JPH0794967B2 - トンネル顕微鏡測定回路 - Google Patents

トンネル顕微鏡測定回路

Info

Publication number: JPH0794967B2
Authority: JP; Japan
Prior art keywords: sample; test probe; tip; distance; tunnel current
Prior art date: 1989-03-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP2068511A

Other languages

English (en)

Japanese (ja)

Other versions

JPH02285203A (ja

Inventor

ジヨージ・リナーグータイ・チユ

ジイーン―マーク・ハルボート

Original Assignee

インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-03-23

Filing date

1990-03-20

Publication date

1995-10-11

1990-03-20 Application filed by インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン filed Critical インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン

1990-11-22 Publication of JPH02285203A publication Critical patent/JPH02285203A/ja

1995-10-11 Publication of JPH0794967B2 publication Critical patent/JPH0794967B2/ja

2010-10-11 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

239000000523 sample Substances 0.000 claims description 92
238000012360 testing method Methods 0.000 claims description 39
238000005259 measurement Methods 0.000 claims description 19
230000005641 tunneling Effects 0.000 claims description 15
238000000034 method Methods 0.000 claims description 5
230000010355 oscillation Effects 0.000 claims 1
239000004020 conductor Substances 0.000 description 27
238000010586 diagram Methods 0.000 description 8
238000005070 sampling Methods 0.000 description 8
230000000694 effects Effects 0.000 description 4
239000013078 crystal Substances 0.000 description 3
230000000737 periodic effect Effects 0.000 description 2
239000004065 semiconductor Substances 0.000 description 2
230000001360 synchronised effect Effects 0.000 description 2
238000011088 calibration curve Methods 0.000 description 1
238000009924 canning Methods 0.000 description 1
230000007423 decrease Effects 0.000 description 1
230000005284 excitation Effects 0.000 description 1
238000012827 research and development Methods 0.000 description 1
238000004574 scanning tunneling microscopy Methods 0.000 description 1
229910052710 silicon Inorganic materials 0.000 description 1
239000010703 silicon Substances 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
- G01Q60/14—STP [Scanning Tunnelling Potentiometry]
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/861—Scanning tunneling probe
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/872—Positioner

Landscapes

Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Chemical & Material Sciences (AREA)
Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
General Health & Medical Sciences (AREA)
Health & Medical Sciences (AREA)
Radiology & Medical Imaging (AREA)
General Engineering & Computer Science (AREA)
Nanotechnology (AREA)
Analytical Chemistry (AREA)
Crystallography & Structural Chemistry (AREA)
Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

JP2068511A 1989-03-23 1990-03-20 トンネル顕微鏡測定回路 Expired - Lifetime JPH0794967B2 (ja)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US07/327,863 US5019707A (en)	1989-03-23	1989-03-23	High speed waveform sampling with a tunneling microscope
US327863		1994-10-24

Publications (2)

Publication Number	Publication Date
JPH02285203A JPH02285203A (ja)	1990-11-22
JPH0794967B2 true JPH0794967B2 (ja)	1995-10-11

Family

ID=23278403

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2068511A Expired - Lifetime JPH0794967B2 (ja)	1989-03-23	1990-03-20	トンネル顕微鏡測定回路

Country Status (4)

Country	Link
US (1)	US5019707A (de)
EP (1)	EP0388640B1 (de)
JP (1)	JPH0794967B2 (de)
DE (1)	DE69003565T2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2775464B2 (ja) *	1989-04-27	1998-07-16	キヤノン株式会社	位置検出装置
DE4324983C2 (de) *	1993-07-26	1996-07-11	Fraunhofer Ges Forschung	Akustisches Mikroskop
US5874668A (en) *	1995-10-24	1999-02-23	Arch Development Corporation	Atomic force microscope for biological specimens
KR100421375B1 (ko) *	2001-01-15	2004-03-09	제원호	고속 주사탐침 현미경용 고주파 진동 탐침

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CH643397A5 (de) *	1979-09-20	1984-05-30	Ibm	Raster-tunnelmikroskop.
DE3570012D1 (en) *	1985-01-29	1989-06-08	Ibm	Field-emission scanning auger electron microscope
US4665313A (en) *	1985-06-28	1987-05-12	International Business Machines Corporation	Apparatus and method for displaying hole-electron pair distributions induced by electron bombardment
EP0223918B1 (de) *	1985-11-26	1990-10-24	International Business Machines Corporation	Verfahren und Mikroskop zur Erzeugung von topographischen Bildern unter Anwendung atomarer Wechselwirkungskräfte mit Subauflösung
US4724318A (en) *	1985-11-26	1988-02-09	International Business Machines Corporation	Atomic force microscope and method for imaging surfaces with atomic resolution
JPS63142202A (ja) *	1986-12-05	1988-06-14	Fujitsu Ltd	高周波トンネル顕微鏡
EP0290647B1 (de) *	1987-05-12	1991-07-24	International Business Machines Corporation	Atomares Kräftemikroskop mit oscillierendem Quarz

1989
- 1989-03-23 US US07/327,863 patent/US5019707A/en not_active Expired - Fee Related
1990
- 1990-02-19 DE DE90103155T patent/DE69003565T2/de not_active Expired - Lifetime
- 1990-02-19 EP EP90103155A patent/EP0388640B1/de not_active Expired - Lifetime
- 1990-03-20 JP JP2068511A patent/JPH0794967B2/ja not_active Expired - Lifetime

Also Published As

Publication number	Publication date
DE69003565T2 (de)	1994-05-11
JPH02285203A (ja)	1990-11-22
EP0388640A3 (en)	1990-11-22
EP0388640B1 (de)	1993-09-29
EP0388640A2 (de)	1990-09-26
US5019707A (en)	1991-05-28
DE69003565D1 (de)	1993-11-04

Publication	Publication Date	Title
JP2915554B2 (ja)	1999-07-05	バリアハイト測定装置
US5319977A (en)	1994-06-14	Near field acoustic ultrasonic microscope system and method
EP0410131B1 (de)	1993-09-01	Nah-Feld Lorentz-Kraft-Mikroskopie
Becker et al.	1985	Electron interferometry at crystal surfaces
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KR20180129941A (ko)	2018-12-05	헤테로다인 주사 탐침 현미경 방법 및 시스템
CN102692523B (zh)	2016-12-28	悬臂的振动特性测定方法
MacDonald et al.	1969	Time‐resolved scanning electron microscopy and its application to bulk‐effect oscillators
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US20080307864A1 (en)	2008-12-18	Scan Type Probe Microscope
CN112945960A (zh)	2021-06-11	一种高通量扫描探针显微成像系统
JPH0823014A (ja)	1996-01-23	信号波形測定装置及び信号波形測定方法
CN215985760U (zh)	2022-03-08	一种高通量扫描探针显微成像系统
Schmitt et al.	1986	E-beam testing of high-speed electronic devices
JPH0712824A (ja)	1995-01-17	電位分布測定機能を備える走査型トンネル顕微鏡
Said et al.	2000	High resolution sampling electrostatic force microscopy using pulse width modulation technique
Strozewski et al.	1992	High-frequency surface-displacement detection using an STM as a mixer-demodulator
JP2015172597A (ja)	2015-10-01	変位検出機構およびそれを用いた走査型プローブ顕微鏡
Bloom	1994	Voltage-contrast scanning probe microscopy
JP3376374B2 (ja)	2003-02-10	プローブ顕微鏡における試料表面のイメージ作成方法
JP2002286613A (ja)	2002-10-03	高周波特性測定装置
JPH08248082A (ja)	1996-09-27	電位分布測定方法および走査型顕微鏡