JPH0338843U - - Google Patents

Info

Publication number
JPH0338843U
JPH0338843U JP9917989U JP9917989U JPH0338843U JP H0338843 U JPH0338843 U JP H0338843U JP 9917989 U JP9917989 U JP 9917989U JP 9917989 U JP9917989 U JP 9917989U JP H0338843 U JPH0338843 U JP H0338843U
Authority
JP
Japan
Prior art keywords
cylinders
pressure
outlets
pressure reduction
tilting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9917989U
Other languages
Japanese (ja)
Other versions
JPH0748574Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989099179U priority Critical patent/JPH0748574Y2/en
Publication of JPH0338843U publication Critical patent/JPH0338843U/ja
Application granted granted Critical
Publication of JPH0748574Y2 publication Critical patent/JPH0748574Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Delivering By Means Of Belts And Rollers (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例の側面図、第２図は
第１図の−矢視図、第３図は搬送物品の搬送
状態を示す作動状態図、第４図は搬送物品の停止
状態を示す作動状態図である。 １は筒体、２は軸受架台、２′は案内部、３は
加圧源、４は減圧源、５は加圧筒、６は減圧筒、
７は吹出口、８は吸引口、１２は傾動駆動装置、
１３は吹出口傾動調節装置、１７は傾動駆動装置
、１８は吸引口傾動調節装置、１９は搬送物品、
２０は流体を示す。 Fig. 1 is a side view of one embodiment of the present invention, Fig. 2 is a view taken along the - arrow in Fig. 1, Fig. 3 is an operating state diagram showing the conveyance state of the conveyed article, and Fig. 4 is a stoppage of the conveyed article. It is an operating state diagram showing the state. 1 is a cylinder body, 2 is a bearing frame, 2' is a guide part, 3 is a pressure source, 4 is a pressure reduction source, 5 is a pressure cylinder, 6 is a pressure reduction cylinder,
7 is an air outlet, 8 is a suction port, 12 is a tilting drive device,
13 is an air outlet tilt adjustment device, 17 is a tilt drive device, 18 is a suction port tilt adjustment device, 19 is a transported article,
20 indicates a fluid.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 上方に向けて略同一平面内で開口し気体を吹き
出す複数の吹出口を有する複数の加圧筒と、上方
に向けて前記吹出口と略同一平面内で開口し気体
を吸引する複数の吸引口を有し、前記複数の加圧
筒と混在配置された複数の減圧筒と、前記複数の
加圧筒の夫々に接続した加圧源と、前記複数の減
圧筒の夫々に接続した減圧源と前記吹出口のすべ
てを同方向に同時に傾動するための吹出口傾動調
節装置と、前記吹出口の傾動方向と平行に左右側
部に配置した案内部とを備えて物品を前記吹出口
から吹き出される流体により浮遊状態にて搬送す
るようにしたことを特徴とする搬送装置。 a plurality of pressurizing cylinders each having a plurality of outlets that open upwardly in substantially the same plane and blow out gas; and a plurality of suction ports that open upwardly in substantially the same plane as the outlets and suck gas; , a plurality of pressure reduction cylinders arranged in a mixed manner with the plurality of pressure cylinders, a pressure source connected to each of the plurality of pressure cylinders, and a pressure reduction source connected to each of the plurality of pressure reduction cylinders. An air outlet tilting adjustment device for simultaneously tilting all of the air outlets in the same direction, and guide portions disposed on left and right sides parallel to the tilting direction of the air outlets, the article being blown out from the air outlets. A conveyance device characterized in that the conveyance is carried out in a floating state using a fluid.
JP1989099179U 1989-08-25 1989-08-25 Carrier Expired - Lifetime JPH0748574Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989099179U JPH0748574Y2 (en) 1989-08-25 1989-08-25 Carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989099179U JPH0748574Y2 (en) 1989-08-25 1989-08-25 Carrier

Publications (2)

Publication Number Publication Date
JPH0338843U true JPH0338843U (en) 1991-04-15
JPH0748574Y2 JPH0748574Y2 (en) 1995-11-08

Family

ID=31648237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989099179U Expired - Lifetime JPH0748574Y2 (en) 1989-08-25 1989-08-25 Carrier

Country Status (1)

Country Link
JP (1) JPH0748574Y2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006237097A (en) * 2005-02-23 2006-09-07 Tokyo Electron Ltd Stage device and coating treatment device
JP2008246286A (en) * 2007-03-29 2008-10-16 Matsushita Electric Ind Co Ltd Air cleaner
JP2013098576A (en) * 2011-11-02 2013-05-20 Research And Business Foundation Sankyunquan Univ Transfer direction-changeable substrate transfer device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4832869U (en) * 1971-08-27 1973-04-20
JPS5016679U (en) * 1973-04-28 1975-02-21
JPS592733U (en) * 1982-06-28 1984-01-09 株式会社日立製作所 Air bearing conveyor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4832869U (en) * 1971-08-27 1973-04-20
JPS5016679U (en) * 1973-04-28 1975-02-21
JPS592733U (en) * 1982-06-28 1984-01-09 株式会社日立製作所 Air bearing conveyor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006237097A (en) * 2005-02-23 2006-09-07 Tokyo Electron Ltd Stage device and coating treatment device
JP2008246286A (en) * 2007-03-29 2008-10-16 Matsushita Electric Ind Co Ltd Air cleaner
JP2013098576A (en) * 2011-11-02 2013-05-20 Research And Business Foundation Sankyunquan Univ Transfer direction-changeable substrate transfer device

Also Published As

Publication number Publication date
JPH0748574Y2 (en) 1995-11-08

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