JPH0788262B2 - 窒化ケイ素と金属との接合方法 - Google Patents

窒化ケイ素と金属との接合方法

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Publication number
JPH0788262B2
JPH0788262B2 JP60066445A JP6644585A JPH0788262B2 JP H0788262 B2 JPH0788262 B2 JP H0788262B2 JP 60066445 A JP60066445 A JP 60066445A JP 6644585 A JP6644585 A JP 6644585A JP H0788262 B2 JPH0788262 B2 JP H0788262B2
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JP
Japan
Prior art keywords
alloy
metal
joining
silicon nitride
joint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60066445A
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English (en)
Other versions
JPS61227971A (ja
Inventor
俊宏 山田
顕臣 河野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
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Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60066445A priority Critical patent/JPH0788262B2/ja
Priority to EP86103915A priority patent/EP0197397B1/en
Priority to DE8686103915T priority patent/DE3679847D1/de
Priority to CN86102112A priority patent/CN1009823B/zh
Publication of JPS61227971A publication Critical patent/JPS61227971A/ja
Priority to US07/140,224 priority patent/US4871107A/en
Publication of JPH0788262B2 publication Critical patent/JPH0788262B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Ceramic Products (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は窒化ケイ素（Si3N4）と金属との接合方法に係
り、特にSi3N4と金属との接合が必要な機械構造部品，
電子部品などに使用して好適な接合方法に関する。
〔従来の技術〕
例えば特開昭58−135180号公報に開示されているよう
に、シリコン系セラミックスと鉄系金属とをAlまたはAl
合金のインサート材を用いて拡散接合する方法が提案さ
れている。
〔発明が解決しようとする課題〕
しかし、上記従来技術においてはインサート材として単
一材質の純Al箔若しくはAl合金を用い、純Alの融点より
若干低い650℃の温度で拡散接合している。このため、
インサート材として純Al箔を用いた場合、箔の表面に強
固に形成されている酸化皮膜（Al2O3）は接合面に残り
接合強度を低下させるという問題があった。一方、融点
が接合温度より低いAl合金を用いた場合には、接合温度
条件により溶融状態となったAl合金が加圧によって接合
部からほとんど押出され接合部にはわずかしか残らず、
接合部のAl合金が、セラミックスと金属との接合熱応力
を緩和する効果を低減するという問題があった。
本発明の目的は、Si3N4と金属との熱膨張差に起因して
発生する熱応力を極力抑え、かつSi3N4と金属とを冶金
的に強固に接合させて、信頼性の高い接合部が得られる
Si3N4と金属との接合方法を提供することにある。
〔課題を解決するための手段〕
上記目的は、Si3N4と金属との接合方法において、Si3N4
と金属との接合面間に第１のAl合金の両側に該第１のAl
合金より低融点の第２のAl合金を配置した三層構造の積
層板を挿入し、前記第２のAl合金の融点以上で且つ前記
第１のAl合金の融点以下の温度に加熱すると共に加圧す
ることにより達成される。
〔作用〕
Si3N4と金属との接合面間に配置するAlインサート材と
して材質の異なる積層板を用い、第１のAl合金の融点よ
り低く、第２のAl合金の融点より高い温度に加熱する
と、第２のAl合金の多くは溶融状態となるため加圧によ
り接合部から押出される。この時インサート材の表面に
形成されている酸化皮膜が接合部から押出され被接合材
との接合が良好に行われる。
更に、第１のAl合金は溶融しないため、接合面間にAl合
金が残存するため、接合温度から常温まで冷却した状態
において、Si3N4と金属との熱膨張差により生ずる熱応
力をAl合金が降伏することにより緩和させることができ
る。
〔発明の実施例〕
以下、本発明の実施例を図面に従って説明する。
図に示すように、Si3N4製の軸１とCr−Mo鋼製の軸２と
の接合面間に、Al合金を心板（厚さ0.5mm）4,Al−Si−M
g合金を両表皮材（厚さ0.05mm）５とする三層のグラッ
ド板（厚さ0.6mm）３を挿入し、真空雰囲気下（10-4Tor
r）で、接合温度600℃，接合圧力1.0kg f/mm2で15分間
加熱保持して接合した。この場合、Al−Si−Mg合金の融
点は約585℃であるので、接合温度600℃では前記クラッ
ド板３の両表皮材５のみ溶融状態となり、AlおよびSiは
Si3N4およびFeと反応し、Si3N4の軸１とCr−Mo鋼の軸２
とはクラッド板３を介して冶金的に完全に接合する。
尚、MgはSiCおよびFeに対しての溶融Al−Si合金の濡れ
性向上に寄与する。
本実施例で接合した軸1,2の接合強度（曲げ強度）は、
約8kg f/mm2であった。しかし、破断位置は軸２とクラ
ッド板３との接合界面であった。即ちAlとFeとの金属間
化合物が脆弱であるため、その箇所で破断した。従っ
て、さらに高強度の接合部を得るには、軸２とクラッド
板３との間に熱膨張の低い材料を挿入すると良い。
尚、前述の接合において、接合温度を620℃以上にする
と、FeとAlとの反応により形成される金属間化合物（Fe
3Al,Fe2Al5）の厚さが厚くなり、接合強度の低下をきた
すので、それ以下の接合温度に抑える必要がある。
〔発明の効果〕
本発明によれば、信頼性の高い接合部が得られ、且つ接
合部にAlが確実に残存するため、Si3N4に発生する熱応
力が極力抑えられると共に、熱応力によるSi3N4の割れ
発生が防止できる。
【図面の簡単な説明】
図面は本発明による接合方法によってSi3N4製の軸とCr
−Mo鋼製の軸とを接合する場合の説明図である。 １……Si3N4製の軸、２……Cr−Mo鋼製の軸、３……ク
ラッド板、４……Al合金の心板、５……Al−Si−Mg合金
の表皮材。

Claims (2)

    【特許請求の範囲】
  1. 【請求項１】窒化ケイ素と金属との接合方法において、
    窒化ケイ素と金属との接合面間に第１のAl合金の両側に
    該第１のAl合金より低融点の第２のAl合金を配置した三
    層構造の積層板を挿入し、前記第２のAl合金の融点以上
    で且つ前記第１のAl合金の融点以下の温度に加熱すると
    共に加圧することを特徴とする窒化ケイ素と金属との接
    合方法。
  2. 【請求項２】特許請求の範囲第１項において、前記積層
    板は第２のAl合金がAl−Si合金からなるクラッド板であ
    ることを特徴とする窒化ケイ素と金属との接合方法。
JP60066445A 1985-04-01 1985-04-01 窒化ケイ素と金属との接合方法 Expired - Lifetime JPH0788262B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP60066445A JPH0788262B2 (ja) 1985-04-01 1985-04-01 窒化ケイ素と金属との接合方法
EP86103915A EP0197397B1 (en) 1985-04-01 1986-03-21 A method for bonding ceramics to a metal
DE8686103915T DE3679847D1 (de) 1985-04-01 1986-03-21 Verfahren zum verbinden von keramischen bauteilen mit einem metall.
CN86102112A CN1009823B (zh) 1985-04-01 1986-03-31 陶瓷与陶瓷或陶瓷与金属的粘结方法
US07/140,224 US4871107A (en) 1985-04-01 1987-12-31 Method for bonding ceramics to each other or a ceramic to a metal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60066445A JPH0788262B2 (ja) 1985-04-01 1985-04-01 窒化ケイ素と金属との接合方法

Publications (2)

Publication Number Publication Date
JPS61227971A JPS61227971A (ja) 1986-10-11
JPH0788262B2 true JPH0788262B2 (ja) 1995-09-27

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JPH0729858B2 (ja) * 1985-05-15 1995-04-05 株式会社日立製作所 セラミツクスと金属との接合方法
GB8719498D0 (en) * 1987-08-18 1987-11-18 Ferranti Plc Seals
JPH02153868A (ja) * 1988-12-06 1990-06-13 Mitsubishi Alum Co Ltd セラミック板と金属板のろう付け方法
US5108025A (en) * 1991-05-20 1992-04-28 Gte Laboratories Incorporated Ceramic-metal composite article and joining method
JP3057932B2 (ja) * 1992-10-01 2000-07-04 三菱マテリアル株式会社 セラミックス焼結体の接合方法
JP3866320B2 (ja) * 1995-02-09 2007-01-10 日本碍子株式会社 接合体、および接合体の製造方法
TW200633947A (en) * 2005-02-16 2006-10-01 Ngk Insulators Ltd Joined body and manufacturing method for the same
CN102476954A (zh) * 2010-11-22 2012-05-30 鸿富锦精密工业（深圳）有限公司 不锈钢与氮化硅陶瓷的连接方法及制得的连接件
CN103880462B (zh) * 2012-12-21 2015-08-19 中国科学院上海硅酸盐研究所 氧化锆陶瓷的低温粘结方法
US10399906B2 (en) * 2016-09-20 2019-09-03 Ngk Insulators, Ltd. Sialon sintered body, method for producing the same, composite substrate, and electronic device
US10882130B2 (en) 2018-04-17 2021-01-05 Watlow Electric Manufacturing Company Ceramic-aluminum assembly with bonding trenches
CN115991609A (zh) * 2023-01-09 2023-04-21 南京理工大学 一种陶瓷-金属放电等离子连接方法
CN116874312B (zh) * 2023-07-06 2024-09-17 东北大学 一种具有自包覆结构的刚玉结合塞隆多孔陶瓷的制备方法

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DE3166780D1 (en) * 1980-04-29 1984-11-29 Marston Palmer Ltd A sheet of foil, clad sheet of aluminium and method of brazing using a strontium containing brazing alloy
JPS58135180A (ja) * 1982-02-01 1983-08-11 新明和工業株式会社 拡散接合方法
JPS58190880A (ja) * 1982-04-30 1983-11-07 昭和アルミニウム株式会社 アルミニウム材とセラミツクス材との接合方法
DE3233022A1 (de) * 1982-09-06 1984-03-08 BBC Aktiengesellschaft Brown, Boveri & Cie., 5401 Baden, Aargau Verfahren zum direkten verbinden eines koerpers mit einem keramischen substrat
JPS6071579A (ja) * 1983-09-28 1985-04-23 株式会社日立製作所 アルミナと金属との接合方法
JPS61136969A (ja) * 1984-12-06 1986-06-24 日立金属株式会社 サイアロンと金属の接合方法
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EP0197397A3 (en) 1987-04-22
DE3679847D1 (de) 1991-07-25
EP0197397A2 (en) 1986-10-15
CN86102112A (zh) 1986-12-24
EP0197397B1 (en) 1991-06-19
CN1009823B (zh) 1990-10-03
US4871107A (en) 1989-10-03
JPS61227971A (ja) 1986-10-11

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