JPH0792437B2 - Surface shape observation device - Google Patents
Surface shape observation deviceInfo
- Publication number
- JPH0792437B2 JPH0792437B2 JP29089486A JP29089486A JPH0792437B2 JP H0792437 B2 JPH0792437 B2 JP H0792437B2 JP 29089486 A JP29089486 A JP 29089486A JP 29089486 A JP29089486 A JP 29089486A JP H0792437 B2 JPH0792437 B2 JP H0792437B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- objective lens
- illumination
- light source
- observation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Closed-Circuit Television Systems (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Microscoopes, Condenser (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明は物体の表面形状の観察方法およびその装置、
特にその照明のための光源装置に関する。The present invention relates to a method for observing the surface shape of an object and its apparatus,
Particularly, it relates to a light source device for the illumination.
〔従来の技術〕 物体の表面の微細形状を観察するための計測装置として
は、従来から顕微鏡やレンズを取り付けたカメラを当該
物体に近付けて、適切な照明を施すことで目的を達成し
たものがある。また表面形状を適当な材料に写し取るレ
プリカの手法が利用された。[Prior Art] As a measuring device for observing the fine shape of the surface of an object, a device that achieves its purpose by bringing a camera equipped with a microscope or lens close to the object and applying appropriate illumination has been used. is there. In addition, a replica method in which the surface shape is copied onto an appropriate material was used.
しかし、観察対象物が顕微鏡の試料台に乗らないような
大きな物であるか、生物であって生きたまま観察する必
要がある場合には直接観測には不都合があった。さら
に、表面の微細な剥離や毛状の構造は、レプリカによっ
ては観察が不可能であった。このような例のひとつとし
て、人間の皮膚表面や、植物の組織表面などの観察があ
げられる。However, direct observation is inconvenient when the observation object is a large object that does not fit on the sample stage of the microscope or when it is a living thing and needs to be observed alive. Furthermore, fine peeling of the surface and hair-like structures could not be observed with some replicas. One such example is the observation of the surface of human skin or the surface of plant tissue.
またレプリカによらず物体表面を直接に対物レンズによ
って観察をする場合には、落射照明によらなければなら
ない。細かい凹凸のある物体の表面を見るには、垂直入
射光の反射量を濃淡画像として捕らえることのできる通
常の落射照明が適している。さらに暗視野照明は、物体
で反射された直接光は対物レンズに入射しないように
し、散乱光、回折光のみで観察し、視野中の微細構造が
輝点として得られるため構造観察の有力な手段となる。
すなわち物体の表面観察にはこの２方式を適切に切り換
えて使い分けられることが必要である。When observing the surface of an object directly with an objective lens without using a replica, it is necessary to use epi-illumination. Ordinary epi-illumination, which can capture the reflection amount of vertically incident light as a grayscale image, is suitable for seeing the surface of an object having fine irregularities. Furthermore, in dark-field illumination, direct light reflected by an object is prevented from entering the objective lens and only scattered light or diffracted light is observed, and fine structures in the field of view are obtained as bright spots, which is a powerful means of structure observation. Becomes
That is, it is necessary to appropriately switch between these two methods for observing the surface of an object.
この発明は、拡大像を得るための対物レンズ、上記対物
レンズ付近に装着されて対物レンズの光軸前方向に照明
光を照射する照明装置、光源の前方にあって反射部と遮
光部を移動可能かつ光軸と同軸に配設したものからな
り、上記反射部と遮光部は後方に移動した場合には光源
から反射部と遮光部に影響なく、観察対象物体に直接光
をあてて落射照明を行い、また前方に移動したときには
遮光部により光源から観察対象物体への直接光を遮ると
ともに、反射部において光線を反射させて落射暗視野照
明を行うことを、任意に選択しうるようにされている。
加えて、いずれの方式の照明でも焦点の再設定が不用で
簡便に観察できるように観察面に付当てて拡大像を得る
ように構成される。According to the present invention, an objective lens for obtaining a magnified image, an illuminating device mounted near the objective lens to irradiate illumination light in the front direction of the optical axis of the objective lens, and a reflector and a light shield in front of a light source are moved. It is possible and arranged coaxially with the optical axis, and when the reflecting part and the light blocking part are moved backward, the light is directly applied to the observation target object from the light source without affecting the reflecting part and the light blocking part, and the epi-illumination is performed. Also, when moving forward, it is possible to arbitrarily select to block the direct light from the light source to the object to be observed by the light shielding part and to reflect the light beam in the reflecting part to perform the incident dark field illumination. ing.
In addition, any type of illumination is configured so as to obtain a magnified image by attaching it to the observation surface so that the focus cannot be reset and the observation can be performed easily.
次に本発明について図面を参照して説明する。第１図は
本発明の実施例の断面図である。すべて中心軸13につい
て軸対称に配置され、１は反射部・２は遮光部でこの２
つは一体であり、外側ケース９の内面で前後移動機構３
により可動支持されている。５は光源のストロボランプ
・４は光源用反射鏡で、光源はケース９内面に固定支持
されている。６は観察用対物レンズ・７は鏡筒で支持部
材８によりケース９に固定支持されている。ケース９の
前面には開口部11を持ったカバー12があり、カバーの前
面を観察対象10に軽く押し当てて観察した場合にレンズ
６の焦点が合うように配置されている。レンズ６の後方
には観察のためのカメラまたは接眼レンズ（図示せず）
が設けられている。Next, the present invention will be described with reference to the drawings. FIG. 1 is a sectional view of an embodiment of the present invention. All are arranged symmetrically with respect to the central axis 13, and 1 is a reflection part and 2 is a light-shielding part.
And the front and rear movement mechanisms 3 are integrated on the inner surface of the outer case 9.
It is movably supported by. 5 is a strobe lamp for a light source, 4 is a reflector for the light source, and the light source is fixedly supported on the inner surface of the case 9. An observation objective lens 6 and a lens barrel 7 are fixedly supported by a case 9 by a supporting member 8. A cover 12 having an opening 11 is provided on the front surface of the case 9, and the lens 6 is arranged so that the lens 6 is focused when the front surface of the cover is lightly pressed against the observation object 10. Behind the lens 6 is a camera for observation or an eyepiece (not shown)
Is provided.
反射部・遮光部を第１図のように後方に移動した場合、
光源５の出す光は反射部・遮光部には遮られず、開口部
11を通して観察対象10の表面を照明し、反射光は対物レ
ンズ６に導かれる。この場合通常の落射照明となる。When the reflector / light shield is moved backward as shown in Fig. 1,
The light emitted from the light source 5 is not blocked by the reflection portion and the light shielding portion, and the opening portion
The surface of the observation object 10 is illuminated through 11 and the reflected light is guided to the objective lens 6. In this case, normal epi-illumination is used.
また、反射部・遮光部を第２図のように前方に移動する
と、直接光は遮光部２に遮られて開口部11に達しない。
また反射部１により反射された後、観察対象10の表面で
さらに反射された光線は、直接反射光線は観察対象10の
表面への入射角が小さ過ぎて対物レンズには達せず、散
乱光・乱反射光のみを観察できる。すなわち落射暗視野
照明として動作する。この場合でも対物レンズと観察対
象10との間隔は図１の場合と変わらないため、焦点合わ
せをやり直す必要はない。Further, when the reflecting portion / light-shielding portion is moved forward as shown in FIG. 2, the direct light is blocked by the light-shielding portion 2 and does not reach the opening 11.
Further, after being reflected by the reflecting portion 1, the light ray further reflected by the surface of the observation target 10 is a directly reflected light ray because the incident angle on the surface of the observation target 10 is too small to reach the objective lens and scattered light. Only diffusely reflected light can be observed. That is, it operates as epi-illumination dark field illumination. Even in this case, since the distance between the objective lens and the observation object 10 is the same as that in the case of FIG. 1, it is not necessary to refocus.
また、焦点合わせは、いずれの照明方式においても、単
に前面カバーを（観察する物体に影響を与えない程度
に）物体の表面に軽く押し当てるだけですむため、観察
対象を試料台等に固定する必要はない。したがって、生
物をそのまま観察でき、また観察装置を可搬型に構成し
て任意の場所で観察可能にできる。In addition, focusing can be achieved by simply pressing the front cover lightly on the surface of the object (to the extent that it does not affect the object to be observed) regardless of the illumination method, so that the observation target is fixed to the sample table etc. No need. Therefore, the living thing can be observed as it is, and the observation device can be configured to be portable so that it can be observed at any place.
以上により、反射部・遮光部を前後させるだけで、落射
照明と落射暗視野照明とが切り換えられる。As described above, epi-illumination and epi-illumination dark-field illumination can be switched simply by moving the reflecting part and the light-shielding part back and forth.
この発明は、上記の構成により、通常の落射照明と落射
暗視野照明を任意に選択でき、加えて、いずれの方式の
照明でも焦点の再設定が不用で、容易に物体表面を直接
に観察しうる観察装置を実現できる。According to the present invention, with the above-mentioned configuration, ordinary epi-illumination and epi-illumination dark-field illumination can be arbitrarily selected, and in addition, it is unnecessary to reset the focus in any type of illumination, and it is easy to directly observe the object surface. It is possible to realize a observing device.
第１図・第２図は本発明の一実施例を示す図。 １は反射部・２は遮光部・３は移動機構・４は光源用反
射鏡・５は光源のストロボランプ・６は観察用対物レン
ズ・７は鏡筒・８は支持部材・９はケース・10は観察対
象・11は開口部・12はカバー・13は光学系の光軸であ
る。1 and 2 are views showing an embodiment of the present invention. Reference numeral 1 is a reflecting portion, 2 is a light shielding portion, 3 is a moving mechanism, 4 is a light source reflecting mirror, 5 is a light source strobe lamp, 6 is an observation objective lens, 7 is a lens barrel, 8 is a supporting member, and 9 is a case. 10 is an observation object, 11 is an opening, 12 is a cover, and 13 is an optical axis of the optical system.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 大坂 哲司 東京都江東区亀戸９丁目19番地20−904 (72)発明者 伊藤 裕幸 神奈川県川崎市麻生区百合ケ丘１丁目18番 地 (56)参考文献 特開 昭56−151912（ＪＰ，Ａ) 実開 昭63−128730（ＪＰ，Ｕ) 実開 昭61−29712（ＪＰ，Ｕ) 実開 昭60−118115（ＪＰ，Ｕ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tetsuji Osaka 20-904, 9-19 Kameido, Koto-ku, Tokyo 20-904 (72) Inventor Hiroyuki Ito 1-18 Yurigaoka, Aso-ku, Kawasaki-shi, Kanagawa (56) References JP-A-56-151912 (JP, A) Actually opened 63-128730 (JP, U) Actually opened 61-29712 (JP, U) Actually opened 60-118115 (JP, U)
Claims (1)
レンズ周辺に装着されて対物レンズの光軸前方向に照明
光を照射する照明装置、光源の前方にあって光軸と同軸
に配設され一体で移動可能な反射部と遮光部からなり、
上記反射部と遮光部は後方に移動した場合には光源から
観察対象物体に直接光が当り、前方に移動したときには
遮光部により光源から観察対象物体への直接光を遮ると
ともに、反射部において光線を反射させて暗視野照明を
行うことを特徴とした物体表面形状の観察装置。1. An objective lens for obtaining a magnified image, an illuminating device which is mounted around the objective lens and illuminates illumination light in the front direction of the optical axis of the objective lens, and is arranged in front of the light source and coaxial with the optical axis. It consists of a reflective part and a light blocking part that are installed and can move in one body,
When the reflection part and the light shielding part move backward, the light directly hits the observation target object from the light source, and when the reflection part and the light shielding part move forward, the light shielding part blocks the direct light from the light source to the observation target object. An apparatus for observing the surface shape of an object, characterized by reflecting light to illuminate the dark field.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29089486A JPH0792437B2 (en) | 1986-12-05 | 1986-12-05 | Surface shape observation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29089486A JPH0792437B2 (en) | 1986-12-05 | 1986-12-05 | Surface shape observation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63142239A JPS63142239A (en) | 1988-06-14 |
| JPH0792437B2 true JPH0792437B2 (en) | 1995-10-09 |
Family
ID=17761883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29089486A Expired - Lifetime JPH0792437B2 (en) | 1986-12-05 | 1986-12-05 | Surface shape observation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0792437B2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB8718073D0 (en) * | 1987-07-30 | 1987-09-03 | King J T | Surface inspection lighting scheme |
| JPH0344655U (en) * | 1989-09-06 | 1991-04-25 | ||
| JPH03223972A (en) * | 1990-01-29 | 1991-10-02 | Ezel Inc | camera lighting device |
| EP1424551A4 (en) | 2001-07-27 | 2008-07-09 | Nippon Sheet Glass Co Ltd | Method for evaluating contamination of object surface and imaging box used for this method |
| JP4599941B2 (en) * | 2004-08-20 | 2010-12-15 | 株式会社ニコン | Automatic focus detection apparatus and microscope system including the same |
| US20060092276A1 (en) * | 2004-10-28 | 2006-05-04 | Ariglio James A | Inspection system and method for identifying surface and body defects in a glass sheet |
| JP6438703B2 (en) * | 2014-08-21 | 2018-12-19 | バンドー化学株式会社 | Foreign matter inspection apparatus, foreign matter inspection system, and foreign matter inspection method |
-
1986
- 1986-12-05 JP JP29089486A patent/JPH0792437B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63142239A (en) | 1988-06-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |