JPH0322400U - - Google Patents

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Publication number
JPH0322400U
JPH0322400U JP8283889U JP8283889U JPH0322400U JP H0322400 U JPH0322400 U JP H0322400U JP 8283889 U JP8283889 U JP 8283889U JP 8283889 U JP8283889 U JP 8283889U JP H0322400 U JPH0322400 U JP H0322400U
Authority
JP
Japan
Prior art keywords
cooling
partition plate
chamber
exhaust pipe
partition plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8283889U
Other languages
Japanese (ja)
Other versions
JPH079358Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8283889U priority Critical patent/JPH079358Y2/en
Publication of JPH0322400U publication Critical patent/JPH0322400U/ja
Application granted granted Critical
Publication of JPH079358Y2 publication Critical patent/JPH079358Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Physical Or Chemical Processes And Apparatus (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案に係るプラズマ応用装置におけ
る排出ガスの冷却構造の一例を示す概略図、第２
図は第１図のＡＡ拡大断面図である。 １……トーチ、２……ガス供給ノズル、３……
高周波コイル、４……孔、５……チヤンバー、６
……材料、７……油回転ポンプ、８……排出管、
９ａ乃至９ｆ……仕切板、１０ａ乃至１０ｆ……
切欠、１１……冷却パイプ。 Fig. 1 is a schematic diagram showing an example of an exhaust gas cooling structure in a plasma application device according to the present invention;
The figure is an enlarged sectional view taken along line AA in FIG. 1. 1...Torch, 2...Gas supply nozzle, 3...
High frequency coil, 4...hole, 5...chamber, 6
...Material, 7...Oil rotary pump, 8...Discharge pipe,
9a to 9f... partition plate, 10a to 10f...
Notch, 11...Cooling pipe.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 誘導プラズマを発生させるためのトーチと、該
トーチに連通するように設けられたチヤンバーと
、該チヤンバー内の高温ガスを外部に排出する排
出管とを備え、前記排出管内を少なくとも２枚の
熱良導体製仕切板にて仕切ると共にこの各仕切板
を冷却パイプにて互いに一体化し、各隣り合う仕
切板について切欠部が該各仕切板外周部の互いに
反対側に位置するように夫々仕切板に切欠部を形
成し、前記冷却パイプに冷却水を流して各仕切板
を冷却することにより排出管内を流れるチヤンバ
ーからの高温ガスを冷却するように構成したこと
を特徴とする誘導プラズマ応用装置における排出
ガス冷却構造。 A torch for generating induced plasma, a chamber provided to communicate with the torch, and an exhaust pipe for discharging high-temperature gas in the chamber to the outside, and at least two sheets of good thermal conductor are provided inside the exhaust pipe. The partition plates are partitioned by manufactured partition plates, and the partition plates are integrated with each other by cooling pipes, and cutouts are provided in each partition plate so that the cutouts are located on opposite sides of the outer periphery of each partition plate for each adjacent partition plate. Exhaust gas cooling in an induced plasma application device, characterized in that the high temperature gas from the chamber flowing in the exhaust pipe is cooled by cooling each partition plate by flowing cooling water through the cooling pipe. structure.
JP8283889U 1989-07-14 1989-07-14 Exhaust gas cooling structure in induction plasma application equipment Expired - Lifetime JPH079358Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8283889U JPH079358Y2 (en) 1989-07-14 1989-07-14 Exhaust gas cooling structure in induction plasma application equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8283889U JPH079358Y2 (en) 1989-07-14 1989-07-14 Exhaust gas cooling structure in induction plasma application equipment

Publications (2)

Publication Number Publication Date
JPH0322400U true JPH0322400U (en) 1991-03-07
JPH079358Y2 JPH079358Y2 (en) 1995-03-06

Family

ID=31630000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8283889U Expired - Lifetime JPH079358Y2 (en) 1989-07-14 1989-07-14 Exhaust gas cooling structure in induction plasma application equipment

Country Status (1)

Country Link
JP (1) JPH079358Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021115535A (en) * 2020-01-27 2021-08-10 株式会社Helix Decomposition processing equipment and cooling equipment used for this
CN113993264A (en) * 2021-11-05 2022-01-28 北京环境特性研究所 Plasma torch and cooling method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021115535A (en) * 2020-01-27 2021-08-10 株式会社Helix Decomposition processing equipment and cooling equipment used for this
JP2024113008A (en) * 2020-01-27 2024-08-21 株式会社Helix Decomposition treatment device and cooling device used therein
CN113993264A (en) * 2021-11-05 2022-01-28 北京环境特性研究所 Plasma torch and cooling method thereof
CN113993264B (en) * 2021-11-05 2023-11-14 北京环境特性研究所 Plasma torch and cooling method thereof

Also Published As

Publication number Publication date
JPH079358Y2 (en) 1995-03-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term