JPH076534Y2 - Volume and surface resistivity measuring device - Google Patents
Volume and surface resistivity measuring deviceInfo
- Publication number
- JPH076534Y2 JPH076534Y2 JP1988098922U JP9892288U JPH076534Y2 JP H076534 Y2 JPH076534 Y2 JP H076534Y2 JP 1988098922 U JP1988098922 U JP 1988098922U JP 9892288 U JP9892288 U JP 9892288U JP H076534 Y2 JPH076534 Y2 JP H076534Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- plate
- sample
- shield case
- main electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 description 10
- 239000012212 insulator Substances 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Measurement Of Resistance Or Impedance (AREA)
Description
【考案の詳細な説明】 「産業上の利用分野」 この考案は例えばプリント基板用の絶縁板或いは床面絶
縁タイル等の超高抵抗（ＭΩ以上）絶縁体の体積抵抗率
或いは表面抵抗率を高精度で測定する体積、表面抵抗率
測定装置に関する。[Detailed Description of the Invention] "Industrial Application Field" This invention has a high volume resistivity or surface resistivity of an ultrahigh resistance (MΩ or more) insulator such as an insulating plate for a printed circuit board or a floor insulating tile. The present invention relates to a device for measuring volume and surface resistivity with high accuracy.
「体積抵抗率の測定方法」 絶縁体の体積抵抗率は第３図に示すように、円盤状の主
電極１と同じく円盤状の対向電極２との間に試料３を挟
み込んで、主電極１と対向電極２との間に高圧電源４か
ら例えば1000ボルト程度の電圧を印加し、試料３を通じ
て流れる電流Ｉを電流計５で測定し、試料３の抵抗値を
求める。この抵抗値が体積抵抗である。この体積抵抗値
を試料３の厚みｔで割ると体積抵抗率が得られる。“Measurement Method of Volume Resistivity” As shown in FIG. 3, the volume resistivity of the insulator is such that the sample 3 is sandwiched between the disk-shaped main electrode 1 and the disk-shaped counter electrode 2 and the main electrode 1 A voltage of, for example, about 1000 V is applied between the high voltage power supply 4 and the counter electrode 2, and the current I flowing through the sample 3 is measured by the ammeter 5 to obtain the resistance value of the sample 3. This resistance value is the volume resistance. The volume resistivity can be obtained by dividing this volume resistance value by the thickness t of the sample 3.
なお、電流Ｉを測定する場合試料３の表面を通って対向
電極２と主電極１の間を流れる電流INが存在すると測定
誤差となる。このため主電極１を取囲んでガード電極６
を設け、ガード電極６を接地して電流INを接地に側路さ
せている。When measuring the current I, if there is a current I N flowing between the counter electrode 2 and the main electrode 1 through the surface of the sample 3, a measurement error will occur. Therefore, the main electrode 1 is surrounded and the guard electrode 6
The provided, thereby Gawaro current I N to ground grounded guard electrode 6.
「表面抵抗率の測定方法」 表面抵抗率は第４図に示すように主電極１及びガード電
極６と対向電極２との間に試料３を挾んだ状態でガード
電極６と主電極１との間に高圧電源４から電圧を印加
し、電流計５で試料３の表面を流れる電流Ｉを測定し、
表面抵抗を求める。“Measurement Method of Surface Resistivity” As shown in FIG. 4, the surface resistivity of the guard electrode 6 and the main electrode 1 with the sample 3 sandwiched between the main electrode 1 and the guard electrode 6 and the counter electrode 2 was measured. A voltage is applied from the high voltage power source 4 between the two, and the current I flowing on the surface of the sample 3 is measured by the ammeter 5,
Calculate the surface resistance.
主電極１とガード電極６の各直径によって決まる電極係
数を測定した表面抵抗値に乗じて表面抵抗率を算出す
る。The surface resistivity is calculated by multiplying the measured surface resistance value by the electrode coefficient determined by each diameter of the main electrode 1 and the guard electrode 6.
この場合対向電極２は接地されガード電極６から試料３
の表面を通って流れる電流INを接地に側路させている。In this case, the counter electrode 2 is grounded and the guard electrode 6 to the sample 3
The current I N flowing through the surface of is bypassed to ground.
体積抵抗率及び表面抵抗率は上記のようにして測定され
るものであるが、主電極１とガード電極６及び対向電極
２は第５図及び第６図に示すような構造で支持されてい
る。The volume resistivity and the surface resistivity are measured as described above, but the main electrode 1, the guard electrode 6 and the counter electrode 2 are supported by the structure shown in FIGS. 5 and 6. .
「従来の技術」 従来は第５図及び第６図に示すように上板７と下板８と
が４本の支柱９によって互に板面を対向させて支持さ
れ、下板８に対向電極２が取付けられ、上板７に主電極
１とガード電極６がツマミ11によって回転されるネジ送
り機構12によって上下に移動できるように支持される。“Prior Art” Conventionally, as shown in FIG. 5 and FIG. 6, an upper plate 7 and a lower plate 8 are supported by four columns 9 with their plate surfaces facing each other, and the lower plate 8 has an opposing electrode. 2 is attached and the main electrode 1 and the guard electrode 6 are supported on the upper plate 7 by a screw feed mechanism 12 rotated by a knob 11 so as to be movable up and down.
なお、13はネジ送り機構12の下端に回転自在に取付けた
補助板を示す。この補助板13はガイド棒14によって回り
止めされ、ネジ送り機構12によって上下に移動できるよ
うに支持される。Reference numeral 13 denotes an auxiliary plate rotatably attached to the lower end of the screw feeding mechanism 12. The auxiliary plate 13 is stopped by a guide rod 14 and is supported by a screw feed mechanism 12 so as to be movable up and down.
補助棒14の下端はガード電極６に連結され、ガード電極
６も回り止めする。ガード電極６と補助板13の間にバネ
15を挿入し、ガード電極６をバネ15によって吊り下げ
る。The lower end of the auxiliary rod 14 is connected to the guard electrode 6 and also prevents the guard electrode 6 from rotating. A spring is provided between the guard electrode 6 and the auxiliary plate 13.
15 is inserted and the guard electrode 6 is suspended by the spring 15.
補助板13には更に補助棒16が係合する。この補助棒16は
上端にフランジ16Aを有し、このフランジ16Aが補助板13
に係合して主電極１を吊り下げて支持する。補助棒16に
はバネ17が装着される。このバネ17は補助板13と主電極
１との間に反発力を与える。An auxiliary rod 16 is further engaged with the auxiliary plate 13. This auxiliary rod 16 has a flange 16A at the upper end, and this flange 16A is an auxiliary plate 13
And the main electrode 1 is suspended and supported. A spring 17 is attached to the auxiliary rod 16. This spring 17 gives a repulsive force between the auxiliary plate 13 and the main electrode 1.
このような構造によって補助板13を降下させ、主電極１
とガード電極６を試料３の面に当接させる。この状態で
更にネジ送り機構12を操作して補助板13を降下させると
バネ15と17が圧縮変形される。よって、このバネ15と17
の圧縮変形によって主電極１とガード電極６を所定の圧
接力で試料に当接させるようにしている。With such a structure, the auxiliary plate 13 is lowered and the main electrode 1
The guard electrode 6 is brought into contact with the surface of the sample 3. When the screw feed mechanism 12 is further operated in this state to lower the auxiliary plate 13, the springs 15 and 17 are compressed and deformed. Therefore, this spring 15 and 17
The main electrode 1 and the guard electrode 6 are brought into contact with the sample by a predetermined pressure contact force by the compressive deformation.
「考案が解決しようとする課題」 従来は主電極１、ガード電極６と対向電極２を取囲んで
４本の支柱９が存在するため支柱９の間隔Ｗより大きい
形状の試料を測定することができない欠点がある。[Problems to be Solved by the Invention] Conventionally, since there are four columns 9 surrounding the main electrode 1, the guard electrode 6 and the counter electrode 2, it is possible to measure a sample having a shape larger than the distance W between the columns 9. There is a drawback that cannot be done.
つまり、従来は大きな形状の試料は測定のためにわざわ
ざ切断してサンプルを作り、このサンプルを使って測定
を行っている。このため試料が無駄になってしまう欠点
がある。In other words, conventionally, a large-shaped sample is purposely cut to make a sample for measurement, and the sample is used for the measurement. Therefore, there is a disadvantage that the sample is wasted.
従来の構造では周囲の電磁的な雑音妨害を阻止すること
ができず、高精度の測定を行えない欠点がある。The conventional structure has a drawback in that it is not possible to prevent electromagnetic noise interference in the surroundings and highly accurate measurement cannot be performed.
この考案の目的は、形状が大きい試料でも切断すること
なく測定することができると共に周囲雑音の影響を受け
ず、高精度の測定が可能な体積抵抗率、表面抵抗率測定
装置を提供しようとするものである。An object of the present invention is to provide a volume resistivity and surface resistivity measuring device which can measure a sample having a large shape without cutting and is not affected by ambient noise and can perform highly accurate measurement. It is a thing.
「課題を解決するための手段」 この考案では主電極及びガード電極を前面が解放の電極
収納箱に収納し、更に装置全体をシールドケースに収容
する。大型試料を装着できるようにするため電極収容箱
の側板に切込を入れている。"Means for Solving the Problem" In this invention, the main electrode and the guard electrode are housed in an electrode housing box having a front open, and the entire device is housed in a shield case. The side plate of the electrode housing box is cut so that a large sample can be mounted.
このようにすると主電極及びガード電極と対向電極の周
囲は一面が塞がれるだけで、他の三方が開放される。よ
って面積が大きい試料でも切断することなく主電極と対
向電極の間に挾み込むことができ、体積抵抗率及び表面
抵抗率を測定することができる。In this way, only one surface is closed around the main electrode, the guard electrode and the counter electrode, and the other three sides are opened. Therefore, even a sample having a large area can be sandwiched between the main electrode and the counter electrode without cutting, and the volume resistivity and the surface resistivity can be measured.
電極等の測定要部は電極収容箱及びシールドケースとの
二重シールド構造によって、周囲雑音妨害を阻止するこ
とができ、高精度の測定を行える。Due to the double shield structure of the electrode containing box and the shield case, the measurement main parts such as the electrodes can prevent ambient noise interference and perform high-precision measurement.
「実施例」 第１図及び第２図にこの考案の一実施例を示す。図中１
は主電極、２は対向電極、６はガード電極、７は上板、
８は下板、11はツマミ、12はネジ送り機構、13は補助
板、14は回り止め用の補助棒、15はガード電極６を吊り
下げているバネ、16は主電極１を吊り下げている補助
棒、17は主電極１に圧接力を与えるためのバネを示す点
は従来と同じである。"Embodiment" FIGS. 1 and 2 show an embodiment of the present invention. 1 in the figure
Is a main electrode, 2 is a counter electrode, 6 is a guard electrode, 7 is an upper plate,
8 is a lower plate, 11 is a knob, 12 is a screw feeding mechanism, 13 is an auxiliary plate, 14 is an auxiliary rod for preventing rotation, 15 is a spring for suspending the guard electrode 6, 16 is for suspending the main electrode 1. The auxiliary rod 17 and 17 are springs for applying a pressure contact force to the main electrode 1 as in the conventional case.
この考案においては上板７と下板８と左右の側板18A及
び背面板18Bとによって前面が解放の電極収容箱23を構
成している。この電極収容箱23は扱者が電極等に不用意
に触れないように防護すると共にこれら電極等の測定要
部を周囲の電磁的な雑音からシールドする機能を有す
る。In this invention, the upper plate 7, the lower plate 8, the left and right side plates 18A, and the rear plate 18B form an electrode housing box 23 whose front surface is open. The electrode accommodating box 23 has a function of protecting an operator from accidentally touching the electrodes and the like, and also having a function of shielding a measurement main part of the electrodes and the like from surrounding electromagnetic noise.
左右の側板（金属板）18Aに切込18Aaを形成し、切込18A
aが対向電極２の奥行よりも更に大きく切込ませる。対
向電極２の上面を切込18Aaの範囲内に位置させる。Cut 18Aa is formed on the left and right side plates (metal plate) 18A, and cut 18A
A is made to make a cut larger than the depth of the counter electrode 2. The upper surface of the counter electrode 2 is positioned within the range of the cut 18Aa.
更に、電極収容箱23の外側に台としても作用するシール
ドケース19Aと、このシールドケース19Aの上部を覆う蓋
19Bとを設ける。測定中は蓋19Bを閉じて内部をシールド
するようにし、周囲から雑音が混入しないようにしてい
る。このようにこの考案の測定装置は電極収容箱23,シ
ールドケース19A,蓋19Bによる二重シールド構造となっ
ている。Furthermore, a shield case 19A that also functions as a stand outside the electrode housing box 23, and a lid that covers the upper portion of the shield case 19A.
And 19B. During the measurement, the lid 19B is closed to shield the inside to prevent noise from entering from the surroundings. Thus, the measuring device of the present invention has a double shield structure including the electrode housing box 23, the shield case 19A, and the lid 19B.
また、シールドケース19Aの上面を対向電極２の上面と
面一に選定する。このようにすることによって試料３の
面積が大きい場合には試料３をシールドケース19Aの上
面に乗せて対向電極２の上面にスライドさせることがで
きるから試料３の装着が容易にできるようになる。Further, the upper surface of the shield case 19A is selected to be flush with the upper surface of the counter electrode 2. By doing so, when the area of the sample 3 is large, the sample 3 can be placed on the upper surface of the shield case 19A and slid on the upper surface of the counter electrode 2, so that the sample 3 can be easily mounted.
「考案の効果」 以上説明したように、この考案によれば電極収容箱23の
左右の側板18Aに切込18Aaを設けたから、面積が大きい
試料でも切断することなく対向電極２の上面に乗せるこ
とができる。よって、そのまま体積抵抗率或いは面積抵
抗率を測定することができ便利である。[Advantage of Device] As described above, according to this device, since the notches 18Aa are provided in the left and right side plates 18A of the electrode housing box 23, even a sample having a large area can be placed on the upper surface of the counter electrode 2 without cutting. You can Therefore, the volume resistivity or area resistivity can be measured as it is, which is convenient.
この考案では電極収容箱23とシールドケース19A,その蓋
19Bとによって二重シールド構造をとっているため、周
囲雑音妨害を阻止し、高精度の測定を行うことができ
る。In this invention, the electrode housing box 23, the shield case 19A, and the lid
Since it has a double shield structure with the 19B, it can prevent ambient noise interference and perform highly accurate measurements.
なお、上述では体積抵抗率及び表面抵抗率測定装置につ
いて説明したが、この考案による構造はその他に誘電率
測定装置等に利用することができる。Although the volume resistivity and surface resistivity measuring device has been described above, the structure according to the present invention can also be used for a dielectric constant measuring device and the like.
第１図はこの考案の一実施例を説明するための斜視図、
第２図はその側面から見た断面図、第３図及び第４図は
体積抵抗率測定及び表面抵抗率の測定方法を説明するた
めの図、第５図及び第６図は従来の技術を説明するため
の図である。 1:主電極、2:対向電極、3:試料、6:ガード電極、7:上
板、8:下板、11:ツマミ、12:ネジ送り機構、18A:側板、
18B:背面板、19A:シールドケース、19B:蓋、23:電極収
容箱。FIG. 1 is a perspective view for explaining an embodiment of the present invention,
FIG. 2 is a sectional view seen from the side, FIGS. 3 and 4 are diagrams for explaining a method for measuring volume resistivity and surface resistivity, and FIGS. 5 and 6 are conventional techniques. It is a figure for explaining. 1: main electrode, 2: counter electrode, 3: sample, 6: guard electrode, 7: upper plate, 8: lower plate, 11: knob, 12: screw feed mechanism, 18A: side plate,
18B: back plate, 19A: shield case, 19B: lid, 23: electrode housing box.
Claims (1)
ルドケース（19A）と、 シールドケース（19A）を蓋する蓋（19B）と、 開口（21）より突出するようにシールドケース（19A）
の底板上に立てられた背面板（18B）と左右の側板（18
A）と上板（７）とを有し、前面が解放され、左右の側
板（18A）の前縁から背面板の近傍に亘って試料（３）
を内包するように切込（18Aa）が形成された電極収容箱
（23）と、 電極収容箱（23）の上板（７）に螺合して、上下にスラ
イド自在に取付けられたネジ送り機構（12）と、 ネジ送り機構（12）の下端に水平に取付けられた補助板
（13）と、 補助板（13）の底面からコイルバネ（17）を介して水平
に吊り下げられた円板状の主電極（１）と、 補助板（13）の底面からコイルバネ（15）を介して水平
に吊り下げられ、主電極（１）の周りに空隙を介して同
心に配されたリング状のガード電極（６）と、 主電極（１）及びガード電極（６）の下方に対向して、
シールドケース（19A）の上面と面一になるように、開
口（21）内に配され、主電極（１）及びガード電極
（６）との間に試料（３）を挟持する対向電極（２）
と、 を具備することを特徴とする、 体積、表面抵抗率測定装置。1. A box-shaped shield case (19A) having an opening (21) on its upper surface, a lid (19B) for covering the shield case (19A), and a shield case protruding from the opening (21). (19A)
The back plate (18B) and the left and right side plates (18
A) and an upper plate (7), the front surface is released, and the sample (3) extends from the front edges of the left and right side plates (18A) to the vicinity of the rear plate.
The screw feed that is screwed into the electrode housing box (23) in which the notch (18Aa) is formed so as to enclose and the upper plate (7) of the electrode housing box (23), and is slidable up and down. The mechanism (12), an auxiliary plate (13) horizontally attached to the lower end of the screw feed mechanism (12), and a disk suspended horizontally from the bottom of the auxiliary plate (13) via a coil spring (17). -Shaped main electrode (1) and a ring-shaped ring that is hung horizontally from the bottom surface of the auxiliary plate (13) via a coil spring (15) and is concentrically arranged around the main electrode (1) with a gap. Facing the guard electrode (6) and below the main electrode (1) and the guard electrode (6),
The counter electrode (2) is arranged in the opening (21) so as to be flush with the upper surface of the shield case (19A) and holds the sample (3) between the main electrode (1) and the guard electrode (6). )
An apparatus for measuring volume and surface resistivity, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988098922U JPH076534Y2 (en) | 1988-07-25 | 1988-07-25 | Volume and surface resistivity measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988098922U JPH076534Y2 (en) | 1988-07-25 | 1988-07-25 | Volume and surface resistivity measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0220174U JPH0220174U (en) | 1990-02-09 |
| JPH076534Y2 true JPH076534Y2 (en) | 1995-02-15 |
Family
ID=31325613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988098922U Expired - Lifetime JPH076534Y2 (en) | 1988-07-25 | 1988-07-25 | Volume and surface resistivity measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH076534Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210079562A (en) * | 2019-12-20 | 2021-06-30 | 한국전력공사 | Apparatus and method for measuring resistivity of insulation material |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5808165B2 (en) * | 2011-06-28 | 2015-11-10 | 日置電機株式会社 | Resistance measurement electrode device and resistance measurement system |
| JP7658168B2 (en) * | 2021-05-21 | 2025-04-08 | 富士フイルムビジネスイノベーション株式会社 | Sheet Electrical Resistance Measuring Instrument |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62114365U (en) * | 1986-01-08 | 1987-07-21 |
-
1988
- 1988-07-25 JP JP1988098922U patent/JPH076534Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210079562A (en) * | 2019-12-20 | 2021-06-30 | 한국전력공사 | Apparatus and method for measuring resistivity of insulation material |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0220174U (en) | 1990-02-09 |
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