JPH077034Y2 - Laser trimmer stage - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a stage, and more particularly to a stage for a laser trimmer used in a laser processing apparatus.

[Prior Art] Conventionally, as this type of stage, there has been a mechanical clamp stage or a stage having a vacuum suction mechanism.

The mechanical clamp stage is made for connecting with an autoloader or for fixing a substrate to be processed having a through hole, and the substrate to be processed is mounted on the mounting surface using bearings. I was trying to fix it.

In addition, the mounting table having a vacuum suction mechanism is configured such that the substrate to be processed is fixed on the mounting surface by vacuum suction.

[Problems to be solved by the invention] In the conventional mechanical clamp stage described above,
Since the substrate for work is fixed only by the clamps by the bearings, the tendency to minimize the up and down strokes of the probe and the bearing height to reduce the probe height to shorten the probing time this time However, it has a drawback that it cannot be fixed on a large substrate. In particular, recently, the size of the substrate has been increased, and the warp of the substrate is increased as the size of the substrate is increased. Therefore, this defect has been a particular problem.

In addition, even if the bearing height is increased to fix a board with a large warpage, the warpage of the board is reduced by the probe during probing, so the position of the resistor changes when not probing. There was also.

In addition, in a stage with a vacuum suction mechanism, the substrate to be processed is fixed only by vacuum suction, so the force of fixing is weak on a substrate with many through holes, and as a result, the stage is However, there are drawbacks in that the substrate may move during the movement, or the substrate may not be moved to the reference corner, so that it may not be compatible with the autoloader.

[Means for Solving the Problems] The present invention has been made to solve the above problems. As a means for solving the problems, the present invention provides a mounting surface on which a substrate to be trimmed is mounted, and a mounting surface on the mounting surface. And at least three reference corner side bearings that form reference corners for positioning the substrate to be trimmed, and a plurality of bearings that move relative to the reference corner on the object surface to press and fix the substrate to be trimmed to the reference corner. In a laser trimmer stage including a slide bearing, a large number of micro holes for vacuum suction of the substrate to be trimmed formed on the above-mentioned object surface and an air flow communicating with the micro holes below the above-mentioned object surface. A passage, a vacuum source connected to the air flow path, and a vacuum source controller for operating the vacuum source in association with the operation of the slide bearing.

[Embodiment] Next, an embodiment of the present invention will be described with reference to the drawings.

1 is a plan view showing an embodiment of the present invention, FIG. 2 is a front view thereof, FIG. 3 is a sectional view taken along the line AA of FIG. 1, and FIG. 4 is a line taken along the line BB of FIG. FIG.

This laser trimmer mounting table is provided with a mounting surface 5 on which the substrate 1 to be trimmed is mounted, and the substrate 1 to be trimmed 1 on the mounting surface 5.
At least three reference corner side bearings 2 that form reference corners for positioning, and a plurality of slides that move on the object surface 5 with respect to the reference corners to press and fix the substrate to be trimmed 1 to the reference corners. Bearing 3
In the laser trimmer stage including: a plurality of micro holes 4 for vacuum suction of the substrate to be trimmed formed on the object surface 5; and the micro holes 4 below the object surface 5.
An air flow path 41 communicating with the air flow path 41, a vacuum source 26 connected to the air flow path 41, and a vacuum source control unit 25 that operates the vacuum source 26 in association with the operation of the slide bearing 3. In the figure, 24 is a pressure switch.

Specifically, the substrate 1 to be trimmed is fixed to the mounting surface 5 by pressing the slide bearing 3 against the reference corner side bearing 2 and vacuum suction from a large number of minute holes 4.

The slide bearing 3 can be smoothly moved linearly by the guide 21, and its operation is performed by driving the air cylinder 31 by the solenoid valve 22. The solenoid valve control unit 23 controls the solenoid valve 22.

The pressure switch 24 detects that the solenoid valve 22 is turned on, and the vacuum source control unit 25 operates in response to the signal to generate a vacuum in the vacuum source 26, and the vacuum adsorption is performed through the air flow path 41 and the minute holes 4.

When the substrate to be trimmed 1 is opened, the solenoid valve control unit 23 turns off the solenoid valve 22, the air cylinder 31 operates the slide bearing 3, and the pressure switch 24 detects "OFF" of the solenoid valve 22, and the vacuum is detected. Source control unit
The vacuum generation at the vacuum source 26 is stopped by 25.

These series of operations can be performed by exchanging signals between the interface 27 with the outside and the solenoid valve control unit 23.

[Advantages of the Invention] As described above, the present invention has a mounting surface on which a substrate to be trimmed is mounted, and at least three reference corners forming a reference corner for positioning the substrate to be trimmed on the mounting surface. In a laser trimmer stage including a bearing and a plurality of slide bearings that move relative to the reference corner on the object surface and press and fix the substrate to be trimmed to the reference corner, the table is formed on the object surface. Operation of the slide bearing, a large number of micro holes for vacuum suction of the substrate to be trimmed, an air flow path below the surface of the object and communicating with the micro holes, a vacuum source connected to the air flow path A vacuum source control unit for operating the above-mentioned vacuum source is provided in association with the above, so that the reference corner-side bearing and the slide bearing are used to prevent an object to be processed that has many through holes. It can be fixed even on a bending board, and it can be fixed on a board with a large warp by adsorbing the board to be trimmed with a large number of micro holes, and the position of the resistor can be the same during probing and when not, and the bearing There is an effect that the height can be minimized and the autoloader can be directly supported.

[Brief description of drawings]

1 is a plan view showing an embodiment of the present invention, FIG. 2 is a front view thereof, FIG. 3 is a sectional view taken along the line AA of FIG. 1, and FIG. 4 is a line taken along the line BB of FIG. FIG. 1: Substrate to be trimmed 2: Reference corner side bearing 3: Slide bearing 4: Micro hole 5: Mounting surface 24: Pressure switch 25: Vacuum source controller 26: Vacuum source 41: Air flow path

Claims (1)

[Scope of utility model registration request] 1. A mounting surface on which a substrate to be trimmed is mounted, and at least three reference corner side bearings that form reference corners for positioning the substrate to be trimmed on the mounting surface.
In a laser trimmer stage including a plurality of slide bearings that move on the object surface with respect to the reference corner and press and fix the substrate to be trimmed to the reference corner, the object to be trimmed formed on the object surface. A large number of micro holes for vacuum suction of the substrate, an air channel below the above-mentioned object surface and communicating with the micro holes, a vacuum source connected to the air channel, and the operation of the slide bearing. And a vacuum source control unit for operating the above vacuum source.