JPH0771796A - Pressure adjustment damper - Google Patents

Abstract

(57) [Summary] [Purpose] The structure of the present invention does not project outside from the wall of the clean room, and thus provides a pressure adjustment damper that does not interfere even when installed at a low position in the clean room wall. [Structure] A partition plate 22 for partitioning a ventilation hole of a clean room wall 16 facing a corridor 14 is provided with a rotary blade 30 that is rotatable by an air flow generated by a pressure difference between the inside of the clean room 10 and the corridor 14, and a partition plate. Communication hole A formed in 22,
The blades 28 of the rotary blade 30 open and close B, C, and D, and the balance spring 44 urges the rotary blade 30 in the closing direction. Then, when the pressure in the clean room 10 becomes equal to or more than a predetermined pressure with respect to the pressure in the corridor 14, the communication holes are rotated in the directions of opening A, B, C, D against the biasing force of the balance spring 44. The wing 30 was made to rotate. As a result, the communication holes A, B, C, D are opened, and the air in the clean room 10 is discharged to the corridor 14. Since the pressure adjustment damper of the present invention has the above structure,
Unlike the conventional pressure adjusting damper, the flap does not project outside the clean room wall 16.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure adjusting damper,
In particular, the present invention relates to a pressure adjustment damper that keeps the pressure inside a clean room or the like at a constant positive pressure.

[0002]

2. Description of the Related Art In a clean room or the like where it is necessary to circulate clean air to maintain a clean environment, the pressure in the room is always about several mmAq so that the dirty air outside does not flow into the clean room. A pressure adjustment damper is installed in the vent hole that communicates the indoor and outdoor so that the pressure becomes positive.

A conventional pressure adjusting damper is composed of a flap that opens and closes the vent hole by a pressure difference between the inside and the outside of the room, and a weight member that presses the flap in a direction of closing the vent hole when there is no pressure difference. Further, the installation position of the pressure adjusting damper configured as described above is mainly provided in the ventilation hole of the clean room wall facing the corridor side. In such a configuration and installation position, when the flap of the pressure adjustment damper is opened, the flap projects toward the corridor side from the wall surface of the clean room wall, which is an obstacle as well as a person walking in the corridor. There is a problem called. Therefore, in the case of the conventional pressure adjustment damper, it has to be installed at a position higher than the height of a person passing through the corridor, and is usually installed at a position 2 m or more from the floor surface.

[0004]

However, most clean rooms are down-blow type clean rooms in which clean air blown from the ceiling surface flows toward the floor surface in a constant laminar flow state and is sucked from the floor surface. Therefore, if there is no choice but to install it at a high position in the clean room wall like the conventional pressure adjustment damper, the turbulence of the clean air in the laminar flow state occurs, and the cleanliness in the clean room decreases. is there.

Therefore, there has been a demand for a pressure adjustment damper having a structure which does not project from the wall surface of a clean room and whose installation position is not limited. The present invention has been made in view of such circumstances, and since it is possible to accurately adjust the indoor pressure and has a structure that does not protrude from the wall surface of the room,
An object of the present invention is to provide a pressure adjustment damper that does not interfere even when installed at a low position on a room wall.

[0006]

In order to achieve the above object, the present invention provides a partition plate having a plurality of communication holes, which is provided in a ventilation hole that communicates indoors and outdoors, and is rotatable with respect to the partition plate. A rotary blade that is opened and closed by rotating and that is rotated by an air flow generated by a pressure difference between the inside and the outside of the chamber; and rotation that closes the communication hole. Urging means for urging in the direction, when the pressure inside the chamber has a pressure difference of a predetermined pressure or more with respect to the pressure outside the room, the air flow resists the urging force of the urging means. It is characterized in that the rotary blade rotates in a direction of opening the communication hole.

[0007]

In the pressure adjusting damper of the present invention, the communication hole formed in the partition plate provided in the ventilation hole that communicates the inside and the outside of the room is constituted by the rotating blades that are rotated by the air flow generated by the pressure difference between the inside and the outside of the room. While opening and closing, the rotary vanes are
It has a structure in which the communication hole is blocked by a biasing means and is biased in the rotational direction. Then, when the pressure inside the chamber becomes greater than a predetermined pressure with respect to the pressure outside the chamber, the rotary vanes rotate in a direction to open the communication hole against the biasing force of the biasing means by the air flow. I decided to do it. As a result, when the pressure inside the room becomes greater than the pressure outside the room by a predetermined pressure or more, the communication hole is opened and the air inside the room is discharged to the outside. Further, when there is no pressure difference, the rotating blade is rotated in the direction of closing the communication hole by the urging force of the urging means to close the communication hole and prevent the dirty air outside from flowing into the room.

Further, a chamber having an intake port for taking in the air in the room from a wider range than the ventilation hole is provided on the indoor side of the ventilation hole, and the static pressure when a predetermined pressure difference is generated at the intake port. There is an opening and closing flap that opens with. As a result, the air in the room can be taken in from a wider area than the ventilation hole, so that when the air in the room is discharged to the outside,
Does not disturb the air flow in the room. Further, since the opening and closing flap is provided that opens when the pressure inside the room becomes a predetermined pressure difference or more with respect to the pressure outside the room, the dynamic pressure due to the air flow flowing from the room to the outside is applied to the rotating blades at once, and Since the blades are rotated sharply, the pressure inside the room can be adjusted accurately.

As described above, the pressure adjusting damper of the present invention is
Since it has the above-mentioned structure, the pressure in the room can be accurately adjusted, and the flap does not project outside the room unlike the conventional pressure adjustment damper.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of a pressure adjusting damper according to the present invention will be described in detail below with reference to the accompanying drawings. Clean room 1
The first embodiment will be described with reference to an example in which the pressure adjusting damper 12 of the present invention is used. FIG. 1 is a pressure adjusting damper 12 of the present invention installed in a ventilation hole of a clean room wall 16 facing a corridor 14, and FIG. 2 is an exploded perspective view thereof. As shown in FIG. 1 and FIG. 2, a partition in which four communication holes A, B, C, D are formed in the central vertical direction in a rectangular tubular frame 18 forming the frame of the pressure adjustment damper 12. A plate 22 is provided. As a result, the inside of the frame 18 is clean room 1
It is divided into the 0 side and the corridor 14 side, and the communication holes A, B,
The clean room 10 and the corridor 14 are connected by C and D. In addition, a pin 2 is provided in the center of the partition plate 22 on the corridor side.
4 protrudes, and a rotary shaft 32 of a rotary blade 30 having four blades 28, 28 ... Is rotatably fitted to the pin 24 via a bearing 26. The blades 28 of the rotary blade 30 are formed with a predetermined twist angle with respect to the surface of the partition plate 22. When a pressure difference is generated before and after the rotary blade 30, a rotary force is generated in the rotary blade 30. . This rotational force is generated because the linear force of the air pressure, which tends to cause the air to flow from the high pressure side to the low pressure side, is converted into a rotational force by the twisted blade.

Further, a suction plate 36 having a plurality of suction ports 34, 34 ... Is attached by a set screw 37 to the opening surface of the frame 18 on the clean room side, and the frame 1
A discharge plate 40 having a plurality of discharge ports 38 is attached to the opening surface of the corridor 8 by a set screw 37. This allows
The rotation of the rotary blade 30 protects the person from harm and prevents the rotary blade 30 from being damaged.

Further, as shown in FIG. 3 and FIG.
The individual communication holes A, B, C, D are formed in substantially the same shape as the blade 28, and the respective communication holes A, B, C, D correspond to the four blades 28. In addition, as illustrated in FIG. 4 by taking the communication hole D of the four communication holes A, B, C, and D as a representative, around the openings of the communication holes A, B, C, and D,
A slope piece 42 formed of an elastic material such as rubber having the same inclination as the twist angle of the blade 28 is fixed so that no gap is created when the blade 28 closes the communication holes A, B, C, D. . Then, when the rotary blade 30 rotates and the blade 28 overlaps the communication holes A, B, C, D, the communication holes A, B, C, D are closed, and when the overlap is shifted, the communication holes A, B, C are formed. , D are open.

Further, in the rotary blade 30, when the pressure in the clean room 10 becomes larger than the pressure in the corridor 14 side, FIG.
The twist angle of the blade 28 is formed so as to rotate in the counterclockwise direction (in the direction of the solid line arrow in the drawing) and to rotate in the clockwise direction (in the direction of the broken line arrow in the drawing) when it decreases. Further, as shown in FIG. 4, a balance spring 44 is wound around the tip of the pin 24 fitted with the rotary shaft 32 of the rotary blade 30,
One end of the balance spring 44 is fixed to the pin 24, and the other end is fixed to the rotating shaft 32. Further, the balance spring 44 has a direction in which the rotary blade 30 is rotated clockwise (direction of a broken line arrow in the figure), that is, the communication holes A, B, C ,.
A biasing force is applied in the direction of closing D.
Then, when the blades 28 and the ventilation holes A, B, C, D are completely overlapped with each other, the rotary blades 30 receive a force in the direction of stopping the rotation by the slope piece 42. As a result, in the clockwise rotation of the rotary blade 30, the blade 28 is connected to the communication holes A, B,
Stop with C and D closed without a gap.

Next, the operation of the pressure adjusting damper 12 configured as described above will be described below. When the pressure in the clean room 10 becomes higher than the pressure on the side of the corridor 14 and the rotational force of the rotating blade 30 generated by the pressure difference becomes larger than the urging force of the balance spring 44, the rotating blade 30 urges the balance spring 44. Counterclockwise in FIG. 3 to open the communication holes A, B, C, D. As a result, the air in the clean room 10 is sucked into the suction port 3 of the suction plate 36.
4, discharged to the corridor 14 through the communication holes A, B, C, D of the partition plate 22 and the discharge port 38 of the discharge plate 40. And
When the pressure in the clean room decreases due to the release of the air and the rotational force of the rotor blade 30 becomes smaller than the biasing force of the balance spring 44, the rotor blade 30 loses the biasing force of the balance spring 44 and rotates clockwise in FIG. The blade 28 closes the communication holes A, B, C, D. By repeating this opening / closing operation, the inside of the clean room 10 is maintained at a constant positive pressure. At this time, the holding pressure in the clean room 10 can be changed by adjusting the biasing force of the balance spring 44.

Further, from the inside of the clean room 10, the corridor 14
When the pressure on the side becomes high and the clockwise rotating force of FIG. 3 is applied to the rotary blade 30, the blade 28 is connected to the communication hole A,
Since the slope piece 42 is further pressed by the rotational force of the rotary blade 30 from the state in which B, C, D are closed, the blade 28 and the communication holes A, B, C, D are further closed. As a result, the dirty air on the side of the corridor 14 is removed from the clean room 1.
It can be prevented from flowing into 0.

As described above, the pressure adjusting damper 12 of the present invention.
By opening and closing the communication holes A, B, C, D formed in the partition plate 22 with the blades 28 of the rotating rotary blade 30, the pressure relief damper 12 can be made thin, and Flap like a pressure adjustment damper in the corridor 1
The air in the clean room 10 can be discharged to the corridor 14 without protruding to the 4 side.

As a result, the pressure adjustment damper 12 of the present invention.
Does not get in the way of people passing through the corridor 14 even if it is installed at a low position on the clean room wall 16. Further, since the installation position is not limited, it can be installed near the bottom of the clean room wall 16. Therefore, the air flow of the laminar clean air blown from the ceiling (not shown) of the clean room 10 is not disturbed, so that the cleanliness inside the clean room 10 can be improved.

Next, a second embodiment of the pressure adjusting damper of the present invention will be described with reference to FIG. As shown in FIG.
In the embodiment, four communication holes A formed in the partition plate 22,
The opening areas of B, C and D are changed respectively. That is,
Four slope pieces 4 provided in the communication holes A, B, C, D
Of the two, the three slope pieces 42 have communication holes B, C,
A cover plate 46 having a larger area was attached in the order of D so that the communication holes A, B, C, and D had different opening areas. Other configurations are the same as those in the first embodiment. As a result, when the pressure inside the clean room 10 becomes higher than the pressure on the side of the corridor 14 and the rotary blades 30 rotate counterclockwise in FIG. 5, the communication hole A is first opened, then the communication hole B and the communication hole. C and the communication hole D are opened in this order.

As a result, the second embodiment can obtain the same effect as that of the first embodiment, and the four communication holes A,
By causing B, C, and D to be temporally displaced and sequentially opened, the pressure in the clean room 10 can be accurately controlled even when the pressure fluctuation width in the clean room 10 is small. Next, a third embodiment of the pressure adjustment damper 12 of the present invention will be described with reference to FIGS. 6 and 7.

As shown in FIG. 6, in the third embodiment, two rotary blades 30 and 48 are arranged side by side on the rotary shaft 32. The twist angle of the blade 28 of the rotary blade 30 on the clean room 10 side is set to be larger than the twist angle of the blade 50 of the rotary blade 48 on the corridor 14 side. As a result, the pressure in the clean room 10 becomes higher than the pressure on the corridor 14 side, and the rotor blades 30,
When 48 rotates counterclockwise in FIG. 6, as shown in FIG. 7, first, the rotary blades 30 on the clean room 10 side rotate, and the rotary blades 48 on the corridor 14 side rotate later.

As a result, also in the case of the third embodiment, the same effect as that of the second embodiment can be obtained. Next, a fourth embodiment of the pressure adjustment damper 12 of the present invention will be described with reference to FIGS. 8 and 9. In the fourth embodiment, as shown in FIGS. 8 and 9,
The pressure adjusting damper 12 is attached to the opening of the clean room wall 16 near the floor 52, and the clean room wall 16
A hollow triangular column-shaped chamber 56 communicating with the pressure adjusting damper 12 was formed along the boundary line 54 between the floor 52 and the floor. Further, in the longitudinal direction of the hypotenuse 58 of the chamber 56, a plurality of intake ports 60, 60 for taking in the air in the clean room 10 ...
The lid plate 64 for opening and closing the intake port 60 is attached by the hinge 62 with a spring so that the lid plate 64 opens against the biasing force of the spring when a predetermined static pressure is reached.

As a result, in the case of the fourth embodiment as well, the same effect as in the first embodiment can be obtained, and the intake port 60 for taking in the air in the clean room 10 in the lateral direction centering on the pressure adjusting damper 12 is provided. Since it is expanded, when the air in the clean room 10 is discharged to the corridor 14 side, the flow of clean air blown from the ceiling of the clean room 10 is not concentrated in one place. Therefore, since the flow of clean air in the clean room 10 is not disturbed by adjusting the pressure in the clean room 10, the cleanliness in the clean room 10 can be improved.

Further, since the cover plate 64 that opens by static pressure is provided inside the intake port 60, the dynamic pressure due to the air flow flowing from the clean room 10 to the corridor 14 is applied to the rotary blades 30 at once, so the rotary blades 30 Can be rotated sharply and reliably. Further, if a heat-sensitive sealing rod (not shown) is provided on the cover plate 64 so that the intake port 60 is automatically closed in case of a fire accident in the clean room, the air flow inside and outside the clean room is shut off. As a result, the spread of fire can be prevented.

In this embodiment, the pressure adjusting damper of the present invention is applied to a clean room, but the present invention is not limited to this, and is applied to all cases where the pressure in the room needs to be adjusted. it can. Moreover, although the pressure adjusting damper is installed on the wall of the clean room on the corridor side, it is not limited to the corridor side.

[0025]

As described above, according to the pressure adjusting damper of the present invention, the communication hole formed in the partition plate is opened and closed by the rotary vanes rotatably provided in the partition plate. As a result, indoor air can be released to the outside,
Unlike the conventional pressure adjustment damper, the damper does not project to the outside of the room.

Accordingly, the pressure adjusting damper of the present invention is
The pressure in the room can be adjusted accurately, and even if it is installed at a low position on the wall of the room, it does not interfere with people passing through the corridor. Further, since the installation position is not limited, it can be installed near the bottom of the chamber wall. Therefore, when a clean environment is required, such as in a clean room, the laminar flow of clean air blown from the ceiling is not disturbed, and the cleanliness in the clean room can be improved.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of a pressure adjusting damper according to the present invention mounted on a clean room wall.

FIG. 2 is an exploded perspective view of a pressure adjustment damper of the present invention.

FIG. 3 is an explanatory view for explaining a first embodiment of the pressure adjustment damper of the present invention.

FIG. 4 is a perspective view of an essential part for explaining the relationship between a rotary blade and a vent hole.

FIG. 5 is an explanatory view for explaining a second embodiment of the pressure adjustment damper of the present invention.

FIG. 6 is an explanatory view for explaining a third embodiment of the pressure adjustment damper of the present invention.

FIG. 7 is an explanatory diagram for explaining the operation of the third embodiment.

FIG. 8 is a perspective view illustrating a fourth embodiment of the pressure adjustment damper of the present invention.

FIG. 9 is a sectional view of a fourth embodiment.

[Explanation of symbols]

 10 ... In a clean room 12 ... Pressure adjustment damper 14 ... Corridor 16 ... Clean room wall 22 ... Partition plate A, B, C, D ... Partition plate communicating hole 24 ... Pin 26 ... Bearing 28 ... Blade 30 ... Rotating blade 32 ... Rotating shaft 44 ... Beard spring 56 ... Chamber 60 ... Intake port 64 ... Lid plate

Claims (2)

[Claims] 1. A partition plate having a plurality of communication holes, which is provided in a ventilation hole that communicates the inside and the outside of the room; and a partition plate rotatably provided on the partition plate to open the communication hole by rotating the partition plate. The chamber includes a rotating blade that is closed and that is rotated by an air flow generated by a pressure difference between the inside and the outside, and an urging unit that urges the rotating blade in a rotation direction in which the communication hole is closed. When a pressure difference between the outside pressure and a pressure outside the room becomes a predetermined pressure or more, the rotary vanes rotate in a direction to open the communication hole against the urging force of the urging means by the air flow. Characteristic pressure adjustment damper. 2. A chamber having an intake port for taking in the air in the room from a wider range than the ventilation hole is provided on the indoor side of the ventilation hole, and the static pressure when the intake port has a predetermined pressure difference. The pressure adjusting damper according to claim 1, further comprising an opening / closing flap that opens with the opening.