JPH0748574Y2 - Carrier - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a transport device for transporting articles in a non-contact manner.

[Prior Art] As a device for conveying articles, various systems have been conventionally adopted.

On the other hand, in recent years, in the case of precision parts such as semiconductor wear, cases in which scratches are extremely disliked are increasing in number.

[Problems to be Solved by the Invention] However, all of the above-described conventional conveying devices generally convey an article while holding the article in contact therewith, which may cause flaws on the article or stain the article. And so on.

The present invention has been made in view of the above-mentioned conventional problems, and an object of the present invention is to provide a carrying device that can carry a carried article in a non-contact manner.

[Means for Solving the Problems] The present invention is directed to a plurality of pressurizing cylinders that open upward in a substantially same plane and have a plurality of outlets for blowing out gas, and upwardly in a substantially same plane as the outlets. A plurality of decompression cylinders that have a plurality of suction ports that open inside to suck gas, and that are arranged in a mixed manner with the plurality of pressure cylinders, a pressure source connected to each of the plurality of pressure cylinders, and A pressure reducing source connected to each of the plurality of pressure reducing cylinders,
An outlet tilt adjusting device for tilting all of the outlets in the same direction at the same time, a suction tilt adjusting device for tilting all of the suction ports in the same direction at the same time, and a tilting direction of the outlets parallel to each other. And a guide unit disposed on the left and right sides, and the article is floated by the fluid blown out from the blowout port, and attracted by the suction port to convey the article. It depends on.

[Operation] When the article to be conveyed is placed on the upper side of the outlet in a state where the outlet is tilted in a predetermined direction and the ejection of the fluid by the outlet and the suction by the suction port are adjusted, the article to be ejected is discharged from the outlet. It is supported in a floating state by pressure, and is stably transported by the frictional force of the fluid due to the flow of the fluid blown out from the outlet and the flow of the fluid sucked into the suction port. Further, by changing the tilt angles of the blowout port and the suction port, it is possible to apply a braking force to the conveyed article or control the stop position.

[Embodiment] An embodiment of the present invention will be described below with reference to the drawings.

1 and 2 show one embodiment of the present invention, in which a plurality of cylinders 1 are horizontally and rotatably supported by a bearing mount 2 in parallel, and every other cylinder 1 is placed. To the pressure source 3,
Further, the other cylinders 1 are connected to the decompression source 4 to form a pressure cylinder 5 and a decompression cylinder 6.

On the outer peripheral surface of the pressurizing cylinder 5, there is a blowout port 7 that opens upward.
Are arranged in a straight line in the axial direction at required intervals, and on the outer peripheral surface of the decompression cylinder 6, suction ports 8 opening upward are arranged in a straight line in the axial direction at required intervals. It is set up.

Further, one end of a link 9 is fixed to each of the shaft end portions of each pressurizing cylinder 5, and the other end of each link 9 is connected to a push-pull member 10 by a pin 11 to form a push-pull member. An end of 10 is connected to a blower outlet tilting drive device 12 that performs a push-pull operation to form a blower outlet tilting adjustment device 13.

Further, one end of a link 14 is fixed to each of the shaft ends of the decompression cylinder 6, and the other end of each link 14 is pinned to a push / pull member 15.
16 is connected, and the end portion of the push-pull member 15 is connected to a tilt drive device 17 that performs a push-pull operation, and a suction port tilt adjusting device.
18 are made up. In the figure, 19 is a plate-shaped article to be conveyed, 20 is a fluid blown out from the outlet 7, and 2'is a guide portion formed at the upper end of the bearing base 2.

As shown in FIGS. 1 to 3, the tilting drive devices 12 and 17 are actuated to incline the air outlet 7 and the suction port 8 so that they are directed upward by a required angle in a direction in which the air outlet 7 and the suction port 8 face each other.
While the decompression source 4 is being driven, the conveyed article 19 is placed on the upper side of the air outlet 7 and the suction port 8.

Then, as shown in FIG. 1 and FIG. 3, the conveyed article 19 is supported by the flow of the fluid 20 while being supported in a state of being floated by the pressure of the fluid 20 blown obliquely rearward and rearward from the outlet 7. Is conveyed in the direction indicated by the arrow A by the frictional force.

At this time, the conveyed article 19 receives the suction force toward the suction port 8 by the flow of the fluid sucked into the suction port 8 as appropriate, so that it is prevented from being blown off by the blown fluid 20 from the blowout port 7. Upper guide part 2'of the bearing mount 2 provided on the side
Will move correctly while being guided on the left and right sides.

When stopping the conveyance of the conveyed article 19, the tilt drive device 1
When the air outlets 7 and the suction ports 8 are adjusted to be vertical as shown in FIG. 4 by actuating 2, 17, the conveying force due to the friction of the fluid disappears and the conveyed article 19 stops. Also conveyed goods
When applying a braking force to the conveyance of 19, the air outlet 7 and the suction port 8 may be inclined in the opposite directions to those in FIG.

According to the above, the conveyed article 19 can be conveyed in a non-contact state while being floated, and the suction of the fluid by the suction port 8 is performed in addition to the blowing of the fluid 20 by the blowing port 7. The conveyed article 19 is levitated and conveyed in a stable state.

In the above embodiment, the plurality of outlets 7 are connected to the pressurizing cylinder 5.
In addition, although the depressurizing cylinder 6 is provided with a plurality of suction ports 8 and the pressurizing cylinders 5 and the depressurizing cylinders 6 are alternately arranged, the arrangement of the air outlets 7 and the suction ports 8 and the tilting method are variously changed. Alternatively, the structure in which the blowout port 7 and the suction port 8 are not provided in the fluid 1 may be used, and a structure in which nozzles that serve as the blowout port 7 and the suction port 8 are simply provided may be adopted.

Further, the carrying device of the present invention is not limited to the above-mentioned embodiment, various kinds of gas such as air can be used as the fluid, the presence / absence of the carried article is detected, and the inclination of the outlet and the suction port It is possible to automatically adjust the angle, the amount of gas blown out and the amount of gas sucked, be applicable to the transportation of various transported articles, and make various changes within the scope not departing from the gist of the present invention. Of course you can get it.

[Effects of the Invention] As described above, according to the transfer device of the present invention, it is possible to transfer an object to be transferred without contact, so that it is possible to effectively cope with the transfer of an article that is not susceptible to flaws or stains. Further, by changing the tilting angles of the blowout port and the suction port, it is possible to exert an excellent effect that a braking force is applied to the conveyed article and the stop position of the conveyed article can be controlled.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a side view of an embodiment of the present invention, and FIG. 2 is a side view of FIG.
II-II arrow view, FIG. 3 is an operation state diagram showing a conveyance state of the conveyed article, and FIG. 4 is an operation state diagram showing a stopped state of the conveyed article. 1 is a cylindrical body, 2 is a bearing stand, 2'is a guide part, 3 is a pressure source,
4 is a pressure reducing source, 5 is a pressure cylinder, 6 is a pressure reducing cylinder, 7 is a blowout port, 8
Is a suction port, 12 is a tilt driving device, 13 is a blowout port tilt adjusting device, 17 is a tilt driving device, 18 is a suction port tilt adjusting device, 19 is a conveyed article, and 20 is a fluid.

Claims (1)

[Scope of utility model registration request] 1. A plurality of pressurizing cylinders having a plurality of air outlets that open upward in substantially the same plane and blow out gas, and upwardly open in the same plane as the air outlets and suck gas. A plurality of pressure reducing cylinders having a plurality of suction ports mixedly arranged with the plurality of pressure cylinders, a pressure source connected to each of the plurality of pressure cylinders, and a plurality of pressure reducing cylinders. A connected decompression source, an outlet tilt adjusting device for tilting all of the outlets in the same direction at the same time, a suction port tilt adjusting device for tilting all of the suction ports in the same direction at the same time, and the blower The article is provided with guide portions arranged on the left and right sides in parallel with the tilting direction of the outlet, and the article is floated by the fluid blown out from the blowout outlet and attracted by the suction from the suction opening to be conveyed. A transport device characterized by.