JPH0761891B2 - Firing board - Google Patents
Firing boardInfo
- Publication number
- JPH0761891B2 JPH0761891B2 JP13061786A JP13061786A JPH0761891B2 JP H0761891 B2 JPH0761891 B2 JP H0761891B2 JP 13061786 A JP13061786 A JP 13061786A JP 13061786 A JP13061786 A JP 13061786A JP H0761891 B2 JPH0761891 B2 JP H0761891B2
- Authority
- JP
- Japan
- Prior art keywords
- firing
- board
- cracks
- fired
- firing board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Furnace Charging Or Discharging (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、薄膜太陽電池等の焼成工程時に、焼成物を載
置する焼成ボードに関するものである。TECHNICAL FIELD The present invention relates to a firing board on which a fired product is placed during a firing process of a thin film solar cell or the like.
薄膜太陽電池を形成する工程中、ガラス基板にCdS膜やC
dTe膜をスクリーン印刷して、690℃程度で焼成するが、
このときガラス基板を比較的小さな板状の焼成セッター
に載置し、小型雰囲気バッチ式焼成炉にて焼成を行って
いた。また、この他、焼成ボードに載置して雰囲気トン
ネル炉にて焼成を行うこともあったが、これらの焼成セ
ッターや焼成ボードは、主にアルミナやムライトからな
っていた。これらの焼成セッターや焼成ボードは薄膜太
陽電池以外の他の物体の焼成等にも使用していた。During the process of forming thin film solar cells, CdS film and C
Screen-print the dTe film and bake at about 690 ° C.
At this time, the glass substrate was placed on a relatively small plate-shaped firing setter and fired in a small atmosphere batch type firing furnace. In addition to the above, there was a case where the firing setter and the firing board were placed on a firing board and fired in an atmosphere tunnel furnace, but these firing setters and firing boards were mainly made of alumina or mullite. These firing setters and firing boards were also used for firing other objects than thin film solar cells.
ところが、このような従来のアルミナまたはムライトよ
りなる焼成セッターや焼成ボードは焼成時のヒートショ
ックにより、クラックや割れが発生しやすく、焼成中に
焼成セッターや焼成ボードにクラックや割れが発生する
と載置していた被焼成物体が歪んだり変質して、品質が
低下してしまうという問題点があった。特に大きな焼成
ボードを使用するとクラックや割れの発生率が高く、例
えば30cm角程度の焼成ボードをアルミナまたはムライト
で形成しても、実用に用いることができなかった。その
ため、比較的小さな焼成セッターしか用いることができ
ず、焼成工程の効率が悪いという不都合があった。However, such fired setters and boards made of conventional alumina or mullite are prone to cracks and cracks due to heat shock during firing, and if cracks or cracks occur on the fired setters or boards during firing However, there is a problem in that the object to be fired is distorted or deteriorated and the quality is deteriorated. Especially when a large fired board was used, the rate of occurrence of cracks and cracks was high, and even if a fired board of about 30 cm square was formed of alumina or mullite, it could not be practically used. Therefore, there is a disadvantage that only a relatively small baking setter can be used and the efficiency of the baking process is poor.
上記に鑑みて、本発明は重量組成比が、SiO2 71〜77
％，Al2O3 19〜25％，Li2O 2.1〜3.3％のリシア系セラ
ミックを板状体または皿状体に形成して焼成ボードとし
たものである。In view of the above, the present invention has a weight composition ratio of SiO 2 71 to 77.
%, Al 2 O 3 19 to 25%, Li 2 O 2.1 to 3.3% lithia-based ceramics were formed into a plate or dish to form a firing board.
本発明に係る焼成ボードは第１図に示すような板状体
で、焼成物を載置する載置面11を上面に形成し、周囲に
ヘリ12を備えている。The firing board according to the present invention is a plate-like body as shown in FIG.
この焼成ボード10は、SiO2,Al2O3,Li2Oを主成分とする
リシア系セラミックよりなっているが、これら各成分の
重量組成比を変化させることにより耐ヒートショック性
等の性質が変化する。そこで、第１表に示すように、さ
まざまな重量組成比のリシア系セラミックで100mm×100
mm×5mmのテストピースをつくり、このテストピースを
表面温度600℃に加熱後水中投下するサイクルをくり返
し、クラックが発生するまでの回数を調べた。その結
果、各組成比での平均値は第１表の通りであった。This firing board 10 is composed of SiO 2 , Al 2 O 3 , and lithia-based ceramics containing Li 2 O as a main component, and by changing the weight composition ratio of each of these components, properties such as heat shock resistance can be obtained. Changes. Therefore, as shown in Table 1, 100 mm × 100 mm of lithia ceramics with various weight composition ratios is used.
A test piece having a size of 5 mm × 5 mm was prepared, and the test piece was heated to a surface temperature of 600 ° C. and then repeatedly dropped in water, and the number of times until a crack was generated was examined. As a result, the average value at each composition ratio was as shown in Table 1.
第１表より、No.5〜No.8のものは、少数回のサイクルで
クラックが発生してしまい、耐ヒートショック性が悪い
のに対し、No.1〜No.4のものはクラック発生までのサイ
クルが10回以上と長く、耐ヒートショック性に優れてい
ることがわかる。またNo.1〜No.4のものはLi2O 2.7％に
固定しているが、この比率もさまざまに変化させ、さら
に実験を行った結果、SiO2が71〜77％，Al2O3が19〜25
％、Li2Oが2.1〜3.3％のものが特に耐ヒートショック性
に優れていることがわかった。 From Table 1, No. 5 to No. 8 have cracks in a few cycles and have poor heat shock resistance, while No. 1 to No. 4 have cracks. It can be seen that the cycle up to 10 times or more is long and it has excellent heat shock resistance. Moreover, No. 1 to No. 4 are fixed to Li 2 O 2.7%, but this ratio was also changed variously, and as a result of further experiments, SiO 2 was 71 to 77%, Al 2 O 3 Is 19 to 25
%, Li 2 O of 2.1 to 3.3% was found to be particularly excellent in heat shock resistance.
この第１表におけるNo.4のものについて、さまざまな特
性を調べた結果、第２表に示すように熱膨張係数が小さ
く、ヒートショックによる割れの発生が少ないことがわ
かる。As a result of examining various characteristics of No. 4 in Table 1, it is found that the coefficient of thermal expansion is small and the occurrence of cracks due to heat shock is small as shown in Table 2.
次に第１表のNo.4と同じ組成比で、第１図に示した焼成
ボード10を形成した。大きさは、縦37cm、横38cm、厚さ
1.9cmで内径は35cm×35cmとした。この焼成ボード10を
薄膜太陽電池の焼成に使用した結果、クラックや割れ、
載置面のソリなどはほとんど発生せず、200回程度繰り
返し使用した後でも充分使用可能な状態を保っていた。 Next, the firing board 10 shown in FIG. 1 was formed with the same composition ratio as No. 4 in Table 1. The size is length 37 cm, width 38 cm, thickness
The inside diameter was 1.9 cm and the inside diameter was 35 cm × 35 cm. As a result of using this baking board 10 for baking a thin-film solar cell, cracks, breaks,
Almost no warping of the mounting surface occurred, and it remained in a usable state even after repeated use about 200 times.
叙上のように本発明によれば、重量組成比が、SiO2 71
〜77％，Al2O3 19〜25％，Li2O 2.1〜3.3％のリシア系
セラミックを板状体または皿状体に形成して焼成ボード
としたことによって、焼成時にクラックや割れ、ソリが
発生しにくいため、載置した焼成物体の品質を低下させ
ることがなく、長期にわたって使用することができる。
また、焼成ボードを大きく形成しても充分使用可能であ
るため、一度に大量の焼成が行え、焼成工程を効率化さ
せられるなど多くの特長を有した焼成ボードを提供する
ことができる。As described above, according to the present invention, the weight composition ratio is SiO 2 71
-77%, Al 2 O 3 19-25%, Li 2 O 2.1-3.3% lithia-based ceramics were formed into a plate or dish to make a firing board, so that cracks, cracks and Is less likely to occur, the quality of the placed baking object is not deteriorated, and it can be used for a long period of time.
Further, even if the firing board is formed large, it can be sufficiently used, and therefore, it is possible to provide a firing board having many features such that a large amount of firing can be performed at one time and the firing process can be made efficient.
第１図は本発明に係る焼成ボードを示す斜視図である。 10……焼成ボード、11……載置面 12……ヘリ FIG. 1 is a perspective view showing a firing board according to the present invention. 10 …… Baking board, 11 …… Mounting surface 12 …… Heli
Claims (1)
〜25％，Li2O 2.1〜3.3％のリシア系セラミックを板状
体または皿状体に形成してなる焼成ボード。1. A weight composition ratio of SiO 2 71 to 77%, Al 2 O 3 19
25%, by forming a lithia-based ceramic Li 2 O 2.1-3.3% in the plate-like member or dish-shaped body fired board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13061786A JPH0761891B2 (en) | 1986-06-04 | 1986-06-04 | Firing board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13061786A JPH0761891B2 (en) | 1986-06-04 | 1986-06-04 | Firing board |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62288158A JPS62288158A (en) | 1987-12-15 |
| JPH0761891B2 true JPH0761891B2 (en) | 1995-07-05 |
Family
ID=15038506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13061786A Expired - Fee Related JPH0761891B2 (en) | 1986-06-04 | 1986-06-04 | Firing board |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0761891B2 (en) |
-
1986
- 1986-06-04 JP JP13061786A patent/JPH0761891B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62288158A (en) | 1987-12-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |