JPH07630U - Linear drive stage device - Google Patents

Abstract

(57) [Summary] [Object] To realize accurate positioning in a linear drive stage apparatus by reducing the dimension in the apparatus axis direction and suppressing the generation of a bending moment accompanying the movement of the table. [Structure] The linear drive stage device 1 includes a stage 2 and
The drive unit 3 arranged on this side surface and the drive unit 3
Of the arm mechanism 4 for transmitting the linear motion of the above to the table 24 side of the stage 2. Arm mechanism 4
The arm 41 constituting the arm is rotatable about a central fulcrum C, and both ends equidistant from this fulcrum are
Roller 4 as table abutting part and rod abutting part
2, 43 are attached. The roller 42 is in contact with the center of the front end of the table 24. The table 24 is urged toward the arm 41 by a coil spring incorporated in a tensioned state.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a linear drive stage device used for moving a work to a predetermined position in the field of machine tools and the like.

[0002]

[Prior art]

 The linear drive stage device is basically composed of a linear drive stage and a drive unit for linearly moving the table of this stage. Generally, the stage and drive unit are arranged in series in the direction of movement.

[0003]

[Problems to be solved by the device]

 However, when a configuration in which the stage and the drive unit are arranged in series is adopted, the device size in the moving direction becomes large and it may not be possible to install depending on the place of use. In order to shorten the dimension in the moving direction (device axial direction), it is conceivable to arrange the drive unit on the side surface side of the stage. In this case, since the moving direction of the table and the moving direction of the actuating rod of the drive unit are parallel to each other, the arm is extended laterally from the side of the table and the end of the arm is guided by the actuating rod of the drive unit. It may be configured to push.

However, in this case, since a bending moment acts on the table side via the arm, the straightness of the table decreases.

In view of such a point, an object of the present invention is to provide a linear drive stage device capable of shortening the size in the axial direction of the device and performing accurate positioning without lowering the straightness of the table. Is to realize.

[0006]

In order to solve the above problems, in the linear drive stage device of the present invention, the drive unit is arranged and fixed on the side surface side of the linear movement stage. A structure is adopted in which the stage table is moved linearly by a drive unit via an arm mechanism that can swivel around a fulcrum.

That is, the linear drive stage device of the present invention includes a linear movement stage in which a table is linearly movable on a fixed base, and the table on the side of the base parallel to the moving direction of the table. Drive unit, which is arranged so that the operating rod moves linearly in the moving direction, and the rod contact portion and the table contact that are in contact with the tip of the operating rod and one end face of the table in the moving direction, respectively. An arm that includes a contact portion, is rotatably supported with a position different from these contact portions as a fulcrum, and transmits the linear motion of the operating rod to the table side so as to become the linear motion of the table. A mechanism and a biasing means for holding the contact state of the arm mechanism with respect to the operating rod and the table. It has a feature.

In order to prevent the bending moment from substantially acting on the table side, the table contact portion of the arm mechanism is brought into contact with the center of the end face of the table (that is, the position on the apparatus axis). You can do it.

As a typical structure of the arm mechanism, there may be mentioned one that is supported so as to be rotatable around a position between the rod contact portion and the table contact portion as a fulcrum.

Here, it is desirable that the rod abutting portion and the table abutting portion of the arm mechanism are formed of rolling elements having a circular outer peripheral surface or a spherical outer peripheral surface.

[0011]

【Example】

 Embodiments of the present invention will be described below with reference to the drawings.

1, 2, and 3 show a linear drive stage device according to an embodiment of the present invention. The device 1 of the present example includes a linear movement stage 2, a drive unit 3 attached to the side surface thereof, and an arm mechanism 4 connecting the linear movement stage 2 and the drive unit 3.

The linear movement stage 2 has a rectangular shape as a whole, and is linearly reciprocally movable along the apparatus axis L via a base 21 and a pair of left and right linear guides 22 and 23 with respect to the upper surface. A supported table 24 is provided. At the center of the front end surface 24a of the table 24, a T-shaped arm contact member 241 is fixed by a bolt. A coil spring 26 is arranged in a tensioned state along the apparatus axis L in a space 25 formed between the upper surface of the base 21 and the back surface of the table 24. The front end of the coil spring 26 is hooked on a spring receiving pin 27 fixed to the base side, and the rear end thereof is hooked on a spring receiving pin 28 fixed to the table side. . It should be noted that nine bolt holes 29 for mounting, which are used for mounting the driven member, are formed on the upper surface of the table 24.

Next, a T-shaped support member 5 is also fixed to the front end surface of the base 21 by a bolt at a position closer to the side surface from the center. The side portion of the support member 5 extends laterally from the side surface of the base, and the drive unit 3 is attached thereto. The drive unit 3 is arranged so as to be parallel to the device axis L. The drive unit 3 is a generally known one composed of a rotation source such as a motor, a reduction mechanism for reducing the rotation from the rotation source, and a conversion mechanism for converting the reduced rotation into a linear motion. It is adopted. An operating rod 31 projects from the front end of the drive unit 3, and when the drive unit 3 is driven, the operating rod 31 linearly reciprocates at a predetermined stroke.

On the other hand, on the upper surface of the projecting portion 51 of the supporting member 5 attached to the front end surface of the base 21 and projecting to the front side, a state in which the supporting pin 52 is the center, and the supporting pin 52 is rotatable in a plane parallel to the table upper surface. The arm 41 that constitutes the arm mechanism 4 is supported by. The arm 41 has a bilaterally symmetrical shape about a fulcrum C defined by a support pin 52. Further, at one end of the arm 41, a roller 42 that defines a table contact portion is rotatably supported, and an outer peripheral surface 42a of the roller 42 is a front end surface of an arm contact member 241 on the table side. It is in contact with 241a. A roller 43 defining a rod contact portion is also rotatably supported at the other end of the arm 41, and an outer peripheral surface 43a of the roller 43 contacts the front end surface 31a of the operating rod 31 of the drive unit. Touching.

The operation of the linear drive stage device 1 of this example will be described with reference to FIG. In the initial state, the operating rod 31 of the drive unit 3 is at the most retracted position, as indicated by the imaginary line in the figure. Since the table 24 is biased toward the front side by the pulling force of the coil spring 26 mounted in a tensioned state, the rollers 42 and 43 at both ends of the arm 41 are respectively pressed by a predetermined pressing force. Thus, the arm contact member 241 is in contact with the front end surface 241a of the arm contact member 241 and the front end surface 31a of the operating rod 31. That is, in this example, the coil spring 26 constitutes a biasing means for holding the contact state of the arm with the table and the operating rod. Of course, a biasing means having a configuration other than this may be adopted.

In this state, when the driving unit 3 is driven to project the actuating rod 31 to the position shown by the solid line in the figure, the arm 41 pivots about the fulcrum C at the center of the arm 41. Numeral 24 is retracted toward the rear end side against the spring force of the coil spring 26 by the same amount as the protruding amount of the operating rod. Thus, by linearly reciprocating the operating rod 31, the table 24 can be moved to an arbitrary position within a predetermined range and positioned there.

In the apparatus of this example, since the arm mechanism 4 is used, an undesired bending moment does not act on the table 24 side. Therefore, the straightness of the table can be maintained and the table can be moved accurately. In particular, in this example, since the table 24 is pushed at its center (position on the device axis L), such a bending moment is not substantially generated. Therefore, the position of the table can be extremely accurately determined, and the moment load is not applied to the linear guides 22 and 23, so that the life of the linear guides is improved.

Further, in this example, since the abutting portion is formed by using the rollers 42 and 43, it is preferable that the abutting state of the arm with respect to the table and the operating rod can always be kept good.

In this example, the lengths of the left and right arms centering on the fulcrum C of the arm 41 are the same. However, by changing these lengths, the moving speed of the table 24 and its positioning can be improved. The resolution of can be changed. That is, by increasing the length of the arm from the fulcrum C to the side of the operation rod 3, it is possible to increase the positioning resolution of the table 24, and vice versa, the moving speed of the table 24 can be increased. it can. In addition, in this example, the table contact portion and the rod contact portion are formed by the rollers 42 and 43, but instead of this, a spherical rolling element may be utilized to form the contact portion. Of course good things.

Further, in this example, the fulcrum C of the arm 41 is located between the rollers 42 and 43, but it may be located outside these rollers.

5 to 9 show a biaxial stage device to which the present invention is applied. In these figures, parts corresponding to those in the above-described embodiment are designated by the same reference numerals, and description thereof will be omitted below. In the apparatus 100 of this example, the table 24 supported on the base 21 has a two-stage structure, and is composed of a lower first table 241 and an upper second table 242. These tables move together in the X-axis direction (see FIG. 5). However, the upper second table 242 is supported movably in the Z-axis direction with respect to the lower first table 241. These tables are reciprocally moved in the X-axis direction with respect to the base 21 by the X-axis drive unit 3. This mechanism is the same as the above-mentioned embodiment.

On the other hand, as can be seen from FIG. 5, in the present example, the Z-axis drive unit 102 is mounted on the side surface of the lower first table 241 via the bracket 101. Installed. The drive unit 102 moves the second table 242 in the Z-axis direction. The linear movement of the Z-axis drive unit 102 is transmitted to the table 242 side via the arm mechanism 104. In the arm mechanism 104, the fulcrum C1 of the arm 105 is located at the center of the second table 242. The arm length from this fulcrum to the roller 106 on the side that presses the table 242 is set shorter than the arm length from this fulcrum to the roller 107 on the side that is pressed by the drive unit 102.

In this example, the second table 242 can be positioned at an arbitrary position within a predetermined range on the plane by driving the drive units 3 and 102.

[0025]

[Effect of device]

 As described above, in the linear drive stage apparatus of the present invention, the drive unit is attached to the side surface in the moving direction of the stage, and the linear movement is performed from the drive unit via the arm mechanism. I am trying to communicate to the side. Therefore, according to the present invention, it is possible to reduce the size of the apparatus in the axial direction, avoid occurrence of an undesired bending moment on the stage side, and realize accurate positioning. In particular, it is preferable that the driving force from the driving unit is applied to the center of the table via the arm mechanism, since the bending moment does not act on the stage side. Further, in the present proposal, since the table contact portion and the rod contact portion are formed by using the rolling element having the circular outer peripheral surface or the spherical surface, the contact state of the arm with respect to the table and the operating rod is always kept good. Can be held.

In addition to this, according to the present invention, by changing the distance from the fulcrum of the arm to each contact portion, the moving speed of the table and the resolution of its positioning can be easily changed. There is also.

[Brief description of drawings]

FIG. 1 is a plan view showing a linear drive stage device according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a portion of the device of FIG. 1 taken along line II-II.

FIG. 3 is a side view showing a partial cross-section of the side surface of the device of FIG. 1 when viewed in the direction of arrow III.

FIG. 4 is a plan view for explaining the operation of the device in FIG.

FIG. 5 is a plan view showing a stage device according to another embodiment of the present invention.

6 is a side view showing a partial cross section of the side surface of the device of FIG. 5 when viewed in the direction of arrows VI-VI.

7 is a cross-sectional view showing a cross section in the Z-axis direction of the device of FIG.

FIG. 8 is a side view showing a partial cross section of the side surface of the apparatus of FIG. 5 when viewed in the direction of arrows VIII-VIII.

9 is a cross-sectional view showing a cross section in the X-axis direction of the device of FIG.

[Explanation of symbols]

 1 ... Linear drive stage device 2 ... Stage 21 ... Base 22, 23 ... Linear guide 24 ... Table 24a ... Table front end surface 241 ... Arm contact member 3 ... Drive unit 31 ... Operating rod 31a ... Front end surface of operating rod 4 ... Arm mechanism 41 ... Arm 42 ... Roller (table contact portion) 43 ... Roller (rod contact portion) C ... Arm fulcrum L ... Device axis (moving direction)

Claims (4)

[Scope of utility model registration request] 1. A linear movement stage in which a table is installed so as to be linearly movable on a fixed base, and an operating rod is arranged on the side surface side of the table such that the operating rod linearly moves in the movement direction of the table. A drive unit, a rod contact portion and a table contact portion that are in contact with the distal end of the operation rod and one end surface in the moving direction of the table, respectively, and pivots at a position different from these contact portions as a fulcrum. An arm mechanism that is movably supported and that transmits the linear motion of the operating rod to the side of the table so as to become the linear motion of the table, and holds the contact state of the arm mechanism with the operating rod and the table. A linear drive stage device comprising: 2. The linear drive stage device according to claim 1, wherein the table contact portion of the arm mechanism is in contact with the center of the end surface of the table. 3. The linear drive stage device according to claim 1, wherein the arm mechanism is pivotably supported about a position between the rod contact portion and the table contact portion as a fulcrum. . 4. The rod contact portion and the table contact portion of the arm mechanism according to claim 1, wherein the rod contact portion and the table contact portion are formed of a rolling element having a circular outer peripheral surface or a spherical outer peripheral surface. A linear drive stage device characterized in that