JPH078880A - Fluid coating device - Google Patents

Abstract

(57) [Summary] [Object] To provide a fluid application device capable of applying a fluid to an application object having irregularities such that the surface is even. [Structure] An opening 50 is provided in the lower surface of the coating head 20 for adjusting the coating solution to have a constant film thickness by a slot 44 and flowing out from a nozzle port 45, and a blade 47 for scraping is vertically movable in the opening 50. Then, the blade 52 is biased downward by the spring 52. Guide portions 48, which are curved in a substantially arc shape, extend from the lower surfaces of both ends of the blade 47, and the guide portions 4
By sliding 8 onto the surface of the coating object 16, the scraping height of the coating liquid by the blade 47 can be made constant.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to a fluid application device.
Specifically, the present invention relates to a slot-type fluid application device for applying a fluid with a uniform film thickness to the surface of an object to be applied.

[0002]

2. Description of the Related Art For example, a color liquid crystal display (LC
When manufacturing the color filter used in D), first, after forming a black matrix on the surface of the glass plate,
Using a coating device such as a spin coater, sequentially apply the red filter paint, the blue filter paint and the green filter paint on the surface of the glass plate, and form the red filter, the blue filter and the green filter in the opening pattern of the black matrix in a predetermined pattern. ing.

In this case, in order to make the surface of the red matrix, the blue filter and the green filter and the black matrix uniform, the filter paint of each color is applied to the surface of the glass plate and then the filter paint of each color raised from the surface of the black matrix. Scraping off.

[0004]

However, in the prior art, the device for scraping off the filter paint that has risen from the black matrix has been a separate device from the fluid coating device such as the spin coater. Therefore, it is necessary to install the coating device and the scraping device separately,
There was a problem that the equipment cost or equipment cost was high.

The present invention has been made in view of the above-mentioned drawbacks of the conventional examples, and an object thereof is to apply a fluid so that the surface of a coating object having irregularities is uniform. It is to provide a fluid application device which can be

[0006]

A fluid application device of the present invention is provided with a fluid injection port for injecting a fluid into an application head, and a fluid injection port formed in the application head along the width direction. In a fluid application device including a cavity for diffusing the fluid thus formed in the width direction of the application head and a slot for allowing the fluid in the cavity to have a constant thickness and flowing out, the fluid is applied to the surface of an object to be applied. It is characterized in that a means for scraping off the coating film of the formed fluid is provided.

The means for scraping off the coating film is
It is preferably provided on the coating head.

[0008]

In the fluid applying apparatus of the present invention, since the means for scraping off the coating film applied by the application head is provided, even when the fluid is applied to the object to be coated having unevenness on the surface. The fluid can be applied so that the surface becomes smooth.

Further, if the coating head is provided with a means for scraping the coating film, the coating head and the scraping means can be driven at the same time, so that the structure for driving can be simplified. it can. Further, since the coating film can be scraped immediately after the fluid is applied by the coating head, even in the case of the fluid containing the volatile solvent, the coating surface can be scraped before the surface of the coating starts to cure.

[0010]

1 is a perspective view showing the external appearance of a fluid applying apparatus A according to an embodiment of the present invention. This fluid applying device A is
A cabinet 2 and an apparatus main body 1 are provided. A tank and a controller (none of which are shown) for accumulating the coating liquid are stored in the cabinet 2, and the apparatus main body 1 is installed on the cabinet 2. ing. The apparatus main body 1 mainly includes a feeding mechanism section 3 for horizontally feeding the coating object 16.
It is composed of a coating mechanism section 4 for coating the surface of the coating object 16 fed by the feeding mechanism section 3 with the coating liquid, and a measuring head 5 for measuring the plate thickness of the coating object 16 immediately before coating.

The feeding mechanism section 3 sucks the object 16 to be coated such as a glass substrate and conveys it horizontally at a constant speed. The structure will be described in detail with reference to the sectional view of FIG. A pair of parallel guide rails 7 are provided on the upper surface of the base 6.
Is provided and four sliders 8 provided on the lower surface of the table 9 are slidably supported by the guide rails 7, and the table 9 travels smoothly along the guide rails 7. A male screw shaft 10 is arranged in parallel with the guide rail 7 in the center of the base 6, and both ends of the male screw shaft 10 are rotatably supported by the base 6 via angular bearings 11, A female screw tube 12 and a male screw shaft 10 fixed to the lower surface of 9 are screwed together to form a ball screw mechanism. A servo motor 13 is fixed to an end of the base 6, and an output shaft of the servo motor 13 is connected to a male screw shaft 10 via a joint 14. Therefore, by rotating the male screw shaft 10 at a constant rotation speed by the servomotor 13, the table 9 is guided by the guide rail 7.
Can be moved at a constant speed along.

The table 9 is a vacuum suction table provided with a large number of vacuum suction holes 15, and the object 16 to be coated such as a glass substrate placed on the table 9 is sucked and fixed to the table 9.
At the same time, the coating object 16 can be fed at a constant speed.

FIG. 3 is a view showing the coating mechanism section 4 in detail from the side. In the coating mechanism section 4, a coating arm 19 is horizontally mounted between the upper ends of a pair of lifting rods 18 held by an elevator holder 17 so as to be slidable up and down.
0 is fixed. The elevating holder 17 is fixed to a shelf portion 21 protruding laterally from the base 6, an air cylinder 22 is installed directly below the elevating rod 18, and an upper end surface of an output shaft 23 of the air cylinder 22 is arranged above the elevating rod 18. It faces the lower end surface. Therefore, when the output shaft 23 of the air cylinder 22 is projected upward and the lower end surface of the elevating rod 18 is pushed up, the coating head 20 is raised together with the coating arm 19. Further, when the output shaft 23 of the air cylinder 22 is retracted downward, the coating head 20 is driven by its own weight.
Descends with 3.

Further, a numerical control type linear actuator 2 is provided just below the coating head 20 or the coating arm 19.
4 are installed. This linear actuator 24
Is connected to a motor 26 such as a servo motor or a pulse motor via a joint 25. When the motor 26 rotates the input shaft 27 on the bottom surface, the stopper rod 28 on the top surface projects upward. Moreover, the linear actuator 24 has a screw mechanism inside, and the stopper rod 28 is moved by a distance proportional to the rotation speed of the input shaft 27.
Protrudes. Then, when the stopper rod 28 of the linear actuator 24 projects, when the output shaft 23 of the air cylinder 22 is retracted and the coating head 20 is lowered, the lower surface of the coating head 20 or the coating arm 19 becomes the upper end of the stopper rod 28. At the moment of contact, the lower end surface of the elevating rod 18 separates from the output shaft 23 of the air cylinder 22, and the coating head 20 is supported and positioned by the linear actuator 24 at that position.

The protrusion distance of the stopper rod 28 is
It is controlled by the output of the measuring head 5. That is, when the measurement head 5 measures the plate thickness of the coating object 16, the coating head 20 is placed at a position where the gap between the coating head 20 and the coating object 16 is an optimum distance (for example, several tens of microns to several hundreds of microns). The protruding length of the stopper rod 28 of the linear actuator 24 is determined so as to support and position it.

FIG. 4 shows an exploded perspective view of the coating head 20, and FIG. 5 shows a sectional view thereof. The coating head 20 is 2
It is composed of one divided head 29, 30 and one shim 31. As shown in FIG.
As shown in, a fluid reservoir 32 having a hollow shape is provided across the left and right. The fluid reservoir 32 is horizontally recessed from the inner wall surface of the split head 29 toward the inside, and the coating liquid injection port 33 is bored from the upper surface of the split head 29 toward the center of the fluid reservoir 32. And again
A coating liquid discharge port 34 is bored from the upper surface of the split head 29 toward both ends of the fluid reservoir 32. The other divided head 30 has a protrusion 3 for positioning from the upper edge of the inner wall surface.
5 is provided so as to project, and the projecting portion 35 is abutted on the upper surface of the divided head 29 which faces the coating head 20.
The two divided heads 29 and 30 can be aligned when assembled. Further, a tapered portion 36 having a triangular cross section is projected over the entire width of the left and right sides on the inner wall surface side of the lower surfaces of the split heads 29 and 30, and a fluororesin 37 such as polytetrafluoroethylene (PTFE) 37 is formed on the entire lower surface.
Is coated. The shim 31 is a thin metal plate, and has leg pieces 38 at both ends thereof, and a notch-shaped recess 39 is formed between the leg pieces 38.

Therefore, the divided heads 29, 30 are combined so that the shim 31 is sandwiched between the inner wall surfaces, and the bolts 42 inserted into the through holes 40, 41 of the divided head 30 and the shim 31 are screwed into the divided head 29. Screw it into the hole 43,
By strongly tightening the bolt 42, the coating head 20 as shown in FIG. 5 is configured. In the coating head 20 thus assembled, the notch-shaped recess 39 of the shim 31 forms a slot 44 for shaping the coating liquid between the inner wall surfaces of the divided heads 29 and 30, and the lower end of the slot 44 is the lower surface of the coating head 20 and the nozzle. Opening as port 45, the opening of fluid reservoir 32 faces the upper end of slot 44,
It communicates with the inside of the slot 44.

When the coating liquid is supplied from the coating liquid inlet 33 into the fluid reservoir 32, the coating liquid fills the fluid reservoir 32 and spreads over the entire width of the fluid reservoir 32. Further, the coating liquid is supplied to the fluid reservoir 32 by the supply pressure.
To a slot 44, a uniform film thickness is adjusted in the slot 44, and a coating solution having a uniform film thickness flows out from the nozzle opening 45 at the lower end to form a film on the surface of the coating object 16. Here, there is a constant relationship between the flow rate of the coating liquid and the feed rate of the coating object 16, and the feed rate of the coating object 16 is higher than the flow rate (ejection rate) of the coating liquid. For this reason, the coating liquid having a uniform film thickness discharged from the nozzle port 45 is thinly spread when being applied to the surface of the object 16 to be coated, and has a film thickness smaller than that given by the slot 44. A coating film is formed on the surface of the coating object 16. Further, by forcibly discharging the coating liquid in the fluid reservoir 32 from the coating liquid discharge port 34, the pressure distribution in the slot 44 is adjusted so that the coating liquid discharged from the slot 44 has a uniform film thickness. Can be adjusted.

Further, the coating head 20 is equipped with a scraping device 46 for scraping the applied coating film. This scraping device 46, as shown in FIG.
The guide portions 48 curved in a substantially arc shape are extended downward from both ends of the blade 7, and both ends of the blade 47 are fixed to the lower ends of the pair of sliders 49. Here, the distance H from the lower surface of the guide portion 48 to the lower surface of the blade 47 is the scraping height of the blade 47. Split head 30
An opening portion 50 for accommodating the blade 47 is formed on the lower surface of the, and a vertical hole portion 51 for accommodating the slider 49 is formed at a position corresponding to the sliders 49 at both ends of the opening portion 50. Has been done. The blade 47 is housed in the opening 50, and the slider 49 is housed in the vertical hole 51 so as to be slidable up and down. By urging the slider 49 downward by the spring 52, the blade 47 is moved downward. It is elastically projected. on the other hand,
The slider 49 is prevented from coming off by a stopper 53.

Next, the operation of the fluid applying apparatus A will be described. 7 and 8 (a) and 8 (b) show the fluid applying device A.
FIG. 16 is an explanatory view showing a coating operation by the coating object 16
Paint 56 in the opening 55 of the mask 54 provided on the upper surface of the
Is applied. When the object 16 to be coated is fixed to the table 9 and is fed below the measuring head 5 by the feeding mechanism 3, the plate thickness of the object 16 to be coated is measured by the measuring head 5. When the plate thickness is measured, the lowered position of the coating head 20 is determined, and the stopper rod 28 is projected by the calculated amount in order to stop the coating head 20 at the position. Then, the output shaft 23 of the air cylinder 22 is retracted to lower the coating head 20, and the lowered coating head 20 is supported by the stopper rod 28. As shown in FIG. The coating material 56, which is positioned at a position facing the surface of the substrate 1 with a minute distance and is adjusted to have a constant film thickness by the slot 44, flows out from the nozzle port 45, and the coating object 16
Is coated on the surface of.

On the other hand, as shown in FIG. 8 (a), the guide portion 48 of the scraping device 46 is in sliding contact with the surface of the object 16 to be coated by the elasticity of the spring 52, and the blade 47 as shown in FIG. 8 (b). The distance between the lower edge of the and the coating object 16 is maintained at a constant distance H (for example, a distance equal to the thickness of the mask 54). Therefore, as shown in FIG. 7, the paint 56 that has risen on the surface of the mask 54 is immediately scraped off by the blade 47, and the coating film surface of the paint 56 is finished so as to have a predetermined thickness. When the coating and scraping are completed in this way, the coating head 20 is raised by the air cylinder 22 as before.

In the example of FIGS. 7 and 8A and 8B, the case where the paint 56 is applied to the same thickness as the mask 54 has been described, but the paint 5 thicker than the mask 54 is used.
It is needless to say that even when 6 is applied, the coating material 56 applied by the application head 20 can be scraped off by the blade 47 to form a uniform coating film.

Next, a method of manufacturing a color filter using the above fluid coating device will be described. FIG. 9 (a)
(F) is sectional drawing which shows an example of the manufacturing process of a color filter. 16A is a glass plate (application target), and on the surface of the glass plate 16A, a black matrix 57 made of a metal thin film is formed in a lattice shape by a thin film forming technique such as vacuum deposition or sputtering as shown in FIG. 9A. Has been formed. Using the fluid application device A, first, the red filter paint 58a is applied to the surface of the glass plate 16A [FIG. 9 (b)]. At this time, the red filter paint 58
“A” is scraped off by the blade 47 and adjusted to have a constant film thickness larger than that of the black matrix 57. Next, a portion other than the red filter forming region of the red filter paint 58a (negative type) is covered with a photomask (not shown), exposed, and etched to form openings 59 for forming the green filter 60 and the blue filter 62 [ FIG. 9C]. After the red filter paint 58a is baked to form the red filter 58 in a predetermined area, the red filter paint 58a is similarly scraped off by the blade 47 using the fluid application device A, so that the green filter paint 60a is formed in the opening 59 to have the same film thickness. Apply [Fig. 9
(D)]. An opening 61 for forming a blue filter 62 is formed in the green filter paint 60a by a photolithography method and then baked to form a green filter 60 in a predetermined region [FIG. 9 (e)]. Then, the blue filter paint 62a is applied by using the fluid applying device A, and the blue filter paint 62a is adjusted to have the same film thickness in the opening 61 by scraping off with the blade 47 and baked to form the blue filter 62. As a result, a color filter 63 having a structure as shown in FIG. 9F, in which the black matrix 57 of the metal thin film is located at the boundary between the red filter 58, the green filter 60 and the blue filter 62, is manufactured.

10A to 10H are sectional views showing another example of the manufacturing process of the color filter. In the color filter 68 manufactured in this manufacturing process, the black matrix 67 is finally formed by the black paint 67a. That is, referring to FIG. 10, first, the red filter paint 58a is applied to the surface of the glass plate 16A using the fluid applying device A [FIG. 10 (a)]. At this time,
The red filter paint 58a is scraped off by the blade 47 to a constant film thickness. Next, the red filter paint 58a is patterned by a photolithography method, and the green filter 60, the blue filter 62 and the black matrix 67 are patterned.
An opening 64 is formed for forming [Fig. 10 (b)].
After the red filter paint 58a has been baked, the green filter paint 60a is applied in the opening 64 with the same film thickness by scraping off with the blade 47 in the same manner using the fluid applying device A [FIG. 10 (c)]. . The blue filter 6 is applied to the green filter paint 60a by photolithography.
2 and openings 65 for forming the black matrix 67 are opened and then baked to form a green filter 60 in a predetermined region [FIG. 10 (d)]. Then, the blue filter paint 62a is applied to the inside of the opening 65 by the fluid applying device A and is scraped off by the blade 47 to make the blue filter paint 62a have the same thickness [FIG. 10 (e)]. After opening the openings 66 for forming the black matrix 67 in the blue filter paint 62a, baking is performed to form the green filter 62 in a predetermined area [FIG. 10 (f)]. Finally,
Red filter 58, green filter 60, blue filter 6
2 is coated with black paint 67a [Fig. 10 (g)],
Each filter 58 by exposing from the lower surface side of the glass plate 16A,
The black paint 67a between 60 and 62 is photo-cured, and only the black paint 67a on the upper surfaces of the filters 58, 60 and 62 is removed to form the black matrix 67. If the fluid coating device A is used when the black paint 67a is applied, the step of FIG. 10 (g) can be omitted.

FIG. 11 is a side view showing another embodiment of the present invention. In the above embodiment, the scraping device 46
Although it is provided on the lower surface of the coating head 20, it may be provided on the back surface of the coating head 20 as shown in FIG. That is, the blade 47 is attached to the back surface of the coating head 20 so as to be vertically movable by using a screw 70 or the like using a vertically long hole 69 provided in the blade 47 for scraping, and the blade 47 is attached by its own weight or elastic force of a spring. The blade 47 is urged downward by.

FIG. 12 is a side view showing another embodiment of the present invention. In this embodiment, the lateral width of one of the divided heads 29 is made longer than the lateral width of the other divided head 30 so that both side ends of the divided head 29 are projected laterally from the divided head 30 and the divided head 29 is projected. The blade 47 is attached movably up and down by the elongated hole 69 via the spacer 71, and the blade 47 is urged downward by its own weight or by the elastic force of the spring.

If the scraping device 46 is attached to the outside of the coating head 20 as in the embodiment shown in FIGS. 11 and 12, maintenance and inspection and replacement of the scraping device 46 can be facilitated.

Although the scraping device is provided in the coating head in the above embodiment, it may be provided separately from the coating head and may be driven separately from the coating head.

[0029]

EFFECTS OF THE INVENTION According to the present invention, the coating film applied by the means for scraping the coating film can be scraped off smoothly. Therefore, when applying a fluid to an object to be coated having unevenness on the surface. Also, the fluid can be applied so that the surface becomes smooth. Therefore, even when the color filter paint is applied to the black matrix like a color filter used for a color liquid crystal panel, the filter paint can be applied smoothly into the openings of the black matrix.

Therefore, it is not necessary to purchase and install a coating film scraping device separately from the fluid coating device, and the facility cost can be reduced. Further, there is an advantage that the maintenance and inspection of the equipment can be facilitated by reducing the types of installed equipment.

Further, if the coating head is provided with means for scraping off the coating film, the coating head and the scraping means can be driven at the same time, so that the coating head and the scraping means can be driven at the same time. Therefore, the structure of the fluid application device can be simplified and the productivity is improved. Furthermore, since the coating film can be scraped off immediately after applying the fluid with the coating head, even in the case of a fluid containing a volatile solvent, it can be scraped before the surface of the coating film begins to cure, and the scraping can be performed. It is possible to reduce the occurrence of defects.

[Brief description of drawings]

FIG. 1 is an external perspective view showing a fluid application device according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a feeding mechanism portion in the above fluid applying apparatus.

FIG. 3 is a side view showing a coating mechanism section and a measuring head in the above fluid coating apparatus.

FIG. 4 is an exploded perspective view of a coating head in the coating mechanism section of the above.

FIG. 5 is a sectional view of the coating head of the above.

FIG. 6 is a perspective view of a scraping device.

FIG. 7 is an operation explanatory view of the fluid applying apparatus of the above.

8 (a) and 8 (b) are explanatory views of the operation of the above scraping device.

9 (a), (b), (c), (d), (e), and (f) are views for explaining a manufacturing process of a color filter using the fluid coating device of the above.

10 (a) (b) (c) (d) (e) (f)
(G) (h) is a figure explaining another manufacturing process of the color filter using the fluid coating device same as the above.

FIG. 11 is a side view showing a scraping device according to another embodiment.

FIG. 12 is a side view showing a scraping device according to still another embodiment.

[Explanation of symbols]

 20 Coating Head 31 Shim 32 Fluid Reservoir (Cavity) 33 Coating Liquid Injection Port (Fluid Injection Port) 44 Slot 46 Scraping Device 47 Blade 48 Guide Part

Claims (2)

[Claims] 1. A fluid injection port for injecting a fluid into an application head, and a width direction formed in the application head,
A fluid application device comprising a cavity for diffusing the fluid injected from the fluid injection port in the width direction of the application head, and a slot for allowing the fluid in the cavity to have a constant thickness and flowing out. A fluid application device comprising means for scraping off a coating film of a fluid applied to the surface of an object. 2. The fluid application device according to claim 1, wherein the application head is provided with means for scraping off the coating film.