JPH09211069A - Auto handler with stocker for re-sorting - Google Patents

Auto handler with stocker for re-sorting

Info

Publication number
JPH09211069A
JPH09211069A JP8034364A JP3436496A JPH09211069A JP H09211069 A JPH09211069 A JP H09211069A JP 8034364 A JP8034364 A JP 8034364A JP 3436496 A JP3436496 A JP 3436496A JP H09211069 A JPH09211069 A JP H09211069A
Authority
JP
Japan
Prior art keywords
carrier
stocker
unit
sorting
supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8034364A
Other languages
Japanese (ja)
Inventor
Tetsuya Okudaira
哲也 奥平
Akio Nakamura
明生 中村
Yoshihiro Goto
吉宏 後藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ando Electric Co Ltd
Original Assignee
Ando Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ando Electric Co Ltd filed Critical Ando Electric Co Ltd
Priority to JP8034364A priority Critical patent/JPH09211069A/en
Priority to KR1019970000546A priority patent/KR100260121B1/en
Publication of JPH09211069A publication Critical patent/JPH09211069A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3404Storage means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02Storage devices
    • B65G1/04Storage devices mechanical

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

(57)【要約】 【課題】 IC搬送器10が循環するオートハンドラに
おいて、収容ローダから供給ローダにトレイ20を再搭
載することのないオートハンドラを提供する。 【解決手段】 供給部11ではIC搬送器10にIC1
が供給され、IC搬送器10は測定部13に移動し、I
C搬送器10は分類部14に移動し、前記IC搬送器1
0内のIC1を複数のトレイ20に分類移載し、前記I
C搬送器10は供給部11に移動する。ストッカ15は
複数のIC1を収容する凹部15Aをもち、分類部14
から供給部11へのIC搬送器10の移送経路間にスト
ッカ15を配置し、分類部14における不良品判定のI
C1はストッカ15に収容され、ストッカ15にIC1
が満杯になると、分類部14から供給部11に移動する
空のIC搬送器10に前記不良品判定のIC1を移載す
る。
(57) An object of the present invention is to provide an auto handler in which an IC carrier 10 circulates without re-loading a tray 20 from a storage loader to a supply loader. SOLUTION: In a supply section 11, an IC1 is attached to an IC carrier 10.
Is supplied, the IC carrier 10 moves to the measuring unit 13, and I
The C carrier 10 moves to the sorting unit 14, and the IC carrier 1
The ICs 1 in 0 are transferred to a plurality of trays 20 by sorting,
The C carrier 10 moves to the supply unit 11. The stocker 15 has a recess 15A for accommodating a plurality of ICs 1, and the stocker 15
The stocker 15 is arranged between the transfer paths of the IC carrier 10 from the supply unit 11 to the supply unit 11, and the stocker 15 determines the defective product I in the classification unit 14.
C1 is stored in the stocker 15 and IC1 is stored in the stocker 15.
When is full, the defective IC 1 is transferred to the empty IC carrier 10 moving from the sorting unit 14 to the supply unit 11.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】この発明は、再選別用ストッ
カをもつオートハンドラについてのものである。特に、
複数のICを搭載するIC搬送器が装置内部を循環する
水平搬送式のオートハンドラについてのものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an auto handler having a stocker for re-sorting. Especially,
The present invention relates to a horizontal carrier type auto handler in which an IC carrier carrying a plurality of ICs circulates inside the apparatus.

【0002】[0002]

【従来の技術】次に、従来の技術によるオートハンドラ
の構成を図2により説明する。図2アはオートハンドラ
の平面図であり、図2イは正面図である。図2の10は
IC搬送器、11は供給部、12は予熱部、13は測定
部、14は分類部である。また、20はトレイ、21は
供給ローダ、22〜24は収容ローダ、25は待機部で
ある。
2. Description of the Related Art Next, the structure of an auto handler according to the prior art will be described with reference to FIG. FIG. 2A is a plan view of the auto handler, and FIG. 2A is a front view. 2, 10 is an IC carrier, 11 is a supply unit, 12 is a preheating unit, 13 is a measurement unit, and 14 is a classification unit. Further, 20 is a tray, 21 is a supply loader, 22 to 24 are accommodating loaders, and 25 is a standby unit.

【0003】図2では、IC1が複数搭載されたトレイ
20は供給ローダ21に多段枚搭載される。供給ハンド
31は供給ローダ21の最上段のトレイ20からIC1
を供給部11のIC搬送器10に逐次移送する。供給部
11のIC搬送器10への搬送動作が完了すると、空の
トレイ20は移動機構で搬送され、待機部25に収納さ
れる。
In FIG. 2, a tray 20 having a plurality of ICs 1 mounted thereon is mounted on a supply loader 21 in multiple stages. The supply hand 31 starts from the uppermost tray 20 of the supply loader 21 to the IC 1
Are sequentially transferred to the IC carrier 10 of the supply unit 11. When the transport operation of the supply unit 11 to the IC transport device 10 is completed, the empty tray 20 is transported by the moving mechanism and stored in the standby unit 25.

【0004】供給部11のIC搬送器10は予熱部12
に移動し、IC搬送器10内のIC1が一定時間加熱さ
れる。一定時間経過後、IC搬送器10は測定部13に
移動し、IC1が試験される。なお、図2は高温ハンド
ラであり、予熱部12と測定部13は高温槽に内蔵され
る。低温ハンドラの場合は、予熱部12は予冷部とな
り、予冷部と測定部は低温槽に内蔵される。
The IC carrier 10 of the supply unit 11 has a preheating unit 12
Then, the IC 1 in the IC carrier 10 is heated for a certain period of time. After a certain period of time, the IC carrier 10 moves to the measuring unit 13 and the IC 1 is tested. 2 is a high temperature handler, and the preheating unit 12 and the measuring unit 13 are built in a high temperature tank. In the case of the low temperature handler, the preheating unit 12 is a precooling unit, and the precooling unit and the measuring unit are built in the low temperature tank.

【0005】IC1が試験完了後のIC搬送器10は分
類部14に移動する。分類部14では、試験結果と予め
設定された分類条件にしたがって、収容ハンド32はI
C1を収容ローダのトレイ20に分類移載する。空のI
C搬送器10は供給部11に戻る。
After the IC 1 is tested, the IC carrier 10 moves to the sorting section 14. In the classifying unit 14, the accommodating hand 32 moves to I according to the test result and the preset classification condition.
C1 is classified and transferred to the tray 20 of the accommodating loader. Empty I
The C carrier 10 returns to the supply unit 11.

【0006】図2では、収容ローダは3つ用意されてい
る。第1の収容ローダ22はICが収容されるのトレイ
20が多段枚搭載可能であるが、IC1が収容不足の場
合は、既に空であることが確認されたトレイ20を待機
部25から供給する。第2の収容ローダ23には、待機
部25から空のトレイ20が移載される。第3の収容ロ
ーダ24には空のトレイ20が複数段搭載される。第3
の収容ローダ24はIC1を例えば、不良品収容として
使用される。なお、図2と技術的に同様の構成は特願平
7− 91795号明細書に開示されている。
In FIG. 2, three accommodating loaders are prepared. The first accommodating loader 22 can mount a multi-stage tray 20 in which ICs are accommodated, but when the ICs 1 are insufficiently accommodated, the trays 20 already confirmed to be empty are supplied from the standby unit 25. . The empty tray 20 is transferred from the standby unit 25 to the second storage loader 23. A plurality of empty trays 20 are mounted on the third storage loader 24. Third
The storage loader 24 is used to store the IC 1 as a defective product, for example. It should be noted that the technically similar configuration to that of FIG.
No. 7-91795.

【0007】[0007]

【発明が解決しようとする課題】図2では、分類された
ICの中で不良品として分類されたICを再選別する場
合がある。例えば、1ロットにおける歩どまりが想定す
る歩どまりと異なる場合に、不良品のICを収容するこ
とに設定した収容ローダから、トレイ20を引き出し、
前記トレイ20を供給ローダ21に搭載する。
In FIG. 2, an IC classified as a defective product may be re-sorted among the classified ICs. For example, when the yield in one lot is different from the expected yield, the tray 20 is pulled out from the accommodating loader set to accommodate defective ICs,
The tray 20 is mounted on the supply loader 21.

【0008】この発明は、IC搬送器が内部循環するオ
ートハンドラにおいて、分類部から供給部へのIC搬送
器の移送経路間に再選別用のストッカを配置し、収容ロ
ーダから供給ローダにトレイを再搭載することなく、前
記オートハンドラ内部で再選別するオートハンドラを提
供することを目的とする。
According to the present invention, in the auto handler in which the IC carrier is internally circulated, a stocker for re-sorting is arranged between the transfer paths of the IC carrier from the sorting section to the supply section, and the tray is transferred from the storage loader to the supply loader. It is an object of the present invention to provide an auto handler that re-selects inside the auto handler without reloading.

【0009】[0009]

【課題を解決するための手段】この目的を達成するた
め、この発明は、供給部11ではIC搬送器10にIC
1が逐次供給され、前記IC搬送器10は測定部13に
移動して複数のIC1が一括して試験され、試験終了後
の前記IC搬送器10は分類部14に移動し、前記分類
部14では前記試験結果に基づき前記IC搬送器10内
のIC1を分類してIC1を複数のトレイ20に分類移
載し、前記IC搬送器10は供給部11に移動するIC
搬送器が循環するオートハンドラであって、ストッカ1
5は複数のIC1を収容する凹部15Aをもち、分類部
14から供給部11へのIC搬送器10の移送経路間に
ストッカ15を配置し、分類部14における不良品判定
のIC1はストッカ15に収容され、ストッカ15にI
C1が満杯になると、分類部14から供給部11に移動
する空のIC搬送器10に前記不良品判定のIC1を移
載する。
In order to achieve this object, according to the present invention, an IC is mounted on an IC carrier 10 in a supply section 11.
1 is sequentially supplied, the IC carrier 10 is moved to the measuring unit 13 and a plurality of ICs 1 are collectively tested, and the IC carrier 10 after the test is moved to the classifying unit 14 and the classifying unit 14 Then, the ICs 1 in the IC carrier 10 are sorted based on the test result, the ICs 1 are sorted and transferred to the plurality of trays 20, and the IC carrier 10 is moved to the supply unit 11.
A stocker 1 that is an auto handler in which the carrier circulates.
5 has a recess 15A for accommodating a plurality of ICs 1, and arranges the stocker 15 between the transfer paths of the IC transporter 10 from the sorting unit 14 to the supply unit 11. The ICs 1 for determining defective products in the sorting unit 14 are stored in the stocker 15. Stored, I in stocker 15
When C1 becomes full, the defective IC 1 for determination is transferred to the empty IC carrier 10 moving from the sorting unit 14 to the supply unit 11.

【0010】[0010]

【発明の実施の形態】以下、図面を参照してこの発明の
一実施の形態を説明する。図1はこの発明によるオート
ハンドラの一実施の形態を示す構成図であり、図1アは
平面図、図1イは正面図である。なお、図1において図
2と同じ符号は同一構成品であるので、特に必要が無い
限り、説明を省略する。
BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings. 1 is a configuration diagram showing an embodiment of an auto handler according to the present invention. FIG. 1A is a plan view and FIG. 1A is a front view. Note that, in FIG. 1, the same reference numerals as those in FIG. 2 are the same components, and thus the description thereof will be omitted unless particularly necessary.

【0011】図1において、15はストッカであり、ス
トッカ15は複数のIC1を収容する凹部15Aを縦横
に配置する。分類部14から供給部11へのIC搬送器
10の移送経路間にストッカ15は配置される。
In FIG. 1, reference numeral 15 is a stocker, and the stocker 15 has recesses 15A for accommodating a plurality of ICs 1 arranged vertically and horizontally. The stocker 15 is arranged in the transfer path of the IC carrier 10 from the sorting unit 14 to the supply unit 11.

【0012】分類部14における不良品判定のIC1は
収容ハンド32により、ストッカ15に収容される。ス
トッカ15にIC1が満杯になると、分類部14から供
給部11に移動する空のIC搬送器10に前記不良品判
定のIC1を移載する。すなわち、図1において、スト
ッカ15の左側に空間が設けられ、前記空間に空のIC
搬送器10が待機し、収容ハンド32により、再選別用
のIC1が移載される。なお、再選別用のIC搬送器1
0の循環形態は、通常選別と同じである。
The defective product IC 1 in the classification unit 14 is stored in the stocker 15 by the storage hand 32. When the IC1 is full in the stocker 15, the defective IC1 is transferred to the empty IC carrier 10 moving from the sorting unit 14 to the supply unit 11. That is, in FIG. 1, a space is provided on the left side of the stocker 15, and an empty IC is provided in the space.
The carrier 10 stands by, and the accommodation hand 32 transfers the re-sorting IC 1. The IC carrier 1 for re-sorting
The circulation form of 0 is the same as that of normal selection.

【0013】[0013]

【発明の効果】この発明は、IC搬送器が内部循環する
オートハンドラにおいて、分類部から供給部へのIC搬
送器の移送経路間に再選別用のストッカを配置している
ので、収容ローダから供給ローダにトレイを再搭載する
ことなく、前記オートハンドラ内部で自動的に再選別す
ることができる。
As described above, according to the present invention, in the auto handler in which the IC carrier circulates internally, the stocker for re-sorting is arranged between the transfer paths of the IC carrier from the sorting unit to the supply unit. It is possible to automatically re-sort inside the auto handler without reloading the tray in the supply loader.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の一実施の形態によるオートハンドラ
の構成図である。
FIG. 1 is a configuration diagram of an auto handler according to an embodiment of the present invention.

【図2】従来の技術によるオートハンドラの構成図であ
る。
FIG. 2 is a configuration diagram of an auto handler according to a conventional technique.

【符号の説明】[Explanation of symbols]

1 IC 10 IC搬送器 11 供給部 12 予熱部 13 測定部 14 分類部 15 ストッカ 15A 凹部 1 IC 10 IC Conveyor 11 Supply Section 12 Preheating Section 13 Measuring Section 14 Sorting Section 15 Stocker 15A Recess

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 供給部(11)ではIC搬送器(10)にIC
(1) が逐次供給され、前記IC搬送器(10)は測定部(13)
に移動して複数のIC(1) が一括して試験され、試験終
了後の前記IC搬送器(10)は分類部(14)に移動し、前記
分類部(14)では前記試験結果に基づき前記IC搬送器(1
0)内のIC(1) を分類してIC(1) を複数のトレイ(20)
に分類移載し、前記IC搬送器(10)は供給部(11)に移動
するIC搬送器が循環するオートハンドラであって、 ストッカ(15)は複数のIC(1) を収容する凹部(15A)を
もち、 分類部(14)から供給部(11)へのIC搬送器(10)の移送経
路間にストッカ(15)を配置し、 分類部(14)における不良品判定のIC(1) はストッカ(1
5)に収容され、 ストッカ(15)にIC(1) が満杯になると、分類部(14)か
ら供給部(11)に移動する空のIC搬送器(10)に前記不良
品判定のIC(1) を移載することを特徴とする再選別用
ストッカをもつオートハンドラ
1. The IC is provided in the IC carrier (10) in the supply section (11).
(1) are sequentially supplied, and the IC carrier (10) is a measuring unit (13).
After the test is completed, the IC carrier (10) moves to the classification unit (14), and the classification unit (14) moves to the IC based on the test result. The IC carrier (1
The IC (1) in (0) is sorted and the IC (1) is divided into a plurality of trays (20).
The IC carrier (10) is an auto handler in which the IC carrier moving to the supply unit (11) is circulated, and the stocker (15) is a recess (a) for accommodating a plurality of ICs (1). 15A), a stocker (15) is arranged between the transfer paths of the IC carrier (10) from the classification unit (14) to the supply unit (11), and the IC (1) for determining defective products in the classification unit (14) ) Is the stocker (1
When the stocker (15) is filled with the IC (1) and the stocker (15) is full, the empty IC carrier (10) that moves from the sorting unit (14) to the supply unit (11) determines the defective IC ( Autohandler with re-sorting stocker characterized by transferring 1)
JP8034364A 1996-01-29 1996-01-29 Auto handler with stocker for re-sorting Pending JPH09211069A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP8034364A JPH09211069A (en) 1996-01-29 1996-01-29 Auto handler with stocker for re-sorting
KR1019970000546A KR100260121B1 (en) 1996-01-29 1997-01-11 Autohandler with stocker for screening

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8034364A JPH09211069A (en) 1996-01-29 1996-01-29 Auto handler with stocker for re-sorting

Publications (1)

Publication Number Publication Date
JPH09211069A true JPH09211069A (en) 1997-08-15

Family

ID=12412119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8034364A Pending JPH09211069A (en) 1996-01-29 1996-01-29 Auto handler with stocker for re-sorting

Country Status (2)

Country Link
JP (1) JPH09211069A (en)
KR (1) KR100260121B1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002077655A1 (en) * 2001-03-22 2002-10-03 Vladimir Nikolaevich Davydov Handler for electronic circuits
CN111776571A (en) * 2020-07-10 2020-10-16 龙合智能装备制造有限公司 Tray recovery method and equipment for replacing tray

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100286046B1 (en) * 1997-12-31 2001-11-02 윤종용 Printed circuit board inspection device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002077655A1 (en) * 2001-03-22 2002-10-03 Vladimir Nikolaevich Davydov Handler for electronic circuits
CN111776571A (en) * 2020-07-10 2020-10-16 龙合智能装备制造有限公司 Tray recovery method and equipment for replacing tray

Also Published As

Publication number Publication date
KR100260121B1 (en) 2000-08-01
KR970060442A (en) 1997-08-12

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