JPH074967U - Gate valve device - Google Patents

Abstract

(57) [Abstract] [Purpose] The present invention simplifies the structure of the entire device and simplifies its structure. Moreover, the gate can be reliably blocked for a long period of time, resulting in high accuracy and high reliability. (EN) Provided is a gate valve device which can achieve cost reduction despite being obtained. [Structure] A valve body 8 for opening and closing a fluid flow gate 16 so as to be opened and closed, and a valve body 17 is moved by a first actuator 19 in a direction along a valve seat 15 formed on the periphery of the gate 16. In the gate valve device including the valve shaft 7, the valve shaft 7 is pivotally supported so as to swing the valve body 17 in and out of contact with the valve seat 15, and a second shaft for swinging the valve shaft 6 is provided. The actuator 31 is provided.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to an optimal gate valve device for opening and closing a gate formed in a vacuum chamber, for example.

[0002]

[Prior art]

 In recent years, for example, in a gate valve device for opening and closing a gate of a vacuum chamber for semiconductor manufacturing, as shown in FIG. 5, a valve body 50 is separated from a valve seat 52 that forms a gate 51 for fluid flow. When the valve body 50 is located at the lowest end in a contact state by the air cylinder device 53, the back side of the valve body 50 is pressed by the link mechanism to completely close the gate 51. At the same time, when the valve body is opened, the valve body 50 pressed by the link mechanism is returned by a spring to separate the valve body 50 from the valve seat 52.

[0003]

[Problems to be solved by the device]

 However, in the above-mentioned conventional gate valve device, in order to operate the valve body 50 by the link mechanism to reliably and efficiently close the gate 51, the structure is complicated and high accuracy is required. It had the drawback of being very expensive.

Further, when the valve body is returned by the spring, the elastic force of the spring may not allow the pin and the link to rotate smoothly, and the valve body 50 may not be reliably separated from the valve seat 52. There is. As a result, when the air cylinder device 53 raises the valve body 50 in order to open the gate 51, the seal ring of the valve body 50 and the valve seat 52 slide to damage the seal ring or the valve seat 52. When it is closed again, the seal ring scratches and leaks, making it impossible to reliably close it.

The present invention has been made in view of the conventional problems as described above, and by simplifying the entire apparatus, its structure can be simplified and, moreover, the gate can be reliably closed for a long period of time. It is an object of the present invention to provide a gate valve device that can reduce the cost while achieving high accuracy and high reliability.

[0006]

[Means for Solving the Problems]

 The technical means taken by the present invention to solve the above-mentioned problems are a valve body 8 for opening and closing a gate 16 for fluid flow, and a valve body 17 for the gate by a first actuator 19. In a gate valve device provided with a valve shaft 7 which is formed on the periphery of 16 and moves in a direction along a valve seat 15, the valve shaft 7 is swingable in a direction in which a valve body 17 is moved toward and away from a valve seat 15. A second actuator 31 that is pivotally supported and swings the valve shaft 6 is provided.

Further, a valve body 17 for closing the fluid circulation gate 16 so as to be openable and closable, and a direction along a valve seat 15 formed on the peripheral edge of the gate 16 by the first actuator 19 are provided. In the gate valve device having a valve shaft 7 for moving the valve shaft 7, the valve shaft 7 is inserted into the valve casing 1 and pivotally supported so as to move the valve body 17 toward and away from the valve seat 15. The casing 1 is provided with cylinder chambers 5 and 5a in which pistons 29 and 29a for rocking the valve shaft 6 are internally mounted in a sliding manner.

[0008]

[Action]

 In the gate valve device of the present invention, first, when the gate 16 is closed, the first actuator 19 is operated to position the valve body 17 in front of the gate 16, and further the second actuator 31 is operated. Then, since the second actuator 31 swings the valve shaft 6 and presses the valve body 17 against the valve seat 15, the gate 16 can be reliably closed with a strong pressing force.

Next, when opening the gate 16, contrary to the above, first, the valve shaft 6 is swung by the operation of the second actuator 31, so that the valve body 17 is surely moved from the valve seat 15. After the separation, the first actuator 19 is operated to move the valve body 17 along the valve seat 15 in a non-sliding state so that the entire gate 16 can be opened.

[0010]

【Example】

 Embodiments of the present invention will be described below with reference to the drawings. 1 to 3, reference numeral 1 denotes a valve casing having a pair of cylinder plates 2,2, and a base plate 3 fixed to the lower surface of a vacuum chamber 4 with bolts or the like is attached to the upper surface thereof.

Reference numeral 6 is a cylindrical shaft guide inserted into the valve casing 1, and the valve shaft 7 is inserted into the shaft guide 6. That is, the lower end side of the valve shaft 7 is inserted into the shaft guide 6 through the insertion hole 3a formed in the base plate 3, and a pair of pivotally supporting parts 9 are horizontally projected on the upper part of the shaft guide 6, The pivot portion 9 is pivotally supported by a support plate 11 connecting the upper portions of the cylinder plates 2, 2 via an oilless flange bush 10 as shown in FIG. It is swingably provided with the pivot 9 as a fulcrum.

A valve body retainer 13 is fixed to the upper end of the valve shaft 7 via a bolt 14, and a belt-shaped fluid passage gate 16 formed in the vacuum chamber 4 is formed in the valve body retainer 13. In order to close the valve, a belt-shaped valve body 17 that is freely movable to and from the valve seat 15 is attached.

Reference numeral 19 denotes an air cylinder as a first actuator for moving the valve shaft 7 in the vertical direction. A flange 19b of a cylinder body 19a of the air cylinder is attached to a flange 18 provided at a lower end of the shaft guide 6. There is. The upper end of the rod 20 of the first air cylinder 19 is screwed onto the lower end of the valve shaft 7 and is fixed by a lock nut 21. 17 is movably provided in an ascending position located in front of the gate 16 by ascending and a descending position in which it descends to open the gate 16 over the entire surface.

When the rod 20 of the first air cylinder 19 is located at the upper and lower ends, a disc 23 provided at the lower end of the rod 20 protruding downward from the cylinder body 19a is attached to the cylinder body 19a by a bracket. By contacting a pair of upper and lower microswitches 26, 26a mounted via 24, the vertical position of the rod 20 can be detected and confirmed.

A pair of cylinder chambers 5 and 5a opening to the side of the shaft guide 6 are formed in each of the cylinder plates 2 and 2, and the valve shaft 7 is oscillated in each of the cylinder chambers 5 and 5a. Pistons 29, 29a for pressing the shaft guide 6 are internally mounted in a sliding manner via a piston packing 30. Also, as shown in FIG. 3B, each cylinder plate 2, 2 has an air supply port 32 communicating with the cylinder chamber 5, 5a so that air can be supplied to the rear side of each piston 29, 29a. Has been formed. The cylinder plates 2, 2 forming the cylinder chambers 5, 5a and the pistons 29, 29a constitute a second air cylinder 31 as a second actuator.

As shown in FIG. 3B, the pistons 29 and 29a are connected to each other by a pair of connecting fittings 34, and the insertion holes 35 formed in the connecting fittings 34 are inserted into the through holes 35. A protruding shaft 38 protruding from the bulging portion 37 formed on the base is inserted. A cushion member 28 is attached to the back surface of each piston 29, 29a to cushion the piston 29, 29a from coming into contact with each cylinder plate 2, 2.

Next, a usage example of the embodiment having the above configuration will be described. First, when closing the gate 16 of the vacuum chamber 4, when the rod 20 of the first air cylinder 19 is advanced upward, there is a gap L between the valve body 17 and the vacuum chamber 4. The valve body 17 ascends without contacting the vacuum chamber 4 and stops at a predetermined elevated position, and the position of the valve body 17 is detected by the disc 23 coming into contact with the upper microswitch 26 and confirmed. can do. At this time, the valve body 17 reaches the raised position and is positioned in front of the gate 16.

Further, when compressed air is supplied to the cylinder chamber 5 on the side of one piston 29 for closing, the piston 29 advances and presses the shaft guide 6, so that the shaft guide 6 is pivoted. It swings in the direction of arrow a shown in FIG. As a result, the valve body 17 is pressed against the valve seat 15 of the vacuum chamber 4, and the gate 16 can be firmly and reliably closed.

Next, when the gate 16 is opened to communicate the inside of the vacuum chamber 4 with the atmosphere, first, when the compression air is supplied to the cylinder chamber 29a on the side of the other piston 29a for opening, Since the piston 29a presses and urges the shaft guide 6 in the opposite direction to the above, the valve shaft 7 together with the shaft guide 6 swings in the opposite direction with the pivotal support portion 9 as a fulcrum.

As a result, the valve body 17 separates from the vacuum chamber 4, and a gap L is formed again between them. Further, when the rod 20 is retracted downward by the operation of the air cylinder 19, the valve body 17 is stopped at a predetermined lowered position, and the disc body 23 contacts the lower micro switch 26 at the position of the valve body 17. Therefore, it can be confirmed. At this time, the valve body 17 descends without contacting the vacuum chamber 4 and the entire gate 16 can be opened.

As described above, in the above embodiment, the valve casing 1 is provided with the cylinder chambers 5 and 5a, and the pistons 29 and 29a are provided in the cylinder chambers 5 and 5a, respectively. Can be realized. Further, since the valve body 8 is pressed against or separated from the valve seat 15 by swinging the shaft guide 6 and the valve shaft 7 with the pistons 29 and 29a, the gate 16 can be reliably and efficiently closed, and Since the opening / closing operation of the valve body 8 can be performed accurately, there is an advantage that the reliability can be improved.

FIG. 4 shows another embodiment of the present invention, in which a valve shaft 7 having a valve body 17 attached is inserted into a valve casing 40 having a gate 16 for fluid flow. The valve shaft 7 is swingably provided with a pivot shaft 42 as a fulcrum, and a space between the valve shaft 7 and the valve casing 40 is sealed by a bellows 41. The lower end of the valve shaft 7 is connected by a first air cylinder 19, and below the pivot shaft 42 of the valve shaft 7 serves as a second actuator for rocking the valve shaft 7. The second cylinder 43 is connected.

In the present embodiment, a commercially available general-purpose cylinder 43 can be connected 10 to the valve shaft 7, which is advantageous in that it is more inexpensive.

The gate valve device of the present invention is not limited to the above embodiment, and air cylinders are exemplified as the first and second actuators, but the first and second actuators are not air. It may be a cylinder that is hydraulically operated, or may be a structure that is operated by an electric mechanism. In addition, the specific configurations such as the shapes of the cylinders 19 and 31 are by no means limited to the above embodiment. It is needless to say that the valve body 17 is not moved, and the valve body 17 may be configured to be moved in the lateral direction and the oblique direction in addition to being moved in the vertical direction.

[0025]

[Effect of device]

 As described above, according to the present invention, since the valve shaft is swingably supported in the direction to move the valve body toward and away from the valve seat, and the second actuator for swinging the valve shaft is provided, Compared to the structure in which the valve body is brought into contact with and separated from the valve seat by the link mechanism, the structure can be simplified and the cost can be reduced by simplifying the entire device.

Moreover, the second actuator can surely press the valve body against the valve seat or separate it from the valve seat, without damaging the seal ring of the valve body or wearing the valve seat. It prevents leaks from occurring over a long period of time and ensures reliable blockage, provides high accuracy and high reliability, and is of great practical value.

The valve shaft is inserted into the valve casing and is swingably supported so as to move the valve body toward and away from the valve seat. A piston for swinging the valve shaft slides on the valve casing. Since the cylinder chamber that is movably installed is provided, the valve casing can serve as both the holding of the valve shaft and the constituent member of the cylinder, and it is possible to downsize the device. It is effective when the installation space of the device is limited.

[Brief description of drawings]

FIG. 1 is a cross-sectional side view showing an embodiment of the present invention.

FIG. 2 is a sectional front view of the same portion.

3A is a sectional view taken along the line AA of FIG. 1, and FIG. 3B is a sectional view taken along the line BB of FIG.

FIG. 4 is a partially sectional front view showing another embodiment of the present invention.

FIG. 5 is a sectional view showing a conventional example.

[Explanation of symbols]

1 ... Valve casing, 5,5a ... Cylinder chamber, 7 ... Valve shaft, 15
... valve seat, 16 ... gate, 19 ... first air cylinder (first
Actuator), 29, 29a ... Piston, 31 ... Second air cylinder (second actuator)

Claims (2)

[Scope of utility model registration request] 1. A valve body (17) for opening and closing a fluid flow gate (16) in an openable and closable manner, and the valve body (17) is attached to a peripheral edge of the gate (16) by a first actuator (19). In a gate valve device provided with a valve shaft (7) that moves in a direction along the formed valve seat (15), the valve shaft (7) brings the valve body (17) into contact with and separates from the valve seat (15). A gate valve device comprising a second actuator (31) pivotably supported in a direction, and a second actuator (31) for rocking the valve shaft (7). 2. A valve body (17) for opening and closing a fluid flow gate (16) in an openable and closable manner, and the valve body (17) is attached to a peripheral edge of the gate (16) by a first actuator (19). In a gate valve device provided with a valve shaft (7) that moves in a direction along the formed valve seat (15), the valve shaft (7) is inserted into the valve casing (1) and the valve body (17) is also included. Is pivotally supported so as to move toward and away from the valve seat (15), and pistons (29) and (29a) for swinging the valve shaft (6) are slidable on the valve casing (1). A gate valve device, characterized in that it is provided with a cylinder chamber (5), (5a) which is installed inside.