JPH0779580A - Vibration wave motor - Google Patents

Abstract

(57) [Summary] [Purpose] Satisfies the required characteristics, no chattering noise occurs,
Moreover, a high-torque, high-accuracy vibration wave motor in which the step-out phenomenon is alleviated is provided. [Configuration] A vibrating body that generates a progressive vibration wave having a wavelength of λ and has protrusions that are an integral multiple of 2 per λ / 2 formed by a slit and a progressive vibration wave of the vibrating body that comes into contact with the vibrating body A moving body that is rotated by friction drive, and a rotating shaft that is connected to the moving body so as to extract rotation of the moving body,
This vibrating body 302 has a thin plate annular portion 302 on the inner diameter portion of the contact portion.
a, and the thin plate annular portion 302a has mounting holes 302d of an integral multiple of 3 or 4, and these mounting holes 302
d are formed in a concentric shape of the thin plate annular portion 302a at equal intervals and corresponding to the angular position of the slit.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention produces a progressive vibration wave in a vibrating body by applying a voltage to an electro-mechanical energy conversion element, and friction driving between the vibrating body and a moving body in contact therewith. The present invention relates to a structure of a moving wave motor that causes relative movement, particularly a high torque and high precision vibration wave motor.

[0002]

2. Description of the Related Art FIG. 3 is a longitudinal sectional view of a conventional vibration wave motor,
4A is an electrode configuration diagram, FIG. 4B is a developed side view of the stator, FIG. 5 is a front view of the vibrating body, and FIG. 6 is a compression spring member for pressurization.

In FIGS. 3 and 4, reference numeral 1 designates a thin ring-shaped piezoelectric element having a thickness b, which is solid on a vibrating body 2 which is made of an elastic material and has four protrusions per λ / 2 formed at equal intervals. The electrode surface is fixed to form a stator.

As shown in FIG. 4 (a), the electrode structure on the other surface of the piezoelectric element 1 is polarized at λ / 2 pitch so that the expansion and contraction polarities are alternately opposite to the wavelength λ of the frequency to be excited. The driven A electrode group (A _{1 to} A ₈ ) and the B electrode group (B _{1 to} B ₈ ) and the λ / 4 for detecting the vibration state of each electrode group between the A and B electrodes. The electrodes are composed of pitch vibration detection electrodes S _A and S _B, and also three common electrodes G for grounding.

The drive B electrode group (B _{1 to} B ₈ ) is arranged at a pitch offset by 3 / λ from the drive A electrode group (A _{1 to} A ₈ ), while the vibration detection electrode S _A is arranged. and S _B are a electrode group for driving (a ₁ to a ₈₎ and the B electrode group (B ₁ ~
B ₈ ), which are arranged around the substantially antinode position of each standing wave.

In FIG. 4B, the protrusion of the vibrating body 2 is formed by forming a slit having a constant width (t) with respect to the axis, where H is the total height of the vibrating body 2 and h is the slit. Depth.

Further, as shown in FIG. 4B, the center point of the vibration detecting electrodes S _A and S _B of the piezoelectric element 1 is placed at the vibrating body 2.
Since the stator is aligned with the center point of the slit part, the center points of the driving A electrode group (A _{1 to} A ₈ ) or B electrode group (B _{1 to} B ₈ ) are all located at the center point of the slit part. It matches.

In FIG. 3, the piezoelectric element 1 is fixed to the rear surface of the vibrating body 2 concentrically with the heat-resistant epoxy adhesive and at the slit position of the vibrating body 2 by specifying the electrode configuration as described above. .

Reference numeral 3 denotes a housing made of a material having excellent thermal conductivity, and the vibrating body 2 is firmly fixed with screws 4 via a thin disk portion 2a on the inner diameter side of the contact portion of the vibrating body 2. A first ball bearing 11 is attached to the inner diameter fitting portion 3a at the center of the housing 3 with its outer ring 11a fixed.

Reference numeral 100 denotes a rotary shaft having a flange portion 100c fixed in the middle by, for example, shrink fitting, and one end portion 1 thereof.
00a is supported by the inner ring of the first ball bearing 11 so as to be slidable in the axial direction, and the other end 100b is provided with the housing cover 108.
The bearing fitting portion 10 that projects to the opposite side of the housing 3 from the center of the
The outer ring 12a is fixed to the inner ring 12b of the second ball bearing 12 and is supported slidably in the axial direction. The other end 100b of the rotary shaft 100 is also provided with an inner diameter fitting portion 100c for fixing the input shaft of the encoder and a fixing screw hole 100d.

215 is a flange portion 100 of the rotary shaft 100.
It is a disk-shaped intermediate member that is concentrically fixed to c with a screw 116, and an annular moving body 7 is concentrically fitted and provided at the outer peripheral end. The moving body 7 is formed of an annular sliding body 6 made of a composite resin and a support body 5 made of, for example, an aluminum alloy, which is concentrically fixed to the sliding body 6 with an epoxy adhesive, and the sliding body 6 vibrates. It contacts the sliding surface 2b of the body 2. The support 5 has a thin plate annular portion 5a formed on the inner diameter side of the contact portion.

The moving body 7 is supported by the intermediate member 215 via an elastic sheet member 17 made of rubber at the bottom thereof, and the moving body 7 has a flange portion 215a of the intermediate member 215 and an inner ring 12a of the second ball bearing 12. For example, as shown in FIG.
The axial load generated by the diaphragm-shaped compression spring member 114 shown in FIG.
Is given in the axial direction, the sliding surface 2b of the vibrating body 2 and the sliding body 6 of the moving body 7 are in pressure contact with each other.

Reference numeral 108 denotes the housing cover, which is screw 9
It is fixed to the housing 3 by.

A spacer member (not shown) is installed between the inner ring 12b of the second ball bearing 12 provided on the housing cover 108 to adjust the axial load generated by the compression spring member 114. It is possible.

The required characteristics of the vibration wave motor are as follows:
The table below shows the main design specifications as shown in Table 2 below.

[0016]

[Table 1]

[0017]

However, when the conventional vibration wave motor was evaluated in accordance with the required characteristics, there were the following unsatisfactory points.

When the rotating shaft of the vibration wave motor is fixed to a torque meter and the rated input speed is gradually increased to 22.5 rpm, the rated torque of 8 kgcm is obtained, but a slight chattering noise is generated. However, the time variation of the torque was unstable. Next, the torque-rotation speed characteristics were similarly measured with a large input.
So-called "step-out phenomenon" in which the rotation speed decreases near kgcm
It was observed.

Next, a laser rotary encoder having a resolution of 81000 PPR was fixed to one end of the rotary shaft, a load of 1 kgcm was applied to the other end of the rotary shaft, the rotation speed was 33.3 rpm, and the rotation accuracy was measured by a flutter meter. It was 0.04% RMS at 500 Hz and did not satisfy the required characteristics.

When continuous operation was continued for 2.000 hours while measuring the rotation accuracy at 33.3 rpm and 1 kgcm, the flutter value changed to 0.025% RMS.

After continuous operation for 2.000 hours, when the motor was driven again at the rated rotation speed of 22.5 rpm, a slight chattering noise was not generated, and a stable torque value of 8 kgcm was obtained. Moreover, when the torque-rotation speed characteristic is measured, it is 8k.
The "step-out phenomenon" in the high torque region near gcm is alleviated, and the rated 22.5 rpm. A characteristic curve passing through 8 kgcm was obtained.

In the conventional frequency motor, as shown in FIG. 3, the vibrating body 2 made of stainless steel is supported by the thin disk portion 2a on the inner diameter side with respect to the contact portion with the moving body 7. On the other hand, the support body 5 made of an aluminum alloy of the moving body 7 has a thin plate annular portion 5a formed on the inner diameter side of the contact portion with the vibrating body 2.

Therefore, when the axial load generated by the compression spring member 114 presses the moving body 7 against the vibrating body 2, the sliding body 6 tends to come into contact with the vibrating body 2. When the motor is driven while the body 2 and the moving body 7 are in contact with each other to increase the torque, a so-called “step-out phenomenon” in which the rotation speed suddenly decreases at a specific torque value is likely to occur.

When a continuous operation for a long time is carried out, wear progresses from the inner diameter side of the sliding body 6 made of composite resin, and as a result the contact area increases, so that the "step-out phenomenon" is alleviated, and higher torque can be achieved. It is also considered that a more stable contact state was obtained and the rotation accuracy was stable.

The present invention solves the above-mentioned problems by improving the contact state between the vibrating body and the moving body, alleviating the "step-out phenomenon" in the high torque region, and obtaining the rated value of the low speed and high torque. At the same time, it is intended to obtain a high-torque and high-precision vibration wave motor by improving the rotation accuracy by making the internal stress generated in the vibrating body more uniform.

[0026]

The constitution for realizing the object of the present invention is as described in each claim of the claims, and is specifically as follows.

According to the present invention, firstly, a vibrating body which produces a progressive vibration wave having a wavelength λ and has a projection portion formed by a slit and having an integral multiple of 2 per λ / 2 (2, 4, 6 ...), In a vibration wave motor including a moving body that is brought into contact with the vibrating body and is rotated by frictional driving by a progressive vibration wave of the vibrating body, and a rotating shaft that is connected to the moving body so as to take out the rotation of the moving body. , The vibrating body has a thin plate circular ring portion on the inner diameter side of the contact portion, and the thin plate circular ring portion has an integral multiple of 3 or 4 (3, 6, 9
... or 4,8,12 ...) mounting screw holes or mounting holes, and the mounting screw holes or mounting holes having an integral multiple of 3 or 4 are equally spaced on the concentric circles of the thin plate annular portion and the slits. It is provided in correspondence with the angular position of to support the vibrating body more rigidly and to make the internal stress of the vibrating body more uniform.

Secondly, a progressive oscillatory wave having a wavelength λ is generated, and an integral multiple of 2 (2
4, 6 ...), a moving body that comes into contact with the moving body and is rotated by frictional drive by the progressive vibration wave of the vibrating body, and the moving body to take out the rotation of the moving body. In a vibration wave motor having a rotating shaft connected to the vibrating body, the vibrating body has an annular portion of a thin plate on the inner diameter side of the contact portion and a thick annular portion on the inner diameter side of the annular portion, The thick plate annular portion is provided with a mounting screw or mounting hole of an integral multiple of 3 or 4 (3, 6, 9 ... Or 4,8, 12 ...), and the mounting screw or mounting hole of an integral multiple of 3 or 4 is provided. It is provided on the concentric circles of the annular portion of the thick plate at equal intervals and corresponding to the angular positions of the slits so as to more rigidly support the vibrating body and more even the internal stress of the vibrating body.

Further, holes of an integer multiple of 3 or 4 (3, 6, 9 ... Or 4, 8, 12 ...) Are concentrically arranged in the thin plate annular portion of the vibrating body at equal intervals and in the middle of adjacent holes. By disposing the slits, the vibration noise generated by the vibrating body is eliminated and the loss is reduced.

Thirdly, a vibrating body having a plurality of protrusions formed by slits on the contact surface, a moving body which comes into contact with the vibrating body and is rotated by frictional driving by a progressive vibration wave of the vibrating body, In a vibration wave motor having a rotating shaft connected to the moving body so as to extract the rotation of the moving body, an integer multiple of 3 or 4 (3
6, 9 ... or 4, 8, 12, ...) mounting holes or mounting parts having mounting screws, or mounting holes having an integral multiple of 3 or 4 in the thinned plate annular portion on the neutral surface. A mounting screw is provided, and mounting holes or mounting screws having an integral multiple of 3 or 4 are provided on the concentric circles at equal intervals corresponding to the angular positions of the slits to rigidly support the vibrating body and also inside the vibrating body. This makes the stress more uniform.

Fourthly, a vibrating body having a plurality of projections formed in slits in the contact portion and a thin plate annular portion on the inner surface of the inner diameter side of the contact portion, which produces a progressive vibration wave, and the vibration. A vibration wave motor comprising: a moving body that comes into contact with the body and is rotated by frictional driving by a progressive vibration wave of the vibrating body; and a rotating shaft connected to the moving body so as to take out the rotation of the moving body, The vibrating body is an integer multiple of 3 or 4 (3, 6, 9
... or 4,8,12 ...) mounting holes are provided at equal intervals on the concentric circles and corresponding to the angular positions of the slits of the contact portion, and similarly, mounting holes or mounting screws of an integer multiple of 3 or 4 are provided. It is sandwiched by a circular ring member and fixed to the housing.

[0032]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail based on the embodiments shown in the drawings.

FIG. 1 is a vertical sectional view showing a first embodiment of a vibration wave motor according to the present invention, and FIG. 2 is a front view of the vibrator shown in FIG.

In FIG. 1, 1 is a piezoelectric element, 5 is a support, 6 is a sliding body, 7 is a moving body, 108 is a housing cover, 9 is a screw, 1
00 is a rotary shaft, 11 is a first ball bearing, 12 is a second ball bearing, 114 is a compression spring member, 215 is an intermediate member, 116 is a screw, 17 is an elastic sheet member, and the above components are shown in FIG. Since this is equivalent to the vibration wave motor of the conventional example, detailed description thereof will be omitted.

Reference numeral 302 denotes a vibrating body which, like the conventional vibrating body 2 shown in FIG. 5, has projections formed by slits that are an integral multiple of 2 per λ / 2 (however, 4 in FIG. 2). ,
The piezoelectric element 1 is fixed by a heat-resistant epoxy adhesive concentrically on the back surface and at the slit position of the vibrating body 302 by specifying its electrode configuration.

Further, the conventional vibrating body 2 of FIG. 5 is fixed to the housing 3 by the thick circular plate portion 2c on the inner diameter side via the thin circular disc portion 2a, whereas the vibration of the present embodiment is fixed. As shown in FIG. 2, the body 302 is fixed to the housing 203 with a screw 104 by a thin plate annular portion 302a having the same plate thickness but a small radial length.

Therefore, the thin plate annular portion 302a of the vibrating body 302
The rigidity of the thin disk portion 2a of the conventional vibrator 2 shown in FIG.
Since the rigidity is higher than that of the conventional type, an axial load equivalent to that of the conventional type generated by the compression spring member 114 is applied to the support body 5 via the intermediate member 215 and the elastic sheet member 17 and slides on the sliding surface 302b of the vibrating body 302. In the state where the moving body 6 is in pressure contact, the inclination of the sliding surface 302b of the vibrating body 302 becomes smaller, so the contact state of the moving body 7 with the sliding body 6 is improved.

Further, as shown in FIG. 5, three screws 4 are used for fixing the conventional vibrating body 2, but as shown in FIG. 2, in this embodiment, it is an integral multiple of 3 (however, 9 in FIG. ) Screw 11
4 is used.

As shown in FIG. 4A, the driving wave number of the piezoelectric element 1 used in the conventional example and the present example is 9, and therefore, the vibrating bodies 2 and 302 of the conventional example and the present example are both. In addition, since there are 4 protrusions per λ / 2, 72 protrusions and slits are formed as a whole.

In the vibrating body 302 of the present embodiment, mounting holes 302d of an integral multiple (9 in the figure) are provided at equal intervals on the concentric circles of the thin plate annular portion 302a, and all the mounting holes 302d are slits of the vibrating body 302. The angle position of the center of is matched.

As described above, the housing 203 has an integral multiple (3, 3).
6 or 9) or an integral multiple of 4 (4, 8, 12 ...), and the vibrating body 302 that is firmly fixed with a large number of screws, the internal stress of the vibrating body generated during driving is made more uniform.

In the above description, the thin plate annular portion 302a of the vibrating body 302 is provided with the mounting holes 302 having an integral multiple of 3 or an integral multiple of 4.
Although d is provided, a mounting hole may be provided in the corresponding casing 203 by using this as a mounting screw hole to fix the vibrating body and the casing.

FIG. 7 shows a vibrator 40 according to a second embodiment of the present invention.
2 is a front view of FIG.

The piezoelectric element in this embodiment is different from the 9-wave drive piezoelectric element 1 in that it has a 7-wave drive electrode structure.

Therefore, since the vibrating body 402 has four protrusions per λ / 2, 56 protrusions and slits are formed as a whole.

Further, in the vibrating body 402, the thin plate annular portion 402a
Mounting holes 4 that are an integral multiple of 4 (8 in the figure) at equal intervals on the concentric circles
02d is provided, and all the mounting holes 402d are aligned with the angular position of the center of the slit of the vibrating body 402.

The thin plate annular portion 402a of the vibrating body 402
Mounting holes 4 that are an integral multiple of 4 (8 in the figure) at equal intervals on the concentric circles
02f is provided in the middle of the adjacent mounting holes 402d, and the vibrating body 402 may be fixed using this mounting hole 402f in addition to the mounting hole of 402d.

FIG. 8 is a longitudinal sectional view showing a third embodiment of the vibration wave motor according to the present invention, and FIG. 9 is a front view of the vibrating body shown in FIG.

In FIG. 8, 1 is a piezoelectric element, 4 is a screw,
5 is a support, 6 is a sliding body, 7 is a moving body, 108 is a housing cover, 9 is a screw, 100 is a rotating shaft, 11 is a first ball bearing, 12 is a second ball bearing, and 114 is a compression spring. A member 215 is an intermediate member, a screw 116, and an elastic sheet member 17 are the same as those of the vibration wave motor of the conventional example shown in FIG.

Reference numeral 102 designates the vibrating body according to the present embodiment, which is formed by a slit λ, like the vibrating body 2 of FIG.
/ 2 has an integer multiple of 2 (however, 4 in FIG. 9), and the piezoelectric element 1 is made of a heat-resistant epoxy adhesive so as to be concentric with the back surface and to the slit position of the vibrating body 102.
The electrode configuration is specified and fixed.

Further, while the conventional vibrating body 2 of FIG. 5 is fixed to the housing 3 by the thick circular plate portion 2c on the inner diameter side through the thin circular disc portion 2a, the book shown in FIG. Example vibrator 102
Then, the casing 1 is formed by the thick plate annular portion 102c on the inner diameter side through the thin plate annular portion 102a having the same plate thickness but a small radial length.
It is fixed to 03 with screws 4.

Therefore, the thin plate annular portion 102a of the vibrating body 102
The rigidity of the thin disk portion 2a of the conventional vibrator 2 shown in FIG.
Since the rigidity of the vibrating body 102 is higher than that of the vibrating body 102, an axial load equivalent to that of the conventional type generated by the compression spring member 114 is applied to the support body 5 via the intermediate member 215 and the elastic sheet member 17.
In the state where the sliding surface 102b and the sliding body 6 are in pressure contact with each other, the inclination of the sliding surface 102b of the vibrating body 102 becomes smaller, so that the contact state of the moving body 7 with the sliding body 6 is improved.

Further, the conventional vibrating body 2 shown in FIG.
Although the individual screws 4 are used, as shown in FIG. 2, in the present embodiment, the screws 4 of an integral multiple of 3 (however, 9 in the figure) are used.

As shown in FIG. 4A, the number of driving waves of the piezoelectric element 1 used in the conventional example and the present example is 9 and therefore, the vibrating bodies 2 and 102 of the conventional example and the present example are both. In addition, since there are 4 protrusions per λ / 2, 72 protrusions and slits are formed as a whole.

In the vibrating body 102 of this embodiment, the thick plate annular portion 1
The mounting screw holes 102d of an integral multiple of 3 (9 in the figure) are provided at equal intervals on the concentric circles of 02c, and all the mounting screw holes 102
d was made to match the angular position of the center of the slit of the vibrating body 102.

As described above, the housing 103 has an integral multiple (3, 3
6 or 9) or an integral multiple of 4 (4, 8, 12 ...), and the vibrating body 102 that is firmly fixed with a large number of screws has more uniform internal stress of the vibrating body generated during driving.

Further, in the vibrating body 102 of this embodiment, circular holes 102e of an integer multiple of 3 or an integral multiple of 4 (36 in the figure) are formed in the thin plate annular portion 102a at equal intervals on concentric circles, and adjacent circles are formed. Mounting screw hole 1 at the angular position of the center of hole 102e
02d was all matched.

Therefore, it is possible to prevent the vibrating sound of the vibrating body 102 from being generated and reduce the loss due to the thin plate annular portion 102a.

In the above description, the mounting screw hole 1 having an integral multiple of 3 or an integral multiple of 4 is formed in the thick plate annular portion 102c of the vibrating body 102.
Although 02d is provided, a mounting screw hole may be provided in the corresponding casing 103 by using this as a mounting hole to fix the vibrating body and the casing.

FIG. 10 shows a vibrator 2 according to a fourth embodiment of the present invention.
It is a front view of 02.

The piezoelectric element in this embodiment has a 7-wave driving electrode structure, unlike the 9-wave driving piezoelectric element 1.

Therefore, the vibrating body 202 has four protrusions per λ / 2, so that 56 protrusions and slits are formed as a whole.

In the vibrating body 202, mounting screw holes 2 of an integral multiple of 4 (8 in the figure) are equidistantly arranged on the concentric circles of the thick plate annular portion 202c.
02d is provided, and all the mounting screw holes 202 are provided.
d is made to match the angular position of the center of the slit of the vibrating body 202.

Further, elongated holes 202e of an integral multiple of 4 (however, 8 in the figure) are formed in the thin plate annular portion 202a of the vibrating body 202 at concentric circles at equal intervals, and are attached at angular positions at the centers of the adjacent elongated holes 202e. The screw holes 202d are all matched.

FIG. 11 shows a fifth embodiment of the vibration wave motor according to the present invention.
12 is a front sectional view of the vibrating body shown in FIG. 11.

In FIG. 11, 1 is a piezoelectric element, 5 is a support, 6 is a sliding body, 7 is a moving body, 108 is a housing cover, and 9 is a housing cover.
Is a screw, 100 is a rotating shaft, 11 is a first ball bearing, 1
2 is a second ball bearing, 114 is a compression spring member, 215
Is an intermediate member, 116 is a screw, and 17 is an elastic sheet member. The above components are equivalent to those of the conventional vibration wave motor of FIG.

Reference numeral 702 denotes a vibrating body according to this embodiment, which has a λ formed by a slit as in the vibrating body 2 of the conventional example shown in FIG.
/ 2 has a projection of an integer multiple of 2 (however, 4 in FIG. 12), and the piezoelectric element 1 is made of a heat-resistant epoxy adhesive so as to be concentric with the rear surface and to the slit position of the vibrating body 702. The electrode configuration is specified and fixed.

In contrast to the conventional vibrating body 2 shown in FIG. 5, which is fixed to the housing 3 by the thick circular plate portion 2c on the inner diameter side through the thin circular disc portion 2a on the neutral surface. The vibrator 702 of this embodiment
Is a slightly thicker plate, but a thin plate annular part having a small radial length is partially removed to provide a support part 702d and a mounting hole 702c of an integral multiple of 4 (8 in FIG. 12), Screw 1
It is fixed to the housing 403 at 04.

As shown in FIG. 4A, the number of driving waves of the piezoelectric element 1 used in the conventional example and the example is 9,
Therefore, since the vibrating body 702 of this embodiment has four protrusions per λ / 2, 72 protrusions are formed by slits as a whole.

As described above, the supporting portion 702d of the vibrating body 702.
Therefore, the axial load equivalent to that of the conventional type generated by the compression spring member 114 is applied to the support body 5 via the intermediate member 215 and the elastic sheet member 17, and the vibrating body 702 slides. Since the inclination of the sliding surface 702a of the vibrating body 702 becomes smaller when the surface 702b and the sliding body 6 are in pressure contact, the contact state with the sliding surface 6 of the moving body 7 is improved.

In the vibrating body 702 of the present embodiment, an integral multiple of 4 (8 in the figure) is arranged on the inner surface of the contact surface on the inner surface on the inner diameter side in concentric circles at equal intervals.
The support portion 702d having the mounting holes 702c of 1 is provided, and all the mounting holes 702c are aligned with the angular position of the center of the slit of the vibrating body 702.

As described above, the vibrating body 702 has the support portion 7 that is an integral multiple of 3 or 4 (3, 6, 9 ... Or 4, 8, 12 ...).
Since the vibrating body 702 is firmly fixed to the housing 403 using the mounting hole 702c of 02d, the internal stress of the vibrating body generated during driving is more uniform.

Further, since the thin plate annular portion on the neutral surface on the inner diameter side of the contact surface of the vibrating body 702 is partially removed to form the support portion 702d, the loss is reduced and the motor efficiency is expected to be improved. I can.

In the above description, the support portion 70 of the vibrating body 702 is used.
2d is an integer multiple of 3 or 4 (3, 6, 9 ... or 4,
, 12 ...) are provided, the vibrating body may be fixed to the housing by providing mounting holes in the corresponding housing 403 by using these as mounting screws.

FIG. 13 is a front view of a vibrating body according to a sixth embodiment of the vibration wave motor of the present invention.

The vibrating body 802 has a thin plate annular portion 802b formed on the neutral surface on the inner diameter side of the contact surface, which is slightly thicker but has a small radial length. A mounting screw 8 that is an integral multiple of 3 (6 in the figure) according to the angular position of the center of the slit that forms the protrusions of the vibrating body at equal intervals on the concentric circles.
02c, which is fixed in a corresponding mounting hole of a casing (not shown).

Further, elongated holes 802e of an integral multiple of 3 (6 in the figure) are formed in the thin plate annular portion 802b of the vibrating body 802 at equal intervals on concentric circles, and they are attached at angular positions at the centers of the adjacent elongated holes 802e. The screws 802c were all matched.

FIG. 14 shows a seventh embodiment of the vibration wave motor according to the present invention.
FIG. 15 is a front view of the vibrating body shown in FIG. 14, and FIG. 16 is a fixing member.

In the figure, 1 is a piezoelectric element, 5 is a support,
6 is a sliding body, 7 is a moving body, 108 is a housing cover, 9 is a screw, 100 is a rotating shaft, 11 is a first ball bearing, 12 is a second ball bearing, 114 is a compression spring member, and 215 is an intermediate. Members, 116 are screws, and 17 is an elastic sheet member. The above components are equivalent to the vibration wave motor of the conventional example of FIG. 3, and detailed description thereof will be omitted.

Reference numeral 502 denotes a vibrating body according to the present embodiment, which has a projection portion of an integral multiple of 2 (4 in FIG. 15) per λ / 2 formed by the slit, as in the vibrating body 2 of the conventional example shown in FIG. Therefore, the piezoelectric element 1 is fixed on the back surface concentrically with the heat-resistant epoxy adhesive and at the slit position of the vibrating body 502 by specifying its electrode configuration.

In contrast to the conventional vibrating body 2 of FIG. 5, which is fixed to the housing 3 by the thick circular plate portion 2c on the inner diameter side through the thin circular plate portion 2a on the neutral surface, Vibrating body 502 of this embodiment
Has the same plate thickness, but is sandwiched by the thin plate annular portion 502b having a small radial length in the housing 303 by the annular fixing member 18 shown in FIG. 16, and the screw 204 is screwed into the screw 18a to be fixed. ing.

Therefore, the thin plate annular portion 502a of the vibrating body 502 is
Is higher than the rigidity of the thin disk portion 2a of the vibrating body 2, an axial load equivalent to the conventional type generated by the compression spring member 114 is applied to the support body 5 via the intermediate member 215 and the elastic sheet member 17. When the sliding surface 502b of the vibrating body 502 and the sliding body 6 are in pressure contact with each other, the sliding surface 5 of the vibrating body 502 is
Since the inclination of 02a becomes smaller, the contact state of the moving body 7 with the sliding body 6 is improved. Vibration body 50 shown in FIG.
2 has a driving wave number of 9 similarly to the sliding body 2 of the conventional example, so that the total number of protrusions is 72.

Further, in the thin plate annular portion 502b of the vibrating body 502, four (integral multiple of 4) mounting holes 502c are symmetrically concentric with the yy 'axis and all the mounting holes 502c are formed. The vibrator 502 is provided so as to match the angular position of the center of the slit.

As described above, an integral multiple of 3 (3, 3
6 or 9) or an integer multiple of 4 (4, 8, 12, ...) Is provided, and the vibrator 502 is also an integral multiple of 3 (3, 6, 6).
(9 ...) Or an integral multiple of 4 (4,8,12 ...), and is firmly fixed by sandwiching it with a fixing member having a fixing screw 18a. Be homogenized.

FIG. 17 is a front view of a vibrating body according to the eighth embodiment of the present invention, and FIG. 18 is a fixing member corresponding to the vibrating body of FIG.

In FIG. 17, the thin plate annular portion 602 of the vibrating body 602 is shown.
There are 6 (integer multiples of 3) mounting holes 602c in yy.
All mounting holes 602 are symmetrical about the axis and are equidistant on a concentric circle.
c is provided so as to match the angular position of the center of the slit of the vibrating body 602 similarly to the vibrating body 502 of FIG.

In the vibrating body 602, the fixing member 118 having the six mounting holes 118a (integral multiple of 3) is also sandwiched between the casings (not shown) having six screw holes (integral multiple of 3). It is firmly fixed with screws not shown.

The vibration wave motor in each of the above examples was evaluated according to the required characteristics, and the following results were obtained.

When the input was increased at the rated rotation speed of 22.5 rpm, the rated torque of 8 kgcm was obtained, the chatter noise was not generated, and the time variation of the torque was stable. Further, the torque-rotation speed characteristics were measured with a large input, and in all the characteristic curves, the "step-out phenomenon" was alleviated when the torque was 8 kgcm or more.

In the measurement of the rotation accuracy using the laser rotary encoder, 0.02% R was obtained under the same conditions as the conventional type.
Meets MS and required characteristics.

[0091]

As described above, according to the vibration wave motor of the present invention, a high torque and high precision vibration wave motor satisfying the required characteristics, producing no chattering noise, and mitigating the step-out phenomenon is obtained.

[Brief description of drawings]

FIG. 1 is a sectional view showing a first embodiment of a vibration wave motor according to the present invention.

FIG. 2 is a front view of the vibrator shown in FIG.

FIG. 3 is a sectional view of a conventional vibration wave motor.

4A and 4B show a basic configuration of a stator of FIG. 3 and each embodiment of the present invention, FIG. 4A is a diagram showing an electrode configuration, and FIG. 4B is a developed front view of the stator.

5 is a front view of the vibrator shown in FIG.

6 is a front view of the compression spring member of FIG.

FIG. 7 is a front view of a vibrating body according to a second embodiment.

FIG. 8 is a sectional view of a vibration wave motor showing a third embodiment.

9 is a front view of the vibrator shown in FIG.

FIG. 10 is a front view of a vibrating body showing a fourth embodiment.

FIG. 11 is a cross-sectional view of a vibration wave motor showing a fifth embodiment.

12 is a front view of the vibrating body of FIG.

FIG. 13 is a front view of a vibrating body showing a sixth embodiment.

FIG. 14 is a sectional view of a vibration wave motor showing a seventh embodiment.

15 is a front view of the vibrating body of FIG.

16 is a front view of the support of FIG.

FIG. 17 is a front view of a vibrating body showing an eighth embodiment.

FIG. 18 is a front view showing a support body of an eighth embodiment.

[Explanation of symbols]

1 ... Piezoelectric element 2, 202, 102, 302, 402, 702, 802
Vibrating body 102a, 302a, 402a ... Thin plate annular portion 102c, 202c ... Thick plate annular portion 102b, 3
02b ... Sliding surface 302d, 402d, 402f, 702c ... Mounting hole 203 ... Housing 4 ... Screw 5 ... Support 6 ... Sliding body 7 ... Moving body 108 ... Housing cover 9 ... Screw 100 ... Rotating shaft 11 ... First Ball bearing 12 ... Second ball bearing 14, 114 ... Compression spring member 215 ... Intermediate member 116 ... Screw 17 ... Elastic sheet member

Claims (12)

[Claims] 1. An integer multiple of 2 per λ / 2 formed by a slit (2, 4, 6) which produces a progressive vibration wave with a wavelength.
A vibration body having a protruding portion, and being rotated by frictional drive by a progressive vibration wave of the vibration body in contact with the vibration body, and the movement body, which is connected to the movement body so as to take out the rotation of the movement body. In the vibration wave motor including a rotating shaft, the vibrating body has a thin plate annular portion on the inner diameter side of the contact portion, and the thin plate annular portion has an integral multiple of 3 or 4 (3, 6, 8, ..., Or 4, 8, 12 ...) Mounting holes or mounting screw holes are provided. 2. A mounting hole or a mounting screw hole that is an integral multiple of 3 or 4 is provided on the concentric circles of the thin plate annular portion at equal intervals and corresponding to the angular position of the slit. The vibration wave motor according to claim 1. 3. A progressive vibration wave having a wavelength λ is generated, and an integral multiple of 2 per λ / 2 formed by the slit (2, 4, 6).
...), a moving body that is brought into contact with the vibrating body and is rotated by frictional drive by the progressive vibration wave of the vibrating body, and is connected to the moving body so as to take out the rotation of the moving body. In the vibration wave motor having a rotating shaft, the vibrating body has a thin annular portion on the inner diameter side of the contact portion and a thick annular portion on the inner diameter side of the annular portion. 3 in the torus
Or an integer multiple of 4 (3,6,9 ... or 4,8,12
A vibration wave motor characterized in that it has a mounting screw hole or a mounting hole. 4. The integer multiple of 3 or 4 (3, 6, 9 ...
Or 4, 8, 12 ...) mounting screw holes or mounting holes are provided on the concentric circles of the thick plate annular portion at equal intervals and corresponding to the angular positions of the slits. 3 vibration wave motor. 5. The vibration according to claim 3, wherein holes of an integer multiple of 3 or 4 (3, 6, 9 ... Or 4, 8, 12 ...) Are formed in the thin plate annular portion of the vibrating body. Wave motor. 6. An integer multiple (3, 6, 9 ... Of 3 or 4 ...
Alternatively, 4, 8, 12, ...) Holes are arranged on the concentric circles of the thin plate annular portion at equal intervals, and the slits are correspondingly arranged in the middle of adjacent holes. Vibration wave motor. 7. An integer multiple (3, 6, 9 ... Of 3 or 4 ...
6. The vibration wave motor according to claim 5, wherein the holes 4, 8, 12, ...) Are round holes or elongated holes. 8. A vibrating body having a plurality of protrusions formed by slits in a contact portion, a moving body which is brought into contact with the vibrating body and is frictionally driven by a progressive vibration wave of the vibrating body, and the moving body. A vibration wave motor having a rotating shaft connected to a moving body so as to take out rotation of the body, wherein an integer multiple of 3 or 4 (3, 6, 9 ... or 4,8,12 ...) and a supporting portion having mounting holes or mounting screws. 9. The vibration wave according to claim 8, wherein mounting holes or mounting screws of integral multiples of 3 or 4 are provided on concentric circles at equal intervals and corresponding to angular positions of the slits. motor. 10. A vibrating body having a plurality of protrusions formed by slits in a contact portion, and a moving body which is brought into contact with the vibrating body and is rotated by frictional driving by a progressive vibration wave of the vibrating body.
In a vibration wave motor having a rotating shaft connected to the moving body so as to take out the rotation of the moving body, in a thin plate ring portion on a neutral surface on an inner diameter side of a contact surface of the vibrating body,
Or an integer multiple of 4 (3,6,9 ... or 4,8,12
The vibration wave motor is characterized in that it has a lightening hole and a mounting hole or a mounting screw. 11. A vibrating body having a plurality of protrusions formed by slits in the contact portion and a thin plate annular portion on the inner surface of the contact portion on the inner diameter side, and generating a progressive vibration wave, and the vibrating body. A vibration wave motor comprising: a moving body that is brought into contact with and is rotated by frictional driving by a progressive vibration wave of the vibrating body; and a rotating shaft that is connected to the moving body so as to take out the rotation of the moving body. The body is fixed to the housing by being sandwiched by an annular member having mounting holes or mounting screws in integral multiples of 3 or 4 (3, 6, 9 ... Or 4, 8, 12 ...). Vibration wave motor. 12. The vibrating body comprises 3 or 4 in a thin plate annular portion.
12. The vibration wave motor according to claim 11, wherein the mounting holes are integral multiples of the above, equidistantly on concentric circles, and corresponding to angular positions of the slits of the contact portion.