JPH0778794A - Cassette table of dicing device - Google Patents

Abstract

PURPOSE:To provide a cassette table wherein a cassette can be easily mounted or dismounted even if a cassette mounting region is narrow in area by a method wherein the cassette table is formed in a drawer type equipped with a sliding means. CONSTITUTION:A cassette table 2 is formed in such a drawer type that it is so mounted on a table guide 5 as to slide back or forth by a sliding means 6, wherein positioning projections 2a are provided to the top of the cassette table 2, and a handy-grip recess 2b is provided to the front side of the table 2. When the cassette table 2 is drawn forward, it is stopped by a stopper 6a provided to the sliding means 6, and a cassette is placed on the table 2 as being fitted inside the cassette positioning projections 2a. When the cassette table 2 is pushed in after the cassette is placed on the cassette table 2, it is returned to a cassette placing region as stopped by a stopper 5a of magnet or the like provided to the rear end of the table guide 5. By this setup, a cassette can be easily mounted or dismounted even if a cassette mounting region is narrow in area.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cassette table for a dicing machine.

[0002]

2. Description of the Related Art In a dicing apparatus, for example, FIG.
As shown in FIG. 1, the cassette 1 containing the wafers is placed on the cassette table 2, and the wafers in the cassette 1 are taken out one by one by the wafer loading / unloading means 3 while the cassette table 2 is being raised intermittently, and the predetermined cutting is performed. After the cleaning process and the like, the processed wafers are stored in the cassette 1 again, and after the completion of all the wafers, the cassette table 2
After returning to the original position, it will be replaced with the next cassette.

[0003]

According to the above-mentioned conventional apparatus, the cassette mounting area is provided at a position lower than the corner of the dicing device 4 by one step, and the cassette 1 mounted on the cassette table 2 and the dicing device. Side wall 4a of 4
Since the space between the cassette 1 and the cartridge is narrow, it is difficult to attach and detach the cassette 1, and the cassette 1 hits the side wall 4a to damage the wafer. Further, since an acrylic opening / closing cover is usually attached to the front side of the cassette mounting area, it becomes more difficult to attach / detach the cassette 1, and in the case where a plurality of dicing devices are closely arranged side by side. Inconveniences such as contact with the adjacent dicing device occurred. To solve such a problem, for example, the gap between the cassette 1 and the side wall 4a may be widened, but this is not preferable because it causes the size of the dicing device 4 to be large, and the dicing devices arranged in parallel can be widely held. If so, a new problem arises, such as taking up a lot of space in the clean room and becoming uneconomical. The present invention has been made to solve the above-mentioned conventional problems, and an object thereof is to provide a cassette table for a dicing device, which makes it possible to attach and detach the cassette extremely easily even when the cassette mounting area is narrow. Is.

[0004]

Means for Solving the Problems As a means for technically solving the above-mentioned problems, the present invention mounts a cassette,
In a cassette table of a dicing device that is vertically movable for loading and unloading wafers into and from this cassette, this cassette table is constructed by a slide means so that it can be positioned in the cassette attachment / detachment area and the elevating / lowering area. And

[0005]

[Operation] If you pull out the cassette table to the front, you can easily attach / detach the cassette. After placing the cassette in the cassette attachment / detachment area, press the cassette table to insert it into the regular cassette placement area, that is, the cassette lifting area. Can be positioned.

[0006]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. In FIG. 1, reference numeral 1 denotes a cassette, which is held on a cassette table 2 in a cassette mounting area provided at a corner of the dicing device 4.

The cassette table 2 is formed in a pull-out type, and is attached to the table guide 5 so as to be slidable forward and backward by a slide means 6, as shown in FIGS. It has a projection 2a for use and a handhold 2b on the front side.
When this cassette table 2 is pulled out to the front, it is stopped by the stopper 6a of the slide means 6 and is stopped by the dicing device 4
To the cassette attachment / detachment region P, and in this state, the cassette 1 is fitted and placed in the cassette positioning protrusion 2a. When the cassette table 2 is pushed in after being placed, it can be stopped by the stopper 5a such as a magnet provided at the rear end of the table guide 5 to return to the cassette placing area, that is, it can be positioned in the cassette lifting area Q.

An elevating base 7 is fixed to the table guide 5 as shown in FIG. 2, and the cassette table 2 is moved up and down by the elevating means 8 as shown in FIG. 4 through the elevating base 7.

In the elevating means 8, a bracket 8b is erected on a base 8a, the ball screw 8c is vertically held by the bracket 8b, and the ball screw 8c is rotated forward and backward by a servo motor 8d installed on the base 8a. The nut 8e screwed into the ball screw 8c is moved up and down. This nut 8e
The engaging block 7 attached to the lower part of the lifting base 7
a is fixed, and both ends of the engagement block 7a are slidably fitted to a pair of guide bars 8f provided upright between the base 8a and the bracket 8b. Therefore, when the ball screw 8c of the lifting means 8 is rotated, the lifting base 7
The cassette table 2 can be freely moved up and down via the.

FIG. 5 shows another embodiment of the present invention.
The slide means 26 of the cassette table 22 is provided with guide rails 25a on both sides of the table guide 25, the cassette table 22 is slidably engaged along the guide rails 25a, and further attached to the lower portion of the cassette table 22. A substantially U-shaped lifting base 27 is screwed onto the ball screw 28c of the lifting means 28 and slidably fitted to the pair of guide bars 28f. Therefore, in this case as well, the ball screw 28 of the lifting means 28 is
By rotating c, the cassette table 22 can be freely moved up and down via the elevating base 27.

As described above, since the cassette table 2 according to the present invention is of the pull-out type, if it is pulled out to the front, it becomes a cassette attachment / detachment area P as shown in FIG. Can be attached and detached. When the cassette table 2 is pushed in after the cassette 1 is placed at a predetermined position, the cassette 1 can be stored in the cassette mounting area (cassette elevating area Q) of the dicing device 4 as shown in FIG. I can.

Cassette loading area (cassette lifting area Q)
The cassettes 1 stored in the above are lifted up and down together with the cassette table 2 by the elevating means 8 and taken out one by one by the wafer loading / unloading means 3 shown in FIG. The chuck table 10 is conveyed to the chuck table 10, and the chuck table 10 is laterally moved and aligned by the alignment means 11.
Then, dicing is performed by the rotary blade of the cutting means 12. When the chuck table 10 returns to the original position after dicing, the wafer is transferred to the cleaning means 14 by the second transfer means 13, and is transferred to the standby area R by the first transfer means 9 after cleaning, and the wafer is loaded and unloaded. It is again stored in the predetermined position of the cassette 1 by the means 3.

After processing all the wafers in the cassette 1 in this way, the cassette table 2 is pulled out and positioned in the cassette attachment / detachment area P, and after the cassette is exchanged here, the cassette table 2 is placed on the cassette again. The wafer is pushed into the area (cassette elevating area Q) to continue the processing of the wafer.

A protective cover 15 is attached to the upper portion of the dicing device 4, and an opening / closing cover 16 is provided on the front side of the cassette mounting area (cassette elevating area Q).
The opening / closing covers 17 and 18 are also attached to the front side of the chuck table 10 and the front side of the cutting means 12 by connecting the upper ends thereof with outer hinges 17a and 18a, respectively.

The opening / closing cover 18 located on the front side of the cutting means 12 can be opened when the blade is replaced or the spindle is inspected, but as shown in FIGS. 6 and 7, an inner hinge 19a is provided at the upper part on the inner surface side. The splash prevention plate 19 is hung vertically,
A strip-shaped guide plate 20 for restricting the movement of the splash prevention plate 19 is fixedly attached to the inner wall of the cutting area as shown in FIG. The upper half of the guide plate 20 is formed by bending it into a substantially V shape so that it is located inwardly toward the upper end.

A splash prevention plate 1 is provided inside the opening / closing cover 18.
9 is provided because water droplets (cutting fluid) that scatter when the wafer is diced by the cutting means 12 adheres to the inner surface of the opening / closing cover 18, and when the opening / closing cover 18 is opened, the water droplets are applied to the operation panel 21 or the floor surface. This is to prevent falling and contamination. That is, the inner surface of the hanging down splash prevention plate 19 receives water drops and prevents them from adhering to the opening / closing cover 18.

When the opening / closing cover 18 is opened, the splash prevention plate 19 is rotated inward (counterclockwise) via the inner hinge 19a as the opening / closing cover 18 is rotated, as shown in phantom in FIG. As it moves, it sticks out and splash prevention plate 1
The water droplets attached to the inner surface side of 9 will not drop on the operation panel 21 or the floor surface to be contaminated.

On the other hand, when the opening / closing cover 18 is closed, the lower end portion of the splash prevention plate 19 slides along the guide plate 20 and rotates inward (counterclockwise) by its own weight so that the opening / closing cover 18 is completely closed. When it is closed to, the guide plate 20 is separated from the guide plate 20 to return to the hanging state.

[0019]

As described above, according to the present invention,
Since the cassette table in the dicing device is configured to be pulled out by an appropriate slide means, if the cassette table is pulled out to the front and the cassette is placed, the cassette table is pushed in to position it in the regular cassette placement area, that is, the cassette lifting area. You can do it. As a result, the cassette can be easily attached and detached even if the cassette mounting area is narrow, workability is improved, and wafer damage or the like caused by the contact of the cassette can be prevented in advance. It also has an excellent effect that the space between and can be kept to a minimum and the space in the clean room can be widely used.

[Brief description of drawings]

FIG. 1 is a perspective view showing an example of a dicing device equipped with a cassette table according to the present invention.

FIG. 2 is a perspective view showing an embodiment of a cassette table.

FIG. 3 is a cross-sectional view of the sliding means of the same.

FIG. 4 is a perspective view showing a state in which the cassette table is vertically moved.

FIG. 5 is a perspective view showing another embodiment of the cassette table.

FIG. 6 is a perspective view of an opening / closing cover portion that protects the cutting means of the dicing device.

FIG. 7 is an explanatory diagram showing a state of opening and closing the same.

FIG. 8 is a perspective view of a dicing device for explaining a conventional example.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Cassette 2 ... Cassette table 2a ... Positioning protrusion 2b ... Handle part 3 ... Wafer loading / unloading means 4 ... Dicing device 4a ... Side wall 5 ... Table guide 6 ... Sliding means 6a ... Stopper 7 ... Elevating base 7a ... Engagement block
8 ... Elevating means 8a ... Base 8b ... Bracket
8c ... Ball screw 8d ... Servo motor
8e ... Nut 8f ... Guide bar 9 ... 1st conveyance means 10 ... Chuck table 11 ... Alignment means 12 ... Cutting means 13 ...
Second conveying means 14 ... Washing means 15 ... Protective covers 16, 17, 18 ... Open / close covers 17a, 18
a ... outer hinge 19 ... splash prevention plate 19a ... inner hinge 20 ... guide plate 21 ... operation panel 22 ... cassette table 25 ... table guide 25a ... guide rail 26 ... slide means 27
… Elevating base 28… Elevating means 28c… Ball screw 28f… Guide bar

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[Procedure amendment]

[Submission date] August 2, 1994

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be amended] Claims

[Correction method] Change

[Correction content]

[Claims]

[Procedure Amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0004

[Correction method] Change

[Correction content]

[0004]

As a means for technically solving the above-mentioned problems, the present invention is directed to dicing a wafer.
On the cassette table of the dicing machine
The cassette table is designed for easy loading and unloading of cassettes
The gist is that it was constructed in a pull-out style. Further, in a cassette table of a dicing device which is formed to be vertically movable for loading and unloading wafers in and from the cassette, the cassette table is constituted by a slide means so that it can be pulled out, and a cassette attachment / detachment area, The main point is to be positioned in the lifting area.

Claims (1)

[Claims] 1. A cassette table of a dicing device, which is formed so that a cassette can be placed and can be moved up and down for loading and unloading wafers into and from the cassette, the cassette table being constructed by a slide means so as to be detachable. A cassette table for a dicing device, which is positioned in an area and an ascending / descending area.