JPH0755406A - Flatness measuring instrument - Google Patents

Flatness measuring instrument

Info

Publication number
JPH0755406A
JPH0755406A JP20518393A JP20518393A JPH0755406A JP H0755406 A JPH0755406 A JP H0755406A JP 20518393 A JP20518393 A JP 20518393A JP 20518393 A JP20518393 A JP 20518393A JP H0755406 A JPH0755406 A JP H0755406A
Authority
JP
Japan
Prior art keywords
main body
contact
attached
measured
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP20518393A
Other languages
Japanese (ja)
Inventor
Komaki Kunikata
己真希 國方
Tadashi Ito
匡 伊藤
Kenji Nakamura
憲司 中村
Seizo Shimizu
清三 清水
Masahiko Watanabe
昌彦 渡邉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Aviation Electronics Industry Ltd
Original Assignee
Japan Aviation Electronics Industry Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Aviation Electronics Industry Ltd filed Critical Japan Aviation Electronics Industry Ltd
Priority to JP20518393A priority Critical patent/JPH0755406A/en
Publication of JPH0755406A publication Critical patent/JPH0755406A/en
Withdrawn legal-status Critical Current

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  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

(57)【要約】 【目的】 測定スパンの連続的かつ簡易な変更を可能と
し、さらに強度や硬度の小さい被測定物であっても正確
な測定が行えるようにする。 【構成】 測定子13bの両側に位置する2つの接触子
12及び1つの接触子12をそれぞれ本体31に移動自
在に取付けたキャリア32,33に取付ける。本体31
の、測定子13b及び接触子12の配列方向と平行する
各面の中央部に、その配列方向に沿って凹部34,3
5,36,37a,37bをそれぞれ形成し、本体31
の軽量化を図る。
(57) [Summary] [Purpose] To enable continuous and easy change of measurement span, and to enable accurate measurement even for DUTs with low strength and hardness. [Structure] Two contacts 12 and one contact 12 located on both sides of a measuring element 13b are attached to carriers 32 and 33 which are movably attached to a main body 31, respectively. Body 31
In the central portion of each surface parallel to the arrangement direction of the measuring element 13b and the contact element 12, concave portions 34, 3 are formed along the arrangement direction.
5, 36, 37a, 37b are respectively formed, and the main body 31
To reduce the weight of.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は例えば平面加工時や球
面加工時における平面度測定や球面度測定に用いる平面
度測定器に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flatness measuring instrument used for flatness measurement or sphericity measurement, for example, in flattening or spherical working.

【0002】[0002]

【従来の技術】従来のこの種の平面度測定器は図2に示
すように、直方体状の本体11の長手方向の一方側に2
つの接触子12が取付けられ、他方側に1つの接触子1
2が取付けられ、これら2つの接触子12と1つの接触
子12との中間にダイヤルゲージ13が取付けられて構
成されている。
2. Description of the Related Art As shown in FIG. 2, a conventional flatness measuring instrument of this type has a rectangular parallelepiped main body 11 which is provided on one side in the longitudinal direction.
One contact 12 is attached, and one contact 1 is provided on the other side.
2 is attached, and a dial gauge 13 is attached between these two contacts 12 and one contact 12.

【0003】ダイヤルゲージ13の本体11への取付け
は、本体11に形成された取付け穴14にスリーブ15
を介してダイヤルゲージ13のステム13aを挿通し、
取付け穴14に開口するように本体11の側面から形成
されたねじ穴16にねじ17を螺合してその先端でスリ
ーブ15を介してステム13aを本体11に押圧固定す
ることによって行われる。ダイヤルゲージ13の測定子
13bは本体11の底面11aから突出し、ステム13
aの軸方向において前後自在とされる。
The dial gauge 13 is attached to the main body 11 by inserting a sleeve 15 into an attachment hole 14 formed in the main body 11.
Through the stem 13a of the dial gauge 13,
This is performed by screwing a screw 17 into a screw hole 16 formed from the side surface of the main body 11 so as to open to the mounting hole 14 and pressing and fixing the stem 13a to the main body 11 via the sleeve 15 at the tip thereof. The gauge head 13b of the dial gauge 13 projects from the bottom surface 11a of the main body 11 and
It can be moved back and forth in the axial direction of a.

【0004】軸状の接触子12は、その一端が先細形状
とされてその先端に微小ボールが取付けられており、一
方他端部側の周面にはねじが形成されている。接触子1
2は、ねじ部の先端面にねじ穴が形成されたボルト18
のそのねじ穴に螺合されてボルト18と一体に連結固定
され、このボルト18が本体11に形成されたねじ穴1
9に螺合され、ナット21で締結されることにより、本
体11の底面11aからボール付先端側が突出されて本
体11に固定される。
One end of the shaft-shaped contactor 12 is tapered and a minute ball is attached to the tip thereof, while a screw is formed on the peripheral surface on the other end side. Contact 1
2 is a bolt 18 having a screw hole formed on the tip surface of the screw portion.
The screw hole 1 formed in the main body 11 is screwed into the screw hole of the
By being screwed to the shaft 9 and fastened with the nut 21, the tip end side with the ball is projected from the bottom surface 11 a of the main body 11 and fixed to the main body 11.

【0005】被測定面の大きさに対応して接触子12の
取付け位置を変更できるように、つまり平面度(球面
度)の測定スパンを調節できるように、本体11には複
数のねじ穴19が形成されている。この例では2つの接
触子12が取付けられる側には本体11の長手方向に5
個、幅方向に2個の計10個のねじ穴19が配列形成さ
れており、一つの接触子12が取付けられる他方側には
本体11の長手方向に2個のねじ穴19が配列形成され
ている。なお、10個のねじ穴19は本体11幅方向の
2個が1組とされ、その1組に2つの接触子12が取付
けられる。
A plurality of screw holes 19 are formed in the main body 11 so that the mounting position of the contact 12 can be changed in accordance with the size of the surface to be measured, that is, the flatness (sphericity) measurement span can be adjusted. Are formed. In this example, on the side where the two contacts 12 are attached, there is 5
A total of 10 screw holes 19 are formed in the width direction, and two screw holes 19 are formed in the longitudinal direction of the main body 11 on the other side to which one contact 12 is attached. ing. The ten screw holes 19 are two sets in the width direction of the main body 11, and the two contacts 12 are attached to the set.

【0006】この平面度測定器22による平面度の測定
は、被測定面の大きさに対応させて3つの接触子12を
取付けた本体11を、まず基準平面を構成する定盤上
に、各接触子12の先端及び測定子13bを接触させて
配して、ダイヤルメータ13のダイヤルインジケータ1
3cのゼロ較正を行い、次にこのゼロ較正された平面度
測定器22を被測定面上に配してダイヤルインジケータ
13cの指針量、即ち基準平面からの測定子13bの変
位量を読み取ることによって行われる。
To measure the flatness by the flatness measuring device 22, the main body 11 to which the three contacts 12 are attached according to the size of the surface to be measured is first placed on a surface plate constituting a reference plane. The tip of the contact piece 12 and the measuring piece 13b are arranged in contact with each other, and the dial indicator 1 of the dial meter 13 is arranged.
3c is zero-calibrated, and then the zero-calibrated flatness measuring instrument 22 is placed on the surface to be measured to read the pointer amount of the dial indicator 13c, that is, the displacement amount of the probe 13b from the reference plane. Done.

【0007】[0007]

【発明が解決しようとする課題】以上述べたように、従
来の平面度測定器22は被測定面の大きさに対応して測
定スパンを調節することができるものの、その調節は予
め本体11に形成された複数のねじ穴19から適当なも
のを選定して、その位置に接触子12を取付けるもので
あるため、測定スパンを連続的に調節することができ
ず、つまり被測定面に対して測定スパンを最適に調節す
ることができない恐れがあり、また接触子12の位置変
更は接触子12が取付けられたボルト18を本体11か
ら一旦取外して再度取付け直すというように、手間のか
かるものとなっていた。
As described above, the conventional flatness measuring instrument 22 can adjust the measurement span in accordance with the size of the surface to be measured, but the adjustment is made in the main body 11 in advance. Since a suitable one is selected from the formed plurality of screw holes 19 and the contact 12 is mounted at that position, the measurement span cannot be continuously adjusted, that is, with respect to the surface to be measured. There is a risk that the measurement span cannot be adjusted optimally, and changing the position of the contact 12 is troublesome, such as once removing the bolt 18 to which the contact 12 is attached from the main body 11 and then reattaching it. Was becoming.

【0008】さらに、直方体状とされた本体11はかな
りの重量を有するため、例えば被測定物の強度が小さい
場合には、その重量により被測定物が変形し、つまり被
測定面が変形してその平面度を正確に測定することがで
きず、また被測定面の硬度が小さい場合には、接触子1
2の大きな接触圧により被測定面に傷がつき、平面度を
正確に測定することができないという問題があった。
Further, since the main body 11 having a rectangular parallelepiped shape has a considerable weight, for example, when the strength of the measured object is small, the measured object is deformed by the weight, that is, the measured surface is deformed. If the flatness cannot be accurately measured and the hardness of the surface to be measured is small, the contact 1
There is a problem that the surface to be measured is damaged by the large contact pressure of 2 and the flatness cannot be accurately measured.

【0009】この発明の目的はこれら従来の問題点を解
決し、測定スパンを連続的に、かつ簡易に変更すること
ができ、さらに強度や硬度の小さい被測定物であっても
平面度の測定を正確に行うことのできる平面度測定器を
提供することにある。
The object of the present invention is to solve these problems of the prior art, to change the measurement span continuously and easily, and to measure the flatness of an object having a small strength and hardness. An object of the present invention is to provide a flatness measuring instrument capable of accurately performing.

【0010】[0010]

【課題を解決するための手段】この発明は本体に被測定
面に対して前後自在に測定子を取付け、その測定子の一
方側において本体の底面から2つの接触子を突出させ、
測定子の他方側において本体の底面から1つの接触子を
突出させ、これら接触子の先端を被測定面上に接触させ
て本体を配し、測定子の変位がダイヤルインジケータで
示される平面度測定器において、測定子及び接触子の配
列方向に移動自在にキャリアを本体に取付け、そのキャ
リアに上記2つの接触子と1つの接触子との一方を取付
け、本体の上記配列方向と平行する各面の中央部に、上
記配列方向に沿って凹部を形成したものである。
According to the present invention, a probe is attached to a main body so as to be movable back and forth with respect to a surface to be measured, and two contactors are projected from the bottom surface of the main body on one side of the probe.
On the other side of the measuring element, project one contact from the bottom surface of the main body, place the main body by bringing the tips of these contacting elements into contact with the surface to be measured, and measure the flatness of the displacement of the measuring element indicated by the dial indicator. In the container, a carrier is attached to the main body so as to be movable in the arrangement direction of the measuring element and the contact element, and one of the two contact elements and one contact element is attached to the carrier, and each surface parallel to the arrangement direction of the main body. A concave portion is formed in the central portion along the arrangement direction.

【0011】[0011]

【作用】上記のように構成されたこの発明では、キャリ
アを移動させることにより、接触子の位置は連続的に変
更され、また本体の軽量化が図られる。
According to the present invention constructed as described above, the position of the contact is continuously changed by moving the carrier, and the weight of the main body is reduced.

【0012】[0012]

【実施例】この発明の一実施例を図1に示す。なお、図
2に示した従来の平面度測定器22と対応する部分につ
いては同一符号を付し、その詳細な説明を省略する。本
体31の長手方向の中間部にダイヤルゲージ13が取付
けられ、その測定子13bが被測定面に対して前後自在
とされる。測定子13bの一方側及び他方側において本
体31の底面31aからそれぞれ突出される2つの接触
子12及び1つの接触子12はそれぞれキャリア32,
33を介して本体31に取付けられる。
FIG. 1 shows an embodiment of the present invention. The parts corresponding to those of the conventional flatness measuring device 22 shown in FIG. 2 are designated by the same reference numerals, and detailed description thereof will be omitted. The dial gauge 13 is attached to the middle portion of the main body 31 in the longitudinal direction, and the probe 13b thereof is freely movable back and forth with respect to the surface to be measured. The two contacts 12 and the one contact 12 which are respectively projected from the bottom surface 31a of the main body 31 on one side and the other side of the measuring element 13b are the carrier 32,
It is attached to the main body 31 via 33.

【0013】これら接触子12及び測定子13bの配列
方向と平行する本体31の各面の中央部には、その配列
方向に沿って凹部がそれぞれ形成されている。この例で
は本体31の底面31a及び両側面31b,31cに形
成された凹部34,35,36はそれぞれ断面台形状と
されており、一方本体31の上面31dには取付け穴1
4を挾んで一対の断面矩形状の凹部37a,37bが形
成されている。なお、ダイヤルゲージ13のステム13
aを本体31に固定するために使用するねじ穴16は凹
部37b及び取付け穴14間に貫通形成され、本体31
の側面31c側の、このねじ穴16と対向する部分には
大径の穴38が貫通形成され、ねじ17の取付け及びね
じ締めが可能とされている。
A recess is formed in the center of each surface of the main body 31 parallel to the arrangement direction of the contact 12 and the measuring element 13b, along the arrangement direction. In this example, the bottom surface 31a of the main body 31 and the recesses 34, 35, 36 formed on both side surfaces 31b, 31c are trapezoidal in cross section, while the top surface 31d of the main body 31 has a mounting hole 1
A pair of concave portions 37a, 37b having a rectangular cross section are formed so as to sandwich the groove 4. The stem 13 of the dial gauge 13
The screw hole 16 used for fixing a to the main body 31 is formed so as to penetrate between the recess 37b and the mounting hole 14, and
A large-diameter hole 38 is formed in a portion of the side surface 31c side facing the screw hole 16 so that the screw 17 can be attached and screwed.

【0014】キャリア32はスライダ39、ストッパ4
1及びねじ42が組立てられて構成される。スライダ3
9は板状体39aの一板面の長手方向の一端部に凸部3
9b、他端部に凸部39cがそれぞれ一体に突設されて
なり、板状体39aには接触子12取付け用の2つのね
じ穴43が長手方向に配列されて形成されている。凸部
39bの先端は内側に折曲げられており、板状体39a
の一板面を本体31の底面31aと対接させた状態で、
本体31の凹部35の底面31a側の内側斜面の一部と
対接可能とされる。
The carrier 32 includes a slider 39 and a stopper 4.
1 and the screw 42 are assembled and configured. Slider 3
9 is a convex portion 3 at one longitudinal end of one plate surface of the plate-like body 39a.
9b and a convex portion 39c are integrally formed on the other end of the plate member 39, and two screw holes 43 for attaching the contact 12 are formed in the plate-like body 39a so as to be arranged in the longitudinal direction. The tip of the convex portion 39b is bent inward, and the plate-like body 39a
With one plate surface of the main body 31 in contact with the bottom surface 31a,
It can be brought into contact with a part of the inner slope of the recess 35 of the main body 31 on the side of the bottom surface 31a.

【0015】ストッパ41は略コ字状とされ、そのコ字
の一方の脚部の外側面の両端部にはC面取りによる斜面
がそれぞれ形成されており、これら斜面部41aが本体
31の凹部36の底面31a側の内側斜面の一部及び凹
部36の上面31d側の角部とそれぞれ対接可能とされ
る。ストッパ41のコ字の他方の脚部にはねじ穴44が
形成されており、ストッパ41のコ字の開口側からスラ
イダ39の凸部39cが挿入された状態で、ねじ42が
ストッパ41の外側からこのねじ穴44に螺合され、ね
じ穴44を挿通したねじ42の先端が凸部39cに回転
自在に係止されてキャリア32が組立てられる。
The stopper 41 is formed in a substantially U shape, and slopes are formed by C chamfering at both ends of the outer surface of one leg of the U shape, and these slopes 41 a are the recesses 36 of the main body 31. A part of the inner slope on the bottom surface 31a side and a corner on the upper surface 31d side of the recess 36 can be brought into contact with each other. A screw hole 44 is formed in the other leg of the U-shape of the stopper 41, and when the protrusion 39c of the slider 39 is inserted from the U-shaped opening side of the stopper 41, the screw 42 is outside the stopper 41. The screw 32 inserted into the screw hole 44 is inserted into the screw hole 44, and the tip of the screw 42 is rotatably locked to the convex portion 39c to assemble the carrier 32.

【0016】キャリア33はスライダ45、ストッパ4
1及びねじ42がキャリア32と同様に組立てられて構
成される。スライダ45は接触子12取付け用のねじ穴
43が1つとされている点でのみスライダ39と異な
り、その他の形状についてはスライダ39と同一とされ
る。スライダ39の2つのねじ穴43及びスライダ45
のねじ穴43にそれぞれ接触子12が凸部39b,45
bと反対側から螺合されて取付けられる。
The carrier 33 includes a slider 45 and a stopper 4.
1 and the screw 42 are assembled and configured similarly to the carrier 32. The slider 45 is different from the slider 39 only in that it has one screw hole 43 for attaching the contact 12, and the other shapes are the same as those of the slider 39. Two screw holes 43 of slider 39 and slider 45
Of the contact 12 into the screw holes 43 of the projections 39b and 45, respectively.
It is attached by screwing from the side opposite to b.

【0017】キャリア32,33はそれぞれスライダ3
9,45の凸部39b,45bとストッパ41とによっ
て本体31をその両側面31b,31c側から挾持する
ようにして本体31に取付けられる。この際、ねじ42
の螺合を進めて凸部39b,45bとストッパ41との
間隔をそれぞれ狭めることにより、凸部39b,45b
が本体31の側面31b及び凹部35に圧接し、ストッ
パ41の斜面部41aが凹部36に圧接し、かつスライ
ダ39,45の板状体39a,45aが本体31の底面
31aにそれぞれ圧接される。本体31にキャリア3
2,33がそれぞれ取付けられた状態でキャリア32の
両接触子12の中点、測定子13b及びキャリア33の
接触子12はほぼ同一直線上に位置されている。ねじ4
2をゆるめることによってキャリア32,33は本体3
1上を測定子13b及び接触子12の配列方向にそれぞ
れ移動自在とされる。
The carriers 32 and 33 are respectively the slider 3
The main body 31 is attached to the main body 31 so as to be sandwiched from both side surfaces 31b and 31c by the convex portions 39b and 45b of 9, 45 and the stopper 41. At this time, the screw 42
By reducing the distance between the protrusions 39b and 45b and the stopper 41, respectively.
Is pressed against the side surface 31b of the main body 31 and the concave portion 35, the inclined surface portion 41a of the stopper 41 is pressed against the concave portion 36, and the plate-like bodies 39a and 45a of the sliders 39 and 45 are pressed against the bottom surface 31a of the main body 31, respectively. Carrier 3 on body 31
In the state in which 2, 33 are respectively attached, the midpoint of both contactors 12 of the carrier 32, the measuring element 13b, and the contactor 12 of the carrier 33 are positioned on substantially the same straight line. Screw 4
By loosening the carrier 2, the carrier 32, 33 is moved to the main body 3
1 is movable in the arrangement direction of the measuring element 13b and the contact element 12, respectively.

【0018】上述のように構成された平面度測定器46
による平面度の測定は、キャリア32,33を移動させ
て被測定面の大きさに対応した測定スパンとなるように
各接触子12を移動させた後、前述した従来の平面度測
定器22と同様に行われる。なお、例えば本体31の側
面31cの上面31d側にキャリア32,33の移動方
向に伸長するスケールを設けておけば、スケールの目盛
を基準にしてキャリア32,33の位置を設定すること
ができるため、以前の測定状態を簡便かつ正確に再現す
ることができ、他の被測定物の測定を行った後、ある被
測定物を再度測定する場合などに極めて便利である。ス
ケールはスケール板の貼付けあるいは側面31cに刻印
形成するなどして設けることができる。
The flatness measuring device 46 constructed as described above.
The flatness is measured by moving the carriers 32 and 33 to move each contact 12 so that the measurement span corresponds to the size of the surface to be measured, and then using the conventional flatness measuring device 22 described above. The same is done. In addition, for example, if a scale extending in the moving direction of the carriers 32 and 33 is provided on the upper surface 31d side of the side surface 31c of the main body 31, the positions of the carriers 32 and 33 can be set based on the scale of the scale. The previous measurement state can be simply and accurately reproduced, which is extremely convenient when, for example, another measurement target object is measured and then a certain measurement target object is measured again. The scale can be provided by pasting a scale plate or engraving on the side surface 31c.

【0019】上述した実施例では測定子13bの両側の
2つの接触子12及び1つの接触子12をそれぞれキャ
リア32,33に取付けた構成としたが、例えば一方の
接触子12のみをキャリアに取付け、他方の接触子12
は本体31に直接取付け、固定して、一方の接触子12
のみを移動させる構成とすることもできる。
In the above-described embodiment, the two contactors 12 and one contactor 12 on both sides of the measuring element 13b are attached to the carriers 32 and 33, respectively. However, for example, only one contactor 12 is attached to the carrier. , The other contact 12
Is directly attached to the body 31 and fixed, and the one contact 12
It is also possible to have a configuration in which only one is moved.

【0020】[0020]

【発明の効果】以上説明したように、この発明によれば
接触子は本体に移動自在に取付けられたキャリアに取付
けられているため、接触子の位置、即ち測定スパンを連
続的に変更することができ、かつキャリアの移動はねじ
を若干ゆるめれば行うことができるため、平面度あるい
は球面度の測定を最適な測定スパンで簡易に行うことが
できる。
As described above, according to the present invention, since the contactor is mounted on the carrier movably mounted on the main body, the position of the contactor, that is, the measurement span can be continuously changed. Since the carrier can be moved by loosening the screw slightly, it is possible to easily measure the flatness or the sphericity with an optimum measurement span.

【0021】また、本体はその各面に凹部が形成されて
剛性を損うことなく、軽量化が図られているため、強度
や硬度の小さい被測定物であっても変形させたり、ある
いは傷つけたりすることなく、平面度を正確に測定する
ことができる。
Further, since the main body has a concave portion formed on each surface thereof to reduce the weight without impairing the rigidity, even an object to be measured having a low strength or hardness can be deformed or damaged. The flatness can be accurately measured without any trouble.

【図面の簡単な説明】[Brief description of drawings]

【図1】(A)はこの発明による平面度測定器の一実施
例を示す正面図、(B),(C)はそれぞれその底面図
及び断面図。
FIG. 1A is a front view showing an embodiment of a flatness measuring device according to the present invention, and FIGS. 1B and 1C are a bottom view and a sectional view, respectively.

【図2】(A)は従来の平面度測定器を示す正面図、
(B),(C)はそれぞれその底面図及び一部を省略し
た断面図。
FIG. 2A is a front view showing a conventional flatness measuring instrument,
(B) and (C) are respectively the bottom view and the sectional view which abbreviate | omitted one part.

【符号の説明】[Explanation of symbols]

11 本体 12 接触子 13b 測定子 13c ダイヤルインジケータ 31 本体 32,33 キャリア 34,35,36,37a,37b 凹部 11 main body 12 contactor 13b measuring element 13c dial indicator 31 main body 32, 33 carrier 34, 35, 36, 37a, 37b concave portion

フロントページの続き (72)発明者 清水 清三 東京都渋谷区道玄坂1丁目21番6号 日本 航空電子工業株式会社内 (72)発明者 渡邉 昌彦 東京都渋谷区道玄坂1丁目21番6号 日本 航空電子工業株式会社内Front page continuation (72) Inventor Seizo Kiyozo 1-21-6 Dogenzaka, Shibuya-ku, Tokyo Japan Aviation Electronics Industry Limited (72) Inventor Masahiko Watanabe 1-26-1 Dogenzaka, Shibuya-ku, Tokyo Japan Airlines Electronic Industry Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 本体に被測定面に対して前後自在に測定
子を取付け、その測定子の一方側において上記本体の底
面から2つの接触子を突出させ、上記測定子の他方側に
おいて上記本体の底面から1つの接触子を突出させ、こ
れら接触子の先端を上記被測定面上に接触させて上記本
体を配し、上記測定子の変位がダイヤルインジケータで
示される平面度測定器において、 上記測定子及び接触子の配列方向に移動自在にキャリア
が上記本体に取付けられ、そのキャリアに上記2つの接
触子と1つの接触子との一方が取付けられ、 上記本体の上記配列方向と平行する各面の中央部に、上
記配列方向に沿って凹部が形成されてなる平面度測定
器。
1. A measuring element is attached to a main body so as to be movable back and forth with respect to a surface to be measured, and two contact elements are projected from one side of the measuring element from a bottom surface of the main body, and the other side of the measuring element is the main body. In the flatness measuring instrument in which one contact is projected from the bottom surface of the device, the tips of these contacts are brought into contact with the surface to be measured, and the main body is arranged, and the displacement of the measuring device is indicated by a dial indicator. A carrier is attached to the main body so as to be movable in the arrangement direction of the measuring element and the contact element, and one of the two contact elements and one contact element is attached to the carrier, and the carrier is parallel to the arrangement direction of the main body. A flatness measuring instrument in which a concave portion is formed in the central portion of the surface along the arrangement direction.
JP20518393A 1993-08-19 1993-08-19 Flatness measuring instrument Withdrawn JPH0755406A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20518393A JPH0755406A (en) 1993-08-19 1993-08-19 Flatness measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20518393A JPH0755406A (en) 1993-08-19 1993-08-19 Flatness measuring instrument

Publications (1)

Publication Number Publication Date
JPH0755406A true JPH0755406A (en) 1995-03-03

Family

ID=16502790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20518393A Withdrawn JPH0755406A (en) 1993-08-19 1993-08-19 Flatness measuring instrument

Country Status (1)

Country Link
JP (1) JPH0755406A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009139311A (en) * 2007-12-10 2009-06-25 Nippon Steel & Sumikin Metal Products Co Ltd Flatness gage
JP2017138206A (en) * 2016-02-03 2017-08-10 損害保険ジャパン日本興亜株式会社 Measuring device and measuring system
CN118548827A (en) * 2024-05-06 2024-08-27 江苏高越高新科技有限公司 A device for detecting copper-clad quality of silicon nitride ceramic materials

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009139311A (en) * 2007-12-10 2009-06-25 Nippon Steel & Sumikin Metal Products Co Ltd Flatness gage
JP2017138206A (en) * 2016-02-03 2017-08-10 損害保険ジャパン日本興亜株式会社 Measuring device and measuring system
CN118548827A (en) * 2024-05-06 2024-08-27 江苏高越高新科技有限公司 A device for detecting copper-clad quality of silicon nitride ceramic materials

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