JPH0811128A - Preventive structure of rotary vibration of wire reel - Google Patents

Abstract

PURPOSE:To provide rotary vibration preventive structure of a wire reel which can correct easily rotary balance of a wire reel and improve cutting accuracy of a work. CONSTITUTION:An annular cavities 32, 32... leaving a columnar shaft core 30 within are formed within a wire reel 10 into a stratified state by partition plates 33, 33.... Then a large number of spherical balance weights 40, 40... are enclosed respectively into the cavities 32, 32.... Then when the wire reel 10 is turned under an unbalanced state, the balance weight 40, 40... within the cavities 32, 32... are moved within a light weight part of a source of the unbalance vibration. Then the moved balanced weights 40, 40... are worked so as to correct a rotary deflection of the wire reel 10 by centrifugal force of a rotary direction. Hereby, the rotary deflection of the wire reel 10 can be corrected automatically. Therefore, the wire reel 10 does not generate the unbalance vibration at the time of a rotation and cutting accuracy of a work can be improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire reel balance correction structure for a wire saw, and more particularly to a semiconductor ingot,
The present invention relates to a rotational vibration prevention structure for a wire reel of a wire saw that cuts a workpiece such as ceramics or glass into a large number of thin wafers with a traveling wire.

[0002]

2. Description of the Related Art A wire saw is one of the cutting devices for cutting a workpiece such as a semiconductor ingot, ceramic, or glass into many thin plate-shaped wafers. In this wire saw, a wire is wound around a plurality of grooved rollers to form a wire row, one end of the wire is wound around one wire reel, and the other end is wound around the other wire reel. To be done. Then, when the wire reciprocates at a high speed between one wire reel and the other wire reel, while pressing the workpiece to the wire row, while supplying a working fluid containing abrasive grains to the wire row, The lapping action of the abrasive grains cuts the workpiece into a large number of thin plate wafers.

This wire saw has an advantage that it can relatively easily slice a material having a large diameter or a material having a small diameter with the same machine, but on the other hand, it has a higher cutting accuracy than other cutting devices. There is a problem of being low. There are several possible causes for the decrease in the cutting accuracy, and unbalance vibration during rotation of the wire reel is one of them. Unbalanced vibration when the wire reel is rotating is the vibration during rotation that occurs because the wire reel itself is not balanced or the wire is not wound accurately and the wire is unevenly distributed. It is transmitted to the cutting part and reduces the cutting accuracy of the work piece.

[0004]

However, the conventional wire saw has not dealt with the unbalanced vibration of the wire reel. For this reason, it is necessary not only to reduce the cutting accuracy of the workpiece but also to eliminate the unbalanced vibration that adversely affects the wire saw body.

The present invention has been made in view of the above circumstances, and it is possible to easily correct the rotational balance of the wire reel in the wire saw and to improve the cutting accuracy of the workpiece. It is an object of the present invention to provide a structure for preventing rotational vibration of.

[0006]

In order to achieve the above-mentioned object, the present invention presses a work piece against a wire running between one wire reel and the other wire reel, and at the same time, abrasive grains are applied to the wire. Is a wire saw that supplies a working liquid containing, and cuts the workpiece into a large number of thin plate-shaped wafers, and connects the wire reel that winds or sends out the wire to a turntable that is the rotational power side. In the wire saw for rotating the wire reel, the wire reel or the turntable is formed with a balance weight mounting portion for mounting a balance weight member for correcting unbalance vibration of the wire reel. To do.

In order to achieve the above object, a work piece is pressed against a wire traveling between one wire reel and the other wire reel, and a working fluid containing abrasive grains is supplied to the wire. A wire saw that cuts the workpiece into a large number of thin plate wafers, and the wire reel that winds or sends out the wire is connected to a turntable that is a rotational power side to rotate the wire reel. In the wire saw, the inside of the wire reel is formed into an annular cavity, and a movable balance weight member is enclosed in the cavity.

[0008]

According to the first aspect of the present invention, it is simple and easy to attach the necessary amount of balance weight member based on the measurement result of the unbalanced vibration of the wire reel to the balance weight attachment portion formed on the wire reel or the turntable. Rotational runout of the wire reel can be corrected quickly. As a result, unbalanced vibration does not occur when the wire reel rotates. Therefore, the vibration during the operation of the wire saw is reduced, and the cutting accuracy for cutting the workpiece can be improved.

According to the second aspect of the present invention, the necessary amount of balance weight member is inserted into the balance weight insertion hole formed at a predetermined position of the wire reel or the turntable, and the stopper is fixed. Can be modified to According to the third aspect, it is possible to easily and quickly correct the rotational runout of the wire reel by simply sliding the balance weight member to a predetermined position along the rail.

In the fourth aspect, when the wire reel rotates in an unbalanced state, the balance weight member (a large number of balls or liquid) inside the wire reel moves to the light weight portion which is the source of the unbalanced vibration. Then, the moved balance weight member works to normally correct the rotational runout of the wire reel by the centrifugal force in the rotating direction.
As a result, unbalanced vibration does not occur when the wire reel rotates. Therefore, the vibration during the operation of the wire saw is reduced, and the cutting accuracy for cutting the workpiece can be improved.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of a rotational vibration preventing structure for a wire reel according to the present invention will be described in detail below with reference to the accompanying drawings. FIG. 1 is an explanatory view of a first embodiment of a rotational vibration preventing structure for a wire reel according to the present invention, and FIG. 2 is A- of FIG.
FIG. The wire reel 10 is composed of a cylindrical body 12 and disk-shaped flanges 14, 14.
The flanges 14 and 14 are fixed to both ends of the body. On the outer peripheral surfaces of the flanges 14, 14 of the wire reel 10, screw holes 20, 20 ... For mounting the balance weights 18, 18 ... Are formed at four locations in the circumferential direction at equal intervals. Also, the body 12 and the flange 14,
A bolt hole 21 for bolting to the turntable on the rotary power side is formed in the center of the bolt 14. FIG. 3 is an enlarged view of the screw holes 20, 20 ... As shown in FIG. 3, the screw holes 20, 20 ...
Hexagon socket head cap screws 22, 22 ... Which can be buried in Nos. When attaching the balance weights 18, 18 ..., the balance weights 18, 18 ... Inserted in the predetermined screw holes 20, 20 ... are pushed to the ends of the screw holes 20, 20. To fix.

Next, a method of correcting the rotational balance of the wire reel 10 will be described using the wire reel 10 configured as described above. The wire reel 10 is connected to a turntable and rotated without rewinding or winding a wire (not shown). At this time, if the rotation balance of the wire reel 10 is poor, the wire reel 10 cannot rotate normally, causing unbalanced vibration due to rotational shake. This unbalanced vibration is measured with a rotation balance meter. Then, based on the measurement result of the rotation balance meter, predetermined balance weights 18, 18, ... Are put in predetermined screw holes 20 and fixed by bolts 22, so that the rotational shake of the wire reel 10 is corrected. By the way, as this rotation balance meter, a well-known one can be used, and which screw hole 20, 20 ... Of the four screw holes 20, 20 ... Formed in the flanges 14, 14 of the wire reel 10 respectively. It is possible to understand how much weight the balance weights 18, 18, ... Can be attached to correct the rotational shake of the wire reel 10.

As described above, according to the first embodiment of the structure for preventing the rotation and vibration of the wire reel of the present invention, it is easy to correct the rotational runout of the wire reel 10 only by fixing the balance weight 18 in the screw hole 20. In addition, it can be performed quickly, and thus unbalanced vibration can be prevented. Therefore, vibration during the operation of the wire saw is reduced, so that the cutting accuracy of the workpiece can be improved. Further, since the balance weights 18, 18 ... Can be attached and detached, even if the wire reel 10 is deformed and the balance is changed because the wire is wound around the wire reel 10, the rotation shake can be easily corrected each time. It can be carried out. Further, since the balance weights 18, 18, ... Are buried in the screw holes 20, 20, ... Formed in the wire reel 10,
It is possible to prevent the wire reel 10 from protruding to the outer peripheral surface.

Next, a second embodiment of the rotational vibration preventing structure for a wire reel according to the present invention will be described. FIG. 4 is an explanatory diagram of a second embodiment of the rotational vibration preventing structure for a wire reel according to the present invention. The same members as those in the first embodiment will be described with the same reference numerals. As shown in FIG. 4, the wire reel 1
Rails 24 and 24 are formed on the outer peripheral surfaces of the flanges 14 and 14, respectively. 5 shows this rail 24,
FIG. 24 is an enlarged view of a main part of FIG. 24, and FIG. As shown in FIGS. 5 and 6, the rails 24, 24
The outer peripheral surfaces of the flanges 14, 14 are formed in a dovetail groove shape. Then, the dovetail-shaped rails 24, 24
The balance weights 26, 26 having a shape that can be loosely fitted to the rails 24, 24 are detachably and slidably provided, and can be fixed by tightening bolts 28 at arbitrary positions.

Next, a method of correcting the balance of the wire reel 10 will be described using the wire reel 10 configured as described above. The wire is unwound and the wire reel 10 is connected to the turntable and rotated without being wound. At this time, if the rotation balance of the wire reel 10 is poor, the wire reel 10 causes unbalanced vibration. This unbalanced vibration is measured by the same rotation balance meter as in the first embodiment. Then, based on the measurement result of the rotation balance meter, the balance weights 26, 26 having predetermined weights are slid to predetermined positions on the rails 24, 24, and bolts 28, 28 are tightened and fixed.

As described above, according to the second embodiment of the rotational vibration preventing structure of the wire reel of the present invention, the rotational shake of the wire reel 10 is caused only by sliding the balance weights 26, 26 along the rails 24, 24. Can be corrected easily and quickly. Therefore, unbalanced vibration can be prevented and the cutting accuracy of the workpiece can be improved. Next, a description will be given of a third embodiment of the rotational vibration preventing structure for a wire reel according to the present invention. FIG.
It is explanatory drawing of 3rd Example of the rotation vibration prevention structure of the wire reel of this invention. The same members as those in the first embodiment will be described with the same reference numerals.

As shown in FIG. 7, in the inside of the body portion 12 and the flanges 14, 14 of the wire reel 10, annular cavities 32, 32, ...
Are formed in layers. Then, on the outer peripheral surface of the body portion 12, the cavities 32, 32 formed inside,
Screw holes 34, 34, 34 are formed so as to penetrate through each of the 32, and bolts 36, 36, 36 that do not protrude from the outer peripheral surface are screwed into the screw holes 34, 34, 34, respectively. Also, the face plate 14 on the outer side of the flanges 14, 14
A and 14A are detachably provided by stopping the bolts 38, 38 ... And the bolts 38, 38 ...
The face plate 1 so as not to protrude from the face plates 14A and 14A.
It is provided so that it can be buried in 4A and 14A. And
A large number of spherical balance weights 40, 40 ... Are enclosed in the respective cavities 32, 32. Further, the balance weights 40, 40 ...
It can be freely put in and taken out from Nos. 4 and 34 and the face plates 14A and 14A.

Next, a method of correcting the balance of the wire reel 10 will be described using the wire reel 10 configured as described above. The wire reel 10 in which the balance weights 40, 40 ... Are enclosed is connected to a turntable in a state in which a wire (not shown) is wound. When the wire reel 10 is rotated, the internal balance weights 40, 40 ... Also rotate at the same number of revolutions with a delay. At this time, if the rotation balance of the wire reel 10 is poor, the wire reel 10 causes unbalanced vibration due to rotational shake. However, when the wire reel 10 rotates while generating unbalanced vibration, the balance weights 40, 40 ... Inside the cavities 32, 32 ... Work to cancel the unbalanced vibration. That is, the balance weights 40, 40 ... Move to the light weight portion of the wire reel 10 which is the source of the unbalanced vibration. Then, the moved balance weights 40, 40 ... Work so as to correct the rotational shake of the wire reel 10 due to the centrifugal force in the rotating direction. As a result, the wire reel 10 can always rotate in a balanced state.

As described above, according to the third embodiment of the wire reel rotational vibration preventing structure of the present invention, the rotational shake of the wire reel 10 can be automatically corrected even while the wire saw is in operation. As a result, the occurrence of unbalanced vibration can be prevented, and the cutting accuracy of the workpiece can be improved. In addition, since the rotational shake of the wire reel 10 can be corrected even during operation, not only the correction of the imbalance of the wire reel 10 itself,
Even when the wire is not accurately wound and the wire is unevenly distributed and the balance is lost, the rotational runout of the wire reel 10 can be automatically corrected.

In this embodiment, the balance weight 4
Spheres are used for 0, 40, ... However, it is not limited to this, and for example, a liquid having high specific gravity and high viscosity may be used. Also,
In this embodiment, the cavities 32, 32, 32 formed in the body portion 12
However, the number is not limited to this, and may be four, for example.

[0021]

As described above, according to the rotational vibration preventing structure of the wire reel of the present invention, a necessary amount of balance weight based on the measurement result of the unbalance vibration of the wire reel is formed on the flange of the wire reel. The rotation runout of the wire reel can be corrected easily and quickly by simply attaching the wire reel at a predetermined position. Therefore, the unbalanced vibration is eliminated in the wire reel, so that the cutting accuracy of the non-workpiece can be improved.

Further, according to the rotational vibration preventing structure of the wire reel of the present invention, since the movable balance weight is enclosed in the annular cavity formed inside the wire reel, it is possible to rotate the wire reel while the wire reel is rotating. The balance weight works to correct the rotational runout. This allows
Rotational runout of the wire reel is automatically corrected even during operation of the wire saw, and the rotational runout of the wire reel can be corrected very easily without requiring human labor. Further, when the wire reel is not accurately wound around the wire saw and the wires are unevenly distributed and the balance is lost, the rotational runout of the wire reel can be automatically corrected. Therefore, since the wire reel can prevent unbalanced vibration, the cutting accuracy of the workpiece can be improved.

[Brief description of drawings]

FIG. 1 is an explanatory view illustrating a first embodiment of a wire reel balance correction structure for a wire saw according to the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is an enlarged view of a main part of FIG.

FIG. 4 is an explanatory view for explaining a second embodiment of the wire reel balance correction structure of the wire saw of the present invention.

5 is an enlarged view of a main part of FIG.

6 is a sectional view taken along line AA of FIG.

FIG. 7 is an explanatory view explaining a third embodiment of the wire reel balance correction structure of the wire saw of the present invention.

[Explanation of symbols]

 10 ... Wire reel 12 ... Wire reel body part 14 ... Wire reel flange 18, 26, 40 ... Balance weight 20 ... Screw hole (balance weight mounting part) 24 ... Rail (balance weight mounting part) 32 ... Cavity

Claims (7)

[Claims] Claims: 1. A work piece is pressed against a wire traveling between one wire reel and the other wire reel, and a working liquid containing abrasive grains is supplied to the wire to form a large number of thin plates. A wire saw for cutting into a wafer in the form of a wire, which rotates the wire reel by connecting the wire reel for winding or sending out the wire to a turntable that is a rotational power side, wherein the wire reel or A rotation weight vibration preventing structure for a wire reel, wherein a balance weight mounting portion for mounting a balance weight member for correcting unbalance vibration of the wire reel is formed on the turntable. 2. The balance weight mounting portion includes a plurality of balance weight insertion holes formed at predetermined intervals on the outer peripheral surface of the flange of the wire reel or the turntable, and a plug member for covering the balance weight insertion hole. The structure for preventing rotational vibration of a wire reel according to claim 1, wherein 3. The balance weight mounting portion is a rail which is formed on an outer peripheral surface of a flange of the wire reel or the turntable and slidably supports the balance weight member. Rotational vibration prevention structure for wire reels. 4. A work sheet is pressed against a wire traveling between one wire reel and the other wire reel, and a working liquid containing abrasive grains is supplied to the wire to form a large number of thin plates. A wire saw for cutting into a wafer in the form of a wire, the wire reel for winding or sending out the wire being connected to a turntable that is a rotational power side to rotate the wire reel, wherein: Is formed in an annular cavity, and a movable balance weight member is enclosed in the cavity to prevent rotational vibration of a wire reel. 5. The structure for preventing rotational vibration of a wire reel according to claim 4, wherein the balance weight member is a large number of balls. 6. The rotational vibration preventing structure for a wire reel according to claim 4, wherein the balance weight member is liquid. 7. The structure for preventing rotational vibration of a wire reel according to claim 4, wherein the cavity is provided with a partition plate which is divided into a plurality of sections in a direction orthogonal to the axial direction.