JPH079358Y2 - Exhaust gas cooling structure in induction plasma application equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to an exhaust gas cooling structure in an induction plasma application apparatus such as an induction plasma film forming apparatus.

[Prior Art] In such an induction plasma application device, a high-frequency coil for heating is wound around the outer periphery of a cylindrical induction plasma generation part (torch) formed of an insulating material, and a plasma generation gas is introduced into the torch. It is configured to be installed. In this configuration, when high-frequency power is supplied to the high-frequency coil, induction plasma is generated inside the torch, but the temperature of this induction plasma is as high as about 10,000 to 15,000 degrees, and the material inside the plasma is high. The substance can be dissolved or vaporized by passing through a powder of the substance. The dissolved or vaporized substance is projected onto a material arranged in a chamber communicating with the torch, a film of the desired substance is formed on the material, or a fine powder of the substance is produced.

By the way, this high-frequency induction plasma is generated in a vacuum (about 10 Torr to 760 Torr) in which the atmospheric pressure is close to the atmospheric pressure.
It is necessary to evacuate the inside of the chamber communicating with the plasma generation torch with an oil rotary pump through an exhaust pipe. The plasma generating gas is, for example, several tens to several tens.
It is introduced into the torch at a flow rate of 0 l / min. here,
Since the gas discharged from the chamber has an extremely high temperature (about 300 to 500 ° C), when such a high temperature gas enters the oil rotary pump, the pump is abnormally heated and the working oil boils. As a result, the pump cannot be used.

[Problems to be solved by the invention] Therefore, conventionally, the discharge pipe is lengthened to be immersed in the cooling tank, or the discharge pipe is formed in a double structure so that cooling water is provided between the inner pipe and the outer pipe. The temperature of the exhaust gas is lowered by introducing it into the oil rotary pump, but with these methods, the exhaust pipe must be long and the structure is complicated and large, and the cost is low. There is an inconvenience.

Then, this invention is made | formed in view of this point, and an object of this invention is to provide the exhaust gas cooling structure which can cool exhaust gas with a small and simple structure.

[Means for Solving the Problems] In order to achieve the above object, the exhaust gas cooling structure in the induction plasma application apparatus of the present invention is provided with a torch for generating induction plasma and a communication with the torch. A chamber and a discharge pipe for discharging the high temperature gas in the chamber to the outside are provided, and at least 2 is provided in the discharge pipe.
The partition plates made of a good heat conductor are used for partitioning, and the partition plates are integrated with each other by a cooling pipe, and the partition plates of each adjacent partition plate are positioned so that the notches are located on the opposite sides of the outer periphery of each partition plate. A notch is formed in the plate, and cooling water is caused to flow through the cooling pipe to cool each partition plate so that the high temperature gas from the chamber flowing in the discharge pipe is cooled.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[Embodiment] FIG. 1 is a schematic view showing an example of an exhaust gas cooling structure in a plasma application apparatus according to the present invention, and FIG. 2 is an AA of FIG.
It is an expanded sectional view.

In FIGS. 1 and 2, reference numeral 1 is a cylindrical torch made of an insulating material such as quartz having good thermal conductivity. At the upper end of the torch is a metal gas supply nozzle 2,
A high frequency coil 3 is wound around the outer circumference. A plurality of holes 4 are formed in the gas supply nozzle 2, and these holes are connected to a gas supply source and a film-forming substance supply source (not shown). The high frequency coil 3 is connected to a high frequency power source (not shown).

Reference numeral 5 denotes a chamber connected to the lower portion of the torch 1, and the material 6 is installed on the inner bottom portion thereof. Reference numeral 7 is an oil rotary pump for exhausting the inside of the chamber 5 through a discharge pipe 8.

Reference numerals 9a to 9f are disc-shaped partition plates for partitioning the inside of the discharge pipe 8. These partition plates are formed so that the outer diameter thereof is slightly smaller than the inner diameter of the discharge pipe so that they can be inserted into and removed from the discharge pipe. is there. Further, cutouts 10a to 10f are provided on the outer peripheral portion of each partition plate.
Are provided respectively. Further, each partition plate is fitted and fixed to the outer circumference of the cooling pipe 10 which is bent in a U shape at an arbitrary interval. At this time, they are attached so that the positions of the notches in the adjacent partition plates are on opposite sides.
Both ends of the cooling pipe 11 are vacuum seal members 12a and 12b.
It is taken out into the air in a state of being kept airtight through, one end is connected to a faucet, and tap water is made to flow.

In this way, since the partition plates 9a to 9f are cooled by the tap water flowing through the cooling pipe 11, the high temperature exhaust gas hits the respective cooling plates and is cooled. At this time, since the cutouts 10A to 10f formed in each cooling plate are alternately arranged at the opposite positions, the exhaust gas flows in a zigzag manner as indicated by an arrow F in FIG. 1, thereby colliding with the partition plate. Since the number of exhaust gases to be discharged increases (the heat transfer area of the partition plate with respect to the exhaust gases becomes large), the exhaust gases are efficiently cooled. Exhaust gas that has passed through the partition plate is guided to the oil rotary pump while being cooled to around room temperature, preventing the oil rotary pump from becoming unusable due to boiling of hydraulic oil as in the past. it can. On the other hand, since each partition plate inserted in the discharge pipe can be taken out together with the cooling pipe, it is possible to clean even if the fine powder dissolved in the plasma adheres to each partition plate and becomes dirty. Becomes

It should be noted that the above description is an example of the present invention, and various modifications are conceivable in implementation. For example, although the oil rotary pump is connected to the discharge pipe to forcibly discharge the gas in the above-described embodiment, the present invention can be implemented when the oil rotary pump is discharged to the outside without being connected.

[Effect] As described in detail above, according to the present invention, the high temperature gas is cooled while flowing in a zigzag manner in the discharge pipe, so that the high temperature gas can be efficiently cooled with a small and simple structure.

[Brief description of drawings]

FIG. 1 is a schematic view showing an example of an exhaust gas cooling structure in a plasma application apparatus according to the present invention, and FIG. 2 is an AA of FIG.
It is an expanded sectional view. 1: Torch, 2: Gas supply nozzle 3: High frequency coil, 4: Hole 5: Chamber, 6: Material 7: Oil rotary pump, 8: Discharge pipe 9a to 9f: Partition plate 10a to 10f: Notch 11: Cooling pipe

Claims (1)

[Scope of utility model registration request] 1. A torch for generating induction plasma, a chamber provided so as to communicate with the torch, and a discharge pipe for discharging high temperature gas in the chamber to the outside, and at least the inside of the discharge pipe is provided. The two partition plates made of a good conductor are used for partitioning, and each partition plate is integrated with each other by a cooling pipe. The notch parts of the adjacent partition plates are located on opposite sides of the outer peripheral parts of the partition plates, respectively. Induction plasma application characterized in that a notch is formed in the partition plate, and cooling water is flowed through the cooling pipe to cool each partition plate to cool the high temperature gas from the chamber flowing in the discharge pipe. Exhaust gas cooling structure in equipment.