JPH076676B2 - Air conditioning panel for equipment grid - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a unit type clean room that can be appropriately arranged in an existing building, and in particular, a gate-shaped structural grid that constitutes the unit type clean room. Among the equipment grids, the present invention relates to an air adjustment panel of the equipment grid that adjusts indoor air such as cleanliness, temperature, and humidity.

[Conventional technology]

A clean room provides a work environment with high cleanliness. For example, industrial clean rooms such as LSI (semiconductor manufacturing process) and precision machinery, bio clean rooms such as operating rooms and food processing, and other various industrial fields and research fields. It is used. As a conventional clean room, clean air treated with a high-performance filter is blown into the room from the ceiling, and the indoor air is discharged through the underfloor to maintain a uniform cleanliness throughout the work room. In addition, by forming a tunnel-like clean room in each area along the production line and blowing clean air from the ceiling surface to the clean room, a clean room that maintains a uniform high cleanliness in the tunnel-like clean room. There are tunnel systems, etc.

[Problems to be solved by the invention]

However, the above-mentioned conventional system has various problems. For example, the above-mentioned full-scale downflow type clean room has the following drawbacks.

The cleaning area and the area to be air-conditioned are large, and a large amount of expensive high-performance filters are used, so the equipment cost is very high.

Running costs such as air conditioning maintenance costs and filter replacement costs are high.

Since the entire room is air-conditioned, it is not possible to control the air-conditioning temperature for each production line (process).

Since the equipment and piping for the production line are repaired in a clean room, dust generated by it is generated on another production line (process).
Has a great influence on.

In addition, the clean tunnel system has the following drawbacks.

It is necessary to install a long duct in the existing building, which causes various problems in installation work and structure of the building.

Dust floats in the building due to air blown from the bottom of the clean tunnel.

It is necessary to separately install a large capacity filter and pump outside the building.

A unit type clean room has been proposed as an inexpensive one that can solve these problems and accurately meet the required quality.

FIG. 2 is a diagram showing an example of a structural grid constituting a unit type clean room, FIG. 3 is a diagram showing an example of an equipment grid constituting a unit type clean room, and FIG. 4 is a diagram showing an appearance of the unit type clean room. . In the figure, 21, 25 and 39 are ceiling panels, 22 and 26 are structural materials, 23 is an interior panel, 24 and 41 are exterior panels, 27 is an air conditioning panel, 28 is an electric panel panel, and 31 to 33 are structural elements. grid,
34 and 35 are equipment grids, 36 is an entrance door, 37 is a viewing window, 38 is an air shower room, and 40 is an equipment panel.

The unit type clean room has a portal-shaped structural grid as shown in FIG. 2 and an equipment grid as shown in FIG. 3 as a unit, and these are alternately arranged and joined to form a clean room. As shown in FIG. 2, the structural grid is composed of a structural material 22 composed of a gate-shaped frame, a ceiling panel 21 attached so as to cover the structural material 22, an interior panel 23, and an exterior panel 24. ,
As shown in FIG. 3, it is composed of equipment panels such as an air conditioning panel 27 and an electric panel panel 28, a structural material 26 forming a ceiling, and a ceiling panel 25 covering the structural material 26. When constructing a unit type clean room using these grids, as shown in FIG. 4, the structure grid 31 is joined to the air shower room 38, and the equipment grid 34, the structure grid 32, and the equipment grid 35 in order. , Structural grid
As in 33, the unit grids of the structural grid shown in FIG. 2 and the equipment grid shown in FIG. 3 are alternately arranged and joined.

In the unit type clean room described above, it is important to make the equipment grid compact. In particular, the air conditioning panel is generally equipped with cooling coils, humidifiers, heating coils, blowers, high-performance filters, etc., and it is necessary to be compact and efficient in order to maintain the required cleanliness. .

The present invention is based on the above consideration, and an object of the present invention is to provide an air conditioning panel for an equipment grid suitable for a unit type clean room, which can be made compact and can flexibly meet requirements for cleanliness. .

[Means for solving problems]

Therefore, the air conditioning panel of the facility grid of the present invention has a cooling coil between the lower inlet and the upper outlet,
A humidifier, heating coil, slide bumper that adjusts the air flow, blower, guide ben, and a high-performance filter placed close to the upper outlet are provided, and the cooling coil is humidified so that it is located below the heating coil. It is placed in parallel with the heater and the heating coil, the slide bumper is placed at a position that adjusts the amount of output of the cooling coil that wraps the heating coil, and the guide ben rectifies the turbulence of the air output from the blower. It is characterized in that it is arranged on the output side of the blower.

[Action]

In the air conditioning panel of the present invention, the cooling coil is positioned below the heating coil, and the cooling coil is arranged in parallel with the humidifier and the heating coil to suppress the height. And
Even if the cooling coil, the humidifier, and the heating coil are not arranged in series, the output of the cooling coil is wrapped with the heating coil by the slide bumper so that there is no problem in performance. Further, the guide ven is used to rectify the turbulent flow of the air output from the blower to reduce the noise generated by the turbulent flow, so that a blower with a large output can be used.

〔Example〕

 Hereinafter, embodiments will be described with reference to the drawings.

FIG. 1 is a view for explaining one embodiment of the air conditioning panel of the present invention. In FIG. 1, 1 is an outlet, 2 is a blower, 3 is a guide ben, 4 is a slide bumper, 5
Is a heating coil, 6 is a cooling coil, 7 is a humidifier, 8 is a suction port, 9 is a structural material, and 10 is a high-performance filter.

The cooling coil 6, the humidifier 7, and the heating coil 5 are generally arranged in series, but in the present invention, the humidifier 7 is heated in the lower corner as shown in the internal front layout view of FIG. 1 (a). Coil 5
On top of which the cooling coils 6 are arranged in parallel with them. The humidifier 7 is equipped with a deionizer, which needs to be replaced every three months or so. However, if the humidifier 7 is arranged as shown in the figure, the humidifier 7 can be replaced by the rear side regardless of other components. Can be easily replaced from. Although the humidifier 7 is usually arranged after the cooling coil 6, the air from the humidifier 7 does not flow toward the cooling coil 6 but toward the heating coil 5 even in the arrangement shown in the figure. There is no problem in performance because it flows. In addition, the cooling coil 6 and the heating coil 5
Can be tilted back and forth as shown in the inner side view of Fig. 1 (b9) to further reduce the height and evenly contact the air over the entire surface of each coil. The decrease can be prevented.

The slide bumper 4 adjusts the air volume for the time being at the factory, but at the site after forming the clean room,
Used again to fine-tune to demand, which provides a low cost, high efficiency clean room.

The blower 2 has a large diameter in order to secure a desired capacity when the thickness is limited, but the cooling coil 6, the humidifier 7,
By devising the arrangement of the heating coil 5 and suppressing the height, it is possible to use the blower 2 having a large diameter. For example, a medium static pressure sirocco fan driven by a low speed rotation motor is used. However, when the diameter of the blower 2 is increased, a vortex flow is generated, which causes a problem that noise is increased due to the vortex flow. Therefore, as shown in FIG. 1 (a), a guide ben 3 is provided, the air passage is lengthened, the output of the air blower 2 is rectified by the guide ben 3, and the width of the air passage is gradually changed while changing the direction. By spreading and preventing the generation of swirl, the generation of noise caused by swirl is suppressed. In order to reduce noise, a sound absorbing material may be used everywhere. By doing this,
We were able to reduce the noise level of the conventional 72 phones to 54 phones.

Needless to say, the outlet 1 may be a fixed type that uses a grill or punching metal, or an attached type that is movable when the influence of the wind direction is required, depending on the indoor layout, or may be used in combination. Absent. As for the suction port 8, a coarse dust filter built-in type is generally used.

It should be noted that the above-mentioned components are conventionally welded and attached, but in the present invention, they are screwed so that they can be removed and replaced. By doing so, individual parts can be arbitrarily exchanged like a cassette, maintenance can be performed, and a device flexibly responding to requirements can be provided.

〔The invention's effect〕

As is clear from the above description, according to the present invention, a compact and low-noise air conditioning panel is provided by devising the arrangement of the cooling coil, the humidifier, the heating coil, and the air flow path. Can be provided. Further, since the respective constituent parts can be exchanged at will, it is possible to flexibly meet the demand, and it is possible to provide the air conditioning panel having the contents that most closely meet the demand.
By using an equipment grid having these air conditioning panels, it is possible to effectively secure a space and to provide an inexpensive clean room without excessive equipment.

[Brief description of drawings]

FIG. 1 is a diagram for explaining one embodiment of an air conditioning panel of the present invention, FIG. 2 is a diagram showing an example of a structural grid constituting a unit type clean room, and FIG. 3 is a unit type clean room. The figure which shows the example of an equipment grid, FIG. 4 is a figure which shows the external appearance of a unit type clean room. 1 ... Blowout port, 2 ... Blower, 3 ... Guide Ben, 4 ... Slide bumper, 5 ... Heating coil, 6 ... Cooling coil, 7 ...
Humidifier, 8 ... Suction port, 9 ... Structural material, 10 ... High performance filter, 21, 25 and 39 ... Ceiling panel, 22 and 26 ... Structural material, 23 ... Interior panel, 24 and 41 ... Exterior panel, 27 ... Air Adjustment panel, 28 ... Panel for electric panel, 31 to 33 ... Structural grid,
34 and 35 ... Equipment grid, 36 ... Entrance door, 37 ... Viewing window, 38 ...
Air shower room, 40… Equipment panel.

Claims (2)

[Claims] 1. An air conditioning panel for a facility grid in a unit type clean room, which is constructed by alternately arranging and joining a gate-shaped structural grid and a facility grid, the space between a lower suction port and an upper blow port. Cooling coil, humidifier,
A heating coil, a slide bumper that adjusts the air flow, a blower, a guide bean, and a high-performance filter that is placed close to the upper outlet are provided.The cooling coil and the humidifier are heated so that they are located below the heating coil. It is placed in parallel with the coil, the slide bumper is placed in a position to adjust the amount of output of the cooling coil that wraps with the heating coil, and the guide ben is arranged to rectify the turbulent flow of air output from the blower. An air conditioning panel for the facility grid, which is located on the output side of the blower. 2. The air conditioning panel for an equipment grid according to claim 1, wherein the cooling coil and the heating coil are arranged so as to be inclined forward and backward.