JPH0792190A - Inspection equipment for printed board - Google Patents

Inspection equipment for printed board

Info

Publication number
JPH0792190A
JPH0792190A JP5257614A JP25761493A JPH0792190A JP H0792190 A JPH0792190 A JP H0792190A JP 5257614 A JP5257614 A JP 5257614A JP 25761493 A JP25761493 A JP 25761493A JP H0792190 A JPH0792190 A JP H0792190A
Authority
JP
Japan
Prior art keywords
board
inspection
printed circuit
circuit board
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5257614A
Other languages
Japanese (ja)
Inventor
Mitsuru Nodera
充 野寺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOKUSOO RIKEN KK
Original Assignee
TOKUSOO RIKEN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOKUSOO RIKEN KK filed Critical TOKUSOO RIKEN KK
Priority to JP5257614A priority Critical patent/JPH0792190A/en
Publication of JPH0792190A publication Critical patent/JPH0792190A/en
Pending legal-status Critical Current

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  • Measuring Leads Or Probes (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)

Abstract

PURPOSE:To enhance the workability by simplifying the inspecting section while eliminating the need of a highly accurate intricate carrying/positioning mechanism. CONSTITUTION:The surface and rear images of a printed board P are picked up by means of cameras 7 disposed above and below a belt conveyor at a substrate measuring section. The positional shift of a measuring pattern from the drilling position of a through hole is then determined based on the positional relationship between a pair of measuring through holes and the positional relationship between a pair of measuring patterns and the positions of upper and lower inspection heads 22, 23 are corrected depending on the positional shift thus determined. The printed board P is then carried to the inspecting position of belt conveyor 5a-5d and transferred from the carrying belt onto a guide board 24 having guide pins being fitted into the guide holes of the printed board P. Subsequently, the guide board 24 lowers and comes into contact with the lower inspection head 23 with the probe penetrating the head and then the upper inspection head 22 lowers thus inspecting the surface and rear of the printed board P.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はプリント基板の検査装置
に係り、特に、予め基板の回路パターンを画像測定して
位置ずれ量を求め、この位置ずれ量に基づいて検査ヘッ
ドとプリント基板との位置関係を調整し、基板の電気的
検査を行う方式の装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a printed circuit board inspecting apparatus, and more particularly, to an image measurement of a circuit pattern of a circuit board in advance to obtain a positional deviation amount, and based on this positional deviation amount, the inspection head and the printed circuit board are separated. The present invention relates to an apparatus that adjusts a positional relationship and electrically inspects a substrate.

【0002】[0002]

【従来の技術】従来、プリント基板の回路パターンを電
気的に検査する装置としては、プリント基板を基板格納
部から搬送コンベアにより基板検査部へ搬送し、プリン
ト基板を検査位置に搬入した後に、例えばカメラ等によ
りプリント基板の表面の回路パターンの位置ずれ量を測
定し、この位置ずれ量に基づいてプリント基板の位置調
整を行い、プリント基板を正規の位置に位置決めするよ
うにしているものが一般的である。そして、検査ヘッド
を位置決めされた基板表面に接触させて、導通試験等を
行い、基板の検査が終了すると、プリント基板は検査部
から搬出され、検査結果に応じて良品収容部又は不良品
収容部に選別収納される。
2. Description of the Related Art Conventionally, as an apparatus for electrically inspecting a circuit pattern of a printed circuit board, the printed circuit board is conveyed from a substrate storage section to a substrate inspection section by a conveyor, and after the printed circuit board is carried into an inspection position, for example, Generally, the amount of displacement of the circuit pattern on the surface of the printed circuit board is measured with a camera, etc., the position of the printed circuit board is adjusted based on this amount of displacement, and the printed circuit board is positioned at a regular position. Is. Then, the inspection head is brought into contact with the positioned substrate surface, a continuity test or the like is performed, and when the inspection of the substrate is completed, the printed circuit board is unloaded from the inspection unit, and the non-defective product storage unit or the defective product storage unit is sent depending on the inspection result. Will be sorted and stored.

【0003】[0003]

【発明が解決しようとする課題】しかし、上記従来の検
査装置では、基板検査部において基板のパターンずれを
測定するようになっているため、測定用カメラ等の測定
機器により検査部周辺が複雑になり、検査ヘッドの交換
作業や保守・修理等が困難であるという問題点があっ
た。そのため、基板測定部と基板検査部とを別の場所に
設け、基板測定部においてパターンずれ量を測定した後
に、プリント基板を基板検査部まで搬送して検査を行う
ようにする方法が考えられる。しかしこの場合には、基
板測定部プリント基板の測定位置と検査位置との関係を
厳密に一致させる必要があるため基板の位置決めが困難
であり、自動的に搬送・位置決めを行う場合には、高精
度の搬送・位置決め機構を要するという問題点があっ
た。そこで本発明は上記問題点を解決するものであり、
その課題は、基板測定部と基板検査部とを別個に設けた
自動検査装置であって、複雑且つ高精度な搬送・位置決
め機構を必要とせずに、プリント基板の正確な検査を行
うことの可能な技術を得ることにある。
However, in the above-described conventional inspection apparatus, since the pattern deviation of the substrate is measured in the substrate inspection unit, the periphery of the inspection unit is complicated by the measuring device such as the measuring camera. Therefore, there is a problem that it is difficult to replace the inspection head, and to perform maintenance and repair. Therefore, a method may be considered in which the board measuring unit and the board inspecting unit are provided in different places, the pattern measuring amount is measured in the board measuring unit, and then the printed circuit board is conveyed to the board inspecting unit for inspection. However, in this case, it is difficult to position the board because the relationship between the measurement position of the printed circuit board and the inspection position of the printed circuit board must be exactly the same. There is a problem in that a precise conveyance / positioning mechanism is required. Therefore, the present invention is to solve the above problems,
The problem is an automatic inspection device in which a board measurement unit and a board inspection unit are separately provided, and it is possible to perform an accurate inspection of a printed circuit board without the need for a complicated and highly accurate transfer / positioning mechanism. To get the right technology.

【0004】[0004]

【課題を解決するための手段】上記課題を解決するため
に本発明が講じた手段は、基板測定部において回路パタ
ーンの位置ずれ量を測定するパターンずれ測定手段と、
基板検査部に配置されたプリント基板に対し位置調整可
能に取付けられた検査ヘッドとを有し、パターンずれ測
定手段は、プリント基板に穿設された基板案内孔又はこ
れと所定の位置関係を以て穿設された測定基準孔若しく
は基板回路孔である少なくとも一対の貫通孔の間の位置
関係と、プリント基板に形成された回路パターン又はこ
れと所定の位置関係を以て形成された基準パターンであ
る少なくとも一対のパターン部の間の位置関係とを比較
し、貫通孔に対するパターン部の位置ずれ量を求める手
段であり、基板検査部には、基板案内孔に嵌合する案内
ピンを備え、プリント基板を案内ピンにより基板検査位
置に位置決めするための案内板と、位置ずれ量に基づい
て検査ヘッドの位置調整を行う制御手段とを備えるもの
である。
Means for Solving the Problems The measures taken by the present invention in order to solve the above-mentioned problems are a pattern deviation measuring means for measuring a positional deviation amount of a circuit pattern in a substrate measuring section,
An inspection head attached to the printed circuit board arranged in the printed circuit board so that its position can be adjusted, and the pattern displacement measuring means is provided with a board guide hole formed in the printed board or with a predetermined positional relationship with the board guide hole. The positional relationship between at least a pair of through-holes, which are measurement reference holes or board circuit holes, and the circuit pattern formed on the printed circuit board, or at least a pair of reference patterns formed with a predetermined positional relationship therewith. It is a means for comparing the positional relationship between the pattern parts to obtain the positional displacement amount of the pattern part with respect to the through hole, and the board inspection part is provided with a guide pin that fits into the board guide hole. A guide plate for positioning the substrate at the substrate inspection position and a control means for adjusting the position of the inspection head based on the amount of displacement.

【0005】この場合に、パターンずれ測定手段を、プ
リント基板における位置ずれ量のX成分、Y成分及びθ
成分を求める手段とし、制御手段は、検査ヘッドの位置
を設定位置に対して位置ずれ量のX成分、Y成分及びθ
成分により修正するように構成することが望ましい。
In this case, the pattern shift measuring means is used to set the X component, Y component and θ of the position shift amount on the printed circuit board.
As a means for obtaining the component, the control means controls the position of the inspection head with respect to the set position by the X component, the Y component, and the θ component of the displacement amount.
It is desirable that the composition is modified so as to be modified.

【0006】また、案内板を、基板検査部におけるプリ
ント基板の搬入位置とプリント基板の検査ヘッドに対す
る接触位置との間を移動可能に取付けることが望まし
く、さらに、案内板には、検査ヘッドのプローブを貫通
させるプローブ案内孔を設けることが好ましい。
Further, it is desirable that the guide plate is mounted so as to be movable between a carry-in position of the printed circuit board in the circuit board inspection section and a contact position of the printed circuit board with respect to the inspection head. Furthermore, the probe of the inspection head is attached to the guide plate. It is preferable to provide a probe guide hole through which

【0007】上記搬送手段としては、搬送方向に沿って
相互に平行に配設された一対の搬送帯で構成し、搬送帯
をプリント基板の両縁を支持する間隔に保持して、それ
ぞれ搬送方向に伸びる軸線周りに回動可能に支持し、各
搬送帯の回動により搬送帯間の間隔を拡げられるように
構成することが望ましい。
The above-mentioned conveying means is composed of a pair of conveying belts arranged in parallel with each other along the conveying direction, and the conveying belts are held at intervals for supporting both edges of the printed circuit board and are respectively arranged in the conveying direction. It is desirable that the support be rotatably supported about an axis extending in the direction such that the interval between the transport bands can be expanded by the rotation of each transport band.

【0008】[0008]

【作用】かかる手段によれば、基板測定部においてはプ
リント基板の貫通孔を基準として回路パターンの位置ず
れ量を測定し、基板検査部においてはプリント基板の基
板案内孔を案内板の案内ピンに嵌合させて位置決めする
ため、位置ずれ量に基づいて検査ヘッドの位置修正を行
えば正確に基板の検査が行える。したがって、基板測定
部から基板検査部までの搬送機構や基板検査部における
プリント基板の位置決め機構の精度が要求されず、特に
基板検査部周りの機構の簡素化が可能になる。
According to such means, the positional deviation amount of the circuit pattern is measured with reference to the through hole of the printed board in the board measuring section, and the board guide hole of the printed board is used as the guide pin of the guide board in the board inspecting section. Since they are fitted and positioned, if the position of the inspection head is corrected based on the amount of displacement, the substrate can be inspected accurately. Therefore, the accuracy of the transport mechanism from the board measuring unit to the board inspecting unit and the positioning mechanism of the printed circuit board in the board inspecting unit is not required to be accurate, and in particular, the mechanism around the board inspecting unit can be simplified.

【0009】[0009]

【実施例】次に、本発明に係るプリント基板検査装置の
実施例を添付図面に基づいて説明する。図1(a)に示
すように、本実施例は、フレーム1内の下部に、検査前
のプリント基板Pを昇降自在の基板支持体2上に積層さ
せたローダーA、検査後のプリント基板のうち良品を基
板支持体3上に積層させて収納するアンローダーB、及
び、検査後のプリント基板のうち不良品を基板支持体4
上に積層させて収納するアンローダーCがそれぞれ配置
されている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment of a printed circuit board inspection device according to the present invention will be described with reference to the accompanying drawings. As shown in FIG. 1A, in this embodiment, a loader A in which a pre-inspection printed circuit board P is stacked on a vertically movable substrate support 2 in the lower portion of a frame 1 and a post-inspection printed circuit board are provided. The unloader B for accommodating non-defective products by stacking them on the substrate support 3 and storing the defective products among the printed boards after the inspection on the substrate support 4
Unloaders C that are stacked on top of each other and housed are arranged.

【0010】ローダーA、アンローダーB及びCの上方
にはベルトコンベア5a,5b,5c,5dが連続して
配設され、各ベルトコンベアには、それぞれ搬送ベルト
を移動させる一対の駆動モータと、搬送されてきたプリ
ント基板を所定位置で停止させる基板停止機構(回動自
在に取付けられた基板ストッパと、基板ストッパを回動
させる駆動用シリンダとからなる。)と、一対の搬送ベ
ルトを下方へ回動させる回動機構とを備えている。
Belt conveyors 5a, 5b, 5c and 5d are continuously arranged above the loaders A, unloaders B and C, and a pair of drive motors for moving the conveyor belts are provided on each belt conveyor. A board stopping mechanism (which includes a board stopper rotatably mounted and a drive cylinder for rotating the board stopper) for stopping the conveyed printed board at a predetermined position, and a pair of carrying belts downward. And a turning mechanism for turning.

【0011】図1(b)は搬送コンベア5aの回動機構
を示すもので、他の搬送コンベア5b,5c,5dも同
一構造である。フレーム1に取付けられた支持ビーム1
1に対して回動軸16が搬送方向に沿って回動自在に軸
支されている。回動軸16には回動アーム12が固着さ
れ、回動アーム12の先端にコンベア支持板13が固定
される。コンベア支持板13には、上部案内ローラ14
と下部案内ローラ15が回転自在に軸支され、これらに
搬送ベルト10が架設されている。各ベルトコンベアに
は上記構造が二つずつ設けられ、一対の搬送ベルト10
が相互に対向配置されてプリント基板Pの両端を支持す
る構造となっている。
FIG. 1B shows a rotating mechanism of the transfer conveyor 5a, and the other transfer conveyors 5b, 5c, 5d have the same structure. Support beam 1 mounted on frame 1
A rotary shaft 16 is rotatably supported with respect to 1 in the transport direction. The rotating arm 12 is fixed to the rotating shaft 16, and the conveyor support plate 13 is fixed to the tip of the rotating arm 12. The conveyor guide plate 13 includes an upper guide roller 14
The lower guide roller 15 is rotatably supported, and the conveyor belt 10 is installed over them. Each of the belt conveyors is provided with two of the above structures, and a pair of conveyor belts 10
Are arranged to face each other to support both ends of the printed circuit board P.

【0012】リンク17は回動軸16に固定され、その
遊動孔17aに嵌合する係合軸18aにより駆動部材1
8に接続されている。駆動部材18はエアシリンダ(図
示せず。)のピストンロッド19に固着されている。エ
アシリンダを動作させピストンロッド19及び駆動部材
18を右方向へ突出させると、回動軸16を介して回動
アーム12が時計周りに回転し、搬送ベルト10を含む
搬送機構も時計周りに回動する。
The link 17 is fixed to the rotary shaft 16, and the driving member 1 is provided by an engaging shaft 18a fitted in a loose hole 17a thereof.
8 is connected. The drive member 18 is fixed to a piston rod 19 of an air cylinder (not shown). When the air cylinder is operated to project the piston rod 19 and the drive member 18 to the right, the rotary arm 12 rotates clockwise through the rotary shaft 16, and the transport mechanism including the transport belt 10 also rotates clockwise. Move.

【0013】したがって、搬送ベルト10と図示しない
他方の搬送ベルト10との間隔が広がり、プリント基板
Pを搬送ベルトの間を通過させて上下に移動できるよう
になる。搬送ベルト10,10の相互間隔は、支持ビー
ム11に螺合したねじ棒と、ねじ棒を回転させるパルス
モータとからなる間隔調整機構(図示せず)により変更
できるようになっている。
Therefore, the distance between the conveyor belt 10 and the other conveyor belt 10 (not shown) is increased, and the printed circuit board P can be moved up and down by passing between the conveyor belts. The mutual distance between the conveyor belts 10 and 10 can be changed by a distance adjusting mechanism (not shown) including a screw rod screwed into the support beam 11 and a pulse motor for rotating the screw rod.

【0014】図1に示す移載ハンド6は、上記の搬送ベ
ルト10,10の間を下降して、ローダーAに格納され
ているプリント基板Pを吸着し、回動して間隔を拡げた
搬送ベルト10,10の間を通過してベルトコンベア5
aの上まで上昇する。ここで搬送ベルト10,10が通
常の状態に復帰して間隔を狭めた後、移載ハンド6がプ
リント基板Pを解放して搬送ベルト10,10上に載置
させ、ベルトコンベア5aが起動してプリント基板Pを
右方へ搬送する。
The transfer hand 6 shown in FIG. 1 descends between the above-mentioned conveyor belts 10 and adsorbs the printed circuit board P stored in the loader A, and rotates to convey it with a wider space. Belt conveyor 5 passing between belts 10 and 10
Ascend to the top of a. Here, after the conveyor belts 10 and 10 have returned to the normal state and the interval has been narrowed, the transfer hand 6 releases the printed circuit board P and places it on the conveyor belts 10 and 10, and the belt conveyor 5a is activated. The printed circuit board P is conveyed rightward.

【0015】ベルトコンベア5aの右端部には図2に示
す基板ストッパ8が回動軸16に回動自在に軸支されて
おり、図示しないエアシリンダにより回動し、上方から
搬送面上に下降するようになっている。プリント基板P
が搬送面上にある基板ストッパ8に当接すると、基板ス
トッパ8に内蔵された光学式の基板センサ30によりベ
ルトコンベア5aが停止する。この位置が基板測定位置
である。
A substrate stopper 8 shown in FIG. 2 is rotatably supported on a rotary shaft 16 at the right end of the belt conveyor 5a, and is rotated by an air cylinder (not shown) to descend from above onto the conveying surface. It is supposed to do. Printed circuit board P
When comes into contact with the substrate stopper 8 on the conveyance surface, the belt conveyor 5a is stopped by the optical substrate sensor 30 built in the substrate stopper 8. This position is the substrate measurement position.

【0016】基板測定位置の上下には、それぞれX−Y
駆動機構に支持された撮像カメラ7a,7bが配設さ
れ、それぞれ並行してプリント基板Pの上下面を撮影す
る。ここで、プリント基板Pには、図2に示すように、
4つの基板案内孔Q1,2,3,4 が穿設され、同時に
測定用スルーホールR1,2 と他の回路用スルーホール
が穿設されている。測定用スルーホールR1,2 は、回
路用スルーホールを兼用していてもよい。また、プリン
ト基板Pの上下両面には、測定用パターンS1,2 と図
示しない回路パターンとが同時に形成されている。測定
用パターンS1,2 は、回路パターンを兼用していても
よい。
Above and below the substrate measuring position, XY is provided.
Imaging cameras 7a and 7b supported by a driving mechanism are provided, and images the upper and lower surfaces of the printed circuit board P in parallel. Here, on the printed circuit board P, as shown in FIG.
Four substrates guide holes Q 1, Q 2, Q 3 , Q 4 is bored is bored through holes R 1, R 2 and a through hole for other circuits for simultaneously measured. The measurement through holes R 1 and R 2 may also serve as circuit through holes. Moreover, the measurement patterns S 1 and S 2 and a circuit pattern (not shown) are simultaneously formed on both upper and lower surfaces of the printed circuit board P. The measurement patterns S 1 and S 2 may also serve as circuit patterns.

【0017】図3には撮像カメラ7a,7bにより基板
のパターンずれを測定する方法を示す。以下の測定にお
ける演算は、図1に示すコンピュータ9により行われ
る。プリント基板Pが基板ストッパ8a,8bに当接す
ると、上記基板センサ30がこれを感知して撮像カメラ
7a,7bを図2の測定用スルーホールR1 と測定用パ
ターンS1 からなるアライメントマーク1の撮影位置に
移動させる。
FIG. 3 shows a method of measuring the pattern shift of the substrate by the image pickup cameras 7a and 7b. The calculation in the following measurement is performed by the computer 9 shown in FIG. When the printed circuit board P comes into contact with the substrate stoppers 8a and 8b, the substrate sensor 30 detects this and the imaging cameras 7a and 7b are moved to the alignment mark 1 including the measurement through hole R 1 and the measurement pattern S 1 shown in FIG. Move to the shooting position of.

【0018】ここで、アライメントマーク1の基準中心
座標(AX1,AY1)は予め設定され、記憶保持され
ている。この位置で撮影した画像において、反射率の高
い測定用パターンS1 の部分は白画素となり、この白画
素領域の重心位置gw1=(gw1x,gw1y)の検
出を行う。一方、反射光の得られない測定用スルーホー
ルR1 の部分は黒画素となり、この黒画素領域の重心位
置gb1=(gb1x,gb1y)の検出を行う。
The reference center coordinates (AX1, AY1) of the alignment mark 1 are preset and stored and held. In the image photographed at this position, the portion of the measurement pattern S 1 having a high reflectance becomes a white pixel, and the gravity center position gw1 = (gw1x, gw1y) of this white pixel area is detected. On the other hand, the portion of the measurement through hole R 1 where the reflected light cannot be obtained becomes a black pixel, and the gravity center position gb1 = (gb1x, gb1y) of this black pixel area is detected.

【0019】アライメントマーク1の処理が終了する
と、撮像カメラ7a,7bを図2の測定用スルーホール
2 と測定用パターンS2 からなるアライメントマーク
2の撮像位置へ移動させる。ここで、アライメントマー
ク2の基準中心座標(AX2,AY2)は予め設定さ
れ、記憶保持されている。この位置で撮影した画像につ
いても、上記と同様に測定用パターンS2 の重心位置g
w2=(gw2x,gw2y)と、測定用スルーホール
2 の重心位置gb2=(gb2x,gb2y)とが検
出される。
When the processing of the alignment mark 1 is completed, the image pickup cameras 7a and 7b are moved to the image pickup position of the alignment mark 2 composed of the measurement through hole R 2 and the measurement pattern S 2 of FIG. Here, the reference center coordinates (AX2, AY2) of the alignment mark 2 are preset and stored and held. Also for the image photographed at this position, the center of gravity position g of the measurement pattern S 2 is the same as above.
w2 = (gw2x, gw2y) and the center of gravity gb2 = (gb2x, gb2y) of the measuring through hole R 2 are detected.

【0020】上記結果から、各アライメントマークにお
ける座標の差を、 g1x=gw1x−gb1x, g2x=gw2
x−gw2x g1y=gw1y−gb1y, g2y=gw2
y−gw2y AX=AX2−AX1, AY=AY2−
AY1 gwx=gw2x−gw1x, gwy=gw2
y−gw1y のように求め、パターンの位置ずれ量を以下のようにし
て求める。
From the above results, the difference in coordinates at each alignment mark is calculated as g1x = gw1x-gb1x, g2x = gw2.
x-gw2x g1y = gw1y-gb1y, g2y = gw2
y-gw2y AX = AX2-AX1, AY = AY2-
AY1 gwx = gw2x-gw1x, gwy = gw2
y-gw1y, and the positional displacement amount of the pattern is calculated as follows.

【0021】ΔX=(g1x+g2x)/2 ΔY=(g1y+g2y)/2 Δθ=KK−WK KK=tan
-1(AX/AY) WK=tan-1(gwx/gwy) また、角度方向のずれ量Δθについては、以下のように
して求めてもよい。 Δθ=BK−WK BK=tan
-1(gbx/gby) (gbx=gb2x−gb1x,gby=gb2y−g
b1x)
ΔX = (g1x + g2x) / 2 ΔY = (g1y + g2y) / 2 Δθ = KK-WK KK = tan
−1 (AX / AY) WK = tan −1 (gwx / gwy) Further, the deviation amount Δθ in the angular direction may be obtained as follows. Δθ = BK-WK BK = tan
-1 (gbx / gby) (gbx = gb2x-gb1x, gby = gb2y-g
b1x)

【0022】このようにして、カメラの画像から測定用
パターンの測定用スルーホールに対するX,Y,θ方向
のずれ量が得られる。測定用パターンは回路パターンと
同時に形成されるか又は回路パターンの一部を兼用し、
一方、測定用スルーホール(回路用スルーホールを兼用
する場合もある。)は、基板案内孔Q1,2,3,4
同時に形成されるか又は基板案内孔自体を兼用してい
る。したがって、上記ずれ量は、基板案内孔を基準とし
た回路パターンの位置ずれ量として用いることができ
る。
In this way, the amount of deviation of the measurement pattern in the X, Y, and θ directions from the measurement through hole can be obtained from the image of the camera. The measurement pattern is formed at the same time as the circuit pattern, or also serves as a part of the circuit pattern,
On the other hand, the measurement through hole (which may also be used as a circuit through hole) is formed at the same time as the board guide holes Q 1, Q 2, Q 3, Q 4 or also as the board guide hole itself. There is. Therefore, the displacement amount can be used as the displacement amount of the circuit pattern with respect to the substrate guide hole.

【0023】回路パターンの位置ずれ量が求められる
と、上記基板ストッパ8は上方へ回動してプリント基板
Pから外れ、ベルトコンベア5aと5bが起動する。プ
リント基板Pは図1に示すベルトコンベア5aからベル
トコンベア5bに移載され、基板検査部20に搬入され
る。プリント基板Pは、検査プレス21の真下にくると
上記同様の基板ストッパ27に当接し、上記同様の基板
センサ(図示せず。)によりベルトコンベア5a,5b
が停止する。この位置が基板検査位置である。
When the positional shift amount of the circuit pattern is obtained, the substrate stopper 8 is rotated upward to be disengaged from the printed substrate P, and the belt conveyors 5a and 5b are activated. The printed circuit board P is transferred from the belt conveyor 5a shown in FIG. 1 to the belt conveyor 5b and is carried into the board inspection unit 20. When the printed circuit board P comes directly under the inspection press 21, it comes into contact with the same substrate stopper 27 as described above, and the same substrate sensor (not shown) as described above causes the belt conveyors 5a and 5b.
Stops. This position is the substrate inspection position.

【0024】基板検査部20は、上記検査プレス21に
より昇降可能に取付けられた上部検査ヘッド22と、ベ
ルトコンベア5bの下方に設けられた下部検査ヘッド2
3と、上部検査ヘッド22と下部検査ヘッド23との間
において昇降可能に配置された案内板24とから大略構
成される。図4に示すように、上部検査ヘッド22は、
プレス駆動部に取付けられたXYθテーブル22aと、
このXYθテーブル22aの下面に固着されたプローブ
板22bと、プローブ板22bの下面に所定のパターン
で植設されたプローブ22cと、プローブ22cを遊嵌
状態で貫通するプローブ孔(図示せず。)を備えたガイ
ド板22dとを有する。
The board inspecting section 20 includes an upper inspecting head 22 mounted so as to be able to move up and down by the inspecting press 21 and a lower inspecting head 2 provided below the belt conveyor 5b.
3 and a guide plate 24 that is vertically movable between the upper inspection head 22 and the lower inspection head 23. As shown in FIG. 4, the upper inspection head 22 is
An XYθ table 22a attached to the press drive unit,
A probe plate 22b fixed to the lower surface of the XYθ table 22a, a probe 22c planted in a predetermined pattern on the lower surface of the probe plate 22b, and a probe hole (not shown) penetrating the probe 22c in a loosely fitted state. And a guide plate 22d provided with.

【0025】下部検査ヘッド23は、フレーム底部に設
置されたXYθテーブル23aと、このXYθテーブル
23aの上面に固着されたプローブ板23bと、プロー
ブ板23bの上面に所定のパターンで植設されたプロー
ブ23cとを有する。案内板24は、プリント基板Pの
基板案内孔Q1,2,3,4 に対応した位置に植設され
た先端円錐状の4本の案内ピン24aと、プローブ23
cの形成位置に対応して穿設されたプローブ孔(図示せ
ず。)とを備え、エアシリンダ(図示せず。)によりガ
イドロッド25に沿って昇降するようになっている。
The lower inspection head 23 has an XYθ table 23a installed at the bottom of the frame, a probe plate 23b fixed to the upper surface of the XYθ table 23a, and a probe planted on the upper surface of the probe plate 23b in a predetermined pattern. 23c. Guide plate 24 includes a substrate guide hole Q 1, Q 2, Q 3 , embedded in positions corresponding to Q 4 are tip conical four guide pins 24a of the printed board P, the probe 23
It is provided with a probe hole (not shown) formed corresponding to the formation position of c, and is moved up and down along the guide rod 25 by an air cylinder (not shown).

【0026】プリント基板Pが基板検査位置に停止する
と、案内板24がベルトコンベア5bの搬送ベルトの間
まで上昇し、基板案内孔Q1,2,3,4 の直下に案内
ピン24aが配置される位置で停止する。次に搬送ベル
トが上述と同様に下方へ開いて搬送ベルトの間隔を広げ
るので、プリント基板Pは案内板24の上に落下し、基
板案内孔Q1,2,3,4 に案内ピン24aが嵌合して
位置決めされる。
[0026] printed circuit board P is stopped at the substrate inspection position, the guide plate 24 is raised to between the conveyor belt of the belt conveyor 5b, the guide pin 24a directly below the substrate guide hole Q 1, Q 2, Q 3 , Q 4 Stops at the position where is placed. Then, the conveyor belt opens downward as described above to widen the distance between the conveyor belts, so that the printed circuit board P drops onto the guide plate 24 and is guided to the board guide holes Q 1, Q 2, Q 3, Q 4 . The pin 24a is fitted and positioned.

【0027】そして、案内板24はプリント基板Pを載
置させた状態で下降し、下部検査ヘッド23のプローブ
23cをプローブ孔に導入させ、プリント基板Pの下面
をプローブ23cに接触させる。次に上部検査ヘッド2
2が下降し、そのプローブ22cをプリント基板Pの上
面に接触させる。プリント基板Pが上下の検査ヘッド2
2,23に挟持された状態になったとき、図1に示す検
査用のコンピュータ26により検査プログラムが実行さ
れ、プリント基板Pの上下両面に形成された回路パター
ンのオープン・ショートチェックが行われる。
Then, the guide plate 24 is lowered with the printed circuit board P placed thereon, the probe 23c of the lower inspection head 23 is introduced into the probe hole, and the lower surface of the printed circuit board P is brought into contact with the probe 23c. Next, the upper inspection head 2
2 descends to bring the probe 22c into contact with the upper surface of the printed board P. Inspection head 2 with printed circuit board P above and below
When it is sandwiched between 2, 23, the inspection program is executed by the inspection computer 26 shown in FIG. 1, and the open / short check of the circuit patterns formed on the upper and lower surfaces of the printed circuit board P is performed.

【0028】回路パターンの検査が終了すると、上部検
査ヘッド22が上昇し、次いで案内板24が上昇する。
そして、案内板24が搬送ベルトの間まで上昇すると、
搬送ベルトが上方へ回動し、プリント基板Pの両縁を支
持する。以後、プリント基板Pはベルトコンベア5bの
上を搬送され、ベルトコンベア5cに移載される。回路
パターンの検査に合格したプリント基板Pは、基板スト
ッパ28に停止させられ、ベルトコンベア5cの搬送ベ
ルトが開いて落下し、アンローダーBに収容される。検
査の結果、不良品と判定されたプリント基板Pは、さら
にベルトコンベア5dに移載され、基板ストッパ29に
停止させられ、ここからアンローダCに収容される。
When the inspection of the circuit pattern is completed, the upper inspection head 22 rises and then the guide plate 24 rises.
Then, when the guide plate 24 is lifted up between the conveyor belts,
The conveyor belt rotates upward and supports both edges of the printed circuit board P. After that, the printed circuit board P is conveyed on the belt conveyor 5b and transferred to the belt conveyor 5c. The printed circuit board P that has passed the circuit pattern inspection is stopped by the substrate stopper 28, the conveyor belt of the belt conveyor 5c opens and falls, and is accommodated in the unloader B. The printed circuit board P determined to be defective as a result of the inspection is further transferred to the belt conveyor 5d, stopped by the substrate stopper 29, and then stored in the unloader C from there.

【0029】以上詳述したように本実施例では、プリン
ト基板の基板案内孔と同時に穿設され、所定の位置関係
にある測定用スルーホールの位置を基準として回路パタ
ーンの位置ずれ量を求め、この位置ずれ量に基づいて検
査ヘッドの位置を修正しているので、基板検査部に対し
てプリント基板を基板案内孔により位置決めするだけ
で、プリント基板の搬送機構や基板検査部の位置決め機
構の精度を要することなく正確な基板検査を行うことが
でき、簡易な搬送機構及び位置決め機構を用いることが
できる。
As described above in detail, in this embodiment, the positional deviation amount of the circuit pattern is obtained with reference to the position of the measurement through hole which is formed at the same time as the substrate guide hole of the printed circuit board and has a predetermined positional relationship. Since the position of the inspection head is corrected based on this amount of positional deviation, it is only necessary to position the printed circuit board by the board guide hole with respect to the circuit board inspection section, and the accuracy of the printed board transfer mechanism and the board inspection section positioning mechanism can be improved. It is possible to perform an accurate board inspection without requiring the use of a simple transfer mechanism and a positioning mechanism.

【0030】また、上記と同様の理由により、基板測定
部と基板検査部とを別位置に設けることができるととも
に、検査位置の精度が両者間の距離に依存しないので自
由なレイアウトが可能である。そして、これらの理由に
より、基板検査部の構造が簡素になり、検査ヘッド等の
交換、点検、整備等の作業が容易になる。さらに、基板
測定部や搬送機構等も簡素化できるので、検査装置全体
としても製造コストの低減やコンパクト化を図ることが
できる。
For the same reason as above, the board measuring section and the board inspecting section can be provided at different positions, and the accuracy of the inspecting position does not depend on the distance between them, so that a free layout is possible. . For these reasons, the structure of the board inspecting unit is simplified, and the work of replacing, inspecting, and maintaining the inspection head and the like becomes easy. Furthermore, since the board measuring unit, the transport mechanism, and the like can be simplified, the manufacturing cost and the size of the entire inspection apparatus can be reduced.

【0031】プリント基板の回路パターンの位置ずれ量
は、各々一対の測定用スルーホールと測定用パターンと
からX,Y,θ方向のずれ量が算出され、各ずれ量に基
づいて検査ヘッドの位置修正を行うので、回路パターン
のどのような位置ずれに対しても精度よく対応できる。
案内板を基板の搬入位置と基板の検査ヘッドに対する接
触位置との間で移動可能にしたため、案内板自体を基板
検査部内におけるプリント基板の搬送手段として用いて
検査機構の簡素化を図ることができるとともに、下部検
査ヘッドの移動機構が不要になる。
As for the positional deviation amount of the circuit pattern on the printed circuit board, the deviation amount in the X, Y and θ directions is calculated from the pair of measuring through holes and the measuring pattern, and the position of the inspection head is calculated based on each deviation amount. Since the correction is performed, it is possible to accurately cope with any positional deviation of the circuit pattern.
Since the guide plate is movable between the loading position of the substrate and the contact position of the substrate with respect to the inspection head, it is possible to simplify the inspection mechanism by using the guide plate itself as a means for transporting the printed circuit board in the substrate inspection unit. At the same time, the moving mechanism of the lower inspection head becomes unnecessary.

【0032】案内板はプローブ孔を備えているので、下
部検査ヘッドのガイド板を兼ねていることになり、基板
両面の同時検査が簡易な構造で可能になっている。ベル
トコンベアにおいては、搬送ベルト間の間隔を可変とし
ているため搬送ベルト間を通してプリント基板を昇降で
きるから、装置の小型化を図ることができるとともに、
回動動作によりコンベアの開閉を行っているので僅かな
動作空間しか必要とせず、周囲機構の配置の自由度が向
上している。
Since the guide plate has the probe hole, it also serves as the guide plate of the lower inspection head, and simultaneous inspection of both surfaces of the substrate is possible with a simple structure. In the belt conveyor, since the distance between the conveyor belts is variable, the printed circuit board can be moved up and down through the conveyor belts, and the device can be downsized.
Since the conveyor is opened and closed by the rotating operation, only a small operation space is required, and the degree of freedom of arrangement of the peripheral mechanism is improved.

【0033】[0033]

【発明の効果】以上説明したように、本発明によれば、
基板の貫通孔を基準にして基板検査部とは別の位置にあ
る基板測定部でパターンの位置ずれを測定するので、プ
リント基板用の搬送機構や位置決め機構の精度を高めず
に高精度な基板検査を行うことができる。また、基板検
査部の構造を簡素化でき、検査ヘッド等の交換、点検、
整備等の作業が容易になる。
As described above, according to the present invention,
High-precision board without increasing the precision of the transfer mechanism and positioning mechanism for the printed circuit board, because the pattern displacement is measured by the board measuring section located at a position different from the board inspection section with reference to the through hole of the board. An inspection can be done. Also, the structure of the board inspection unit can be simplified, and the inspection heads can be replaced,
Maintenance work becomes easy.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係るプリント基板の検査装置の全体構
成を示す概観図(a)と、同検査装置の搬送手段の構造
を示す拡大断面図である。
FIG. 1 is a schematic view (a) showing an overall configuration of a printed circuit board inspection apparatus according to the present invention, and an enlarged cross-sectional view showing a structure of a conveyance unit of the inspection apparatus.

【図2】同検査装置により測定するプリント基板の一例
を示す平面図である。
FIG. 2 is a plan view showing an example of a printed circuit board measured by the inspection apparatus.

【図3】同検査装置の基板測定部におけるパターンの位
置ずれ量を算出する方法を示すフローチャートである。
FIG. 3 is a flowchart showing a method of calculating a pattern positional deviation amount in a substrate measuring unit of the inspection apparatus.

【図4】同検査装置の基板検査部の周辺を詳細に示す拡
大説明図である。
FIG. 4 is an enlarged explanatory view showing details around a board inspection unit of the inspection apparatus.

【符号の説明】[Explanation of symbols]

5a,5b,5c,5d ベルトコンベア 7a,7b 撮像カメラ 10 搬送ベルト 22 上部検査ヘッド 22a,23a XYθテーブル 23 下部検査ヘッド 24 案内板 24a 案内ピン P プリント基板 Q1,2,3,4 基板案内孔 S1,2 測定用パターン R1,2 測定用スルーホール5a, 5b, 5c, 5d belt conveyor 7a, 7b imaging camera 10 conveyor belt 22 the upper inspection head 22a, 23a XY.theta. Table 23 below inspection head 24 a guide plate 24a guiding the pin P PCB Q 1, Q 2, Q 3 , Q 4 Board guide hole S 1, S 2 measurement pattern R 1, R 2 measurement through hole

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 プリント基板の表面画像を入力してプリ
ント基板の測定を行うための基板測定部と、プリント基
板の回路パターンを電気的に検査するための基板検査部
と、基板測定部から基板検査部までプリント基板を搬送
する搬送手段とを有するプリント基板の検査装置におい
て、 前記基板測定部において前記回路パターンの位置ずれ量
を測定するパターンずれ測定手段と、前記基板検査部に
配置されたプリント基板に対し位置調整可能に取付けら
れた検査ヘッドとを有し、 前記パターンずれ測定手段は、前記プリント基板に穿設
された基板案内孔又はこれと所定の位置関係を以て穿設
された測定基準孔若しくは基板回路孔である少なくとも
一対の貫通孔の間の位置関係と、前記プリント基板に形
成された回路パターン又はこれと所定の位置関係を以て
形成された基準パターンである少なくとも一対のパター
ン部の間の位置関係とを比較し、前記貫通孔に対する前
記パターン部の位置ずれ量を求める手段であり、 前記基板検査部には、前記基板案内孔に嵌合する案内ピ
ンを備え、前記プリント基板を案内ピンにより基板検査
位置に位置決めするための案内板と、 前記位置ずれ量に基づいて前記検査ヘッドの位置調整を
行う制御手段とを備えたプリント基板の検査装置。
1. A board measuring section for inputting a surface image of the printed board to measure the printed board, a board inspecting section for electrically inspecting a circuit pattern of the printed board, and a board for measuring the board. A printed circuit board inspecting device having a conveyance means for conveying a printed circuit board to an inspection section, wherein a pattern deviation measuring means for measuring a positional deviation amount of the circuit pattern in the board measuring section and a print arranged in the board inspection section. An inspection head mounted so that its position can be adjusted with respect to the board; and the pattern shift measuring means is a board guide hole formed in the printed board or a measurement reference hole formed in a predetermined positional relationship with the board guide hole. Alternatively, the positional relationship between at least a pair of through holes, which are circuit board holes, and the circuit pattern formed on the printed circuit board or a predetermined position between the circuit pattern and the circuit pattern. Is a means for comparing the positional relationship between at least a pair of pattern portions, which is a reference pattern formed by the relationship, and obtaining the amount of positional deviation of the pattern portion with respect to the through hole. A guide plate for fitting the guide hole in the guide hole; a guide plate for positioning the printed circuit board at a substrate inspection position by the guide pin; and a control means for adjusting the position of the inspection head based on the displacement amount. Printed circuit board inspection device.
【請求項2】 請求項1において、前記パターンずれ測
定手段は、前記プリント基板における前記位置ずれ量の
X成分、Y成分及びθ成分を求める手段であり、前記制
御手段は、前記検査ヘッドの位置を設定位置に対して前
記位置ずれ量のX成分、Y成分及びθ成分により修正す
るように構成されたプリント基板の検査装置。
2. The pattern shift measuring means according to claim 1, wherein the pattern shift measuring means is a means for obtaining an X component, a Y component and a θ component of the positional shift amount on the printed circuit board, and the control means is a position of the inspection head. Is an apparatus for inspecting a printed circuit board, which is configured to correct the position deviation with respect to the set position by the X component, the Y component, and the θ component.
【請求項3】 請求項1において、前記案内板は、前記
基板検査部における前記プリント基板の搬入位置と、前
記プリント基板の前記検査ヘッドに対する接触位置との
間を移動可能に取付けられているプリント基板の検査装
置。
3. The print according to claim 1, wherein the guide plate is movably attached between a loading position of the printed board in the board inspection unit and a contact position of the printed board with the inspection head. Board inspection device.
【請求項4】 請求項3において、前記案内板には、前
記検査ヘッドのプローブを貫通させるプローブ案内孔を
備えているプリント基板の検査装置。
4. The printed circuit board inspection apparatus according to claim 3, wherein the guide plate has a probe guide hole through which a probe of the inspection head is passed.
【請求項5】 請求項1において、前記搬送手段は、搬
送方向に沿って相互に平行に配設された一対の搬送帯か
らなり、該搬送帯は前記プリント基板の両縁を支持する
間隔に保持され、それぞれ搬送方向に伸びる軸線周りに
回動可能に支持され、各搬送帯の回動により搬送帯間の
間隔を拡げられるように構成されたプリント基板の検査
装置。
5. The conveying means according to claim 1, wherein the conveying means comprises a pair of conveying belts arranged in parallel with each other along a conveying direction, and the conveying belts are arranged at intervals for supporting both edges of the printed circuit board. An inspection device for a printed circuit board, which is held and rotatably supported around an axis extending in the transport direction, and is configured to expand the interval between the transport bands by the rotation of each transport band.
JP5257614A 1993-09-21 1993-09-21 Inspection equipment for printed board Pending JPH0792190A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5257614A JPH0792190A (en) 1993-09-21 1993-09-21 Inspection equipment for printed board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5257614A JPH0792190A (en) 1993-09-21 1993-09-21 Inspection equipment for printed board

Publications (1)

Publication Number Publication Date
JPH0792190A true JPH0792190A (en) 1995-04-07

Family

ID=17308713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5257614A Pending JPH0792190A (en) 1993-09-21 1993-09-21 Inspection equipment for printed board

Country Status (1)

Country Link
JP (1) JPH0792190A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0864871A3 (en) * 1997-03-10 2000-05-03 Canon Kabushiki Kaisha Cleaning method, device and tool for board electrical-test probes and board electrical-test device and method
JP2002221550A (en) * 2001-01-29 2002-08-09 Hioki Ee Corp Mounting position correction method for position measurement camera in double-sided board inspection equipment
JP2002277502A (en) * 2001-01-12 2002-09-25 Nidec-Read Corp Substrate inspection device and substrate inspection method
JP2007086023A (en) * 2005-09-26 2007-04-05 Fujitsu Ltd Reference point detection apparatus, detection method, and detection program for printed board via
JP2007107973A (en) * 2005-10-12 2007-04-26 Micronics Japan Co Ltd Inspection device
JP2008101937A (en) * 2006-10-17 2008-05-01 Nidec-Read Corp Board inspection device and board inspection method
JP2013250259A (en) * 2012-05-30 2013-12-12 Samsung Electro-Mechanics Co Ltd Substrate inspection device and position correction method thereof
KR101394362B1 (en) * 2012-03-14 2014-05-13 도쿄엘렉트론가부시키가이샤 Wafer inspection apparatus
US10863659B2 (en) * 2015-09-04 2020-12-08 Fuji Corporation Work machine
KR102668925B1 (en) * 2023-09-27 2024-05-24 에이펙스인텍 주식회사 IoT-based electrical safety remote access device inspection system

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0864871A3 (en) * 1997-03-10 2000-05-03 Canon Kabushiki Kaisha Cleaning method, device and tool for board electrical-test probes and board electrical-test device and method
JP2002277502A (en) * 2001-01-12 2002-09-25 Nidec-Read Corp Substrate inspection device and substrate inspection method
JP2002221550A (en) * 2001-01-29 2002-08-09 Hioki Ee Corp Mounting position correction method for position measurement camera in double-sided board inspection equipment
JP2007086023A (en) * 2005-09-26 2007-04-05 Fujitsu Ltd Reference point detection apparatus, detection method, and detection program for printed board via
JP2007107973A (en) * 2005-10-12 2007-04-26 Micronics Japan Co Ltd Inspection device
JP2008101937A (en) * 2006-10-17 2008-05-01 Nidec-Read Corp Board inspection device and board inspection method
KR101394362B1 (en) * 2012-03-14 2014-05-13 도쿄엘렉트론가부시키가이샤 Wafer inspection apparatus
JP2013250259A (en) * 2012-05-30 2013-12-12 Samsung Electro-Mechanics Co Ltd Substrate inspection device and position correction method thereof
CN103454456A (en) * 2012-05-30 2013-12-18 三星电机株式会社 Printed circuit board inspection apparatus and position correcting method thereof
US10863659B2 (en) * 2015-09-04 2020-12-08 Fuji Corporation Work machine
KR102668925B1 (en) * 2023-09-27 2024-05-24 에이펙스인텍 주식회사 IoT-based electrical safety remote access device inspection system

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