JPH0769735A - Silicon nitride sintered body - Google Patents

Silicon nitride sintered body

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Publication number
JPH0769735A
JPH0769735A JP5213757A JP21375793A JPH0769735A JP H0769735 A JPH0769735 A JP H0769735A JP 5213757 A JP5213757 A JP 5213757A JP 21375793 A JP21375793 A JP 21375793A JP H0769735 A JPH0769735 A JP H0769735A
Authority
JP
Japan
Prior art keywords
amount
silicon nitride
sio
mol
sintered body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5213757A
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Japanese (ja)
Inventor
Takeo Fukutome
武郎 福留
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
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Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP5213757A priority Critical patent/JPH0769735A/en
Publication of JPH0769735A publication Critical patent/JPH0769735A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】 【構成】Si3 N4 を主成分とし、助剤成分としてY、
Sm、Alおよび過剰酸素を、Y、SmおよびAlの酸
化物換算量と、過剰酸素のSiO2 換算量との合計が5
〜25モル%となる量で含み、且つMgを酸化物換算で
0.1〜15モル%の割合で含み、望ましくはYのY2
O3 換算量、SmのSm2 O3 換算量、AlのAl2 O
3 換算量および過剰酸素のSiO2 換算量のSiO2 /
(Y2 O3+Sm2 O3 )で表されるモル比が1〜7、
Al2 O3 /(Y2 O3 +Sm2 O3 )で表されるモル
比が0.25〜4、Y2 O3 /Sm2 O3 で表されるモ
ル比が0.3〜3を満足する組成からなる。 【効果】1700℃程度の低温で高密度化が達成できる
とともに、室温から1000℃の高温まで高い強度を有
するとともに靱性を高めることができる。
(57) [Summary] [Structure] Si 3 N 4 as a main component, Y as an auxiliary component,
The sum of Sm, Al and excess oxygen, which is the equivalent amount of Y, Sm and Al oxides, and the excess oxygen, which is equivalent to SiO 2, is 5
In an amount of about 25 mol% and Mg in an amount of 0.1 to 15 mol% in terms of oxide, preferably Y 2 of Y.
O 3 equivalent, Sm Sm 2 O 3 equivalent, Al Al 2 O
3 converted amount and SiO 2 converted amount of excess oxygen SiO 2 /
The molar ratio represented by (Y 2 O 3 + Sm 2 O 3 ) is 1 to 7,
The molar ratio represented by Al 2 O 3 / (Y 2 O 3 + Sm 2 O 3 ) is 0.25 to 4, and the molar ratio represented by Y 2 O 3 / Sm 2 O 3 is 0.3 to 3. The composition is satisfactory. [Effect] High densification can be achieved at a low temperature of about 1700 ° C, and high strength and toughness can be obtained from room temperature to a high temperature of 1000 ° C.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は室温から高温までの強度
特性および靱性に優れ、特に、自動車用部品やガスタ−
ビンエンジン用部品等に使用される窒化珪素質焼結体に
関する。
BACKGROUND OF THE INVENTION The present invention has excellent strength characteristics and toughness from room temperature to high temperature, and is particularly useful for automobile parts and gas turbines.
The present invention relates to a silicon nitride-based sintered body used for a bin engine part or the like.

【0002】[0002]

【従来技術】従来から窒化珪素質焼結体は、耐熱性、耐
熱衝撃性、および、耐酸化特性に優れることからエンジ
ニアリングセラミックス、特に熱機関用として応用が進
められている。
2. Description of the Related Art Conventionally, silicon nitride sintered bodies have been applied to engineering ceramics, especially for heat engines because of their excellent heat resistance, thermal shock resistance and oxidation resistance.

【0003】この窒化珪素質焼結体は、窒化珪素自体が
難焼結性であることから、各種の焼結助剤を配合して焼
成することにより高密度化が達成されている。用いられ
る焼結助剤としては、Yや希土類元素の酸化物(RE2
O3 )や、酸化アルミニウム(Al2 O3 )、酸化マグ
ネシウム(MgO)、酸化珪素(SiO2 )などが使用
され、比較低温下で容易に焼成するための助剤として、
Y2 O3 とAl2 O3を併用して用いることも特公昭5
2−3649号、特公昭58−5190号にて提案され
ている。
Since the silicon nitride itself is difficult to sinter, this silicon nitride sintered material has been densified by blending various sintering aids and firing. Examples of the sintering aid used include Y and oxides of rare earth elements (RE 2
O 3 ), aluminum oxide (Al 2 O 3 ), magnesium oxide (MgO), silicon oxide (SiO 2 ), etc. are used as an auxiliary agent for easily firing at a comparatively low temperature.
It is also possible to use Y 2 O 3 and Al 2 O 3 together.
No. 2-3649, Japanese Patent Publication No. 58-5190.

【0004】[0004]

【発明が解決しようとする問題点】しかしながら、焼結
助剤としてY2 O3 とAl2 O3 を用いた場合、焼結性
を高めるには非常に効果的であるが、室温から1000
℃の高温までの強度が高々500MPa程度しかなく、
エンジンバルブなどに用いる場合において実用的な強度
が得られないという欠点を有していた。
However, when Y 2 O 3 and Al 2 O 3 are used as the sintering aids, it is very effective in increasing the sinterability, but it is difficult to improve the sinterability from room temperature to 1000.
The strength up to a high temperature of ℃ is only about 500 MPa,
It has a drawback that practical strength cannot be obtained when it is used for an engine valve or the like.

【0005】よって、本発明は、室温から高温まで自動
車用部品やガスタ−ビンエンジン用部品等で使用される
に充分な強度特性および靱性、特に、室温から高温まで
の抗折強度に優れた窒化珪素質焼結体を提供することを
目的とするものである。
Therefore, the present invention provides nitriding excellent in strength characteristics and toughness sufficient to be used in automobile parts, gas turbine engine parts and the like from room temperature to high temperature, and particularly in bending strength from room temperature to high temperature. It is intended to provide a silicon-based sintered body.

【0006】[0006]

【問題点を解決するための手段】本発明者は、上記問題
点に対し、鋭意研究を重ねた結果、希土類元素酸化物と
して酸化イットリウムと酸化サマリウムの2種類を用
い、なおかつ酸化マグネシウムを特定量添加することに
よって優れた強度特性を有する焼結体となる事を知見し
た。
[Means for Solving the Problems] As a result of intensive studies on the above problems, the present inventor has used two kinds of rare earth element oxides, yttrium oxide and samarium oxide, and has a specific amount of magnesium oxide. It has been found that when added, a sintered body having excellent strength characteristics is obtained.

【0007】即ち、本発明の窒化珪素質焼結体は、Si
3 N4 を主成分とし、助剤成分としてY、Sm、Alお
よび過剰酸素を、前記Y、SmおよびAlの酸化物換算
量と、前記過剰酸素のSiO2 換算量との合計が5〜2
5モル%となる量で含み、且つMgを酸化物換算で、
0.1〜15モル%の割合で含むことを特徴とするもの
で、望ましくは、YのY2 O3 換算量、SmのSm2 O
3 換算量、AlのAl2O3 換算量および過剰酸素のS
iO2 換算量のSiO2 /(Y2 O3 +Sm2 O3 )で
表されるモル比が1〜7、Al2 O3 /(Y2 O3 +S
m2 O3 )で表されるモル比が0.25〜4、Y2 O3
/Sm2 O3 で表されるモル比が0.3〜3を満足する
ものである。
That is, the silicon nitride sintered body of the present invention is made of Si
3 N 4 as a main component, Y, Sm, Al and excess oxygen as auxiliary components, and the sum of the oxide conversion amount of the Y, Sm and Al and the SiO 2 conversion amount of the excess oxygen is 5 to 2
It is contained in an amount of 5 mol%, and Mg is converted into oxide,
It is characterized in that it is contained in a proportion of 0.1 to 15 mol%, preferably Y 2 O 3 conversion amount of Y, Sm 2 O of Sm.
3 converted amount, Al 2 O 3 converted amount and excess oxygen S
The molar ratio represented by SiO 2 / (Y 2 O 3 + Sm 2 O 3 ) in terms of iO 2 is 1 to 7, and Al 2 O 3 / (Y 2 O 3 + S).
m 2 O 3 ) has a molar ratio of 0.25 to 4, Y 2 O 3
The molar ratio represented by / Sm 2 O 3 satisfies 0.3 to 3 .

【0008】以下、本発明を詳述する。本発明の焼結体
は、窒化珪素を主成分とし、助剤成分として、Y、S
m、AlおよびMgを必須成分として含み、さらに過剰
酸素を含むものである。ここで、過剰酸素とは焼結体の
全酸素のうちY2 O3 、Sm2 O3 、Al2 O3 、さら
にMgOとして化学量論的に各元素に結合している酸素
を除く残りの酸素量であり、窒化珪素原料に含まれる酸
素、あるいは、SiO2 等の添加物として混入するもの
であり、本発明では全てSiO2 として存在するものと
して考える。
The present invention will be described in detail below. The sintered body of the present invention contains silicon nitride as a main component and Y, S as an auxiliary component.
It contains m, Al and Mg as essential components and further contains excess oxygen. Here, excess oxygen means Y 2 O 3 , Sm 2 O 3 , Al 2 O 3 among all oxygen in the sintered body, and the rest except oxygen which is stoichiometrically bonded to each element as MgO. an oxygen amount, oxygen contained in the silicon nitride raw material or is intended to be mixed as an additive such as SiO 2, in the present invention thought of as all present as SiO 2.

【0009】本発明によれば、これらの助剤成分の含有
量において、Y、SmおよびAlの酸化物換算量と、前
記過剰酸素のSiO2 換算量との合計が5〜25モル
%、特に10〜20モル%、Mgを酸化物換算で、0.
1〜15モル%、特に0.5〜5モル%で含むことが重
要である。これは、Y、Sm、Alおよび過剰酸素の合
量が5モル%より小さいと焼結過程で液相が不足し、緻
密体を得る為には高温焼成が必要となり、そのため、窒
化珪素粒子の成長が起こり、強度低下を引き起こす。ま
た、前記合量が25モル%より多いと焼結体中に粒界相
が多くなり、高温強度の低下と高温での耐酸化特性の劣
化を招いてしまう。また、Mg量が0.1モル%より小
さいとMgO添加の効果が得られずに低靱性となり、1
5モル%より大きいと焼結性を阻害し緻密体が得られな
い。
According to the present invention, in the content of these auxiliary components, the sum of the oxide conversion amount of Y, Sm and Al and the SiO 2 conversion amount of the excess oxygen is 5 to 25 mol%, particularly 10 to 20 mol%, Mg in terms of oxide is 0.
It is important to contain 1 to 15 mol%, particularly 0.5 to 5 mol%. This is because if the total amount of Y, Sm, Al and excess oxygen is less than 5 mol%, the liquid phase will be insufficient in the sintering process, and high temperature firing will be required to obtain a dense body. Growth occurs and causes a decrease in strength. On the other hand, if the total amount is more than 25 mol%, the grain boundary phase will increase in the sintered body, resulting in deterioration of high temperature strength and deterioration of oxidation resistance at high temperature. If the amount of Mg is less than 0.1 mol%, the effect of adding MgO cannot be obtained and the toughness becomes low.
If it is more than 5 mol%, the sinterability is impaired and a dense body cannot be obtained.

【0010】また、本発明によれば、YのY2 O3 換算
量、SmのSm2 O3 換算量、AlのAl2 O3 換算量
および過剰酸素のSiO2 換算量のモル比が SiO2 /(Y2 O3 +Sm2 O3 ) :1〜7、
特に1.3〜2.3、 Al2 O3 /(Y2 O3 +Sm2 O3 ):0.25〜
4、特に0.3〜1.3 Y2 O3 /Sm2 O3 :0.3〜3、 特に
0.5〜2 を満足することが望ましい。
Further, according to the present invention, Y 2 O 3 in terms of Y, Sm 2 O 3 in terms of the amount of Sm, molar ratio of Al 2 O 3 in terms of weight and SiO 2 equivalent amount of excess oxygen of Al SiO 2 / (Y 2 O 3 + Sm 2 O 3): 1~7,
Especially 1.3 to 2.3, Al 2 O 3 / (Y 2 O 3 + Sm 2 O 3 ): 0.25 to
4, particularly 0.3 to 1.3 Y 2 O 3 / Sm 2 O 3 : 0.3 to 3 , particularly 0.5 to 2 is desirable.

【0011】これは、SiO2 /(Y2 O3 +Sm2 O
3 )比が1より小さいと、緻密化不足となり、7を越え
ると同様に緻密化不足となるためである。(上記範囲を
外れると焼結過程で液相が不足し緻密体を得る為には高
温焼成が必要となり、そのため、窒化珪素粒子の成長が
起こり、強度低下を引き起こすためである)。また、A
l2 O3 /(Y2 O3 +Sm2 O3 )が0.25より小
さいと焼結過程で液相が不足し、緻密体を得る為には高
温焼成が必要となり、そのため、窒化珪素粒子の成長が
起こり、強度低下を引き起こし、4より大きいと、高温
強度の低下とさらには高温での耐酸化特性が劣化してし
まう。また、Y2 O3 /Sm2 O3 比が0.3より小さ
いと緻密化不足となり、3を越えると耐酸化性靱性が劣
化すると共に緻密化不足となるためである。
This is SiO 2 / (Y 2 O 3 + Sm 2 O
3 ) When the ratio is less than 1, the densification is insufficient, and when it exceeds 7, the densification is similarly insufficient. (If it is out of the above range, the liquid phase will be insufficient in the sintering process, and high temperature firing will be required to obtain a dense body, which causes the growth of silicon nitride particles and causes a decrease in strength). Also, A
When l 2 O 3 / (Y 2 O 3 + Sm 2 O 3 ) is less than 0.25, the liquid phase is insufficient in the sintering process, and high-temperature firing is necessary to obtain a dense body. Growth occurs and causes a decrease in strength. When it is larger than 4, the high temperature strength is deteriorated and the oxidation resistance property at high temperature is deteriorated. Further, if the Y 2 O 3 / Sm 2 O 3 ratio is less than 0.3, the densification will be insufficient, and if it exceeds 3, the oxidation resistance toughness will be deteriorated and the densification will be insufficient.

【0012】また、本発明の窒化珪素質焼結体は、上記
添加成分の組み合わせに基づき、窒化珪素結晶粒子を微
細な組織により構成したことも大きな特徴である。窒化
珪素結晶は柱状結晶をなすが、本発明の焼結体によれば
柱状結晶の短径の平均が0.4〜0.8μmで、アスペ
クト比(長径/短径)が3〜10の組織からなるもので
ある。
Further, the silicon nitride sintered material of the present invention is also characterized in that the silicon nitride crystal particles are constituted by a fine structure based on the combination of the above-mentioned additional components. The silicon nitride crystals form columnar crystals, and according to the sintered body of the present invention, the columnar crystals have an average minor axis of 0.4 to 0.8 μm and an aspect ratio (major axis / minor axis) of 3 to 10 It consists of

【0013】また、本発明の窒化珪素質焼結体を製造す
る方法としては、原料粉末として窒化珪素粉末、Y2 O
3 粉末、Sm2 O3 粉末、Al2 O3 粉末、MgO粉
末、場合によりSiO2 粉末を用いる。これらの粉末を
用いて、Y2 O3 、Sm2 O3、Al2 O3 、過剰酸素
のSiO2 換算量の合量が5〜25モル%、特に10〜
20モル%、MgOを0.1〜5モル%、特に0.5〜
5モル%になるように調製、混合する。この時、過剰酸
素(SiO2 )は、窒化珪素粉末に含まれる酸素をSi
O2 換算した量と添加するSiO2 粉末との合量であ
る。さらに望ましくは、前述した理由によりSiO2 /
(Y2 O3 +Sm2 O3 )が1〜7、Al2O3 /(Y
2 O3 +Sm2 O3 )が0.25〜4、Y2 O3 /Sm
2 O3 が0.3〜3となるように秤量混合する。なお、
窒化珪素は、75〜95モル%、特に80〜90モル%
の量で配合される。
As a method for producing the silicon nitride sintered material of the present invention, the raw material powder is silicon nitride powder, Y 2 O.
3 powder, Sm 2 O 3 powder, Al 2 O 3 powder, MgO powder, and optionally SiO 2 powder are used. Using these powders, the total amount of Y 2 O 3 , Sm 2 O 3 , Al 2 O 3 and excess oxygen in terms of SiO 2 is 5 to 25 mol%, particularly 10 to 10.
20 mol%, MgO 0.1-5 mol%, especially 0.5-
Prepare and mix so as to be 5 mol%. At this time, the excess oxygen (SiO 2 ) changes the oxygen contained in the silicon nitride powder to Si.
It is the total amount of the O 2 converted amount and the added SiO 2 powder. More preferably, SiO 2 /
(Y 2 O 3 + Sm 2 O 3 ) is 1 to 7, Al 2 O 3 / (Y
2 O 3 + Sm 2 O 3 ) is 0.25 to 4, Y 2 O 3 / Sm
Weigh and mix so that 2 O 3 is 0.3 to 3 . In addition,
Silicon nitride is 75 to 95 mol%, particularly 80 to 90 mol%.
Blended in the amount of.

【0014】このようにして得られた混合粉末を公知の
成形方法、例えば、プレス成形、鋳込み成形、押出し成
形、射出成形、冷間静水圧成形などにより所望の形状に
成形する。次に、得られた成形体を公知の焼成方法、例
えば、ホットプレス方法、常圧焼成、窒素ガス圧力焼
成、さらには、これらの焼成後のHIP焼成、および、
ガラスシ−ルHIP焼成等で焼成し、緻密な焼結体を得
る。
The mixed powder thus obtained is molded into a desired shape by a known molding method, for example, press molding, cast molding, extrusion molding, injection molding, cold isostatic molding or the like. Then, the obtained molded body is subjected to a known firing method, for example, a hot pressing method, atmospheric pressure firing, nitrogen gas pressure firing, and further, HIP firing after these firing, and
It is fired by glass seal HIP firing or the like to obtain a dense sintered body.

【0015】本発明における窒化珪素質焼結体は、前記
特定の添加成分を用いることにより1500〜1750
℃の比較的低温で5〜20時間程度行うことにより相対
密度97%以上の高密度体を得ることができる。
The silicon nitride sintered material according to the present invention contains 1500 to 1750 by using the above-mentioned specific additive component.
A high density body having a relative density of 97% or more can be obtained by performing the treatment at a relatively low temperature of ℃ for 5 to 20 hours.

【0016】[0016]

【作用】窒化珪素質の緻密な焼結体を作製し、室温から
高温までの抗折強度に優れた窒化珪素質焼結体を得るた
めには、窒化珪素からなる主結晶相の形状と、窒化珪素
や添加成分からなる粒界相の組成やその量の制御が必要
である。
[Function] In order to produce a silicon nitride-based dense sintered body and obtain a silicon nitride-based sintered body excellent in bending strength from room temperature to high temperature, the shape of the main crystal phase of silicon nitride and It is necessary to control the composition and amount of the grain boundary phase composed of silicon nitride and additive components.

【0017】窒化珪素結晶粒子は柱状晶をなし、これら
が絡み合った組織構造を有するが、焼結体の破壊メカニ
ズムの1つとして、異常粒成長した窒化珪素結晶粒子が
起点となり破壊が発生することが知られている。よっ
て、高い機械的強度を得るためにはこのような異常粒成
長の発生を抑制することが必要である。
The silicon nitride crystal grains are columnar crystals and have a structure structure in which they are entangled with each other. As one of the fracture mechanisms of the sintered body, the silicon nitride crystal grains with abnormal grain growth are the starting points and fracture occurs. It has been known. Therefore, in order to obtain high mechanical strength, it is necessary to suppress the occurrence of such abnormal grain growth.

【0018】本発明によれば、添加成分として希土類元
素酸化物としてY2 O3 およびSm2 O3 と、Al2 O
3 を併用することにより、焼結過程で生成する液相の融
点が低下し、低温焼成が可能となるために、窒化珪素粒
子の粒成長を抑制することができる。
According to the present invention, Y 2 O 3 and Sm 2 O 3 are added as rare earth element oxides as additive components, and Al 2 O is added.
When 3 is used in combination, the melting point of the liquid phase generated in the sintering process is lowered and low temperature firing becomes possible, so that the grain growth of silicon nitride particles can be suppressed.

【0019】低温での焼成によれば、窒化珪素結晶の成
長を抑制することはできるものの、窒化珪素結晶の柱状
晶自体も小さくなるために、柱状晶の結晶が絡み合った
組織が形成されにくくなるために靱性が低下する傾向に
ある。本発明では、添加成分としてY2 O3 およびSm
2 O3 に加え、MgOを適量添加することにより、柱状
晶のアスペクト比(長径/短径)が大きくなり、これに
より靱性を高めることができるのである。
By firing at a low temperature, the growth of silicon nitride crystals can be suppressed, but the columnar crystals themselves of the silicon nitride crystals become small, so that a structure in which the columnar crystals are entangled with each other is difficult to form. Therefore, the toughness tends to decrease. In the present invention, Y 2 O 3 and Sm are added as additive components.
By adding an appropriate amount of MgO in addition to 2 O 3 , the aspect ratio (major axis / minor axis) of the columnar crystals is increased, and thereby toughness can be increased.

【0020】このように本発明の構成によれば、異常粒
成長の発生がなく、且つ微細でアスペクト比の大きい窒
化珪素結晶粒子からなる焼結体が得られることから、高
強度、高靱性の信頼性の高い窒化珪素質焼結体を得るこ
とができるのである。
As described above, according to the structure of the present invention, since a sintered body made of fine silicon nitride crystal grains having a large aspect ratio and free from abnormal grain growth is obtained, it has high strength and high toughness. It is possible to obtain a highly reliable silicon nitride sintered body.

【0021】[0021]

【実施例】原料粉末として窒化珪素粉末(BET比表面
積12m2 /g、α率95%、酸素量1.2重量%)と
Y2 O3 粉末、Sm2 O3 粉末、SiO2 粉末、Al2
O3 粉末、MgO粉末を用いて、表1に示す組成になる
ように調合して混合後、1t/cm2 で金形成形した。
EXAMPLES Silicon nitride powder (BET specific surface area 12 m 2 / g, α ratio 95%, oxygen amount 1.2% by weight) as raw material powder, Y 2 O 3 powder, Sm 2 O 3 powder, SiO 2 powder, Al 2
O 3 powder and MgO powder were used to prepare the composition shown in Table 1 and mixed, and then a gold-forming mold was formed at 1 t / cm 2 .

【0022】得られた成形体を炭化珪素質の匣鉢に入れ
て、カ−ボンヒ−タ−を用い、常圧窒素中1600℃で
10時間保持し、その後1700℃まで昇温しさらに1
0時間保持後、炉冷し、焼結体を得た。
The molded body thus obtained was placed in a silicon carbide mortar and held at 1600 ° C. for 10 hours in nitrogen at atmospheric pressure using a carbon heater, after which the temperature was raised to 1700 ° C. and further 1
After holding for 0 hour, the furnace was cooled to obtain a sintered body.

【0023】得られた焼結体をJISR1601に示さ
れる形状まで研磨した。アルキメデス法に基づく比重測
定、JISR1601に基づき室温および1000℃で
の4点曲げ抗折強度試験を実施すると共に、破壊靱性の
測定を行った。また、得られた焼結体の窒化珪素結晶組
織について、電子顕微鏡写真(3000倍)から観察さ
れる各結晶の平均短径および平均アスペクト比を求め
た。測定結果は、表2に示した。
The obtained sintered body was ground to a shape shown in JIS R1601. A specific gravity measurement based on the Archimedes method, a four-point bending transverse strength test at room temperature and 1000 ° C. based on JISR1601, and a fracture toughness were measured. Regarding the silicon nitride crystal structure of the obtained sintered body, the average minor axis and the average aspect ratio of each crystal observed from an electron micrograph (3000 times) were determined. The measurement results are shown in Table 2.

【0024】[0024]

【表1】 [Table 1]

【0025】[0025]

【表2】 [Table 2]

【0026】表1の結果によると、SiO2 、Al2 O
3 、MgOを添加した系において、希土類元素酸化物が
1種のみからなる試料No.9,10はいずれも粒径が大
きく、アスペクト比が本発明品より小さいため、強度お
よび靱性値は本発明品より低いものであった。また、添
加物の量が少ない試料No.1では焼結が不十分であり、
室温強度および高温強度ともに低い。逆に添加物量が過
多の試料No.17,18では、高温強度を劣化が見られ
た。さらに添加物としてMgOを全く添加しない試料N
o.12では、靱性の向上効果が不十分であり、MgO量
が過多である試料No.2では、強度、靱性が劣化した。
According to the results of Table 1, SiO 2 , Al 2 O
3 , in the system to which MgO was added, Sample Nos. 9 and 10 each consisting of only one rare earth element oxide had a large grain size and an aspect ratio smaller than that of the product of the present invention. It was lower than the product. Further, in the sample No. 1 containing a small amount of additive, the sintering was insufficient,
Both room temperature strength and high temperature strength are low. On the contrary, in samples Nos. 17 and 18 in which the amount of the additive was excessive, the high temperature strength was deteriorated. Furthermore, sample N containing no MgO as an additive
In No. 12, the effect of improving toughness was insufficient, and in Sample No. 2 in which the amount of MgO was excessive, strength and toughness deteriorated.

【0027】これらの比較例に対して、本発明の試料
は、いずれも、室温強度1100MPa以上、1000
℃強度790MPa以上、破壊靱性7.0MPa・m
1/2 以上の優れた機械的特性を有するものであった。
In contrast to these comparative examples, the samples according to the present invention were all room temperature strengths of 1100 MPa or more and 1000
℃ strength 790MPa or more, fracture toughness 7.0MPa ・ m
It had excellent mechanical properties of 1/2 or more.

【0028】[0028]

【発明の効果】以上詳述したように、本発明によれば、
1700℃程度の低温で高密度化が達成できるととも
に、室温から1000℃の高温まで高い強度を有すると
ともに靱性を高めることができ、ターボロータなどの高
温で使用される部品に適した焼結体を提供できる。
As described in detail above, according to the present invention,
A sintered body suitable for parts used at high temperatures such as turbo rotors, which can achieve high density at a low temperature of about 1700 ° C, has high strength from room temperature to a high temperature of 1000 ° C, and can increase toughness. Can be provided.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】Si3 N4 を主成分とし、助剤成分として
Y、Sm、Alおよび過剰酸素を、前記Y、Smおよび
Alの酸化物換算量と、前記過剰酸素のSiO2 換算量
との合計が5〜25モル%となる量で含み、且つMgを
酸化物換算で、0.1〜15モル%の割合で含むことを
特徴とする窒化珪素質焼結体。
1. A main component of Si 3 N 4 , Y, Sm, Al and excess oxygen as auxiliary components, and the amount of Y, Sm and Al converted into oxide and the amount of excess oxygen converted into SiO 2. Is contained in an amount of 5 to 25 mol%, and Mg is contained in a ratio of 0.1 to 15 mol% in terms of oxide.
【請求項2】YのY2 O3 換算量、SmのSm2 O3 換
算量、AlのAl2 O3 換算量および過剰酸素のSiO
2 換算量のSiO2 /(Y2 O3 +Sm2 O3)で表さ
れるモル比が1〜7、Al2 O3 /(Y2 O3 +Sm2
O3 )で表されるモル比が0.25〜4、Y2 O3 /S
m2 O3 で表されるモル比が0.3〜3を満足する請求
項1記載の窒化珪素質焼結体。
Wherein Y 2 O 3 in terms of Y, Sm 2 O 3 in terms of the amount of Sm, SiO the terms of Al 2 O 3 amount and the excess oxygen in the Al
2 in terms of SiO 2 / mole ratio represented by (Y 2 O 3 + Sm 2 O 3) is 1~7, Al 2 O 3 / ( Y 2 O 3 + Sm 2
Molar ratio represented by O 3) is 0.25~4, Y 2 O 3 / S
The silicon nitride sintered body according to claim 1, wherein the molar ratio represented by m 2 O 3 satisfies 0.3 to 3 .
JP5213757A 1993-08-30 1993-08-30 Silicon nitride sintered body Pending JPH0769735A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5213757A JPH0769735A (en) 1993-08-30 1993-08-30 Silicon nitride sintered body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5213757A JPH0769735A (en) 1993-08-30 1993-08-30 Silicon nitride sintered body

Publications (1)

Publication Number Publication Date
JPH0769735A true JPH0769735A (en) 1995-03-14

Family

ID=16644530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5213757A Pending JPH0769735A (en) 1993-08-30 1993-08-30 Silicon nitride sintered body

Country Status (1)

Country Link
JP (1) JPH0769735A (en)

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