JPH0746612A - Manufacture of solid-state color image pickup device - Google Patents
Manufacture of solid-state color image pickup deviceInfo
- Publication number
- JPH0746612A JPH0746612A JP18499693A JP18499693A JPH0746612A JP H0746612 A JPH0746612 A JP H0746612A JP 18499693 A JP18499693 A JP 18499693A JP 18499693 A JP18499693 A JP 18499693A JP H0746612 A JPH0746612 A JP H0746612A
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- JP
- Japan
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- yellow
- Prior art date
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Links
- 238000004519 manufacturing process Methods 0.000 title claims description 22
- 238000000034 method Methods 0.000 claims abstract description 13
- 238000004043 dyeing Methods 0.000 claims description 17
- 239000000975 dye Substances 0.000 claims description 16
- 238000003384 imaging method Methods 0.000 claims description 16
- 239000001043 yellow dye Substances 0.000 claims description 16
- AJDUTMFFZHIJEM-UHFFFAOYSA-N n-(9,10-dioxoanthracen-1-yl)-4-[4-[[4-[4-[(9,10-dioxoanthracen-1-yl)carbamoyl]phenyl]phenyl]diazenyl]phenyl]benzamide Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2NC(=O)C(C=C1)=CC=C1C(C=C1)=CC=C1N=NC(C=C1)=CC=C1C(C=C1)=CC=C1C(=O)NC1=CC=CC2=C1C(=O)C1=CC=CC=C1C2=O AJDUTMFFZHIJEM-UHFFFAOYSA-N 0.000 claims description 15
- 238000000926 separation method Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims 2
- 239000010410 layer Substances 0.000 abstract description 62
- 229920005989 resin Polymers 0.000 abstract description 16
- 239000011347 resin Substances 0.000 abstract description 16
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 abstract description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 6
- 239000002356 single layer Substances 0.000 abstract description 4
- TUSDEZXZIZRFGC-UHFFFAOYSA-N 1-O-galloyl-3,6-(R)-HHDP-beta-D-glucose Natural products OC1C(O2)COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC1C(O)C2OC(=O)C1=CC(O)=C(O)C(O)=C1 TUSDEZXZIZRFGC-UHFFFAOYSA-N 0.000 abstract description 3
- 239000001263 FEMA 3042 Substances 0.000 abstract description 3
- LRBQNJMCXXYXIU-PPKXGCFTSA-N Penta-digallate-beta-D-glucose Natural products OC1=C(O)C(O)=CC(C(=O)OC=2C(=C(O)C=C(C=2)C(=O)OC[C@@H]2[C@H]([C@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)O2)OC(=O)C=2C=C(OC(=O)C=3C=C(O)C(O)=C(O)C=3)C(O)=C(O)C=2)O)=C1 LRBQNJMCXXYXIU-PPKXGCFTSA-N 0.000 abstract description 3
- WBTCZEPSIIFINA-MSFWTACDSA-J dipotassium;antimony(3+);(2r,3r)-2,3-dioxidobutanedioate;trihydrate Chemical compound O.O.O.[K+].[K+].[Sb+3].[Sb+3].[O-]C(=O)[C@H]([O-])[C@@H]([O-])C([O-])=O.[O-]C(=O)[C@H]([O-])[C@@H]([O-])C([O-])=O WBTCZEPSIIFINA-MSFWTACDSA-J 0.000 abstract description 3
- LRBQNJMCXXYXIU-NRMVVENXSA-N tannic acid Chemical compound OC1=C(O)C(O)=CC(C(=O)OC=2C(=C(O)C=C(C=2)C(=O)OC[C@@H]2[C@H]([C@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)O2)OC(=O)C=2C=C(OC(=O)C=3C=C(O)C(O)=C(O)C=3)C(O)=C(O)C=2)O)=C1 LRBQNJMCXXYXIU-NRMVVENXSA-N 0.000 abstract description 3
- 229940033123 tannic acid Drugs 0.000 abstract description 3
- 235000015523 tannic acid Nutrition 0.000 abstract description 3
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- 239000000203 mixture Substances 0.000 abstract description 2
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- 108010077544 Chromatin Proteins 0.000 abstract 1
- 210000003483 chromatin Anatomy 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
- 238000001228 spectrum Methods 0.000 description 8
- 239000011259 mixed solution Substances 0.000 description 5
- 239000007864 aqueous solution Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229920003002 synthetic resin Polymers 0.000 description 4
- 239000000057 synthetic resin Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000003504 photosensitizing agent Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 108010010803 Gelatin Proteins 0.000 description 2
- 239000005018 casein Substances 0.000 description 2
- BECPQYXYKAMYBN-UHFFFAOYSA-N casein, tech. Chemical compound NCCCCC(C(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(CC(C)C)N=C(O)C(CCC(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(C(C)O)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(COP(O)(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(N)CC1=CC=CC=C1 BECPQYXYKAMYBN-UHFFFAOYSA-N 0.000 description 2
- 235000021240 caseins Nutrition 0.000 description 2
- 150000008049 diazo compounds Chemical class 0.000 description 2
- 229920000159 gelatin Polymers 0.000 description 2
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- 235000011852 gelatine desserts Nutrition 0.000 description 2
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- GFDSVOCOLWMDEU-UHFFFAOYSA-N 4-[4-(diethylamino)phenyl]imino-5-methyl-2-phenylpyrazol-3-one Chemical group C1=CC(N(CC)CC)=CC=C1N=C1C(=O)N(C=2C=CC=CC=2)N=C1C GFDSVOCOLWMDEU-UHFFFAOYSA-N 0.000 description 1
- 229940026189 antimony potassium tartrate Drugs 0.000 description 1
- CMMUKUYEPRGBFB-UHFFFAOYSA-L dichromic acid Chemical compound O[Cr](=O)(=O)O[Cr](O)(=O)=O CMMUKUYEPRGBFB-UHFFFAOYSA-L 0.000 description 1
- 239000001046 green dye Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000012192 staining solution Substances 0.000 description 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Color Television Image Signal Generators (AREA)
- Optical Filters (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、固体撮像素子の形成さ
れたウェハー上に、色分解用のモザイクカラーフィルタ
を直接形成したカラー固体撮像装置の製造方法に関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a color solid-state image pickup device in which a mosaic color filter for color separation is directly formed on a wafer on which a solid-state image pickup element is formed.
【０００２】[0002]
【従来の技術】近年、固体撮像素子の小型化、高画素化
に伴い、受光領域面積が減少し、これによって感度が低
下するという問題がある。このため、受光部上にマイク
ロレンズを備えた固体撮像装置が利用されている。この
ようなマイクロレンズを備えた固体撮像装置の感度を向
上させるためには、マイクロレンズと素子受光部との間
に形成されているフィルタを薄膜化することが必要とな
っている。2. Description of the Related Art In recent years, the size of a solid-state image pickup device has been increased and the number of pixels has been increased. Therefore, a solid-state image pickup device having a microlens on the light receiving portion is used. In order to improve the sensitivity of the solid-state imaging device including such a microlens, it is necessary to thin the filter formed between the microlens and the element light receiving portion.
【０００３】以下、図面を参照しながら従来の技術を説
明する。図１０〜図１５は、従来のカラー固体撮像装置
の製造方法を示す断面フロー図であり、図において１は
固体撮像素子の形成されたウェハー、２は平坦化樹脂
層、３は遮光膜、４はイエロー層、５はシアン層、６は
マゼンタ層、７はグリーン層、８は平坦化樹脂層、９は
マイクロレンズである。固体撮像素子が形成されたウェ
ハー１上に、アクリル等の透明な平坦化樹脂層２があ
り、その上に遮光膜３、さらに平坦化樹脂層２が形成さ
れている（図１０）。A conventional technique will be described below with reference to the drawings. 10 to 15 are cross-sectional flow charts showing a conventional method for manufacturing a color solid-state imaging device, in which 1 is a wafer on which a solid-state imaging device is formed, 2 is a flattening resin layer, 3 is a light-shielding film, and 4 is a light-shielding film. Is a yellow layer, 5 is a cyan layer, 6 is a magenta layer, 7 is a green layer, 8 is a flattening resin layer, and 9 is a microlens. A transparent flattening resin layer 2 made of acrylic or the like is provided on a wafer 1 on which a solid-state image sensor is formed, and a light shielding film 3 and further a flattening resin layer 2 are formed thereon (FIG. 10).
【０００４】平坦化樹脂層２上に、ゼラチンやカゼイン
や合成樹脂等からなる染色基質を塗布し、選択露光、現
像を行って、パターンを形成する。次にこのパターン
を、イエロー染料にて染色し、イエロー層４を形成す
る。この時、染色層を染色した後、タンニン酸水溶液、
酒石酸アンチモニルカリウム水溶液等により、染料の定
着や色抜けや混色を防止するために化学処理を行う（図
１１）。A dyeing substrate made of gelatin, casein, synthetic resin or the like is applied onto the flattening resin layer 2, and selective exposure and development are carried out to form a pattern. Next, this pattern is dyed with a yellow dye to form a yellow layer 4. At this time, after dyeing the dyed layer, tannic acid aqueous solution,
Chemical treatment is performed with an aqueous solution of antimony potassium tartrate to prevent dye fixation, color loss, and color mixing (FIG. 11).
【０００５】次にイエロー層４と同様に、シアン層５を
形成する（図１２）。さらに、同様の方法にて、マゼン
タ層６を形成する（図１３）。イエロー層４とシアン層
５の重なりあった部分に、グリーン層７を形成すること
になる。次に、カラーフィルタ層の段差を平坦化するた
めに、アクリル等の透明な平坦化層８を１．０〜２．０
μｍ塗布する（図１４）。さらに、レンズ材料を塗布
し、選択露光、現像、熱フローを行って、マイクロレン
ズ９を形成する（図１５）。Next, similarly to the yellow layer 4, a cyan layer 5 is formed (FIG. 12). Further, the magenta layer 6 is formed by the same method (FIG. 13). The green layer 7 is formed in the overlapping portion of the yellow layer 4 and the cyan layer 5. Next, in order to flatten the steps of the color filter layer, a transparent flattening layer 8 of acrylic or the like is added to 1.0 to 2.0.
.mu.m is applied (FIG. 14). Further, a lens material is applied, and selective exposure, development, and heat flow are performed to form the microlens 9 (FIG. 15).
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、従来の
カラー固体撮像装置の製造方法では、シアン層５とイエ
ロー層４の重なった部分としてグリーン層７を形成して
いるために、フィルタ膜厚及びこれにより生じた段差を
平坦化するためのアクリル等の透明な平坦化樹脂層８の
膜厚が厚くなってしまうという問題があった。However, in the conventional method of manufacturing a color solid-state image pickup device, since the green layer 7 is formed as an overlapping portion of the cyan layer 5 and the yellow layer 4, the filter film thickness and There is a problem that the film thickness of the transparent flattening resin layer 8 made of acrylic or the like for flattening the step generated by the above becomes thick.
【０００７】一方、グリーン領域をシアン層とイエロー
層とを重ね合わせて形成するのでなく、単層で形成する
方法として、グリーン染料を用いて染色する方法が考え
られる。しかし、この方法では、グリーン分光が、波長
４００ないし５００ｎｍのイエロー分光と６００ないし
７００ｎｍのシアン分光に一致するようにすることは極
めて困難であり、色再現性の良好なフィルタを得ること
はできない。On the other hand, as a method of forming the green region as a single layer instead of forming the cyan layer and the yellow layer in an overlapping manner, a method of dyeing with a green dye can be considered. However, with this method, it is extremely difficult to make the green spectrum coincide with the yellow spectrum having a wavelength of 400 to 500 nm and the cyan spectrum having a wavelength of 600 to 700 nm, and a filter having good color reproducibility cannot be obtained.
【０００８】そこで、本発明はこの課題を解決するた
め、色再現性を損なうことなくグリーン層を形成し、フ
ィルタを薄膜化したカラー固体撮像装置の製造方法を提
供することを目的とする。In order to solve this problem, an object of the present invention is to provide a method for manufacturing a color solid-state image pickup device in which a green layer is formed without impairing color reproducibility and a filter is thinned.
【０００９】[0009]
【課題を解決するための手段】この目的を達成するため
に、本発明のカラー固体撮像装置の製造方法は、固体撮
像素子を形成したウェハー上に色分解用のモザイクカラ
ーフィルタを形成するにあたり、シアン染料とイエロー
染料の混合液を用いて、グリーン層を形成する工程を備
えている。In order to achieve this object, a method of manufacturing a color solid-state image pickup device of the present invention comprises forming a mosaic color filter for color separation on a wafer on which a solid-state image pickup element is formed. The method includes a step of forming a green layer using a mixed solution of a cyan dye and a yellow dye.
【００１０】又、前記シアン染料とイエロー染料の混合
液の濃度比は、前記シアン染料の染着速度とイエロー染
料の染着速度との比の逆数である。The concentration ratio of the mixed solution of the cyan dye and the yellow dye is the reciprocal of the ratio between the dyeing speed of the cyan dye and the dyeing speed of the yellow dye.
【００１１】[0011]
【作用】本発明によれば、シアン染料とイエロー染料の
混合液を用いてグリーン層を形成することにより、グリ
ーン分光は、短波長領域においてはイエロー分光と一致
し、長波長領域においてはシアン分光と一致し、したが
って、ＲＧＢ処理において、 Ｙ＝ＭＧ＋ＧＲ＋ＣＹ＋ＹＥ Ｕ＝ＭＧ−ＧＲ＋ＣＹ−ＹＥ Ｖ＝ＭＧ−ＧＲ−ＣＹ＋ＹＥ をマトリックス変換して、ＲＧＢを求める際、良好な色
再現性を実現できる。According to the present invention, by forming a green layer by using a mixed solution of a cyan dye and a yellow dye, the green spectrum coincides with the yellow spectrum in the short wavelength region and the cyan spectrum in the long wavelength region. Therefore, in the RGB processing, when Y = MG + GR + CY + YE U = MG-GR + CY-YE V = MG-GR-CY + YE is matrix-converted to obtain RGB, good color reproducibility can be realized.
【００１２】又、グリーン層を単層で形成しているため
に、フィルタ膜厚及びこれにより生じた段差を平坦化す
るためのアクリル等の透明な平坦化樹脂層の膜厚を薄膜
化でき、感度向上を実現することができる。Further, since the green layer is formed as a single layer, the thickness of the filter and the thickness of the transparent flattening resin layer of acrylic or the like for flattening the step caused by the filter can be reduced. It is possible to improve sensitivity.
【００１３】[0013]
【実施例】以下、本発明の一実施例について、図面を参
照しながら説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.
【００１４】図１〜図７は、本発明の一実施例における
カラー固体撮像装置の製造方法を示す断面フロー図であ
る。なお、図において、１は固体撮像素子の形成された
ウェハー、２は平坦化樹脂層、３は遮光膜、４はイエロ
ー層、５はシアン層、６はマゼンタ層、７はグリーン
層、８は平坦化樹脂層、９はマイクロレンズである。1 to 7 are sectional flow diagrams showing a method of manufacturing a color solid-state image pickup device according to an embodiment of the present invention. In the figure, 1 is a wafer on which a solid-state image sensor is formed, 2 is a flattening resin layer, 3 is a light-shielding film, 4 is a yellow layer, 5 is a cyan layer, 6 is a magenta layer, 7 is a green layer, and 8 is The flattening resin layer 9 is a microlens.
【００１５】まず、固体撮像素子が形成されたウェハー
１上に、アクリル等の透明な平坦化樹脂層２があり、そ
の上に遮光膜３、さらに平坦化樹脂層２が形成されてい
る（図１）。First, a transparent flattening resin layer 2 made of acrylic or the like is provided on a wafer 1 on which a solid-state image sensor is formed, and a light shielding film 3 and further a flattening resin layer 2 are formed thereon (FIG. 1).
【００１６】次に、平坦化樹脂層２上に、ジアゾ化合物
を感光剤とする合成樹脂からなる染色基質をスピンコー
ト法等により０．２〜０．８μｍ塗布し、ステッパー等
により選択露光、現像を行って、パターンを形成する。
次にこのパターンを、下記シアン染料にて染色し、シア
ン層５を形成する。Next, a dyeing substrate made of a synthetic resin having a diazo compound as a photosensitizer is coated on the flattening resin layer 2 by a spin coating method or the like by 0.2 to 0.8 μm, and selectively exposed and developed by a stepper or the like. To form a pattern.
Next, this pattern is dyed with the following cyan dye to form a cyan layer 5.
【００１７】 シアン染料 ２重量部 純水 １０００重量部 ７０℃ ２０ｍｉｎ この時、染色層を染色した後、タンニン酸水溶液、酒石
酸アンチモニルカリウム水溶液等により、染料の定着や
色抜けや混色を防止するために化学処理を行う（図
２）。次にシアン層５と同様に、下記イエロ染料にて染
色し、イエロー層４を形成する（図３）。Cyan dye 2 parts by weight Pure water 1000 parts by weight 70 ° C. 20 min At this time, after dyeing the dyeing layer, an aqueous solution of tannic acid, an aqueous solution of potassium antimonyl tartrate, etc. is used to prevent fixation, color loss and color mixture of the dye. Is chemically treated (FIG. 2). Next, similarly to the cyan layer 5, the yellow layer 4 is formed by dyeing with the following yellow dye (FIG. 3).
【００１８】 イエロー染料 １重量部 純水 １０００重量部 ７０℃ ２０ｍｉｎ 同様の方法にて、マゼンタ層６を形成する（図４）。Yellow dye 1 part by weight Pure water 1000 parts by weight 70 ° C. for 20 minutes A magenta layer 6 is formed by the same method (FIG. 4).
【００１９】 マゼンタ染料 １重量部 純水 １０００重量部 ４０℃ １０ｍｉｎ さらに、同様の方法にて、グリーン層７を形成する（図
５）。この時、染色液はシアン染料とイエロー染料を混
合液である。シアン染料およびイエロー染料の染着速度
のグラフを図８に示す。これに示すように、基材に染着
する速度は、シアン：イエロー＝４：１である。又、シ
アン染料とイエロー染料の濃度比とそれにより形成した
グリーン分光を図９に示す。これに示すように、濃度比
＝１／染着速度比のときに良好なグリーン分光を示すこ
とがわかる。従って、染色液の混合濃度比は以下の通り
である。Magenta dye 1 part by weight Pure water 1000 parts by weight 40 ° C. for 10 minutes Further, a green layer 7 is formed by the same method (FIG. 5). At this time, the dyeing solution is a mixed solution of cyan dye and yellow dye. A graph of the dyeing speed of the cyan dye and the yellow dye is shown in FIG. As shown in the figure, the dyeing speed on the substrate is cyan: yellow = 4: 1. Further, FIG. 9 shows the density ratio of the cyan dye and the yellow dye and the green spectrum formed thereby. As shown in the figure, when the density ratio = 1 / dyeing speed ratio, good green spectrum is exhibited. Therefore, the mixing concentration ratio of the staining solution is as follows.
【００２０】 シアン染料 ４重量部 イエロー染料 １重量部 純水 １０００重量部 ７０℃ ２０ｍｉｎ 次に、カラーフィルタの段差を平坦化するために、アク
リル等の透明な平坦化層８を０.３〜０.５μｍ塗布する
（図６）。さらに、レンズ材料を塗布し、選択露光、現
像、熱フローを行って、マイクロレンズ９を形成する
（図７）。Cyan dye 4 parts by weight Yellow dye 1 part by weight Pure water 1000 parts by weight 70 ° C. for 20 minutes Next, in order to level the steps of the color filter, a transparent leveling layer 8 such as acrylic is used in an amount of 0.3 to 0. Apply 0.5 μm (Fig. 6). Further, a lens material is applied, selective exposure, development, and heat flow are performed to form the microlens 9 (FIG. 7).
【００２１】なお、上記実施例では、染色基質をジアゾ
化合物を感光剤とする合成樹脂としたが、合成樹脂のか
わりに、重クロム酸を感光剤とするゼラチンやカゼイン
を用いてもよい。又、上記方法において、フィルタ形成
順序は順不同である。In the above embodiment, the dyeing substrate is a synthetic resin having a diazo compound as a photosensitizer, but gelatin or casein having dichromic acid as a photosensitizer may be used instead of the synthetic resin. Further, in the above method, the order of forming the filters is not specified.
【００２２】[0022]
【発明の効果】以上のように、本発明は、シアン染料と
イエロー染料の混合液を用いてグリーン層を形成する工
程を備えていることにより、色再現性の良好なグリーン
層を単層に形成することができ、カラーフィルタは薄膜
化できる。又、カラーフィルタ層の段差が減少し、これ
を平坦化するためアクリル等の透明な平坦化層が薄膜化
できる。このフィルタの薄膜化により、レンズの集光率
が増大し、感度向上を実現できる。As described above, the present invention includes the step of forming a green layer by using a mixed solution of a cyan dye and a yellow dye, so that the green layer having good color reproducibility is formed into a single layer. It can be formed and the color filter can be made thin. Further, since the steps of the color filter layer are reduced and the steps are flattened, the transparent flattening layer such as acrylic can be thinned. By thinning the filter, the light collection rate of the lens is increased, and the sensitivity can be improved.
【図１】本発明の実施例におけるカラー固体撮像装置の
製造方法を示す断面フロー図FIG. 1 is a sectional flow chart showing a method of manufacturing a color solid-state image pickup device according to an embodiment of the present invention.
【図２】本発明の実施例におけるカラー固体撮像装置の
製造方法を示す断面フロー図FIG. 2 is a sectional flow chart showing a method of manufacturing a color solid-state imaging device according to an embodiment of the present invention.
【図３】本発明の実施例におけるカラー固体撮像装置の
製造方法を示す断面フロー図FIG. 3 is a sectional flow chart showing a method of manufacturing a color solid-state imaging device according to an embodiment of the present invention.
【図４】本発明の実施例におけるカラー固体撮像装置の
製造方法を示す断面フロー図FIG. 4 is a sectional flow chart showing a method of manufacturing a color solid-state imaging device according to an embodiment of the present invention.
【図５】本発明の実施例におけるカラー固体撮像装置の
製造方法を示す断面フロー図FIG. 5 is a sectional flow chart showing a method of manufacturing a color solid-state imaging device according to an embodiment of the present invention.
【図６】本発明の実施例におけるカラー固体撮像装置の
製造方法を示す断面フロー図FIG. 6 is a sectional flow chart showing a method of manufacturing a color solid-state imaging device according to an embodiment of the present invention.
【図７】本発明の実施例におけるカラー固体撮像装置の
製造方法を示す断面フロー図FIG. 7 is a sectional flow chart showing a method of manufacturing a color solid-state imaging device according to an embodiment of the present invention.
【図８】本発明の実施例におけるシアンおよびイエロー
染料の染着速度を示す図FIG. 8 is a diagram showing dyeing rates of cyan and yellow dyes in an example of the present invention.
【図９】本発明の実施例におけるグリーン分光特性を示
す図FIG. 9 is a diagram showing green spectral characteristics in an example of the present invention.
【図１０】従来例のカラー固体撮像装置の製造方法を示
す断面フロー図FIG. 10 is a sectional flow chart showing a method of manufacturing a conventional color solid-state imaging device.
【図１１】従来例のカラー固体撮像装置の製造方法を示
す断面フロー図FIG. 11 is a sectional flow chart showing a method of manufacturing a color solid-state image pickup device of a conventional example.
【図１２】従来例のカラー固体撮像装置の製造方法を示
す断面フロー図FIG. 12 is a cross-sectional flow chart showing a method of manufacturing a color solid-state imaging device of a conventional example.
【図１３】従来例のカラー固体撮像装置の製造方法を示
す断面フロー図FIG. 13 is a sectional flow chart showing a method of manufacturing a color solid-state imaging device of a conventional example.
【図１４】従来例のカラー固体撮像装置の製造方法を示
す断面フロー図FIG. 14 is a sectional flow chart showing a method of manufacturing a conventional color solid-state imaging device.
【図１５】従来例のカラー固体撮像装置の製造方法を示
す断面フロー図FIG. 15 is a sectional flow chart showing a method of manufacturing a color solid-state imaging device of a conventional example.
１ ウェハー ２ 平坦化樹脂層 ３ 遮光膜 ４ イエロー層 ５ シアン層 ６ マゼンタ層 ７ グリーン層 ８ 平坦化層 ９ マイクロレンズ 1 Wafer 2 Flattening Resin Layer 3 Light-Shielding Film 4 Yellow Layer 5 Cyan Layer 6 Magenta Layer 7 Green Layer 8 Flattening Layer 9 Microlens
Claims (2)
分解用のモザイクカラーフィルタを形成するにあたり、
シアン染料とイエロー染料の混合液を用いて、グリーン
層を形成する工程を備えたことを特徴とするカラー固体
撮像装置の製造方法。1. When forming a mosaic color filter for color separation on a wafer on which a solid-state image sensor is formed,
A method of manufacturing a color solid-state imaging device, comprising the step of forming a green layer using a mixed liquid of a cyan dye and a yellow dye.
の濃度比は、前記シアン染料の染着速度とイエロー染料
の染着速度との比の逆数であることを特徴とする請求項
１記載のカラー固体撮像装置の製造方法。2. The concentration ratio of the mixed liquid of the cyan dye and the yellow dye is the reciprocal of the ratio of the dyeing speed of the cyan dye and the dyeing speed of the yellow dye. Method for manufacturing color solid-state imaging device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18499693A JPH0746612A (en) | 1993-07-27 | 1993-07-27 | Manufacture of solid-state color image pickup device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18499693A JPH0746612A (en) | 1993-07-27 | 1993-07-27 | Manufacture of solid-state color image pickup device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0746612A true JPH0746612A (en) | 1995-02-14 |
Family
ID=16162964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18499693A Pending JPH0746612A (en) | 1993-07-27 | 1993-07-27 | Manufacture of solid-state color image pickup device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0746612A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004006336A1 (en) * | 2002-07-09 | 2004-01-15 | Toppan Printing Co., Ltd. | Solid-state imaging device and prduction method therefor |
| US7084472B2 (en) | 2002-07-09 | 2006-08-01 | Toppan Printing Co., Ltd. | Solid-state imaging device and manufacturing method therefor |
| JP2006286891A (en) * | 2005-03-31 | 2006-10-19 | Matsushita Electric Ind Co Ltd | Solid-state imaging device and manufacturing method thereof |
-
1993
- 1993-07-27 JP JP18499693A patent/JPH0746612A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004006336A1 (en) * | 2002-07-09 | 2004-01-15 | Toppan Printing Co., Ltd. | Solid-state imaging device and prduction method therefor |
| JPWO2004006336A1 (en) * | 2002-07-09 | 2005-11-10 | 凸版印刷株式会社 | Solid-state imaging device and manufacturing method thereof |
| US7084472B2 (en) | 2002-07-09 | 2006-08-01 | Toppan Printing Co., Ltd. | Solid-state imaging device and manufacturing method therefor |
| JP4622516B2 (en) * | 2002-07-09 | 2011-02-02 | 凸版印刷株式会社 | Solid-state imaging device and manufacturing method thereof |
| JP2006286891A (en) * | 2005-03-31 | 2006-10-19 | Matsushita Electric Ind Co Ltd | Solid-state imaging device and manufacturing method thereof |
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