JPH08147621A - Magnetic head - Google Patents

Magnetic head

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Publication number
JPH08147621A
JPH08147621A JP28626994A JP28626994A JPH08147621A JP H08147621 A JPH08147621 A JP H08147621A JP 28626994 A JP28626994 A JP 28626994A JP 28626994 A JP28626994 A JP 28626994A JP H08147621 A JPH08147621 A JP H08147621A
Authority
JP
Japan
Prior art keywords
magnetic
thin film
alloy thin
magnetic head
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28626994A
Other languages
Japanese (ja)
Inventor
Masatsugu Miura
正嗣 三浦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Denshi KK filed Critical Hitachi Denshi KK
Priority to JP28626994A priority Critical patent/JPH08147621A/en
Publication of JPH08147621A publication Critical patent/JPH08147621A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】 【目的】 酸化物磁性材料上に磁性合金薄膜を形成する
MIG型磁気ヘッドにおいて、疑似ギャップの発生を防
止し、かつトラック幅を精度良く得ることができる構造
を有する磁気ヘッドを提供する。 【構成】 酸化物磁性材料上に形成した磁性合金薄膜を
1層毎種類を変え、磁気ギャップ形成面に近い程透磁率
の高い磁性合金薄膜を配置した構造を有するMIG型磁
気ヘッド。あるいは前記の磁性合金薄膜を1層毎薄膜の
厚さを変え、磁気ギャップ形成面に近い程厚さの薄い磁
性合金薄膜を配置した構造を有するMIG型磁気ヘッ
ド。
(57) [Abstract] [Purpose] In a MIG type magnetic head in which a magnetic alloy thin film is formed on an oxide magnetic material, a magnetic head having a structure capable of preventing generation of a pseudo gap and accurately obtaining a track width. I will provide a. A MIG type magnetic head having a structure in which a type of magnetic alloy thin film formed on an oxide magnetic material is changed for each layer, and a magnetic alloy thin film having a higher magnetic permeability is disposed closer to a magnetic gap formation surface. Alternatively, a MIG type magnetic head having a structure in which the thickness of each magnetic alloy thin film is changed for each layer, and a magnetic alloy thin film having a smaller thickness is arranged closer to a magnetic gap forming surface.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はVTR用ビデオヘッドと
して使用される磁気ヘッドに関し、特に歩留と生産性向
上を図った磁気ヘッドに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used as a video head for a VTR, and more particularly to a magnetic head whose yield and productivity are improved.

【0002】[0002]

【従来の技術】酸化物磁性材料と合金磁性薄膜等、2種
の磁性材料を用いた従来の磁気ヘッドにおいては、2種
の磁性材料の接合面を磁気ギャップと平行にしたものが
ある。本方法によれば生産性は良好であるが2種の磁性
材料接合面が疑似ギャップとして作用し、大きく磁気特
性を劣化させる。
2. Description of the Related Art In a conventional magnetic head using two kinds of magnetic materials such as an oxide magnetic material and an alloy magnetic thin film, there is one in which a joint surface of the two kinds of magnetic materials is parallel to a magnetic gap. According to this method, the productivity is good, but the two kinds of magnetic material joint surfaces act as a pseudo gap, and the magnetic characteristics are greatly deteriorated.

【0003】そのため、図3に示すように、2種の磁性
材料接合面と磁気ギャップが平行にならないよう、高透
磁率磁性材料、通常は酸化物磁性材料1、例えば単結晶
フェライトにV字状溝を設け、その上にもう一方の磁性
材料、通常は合金磁性薄膜2をスパッタリング等で形成
し、疑似ギャップの発生を防止する方法が提案されてい
る。なお、図4はこの方法で構成された磁気コアを示
す。
Therefore, as shown in FIG. 3, a high permeability magnetic material, usually an oxide magnetic material 1, such as a single crystal ferrite, is V-shaped so that the two magnetic material bonding surfaces and the magnetic gap are not parallel to each other. A method has been proposed in which a groove is provided and another magnetic material, usually an alloy magnetic thin film 2, is formed on the groove by sputtering or the like to prevent the occurrence of a pseudo gap. Note that FIG. 4 shows a magnetic core constructed by this method.

【0004】しかし、本方法ではトラック幅となる部分
6が、V字状の先端部分をラップマスター等で研磨して
形成されるので、研磨量によりトラック幅が決定され、
その精度確保が困難である。一方、最近のVTR用ビデ
オヘッドに要求されるトラック幅精度は±1μm以下で
ある。このためトラック幅不良発生の割合が高く、生産
歩留が低下する。
However, in this method, the track width portion 6 is formed by polishing the V-shaped tip portion with a lap master or the like, so the track width is determined by the polishing amount.
It is difficult to ensure its accuracy. On the other hand, the track width accuracy required for recent VTR video heads is ± 1 μm or less. Therefore, the rate of occurrence of track width defects is high, and the production yield is reduced.

【0005】そこで、2種の磁性材料接合面と磁気ギャ
ップが平行になっても2種の磁性材料接合面が疑似ギャ
ップとして作用しないよう磁気ギャップ形成面に、Cr
等の非磁性金属薄膜を形成する方法が提案されている。
しかし、本方法でも完全に疑似ギャップの作用を防止す
ることはできず、良好な電磁変換特性を得ることが困難
である。
Therefore, Cr is formed on the magnetic gap forming surface so that the two kinds of magnetic material joint surfaces do not act as pseudo gaps even if the two kinds of magnetic material joint surfaces are parallel to each other.
A method of forming a non-magnetic metal thin film such as the above has been proposed.
However, even this method cannot completely prevent the action of the pseudo gap, and it is difficult to obtain good electromagnetic conversion characteristics.

【0006】[0006]

【発明が解決しようとする課題】前述の従来技術では電
磁変換特性劣化に繋る疑似ギャップ発生を完全に防止
し、かつトラック幅精度不良による生産歩留低下を防ぐ
ことは前述したように困難である。本発明はこれらの欠
点を除去し疑似ギャップ発生を防止しながら生産歩留が
高く、生産性の良いMIG型磁気ヘッドを提供すること
を目的とする。
In the above-mentioned prior art, it is difficult to completely prevent the generation of the pseudo gap that causes the deterioration of the electromagnetic conversion characteristics and the reduction of the production yield due to the poor track width accuracy, as described above. is there. SUMMARY OF THE INVENTION It is an object of the present invention to provide a MIG type magnetic head which eliminates these drawbacks and prevents the generation of pseudo gaps, and has a high production yield and good productivity.

【0007】[0007]

【課題を解決するための手段】本発明は、上記の目的を
達成するため酸化物磁性材料上にスパッタ等で形成する
磁性合金の多層膜を1層毎種類を変え、かつ、その配置
が磁気ギャップ形成面に近くなるほど、透磁率の高い順
に並べるようにしたものである。また、同様の目的のた
め、前記の磁性合金薄膜の厚さを変え、磁気ギャップ形
成面に近くなるほど薄くなるように順に並べるようにし
たものである。
In order to achieve the above-mentioned object, the present invention changes the type of a multilayer film of a magnetic alloy formed on an oxide magnetic material by sputtering or the like, and the arrangement is magnetic. The closer to the gap forming surface, the higher the magnetic permeability. For the same purpose, the thickness of the magnetic alloy thin film is changed so that the magnetic alloy thin films are arranged in order such that the closer to the magnetic gap forming surface, the thinner.

【0008】磁性合金薄膜の種類を変えるのは多元スパ
ッタ装置を用いれば容易であり、また、膜厚を変えるに
はスパッタ時間を調整すれば良い。さらに多種類の磁性
合金薄膜形成のためのターゲットは例えば、Co−Zr
−Nbから成るアモルファスであればその組成比率を少
しずつ変えることにより得ることができる。
It is easy to change the type of magnetic alloy thin film by using a multi-source sputtering apparatus, and the sputtering time may be adjusted to change the film thickness. Targets for forming various kinds of magnetic alloy thin films include, for example, Co—Zr.
An amorphous material made of —Nb can be obtained by gradually changing the composition ratio.

【0009】[0009]

【作用】その結果、疑似ギャップの発生は、透磁率が異
なる磁性合金薄膜が接することによる相互作用により防
止でき、磁気ギャップ形成面を酸化物磁性材料と磁性合
金薄膜との接合面を非平行にする方法をとらなくてもよ
い。このため酸化物磁性材料上にV字状の溝を設ける必
要がなく、歩留の良いMIG型ヘッドを生産性良く得る
ことができる。
As a result, the generation of the pseudo gap can be prevented by the interaction caused by the contact between the magnetic alloy thin films having different magnetic permeability, and the magnetic gap forming surface is made non-parallel to the bonding surface between the oxide magnetic material and the magnetic alloy thin film. You do not have to take the method of doing. Therefore, it is not necessary to provide a V-shaped groove on the oxide magnetic material, and a MIG type head with a good yield can be obtained with good productivity.

【0010】[0010]

【実施例】以下、本発明の一実施例を図1、2により説
明する。図1は本発明の磁気ヘッドのIコアあるいはC
コアの断面図であり、図2は本発明による磁気ヘッドの
斜視図である。1は酸化物磁性材料で通常は単結晶フェ
ライトが用いられ、2は合金磁性薄膜で通常はアモルフ
ァスが用いられる。また3は磁気ギャップで高融点ガラ
ス等が使用され、4はトラック幅制御溝で通常は低融点
ガラスが充填され、5は巻線溝である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. FIG. 1 shows an I core or C of the magnetic head of the present invention.
FIG. 3 is a sectional view of the core, and FIG. 2 is a perspective view of the magnetic head according to the present invention. 1 is an oxide magnetic material, usually single crystal ferrite is used, and 2 is an alloy magnetic thin film, usually amorphous. Reference numeral 3 is a magnetic gap made of high melting point glass or the like, 4 is a track width control groove normally filled with low melting point glass, and 5 is a winding groove.

【0011】本発明の磁気ヘッドを得るため、まず、酸
化物磁性材料上に磁性合金薄膜を形成する。この時形成
する磁性合金薄膜は多元スパッタ装置を用い透磁率の低
い順に数種のターゲットをスパッタする。または一種の
磁性合金をターゲットにする時は磁性合金薄膜厚さが厚
い順に並ぶようスパッタ時間を調整する。次にトラック
幅制御溝を通常の磁気ヘッドと同様に既知の方法でダイ
サーあるいはワイヤソーを用いて形成する。かかる後に
Cコアとなる方の磁気コアに巻線溝を設け、磁気ギャッ
プ形成面にスパッタ等で高融点ガラス薄膜を形成し、電
気炉等で磁気ギャップを作製する。もちろん磁気ギャッ
プ長は高融点ガラス薄膜により規制する。さらにトラッ
ク幅制御溝に低融点ガラスを充填し、やはり電気炉等で
溶融、固着させる。次に所望する大きさに1対になった
磁気ブロックを切断し磁気ヘッド用チップを得る。以上
の方法により製作した磁気ヘッドチップを所定のベース
に接着剤を用いて所望する位置に接着し、その後巻線を
施し本発明の磁気ヘッドを得る。
To obtain the magnetic head of the present invention, first, a magnetic alloy thin film is formed on an oxide magnetic material. The magnetic alloy thin film formed at this time is sputtered with several types of targets in the order of low magnetic permeability using a multi-source sputtering apparatus. Alternatively, when a kind of magnetic alloy is used as the target, the sputtering time is adjusted so that the magnetic alloy thin films are arranged in the order of increasing thickness. Next, a track width control groove is formed by using a dicer or a wire saw by a known method as in a normal magnetic head. After this, a winding groove is provided in the magnetic core which will be the C core, a high melting point glass thin film is formed on the magnetic gap forming surface by sputtering, etc., and the magnetic gap is produced by an electric furnace or the like. Of course, the magnetic gap length is regulated by the high melting point glass thin film. Further, the track width control groove is filled with a low melting point glass and is also melted and fixed in an electric furnace or the like. Next, a pair of magnetic blocks having a desired size is cut to obtain a magnetic head chip. The magnetic head chip manufactured by the above method is bonded to a predetermined base with an adhesive at a desired position, and then winding is performed to obtain the magnetic head of the present invention.

【0012】[0012]

【発明の効果】本発明による磁気ヘッドは、磁気ギャッ
プと酸化物磁性材料と合金磁性薄膜接合面が平行になっ
ていても透磁率の異なる磁性合金薄膜が多層になってい
るため、各磁性合金薄膜の磁気フラックスの相互作用に
より疑似ギャップの発生が防止できる。また、磁性合金
薄膜の厚さを順に変えていく場合も、結果的に透磁率の
異なる磁性合金薄膜を並べていった場合と同様である。
よって、酸化物磁性材料にV字状溝を施し、その先端を
研磨し、トラック幅を決定する必要がなく、トラック幅
決め研磨工程での精度不良発生が無く加工工数も短縮で
きる。したがって、疑似ギャップの発生を防止し電磁変
換特性に優れたMIG型磁気ヘッドを歩留良く得ること
ができ、生産性も向上することができる。
In the magnetic head according to the present invention, even if the magnetic gap, the oxide magnetic material and the alloy magnetic thin film bonding surface are parallel to each other, the magnetic alloy thin films having different magnetic permeability are multilayered. The generation of the pseudo gap can be prevented by the interaction of the magnetic flux of the thin film. Further, when the thicknesses of the magnetic alloy thin films are sequentially changed, the same result is obtained when the magnetic alloy thin films having different magnetic permeability are arranged side by side.
Therefore, it is not necessary to form the V-shaped groove in the oxide magnetic material and polish the tip of the groove to determine the track width, so that there is no precision defect in the track width determining and polishing step, and the processing man-hour can be shortened. Therefore, it is possible to obtain the MIG type magnetic head having excellent electromagnetic conversion characteristics while preventing the occurrence of the pseudo gap, and to improve the productivity.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による磁気ヘッドのIコアあるいはCコ
アの断面図である。
FIG. 1 is a cross-sectional view of an I core or a C core of a magnetic head according to the present invention.

【図2】本発明による磁気ヘッドの斜視図である。FIG. 2 is a perspective view of a magnetic head according to the present invention.

【図3】従来型の磁気ヘッドのIコアあるいはCコアの
断面図である。
FIG. 3 is a sectional view of an I core or a C core of a conventional magnetic head.

【図4】従来型の磁気ヘッドの斜視図である。FIG. 4 is a perspective view of a conventional magnetic head.

【符号の説明】[Explanation of symbols]

1 酸化物磁性材料 2 合金磁性薄膜 3 磁気ギャップ 4 トラック幅制御溝 5 巻線溝 6 磁気ギャップ形成面あるいはトラック幅制御溝形成
1 oxide magnetic material 2 alloy magnetic thin film 3 magnetic gap 4 track width control groove 5 winding groove 6 magnetic gap formation surface or track width control groove formation surface

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 磁気ギャップ形成面の磁性合金薄膜が多
層で構成されるMIG型磁気ヘッドにおいて、前記磁性
合金薄膜を1層毎種類を異ならせるとともに磁気ギャッ
プ形成面に近い程透磁率が高くなるように配置したこと
を特徴とする磁気ヘッド。
1. In a MIG type magnetic head in which a magnetic alloy thin film on a magnetic gap forming surface is composed of multiple layers, the magnetic alloy thin film is made different in type for each layer, and the magnetic permeability becomes higher as the magnetic alloy thin film becomes closer to the magnetic gap forming surface. A magnetic head characterized in that it is arranged in this manner.
【請求項2】 請求項1の磁気ヘッドにおいて、前記磁
性合金薄膜の厚さを1層毎変え、さらに磁気ギャップ形
成面に近い程磁性合金薄膜厚さが薄くなるよう配置した
ことを特徴とする磁気ヘッド。
2. The magnetic head according to claim 1, wherein the thickness of the magnetic alloy thin film is changed for each layer, and the magnetic alloy thin film is arranged to be thinner toward a magnetic gap forming surface. Magnetic head.
JP28626994A 1994-11-21 1994-11-21 Magnetic head Pending JPH08147621A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28626994A JPH08147621A (en) 1994-11-21 1994-11-21 Magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28626994A JPH08147621A (en) 1994-11-21 1994-11-21 Magnetic head

Publications (1)

Publication Number Publication Date
JPH08147621A true JPH08147621A (en) 1996-06-07

Family

ID=17702182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28626994A Pending JPH08147621A (en) 1994-11-21 1994-11-21 Magnetic head

Country Status (1)

Country Link
JP (1) JPH08147621A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7304822B2 (en) 2002-08-22 2007-12-04 Matsushita Electric Industrial Co., Ltd. Magnetic head with multilayer film including metal magnetic films and non-magnetic films and magnetic recording/reproducing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7304822B2 (en) 2002-08-22 2007-12-04 Matsushita Electric Industrial Co., Ltd. Magnetic head with multilayer film including metal magnetic films and non-magnetic films and magnetic recording/reproducing device

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