JPH0747892Y2 - Variable output solid state laser oscillator - Google Patents

Variable output solid state laser oscillator

Info

Publication number
JPH0747892Y2
JPH0747892Y2 JP1987174500U JP17450087U JPH0747892Y2 JP H0747892 Y2 JPH0747892 Y2 JP H0747892Y2 JP 1987174500 U JP1987174500 U JP 1987174500U JP 17450087 U JP17450087 U JP 17450087U JP H0747892 Y2 JPH0747892 Y2 JP H0747892Y2
Authority
JP
Japan
Prior art keywords
output
state laser
solid
variable
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987174500U
Other languages
Japanese (ja)
Other versions
JPH0179863U (en
Inventor
毅士 山根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1987174500U priority Critical patent/JPH0747892Y2/en
Publication of JPH0179863U publication Critical patent/JPH0179863U/ja
Application granted granted Critical
Publication of JPH0747892Y2 publication Critical patent/JPH0747892Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【考案の詳細な説明】 〔産業上の利用分野〕 本考案は固体レーザ発振装置に関し,特にレーザ加工分
野において必要な出力可変型の固体レーザ発振装置に関
する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a solid-state laser oscillator, and more particularly to a variable output solid-state laser oscillator required in the field of laser processing.

〔従来の技術〕[Conventional technology]

従来固体レーザ発振装置の出力を加工用途に応じて連続
可変する際は,励起入力レベルを可変にするか,共振器
外部に出力減衰器を用いるかしていた。
Conventionally, when continuously changing the output of a solid-state laser oscillator according to the processing application, the pumping input level was made variable or an output attenuator was used outside the resonator.

〔考案が解決しようとする問題点〕[Problems to be solved by the invention]

上述した従来方法のうち,励起入力レベルを変える方法
では,固体レーザ媒質中に生ずる熱レンズ効果量が変化
する結果,共振器の安定条件が変化してレーザ出力の安
定度が出力レベルと共に変化するという欠点がある。
Among the above-mentioned conventional methods, in the method of changing the pumping input level, the thermal lens effect amount generated in the solid-state laser medium changes, and as a result, the stability condition of the resonator changes and the laser output stability changes with the output level. There is a drawback that.

また共振器外部に透過率可変型の減衰器を設置して出力
を可変する方法では,レーザ反射鏡やポラライザ等余分
な光学的減衰素子が必要となってコストアップ要因とな
る他,不用レーザ出力を吸収するための放熱板が必要と
なり,設置スペースが大きくなる等の欠点がある。
In addition, the method of adjusting the output by installing a variable transmittance attenuator outside the resonator requires an additional optical attenuating element such as a laser reflecting mirror and a polarizer, which causes a cost increase and an unnecessary laser output. A heat dissipation plate is required to absorb the heat, which has the drawback of increasing the installation space.

したがって本発明の目的は光学部品が少なくて済み,且
つ,安定した条件で連続的に可変できる固体レーザ発振
装置を得ようとするものである。
Therefore, an object of the present invention is to provide a solid-state laser oscillating device which requires a small number of optical components and which can be continuously varied under stable conditions.

〔問題点を解決するための手段〕[Means for solving problems]

本考案による出力可変型固体レーザ発振装置では,出力
ミラーと全反射ミラーを備えた固体レーザ共振器の内部
に形状可変型アパーチャ機構を備え,外部に前記形状可
変型アパーチャ機構を電気的に制御するアパーチャ駆動
回路を備えてレーザ出力を可変にした固体レーザ発振装
置において,前記全反射ミラーの外部に該全反射ミラー
を不可避的に透過する発信器内部出力のもれ光を受けて
電気信号に変える光検出器を設け,さらにこの光検出器
の出力を演算して前記アパーチャ駆動回路にフィードバ
ックする演算回路を備えている。このような構造により
アパーチャの形状を変化させることにより,励起入力レ
ベルを一定のままレーザ出力に所望の変化を与えると共
に,レーザ出力のレベルを可変アパーチャ駆動回路にフ
ィードバックすることができる。
In the variable output type solid-state laser oscillator according to the present invention, the variable shape aperture mechanism is provided inside the solid state laser resonator having the output mirror and the total reflection mirror, and the variable shape aperture mechanism is electrically controlled outside. In a solid-state laser oscillating device having an aperture drive circuit and variable laser output, the leaked light from the internal output of the oscillator that inevitably passes through the total reflection mirror outside the total reflection mirror is converted into an electric signal. A photodetector is provided, and an arithmetic circuit for computing the output of the photodetector and feeding it back to the aperture driving circuit is provided. By changing the shape of the aperture by such a structure, it is possible to give a desired change to the laser output while keeping the pump input level constant, and to feed back the laser output level to the variable aperture drive circuit.

〔実施例〕〔Example〕

次に本考案について図面を参照して説明する。 Next, the present invention will be described with reference to the drawings.

第1図は本考案の一実施例の構成図である。固体レーザ
ロッド11がレーザ電源13により駆動される励起ランプ12
により励起される結果,出力ミラー14a及び全反射ミラ
ー14bにより構成されるレーザ共振器の間で横モードレ
ーザ発信が生じる。形状可変型アパーチャ機構(たとえ
ば多角形可変絞り機構)15は,可変アパーチャ駆動回路
16により電気的にアパーチャ径等の形状がコントロール
され,発振横モードに対する回折損失がコントロールさ
れる結果,レーザ出力ビーム17の出力レベルが電気的に
コントロール可能である。
FIG. 1 is a block diagram of an embodiment of the present invention. Excitation lamp 12 in which solid-state laser rod 11 is driven by laser power supply 13
As a result, the transverse mode laser emission is generated between the laser resonator constituted by the output mirror 14a and the total reflection mirror 14b. The variable shape aperture mechanism (for example, polygonal variable aperture mechanism) 15 is a variable aperture drive circuit.
The shape such as the aperture diameter is electrically controlled by 16 and the diffraction loss for the oscillation transverse mode is controlled. As a result, the output level of the laser output beam 17 can be electrically controlled.

第2図は本考案の実施例2の構成図である。本構成では
全反射ミラー14bを不可避的に透過する発振器内部出力
のもれ光18を光検出器19を利用してモニタし,その電気
的出力を演算回路20を通じて可変アパーチャ駆動回路16
にフィードバックすることにより,レーザ出力の一定値
維持や予めプログラムされた出力レベルに自動的に設定
するなどの制御を行うことができる。
FIG. 2 is a block diagram of a second embodiment of the present invention. In this configuration, the leak light 18 of the oscillator internal output which is inevitably transmitted through the total reflection mirror 14b is monitored by using the photodetector 19, and its electrical output is supplied through the arithmetic circuit 20 to the variable aperture drive circuit 16
By feeding back to, it is possible to perform control such as maintaining a constant value of the laser output and automatically setting to a preprogrammed output level.

〔考案の効果〕[Effect of device]

以上説明したように本考案による固体レーザでは,共振
器内に設置した可変形状アパーチャにより共振器の回折
損失を制御してレーザ出力を制御できる結果,励起ラン
プ入力を変化させる必要がなく,それによるレーザ出力
の不安定性を招くことがないと同時に,余分な光学部品
も必要としない。また共振器内部で発振出力を制御する
から,不用なレーザ出力を共振器外に送出することもな
い。さらにレーザ出力のレベルをフィードバックできる
ので,レーザ出力の一定値維持や予めプログラムされた
出力レベルへの自動設定が可能となる。
As explained above, in the solid-state laser according to the present invention, it is possible to control the laser output by controlling the diffraction loss of the resonator by means of the variable shape aperture installed in the resonator. As a result, it is not necessary to change the pump lamp input. It does not cause instability of the laser output and at the same time does not require extra optical parts. Further, since the oscillation output is controlled inside the resonator, unnecessary laser output is not sent out of the resonator. Further, since the laser output level can be fed back, it is possible to maintain the laser output at a constant value and automatically set the output level to a preprogrammed output level.

【図面の簡単な説明】[Brief description of drawings]

第1図は本考案による出力可変型固体レーザ装置の一実
施例の構成図,第2図は第二の実施例の構成図である。 記号の説明:11……固体レーザロッド,12……励起ラン
プ,13……レーザ電源,14a……出力ミラー,14b……全反
射ミラー,15……形状可変型アパーチャ機構,16……可変
アパーチャ駆動回路,17……レーザ出力ビーム,18……も
れ光,19……光検出器,20……演算回路。
FIG. 1 is a block diagram of an embodiment of a variable output solid-state laser device according to the present invention, and FIG. 2 is a block diagram of a second embodiment. Symbol description: 11 …… Solid laser rod, 12 …… Excitation lamp, 13 …… Laser power supply, 14a …… Output mirror, 14b …… Total reflection mirror, 15 …… Variable shape aperture mechanism, 16 …… Variable aperture Drive circuit, 17 ... Laser output beam, 18 ... Leakage light, 19 ... Photodetector, 20 ... Arithmetic circuit.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】出力ミラーと全反射ミラーを備えた固体レ
ーザ共振器の内部に形状可変型アパーチャ機構を備え、
外部に前記形状可変型アパーチャ機構を電気的に制御す
るアパーチャ駆動回路を備えてレーザ出力を可変にした
固体レーザ発振装置において、 前記全反射ミラーの外部に該全反射ミラーを不可避的に
透過する発信器内部出力のもれ光を受けて電気信号に変
える光検出器を設け、さらにこの光検出器の出力を演算
して前記アパーチャ駆動回路にフィードバックする演算
回路を設けて成ることを特徴とする出力可変型固体レー
ザ発振装置。
1. A variable shape aperture mechanism is provided inside a solid-state laser resonator having an output mirror and a total reflection mirror,
A solid-state laser oscillating device having an externally provided aperture driving circuit for electrically controlling the variable shape aperture mechanism to make a laser output variable, wherein a transmission unavoidably transmitted through the total reflection mirror to the outside of the total reflection mirror. An output is characterized by being provided with a photodetector for receiving the leak light of the internal output of the device and converting it into an electric signal, and further provided with an arithmetic circuit for computing the output of this photodetector and feeding it back to the aperture drive circuit. Tunable solid-state laser oscillator.
JP1987174500U 1987-11-17 1987-11-17 Variable output solid state laser oscillator Expired - Lifetime JPH0747892Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987174500U JPH0747892Y2 (en) 1987-11-17 1987-11-17 Variable output solid state laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987174500U JPH0747892Y2 (en) 1987-11-17 1987-11-17 Variable output solid state laser oscillator

Publications (2)

Publication Number Publication Date
JPH0179863U JPH0179863U (en) 1989-05-29
JPH0747892Y2 true JPH0747892Y2 (en) 1995-11-01

Family

ID=31466353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987174500U Expired - Lifetime JPH0747892Y2 (en) 1987-11-17 1987-11-17 Variable output solid state laser oscillator

Country Status (1)

Country Link
JP (1) JPH0747892Y2 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4937894U (en) * 1972-07-06 1974-04-03
JPS6189688A (en) * 1984-10-09 1986-05-07 Mitsubishi Electric Corp Laser oscillator

Also Published As

Publication number Publication date
JPH0179863U (en) 1989-05-29

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