JPH0740582B2 - IC automatic test equipment - Google Patents

Description

Detailed Description [Outline] In an IC automatic tester using an auto handler, a storage rack having a plurality of compartments for storing ICs, which is located at an input side and an output side of the auto handler, and an input side storage rack. The ICs stored in the compartments of each lot are provided in a plurality of lots by providing a transport means and a control circuit for transporting the ICs between the storage shelves and the auto handlers so that the ICs are stored in the individual compartments of the output side storage shelves. It enables continuous automatic testing for IC while maintaining lot classification.

[Industrial application field]

The present invention relates to a configuration of an IC automatic test device using an auto handler.

In IC (semiconductor integrated circuit) testing, a continuous automatic test is often performed on a plurality of ICs using an auto handler.

In that case, it is desirable not to reduce the operating rate of the auto handler.

[Conventional technology]

FIG. 4 is a block diagram of a conventional example of an IC automatic test device using an auto handler.

In the figure, 1 is an IC test circuit, 2 is an auto handler,
M1 is a magazine that stores multiple ICs.

The magazine M1 is also called a stick, has a rectangular tubular shape with a length of about 50 cm, and stores a plurality of, for example, about 20 ICs arranged in a line.

The auto handler 2 stores the ICs, sequentially takes out the ICs from the magazine M placed on the entry table 3, connects the terminals of the ICs to the test circuit 1, causes the test circuit 1 to perform a test, and ends the test. The IC is stored in the magazine M1 and placed on the output table 4.

A plurality of units, for example 40 to 50 units (IC
It is possible to mount magazine M1 of about 1 lot) at the same time.

The automatic test is for one lot stored in the magazine M1.
After the ICs are placed on the entry side table 3, the auto handler 2 is activated. When all the ICs have been tested and placed on the exit side table 4, the operation of the auto handler 2 is stopped and the operation is divided into one section. .

The subsequent test is started after the IC is taken out together with the magazine M1 from the output side table 4 to empty the table 4, and a new IC is placed on the input side table 3.

The automatic test is divided into IC lots in this way so that the IC lot division is not disturbed.

In addition, the above loading and unloading to and from the auto handler 2
Usually, it is often done manually, but if necessary, it is mechanized using a robot or the like.

[Problems to be solved by the invention]

As described above, in the conventional example, the automatic test is divided into lots so as not to disturb the lot classification of the ICs, and there is a problem that the operation rate of the auto handler 2 is reduced, that is, the efficiency of the test is reduced.

In other words, in order to prevent this decrease, if the loading is continuously added before the portion placed on the entrance side table 3 is consumed and the break is set in the automatic test, the IC It becomes difficult to maintain lot classification.

[Means for solving problems]

The above-mentioned problem is that there are a plurality of compartments each capable of accommodating one lot of ICs, and there are compartments on the entrance side and the exit side of the IC automatic test auto handler and the compartments on the entrance side. Before the test stored in the compartment so as to empty one by one
First transport means for loading an IC into the auto handler, and an IC for which testing using the auto handler has been completed is stored in each compartment of the above-mentioned storage shelf for each compartment stored before the test. A second transfer means and a control circuit for controlling the operation of the first and second transfer means are provided, and all the ICs stored in lots in a plurality of sections of the input side storage rack are continuously connected. This is solved by the IC automatic test apparatus of the present invention adapted to be tested.

[Action]

In the IC automatic tester with the above configuration, if the ICs before the test are stored in each lot of the above-mentioned storage racks on the input side, the tested ICs will be tested for each lot on the storage racks on the output side. It was stored in the individual compartments of the
Continuous operation is possible until all ICs are tested.

Therefore, multiple lots can be stored in the storage shelves on the entry side at the same time as described above, and by adding storage for each lot before the shelves are emptied, a continuous automatic test is performed on ICs in multiple lots for testing. The efficiency can be improved and the lot classification is maintained.

〔Example〕

The first embodiment of the IC automatic test apparatus according to the present invention will be described below.
This will be described with reference to the configuration diagram of FIG.

The embodiment shown in the figure uses two auto-handlers 2a and 2b connected to test circuits 1a and 1b, respectively, in order to carry out two kinds of tests in succession, and stores ICs on the input side and output side thereof. Storage shelves 5 and 6 and auto handler 2a or
The handling robots 7 and 8 serving as a transport means between the robot 2b and the robot 2b and a control circuit 9 for controlling the robots 8 and others in association with each other are provided. The ICs are stored in the magazine M2.

As shown in the front view and side view of FIG. 2, the magazine M2 is a main body in which four magazines M1 used in the conventional example are integrated side by side.
The movable stopper 12 for preventing the IC from jumping out during transportation is provided on the unit 11, and a plurality of them can be stacked.

The auto handler 2a stores the ICs, sequentially takes out the ICs from the magazine M2 placed on the entry side table 3a, connects the terminals of the ICs to the test circuit 1a, causes the test circuit 1a to perform the test, and ends the test. Stored IC in magazine M2 and send to auto handler 2b.

The auto handler 2b is the IC sent from the auto handler 2a.
On the other hand, the test circuit 1b is made to carry out a test in the same manner as the auto handler 2a, and the IC after the test is stored in the magazine M2 and placed on the output table 4b.

The structure of the auto-handlers 2a and 2b is as shown in the perspective view of FIG. 3, and 21 in the figure is a carry-in section in which a magazine M2 containing a pre-test IC with a conveyor belt is placed.
22 and an entry-side base (3a in the case of the auto handler 2a) having a stacking part 23 on which the magazine M2 is stacked by the operation of the carry-in part 22, 24 is a stacking part 25 on which the magazine M2 containing the tested ICs is stacked. And stacking section 25 with a conveyor belt
Unloading section 26 that pulls out one magazine M2 from the next
Equipped with an output side stand (4b in the case of the auto handler 2b), 27 is a connection part to the test circuit 1a or 1b, 28 is a magazine M2 that is empty after the IC before the test is taken out and the tested IC is stored A transport mechanism for transporting to a position.

The storage shelves 5 and 6 are shelves in which four compartments are arranged in four rows and seven columns, and in each compartment, magazines M2 in which ten or more pieces are stacked can be put in and taken out from both front and rear sides, and the magazine M2 by the robot 7 or 8 can be stored. It has a size that allows it to be taken in and out. Therefore, the storage shelves 5 and 6 can store 28 lots, for example, when each IC has 1000 lots as one lot, each section is addressed to one lot.

The robot 7 takes out one magazine M2 stored in the storage shelf 5 so that the compartments of the storage shelf 5 are emptied one by one,
It is placed on the entry table 3a.

The robot 8 stores the magazine M2 placed on the output table 4b in a predetermined section of the storage rack 6. The predetermined partition at this time is a partition designated so that the IC stored in a certain partition of the storage rack 5 is stored in a certain partition of the storage rack 6.

The above operations of the robots 7 and 8 are performed by the control of the control circuit 9, and the outline of the control is as follows. That is, the control circuit 9 has a storage shelf 5 in which ICs before the test are stored.
The address of the section, the test order of the address, and the address of the section of the storage shelf 6 that stores the tested IC for each address are input.

 The robot 7 is controlled based on this information.

The progress of ICs in the auto handlers 2a and 2b is monitored, and the above addresses and their divisions are marked. In addition, the auto handlers 2a and 2b are controlled so that the magazine M2 that stores the tested ICs is renewed by dividing the addresses.

 The robot 8 is controlled based on the information of and.

The automatic test was started after the pre-test ICs stored in the magazine M2 were stored in each compartment of the storage rack 5 for each lot and the above-mentioned input to the control circuit 9 was made, and then stored in the storage rack 5. It is continuously performed until the test of all ICs is completed. At that time, the ICs that have been tested are stored in the storage shelves 6 while maintaining the lot classification, as will be understood from the above.
It is stored in the compartment. Therefore, if an input to the storage and control circuit 9 for each lot is added before the storage rack 5 is emptied, it continues until the addition is completed. In addition, at the time of this addition, it is also necessary to take out from the storage rack 6.

From this, this IC automatic tester can
The IC is continuously tested and the test efficiency becomes higher than in the conventional example, and the lot classification is maintained.

Furthermore, since the number of ICs to be taken in and out from the storage shelves 5 and 6 from the outside can be increased in a single handling, the number of man-hours is greatly reduced as compared with the conventional example. Of course, there is no problem in mechanizing as necessary.

In the above embodiment, the storage shelf 5 on the input side and the storage shelf 6 on the output side are provided.
Separately, but both may be put together and stored in one storage shelf. Further, although the number of auto handlers, the storage condition and number of compartments on the storage rack, and the form of the magazine are specified and shown, the present invention does not specify these.

〔The invention's effect〕

As described above, according to the configuration of the present invention, in an IC automatic test device using an auto handler, a plurality of lots of ICs are
On the other hand, continuous automatic tests can be performed while maintaining lot classification, which has the effect of improving test efficiency.

[Brief description of drawings]

1 is a configuration diagram of an embodiment of the present invention, FIG. 2 is a front view and side view of a magazine, FIG. 3 is a perspective view of an autohandler, and FIG. 4 is a configuration diagram of a conventional example. In the figure, 1, 1a, 1b are test circuits, 2, 2a, 2b are auto-handlers,
3, 3a is an entrance table, 4, 4b is an exit table, 5 and 6 are storage shelves,
Reference numerals 7 and 8 are handling robots, (first and second transfer means), 9 is a control circuit, 11 is a main body of M2, 12 is a movable stopper, 21 is an entrance side stand, 24 is an exit side stand, and 27 is a connection part. , 28 is a transport mechanism, and M1 and M2 are magazines.

 ─────────────────────────────────────────────────── --- Continuation of front page (56) References JP-A-60-80238 (JP, A) JP-A-59-231837 (JP, A) JP-A-60-28222 (JP, A)

Claims (1)

[Claims] 1. Storage shelves, each having a plurality of compartments capable of accommodating one lot of ICs, located on the entry side and the exit side of an IC automatic test auto-handler, and the compartments of the entry side storage shelves. The first transfer means for loading the pre-test ICs stored in the compartment into the auto handler so that they are emptied one by one, and the ICs after the test using the auto handler were stored before the test. Each of the compartments is equipped with a second carrier that is housed in each compartment of the outlet storage shelf, and a control circuit that controls the operation of the first and second carrier means. An automatic IC tester that continuously tests all ICs stored in lots in multiple sections on a shelf.