JPH081497A - Dimple grinder - Google Patents

Abstract

(57) [Summary] [Purpose] Positioning a sample easily and accurately. [Structure] A sample table 4 on which a sample 5 is fixedly mounted is fitted into a recess 103 formed on an upper surface of a rotary table 101. Since the sample table 4 is composed of a magnet and the bottom surface of the recess 103 is composed of a magnetic material, the sample table 4 is attracted and fixed to the recess 103 by a magnetic attraction force. The horizontal rotation of the turntable 101 imparts horizontal rotation to the sample 5. A dimple is formed around the horizontal rotation center 18 of the polishing target surface 27 by pressing the rotating grindstone 14 against the horizontal rotation center 18 of the polishing target surface 27 while rotating. [Effect] Since the position of the sample table on which the sample is mounted is accurately determined by fitting it into the concave portion, the desired position of the processed portion can be easily matched with the horizontal rotation center.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dimple grinder, and more particularly to an improvement for easily and accurately aligning a sample.

[0002]

2. Description of the Related Art In order to observe a sample using a transmission electron microscope (TEM), it is necessary to make the observation target portion of the sample thin. The dimple grinder is, for example, this T
It is a type of processing machine used to make samples for EM. The dimple grinder forms a dimple having a diameter of about several mmφ, that is, a mortar-shaped recess, by polishing the surface of the sample.

15 to 17 are respectively a front view, a side view and a plan view showing the structure of a conventional dimple grinder. In these drawings, 50 is a dimple grinder, 1 is a rotary base, 2 is a part of the rotary base 1, and a drive shaft for transmitting horizontal rotation by connecting to a drive device such as an external motor is denoted by 4 and a plate-like shape. Sample stand, 5 is a sample to be dimple processed, 14 is a disk-shaped rotary grindstone, 15
Is a grindstone rotating shaft for vertically rotating the rotary grindstone, 16 is a grindstone surface (circumferential surface) of the rotary grindstone 14, 27 is an upper surface of the sample 5, that is, a surface to be polished, which is a surface to be polished, and 18 is a rotary table Is the intersection of the rotation center axis of and the surface to be polished 27, that is, the horizontal rotation center on the surface to be polished 27.

At least the upper surface of the rotary table 1 is made of a magnetic material that attracts a magnet, and the sample table 4 placed on the magnetic table is made of a magnet. That is, the sample table 4 is fixed to the upper surface of the rotary table 1 by the attraction force between the magnet and the magnetic body. The sample 5 is fixed to the upper surface of the sample table 4 with an adhesive or the like. The rotary grindstone 14 is movable up and down together with the grindstone rotating shaft 15. Further, the center point of the rotary grindstone 14 is located on the center axis of rotation of the rotary base 1, and therefore, when the rotary grindstone 14 descends, the grindstone surface 16 at the horizontal rotary center 18 is the surface to be polished 2
Abut 7.

18 and 19 are perspective views showing the operation of the dimple grinder 50, and FIG. 20 is a front sectional view showing the same operation. Dimple grinder 50
In order to use, the sample 5 is first fixed to the upper surface of the sample table 4 with an adhesive or the like. Then, as shown in FIG. 18, the sample 5 is placed on the rotary table 1 together with the sample table 4. At this time, the rotary grindstone 14 is located at the initial position, that is, above the polishing target surface 27. As described above, the center point of the rotary grindstone 14 is located on the rotation center axis 2a of the turntable 1.

When the installation of the sample 5 is completed, the polishing work is started. At this time, as shown in FIG. 19, the rotary table 1 horizontally rotates and the rotary grindstone 14 vertically rotates. When the turntable 1 horizontally rotates, the horizontal rotation center 18
The surface 27 to be polished is horizontally rotated around. Then, Figure 1
As shown in FIG. 9, by lowering the rotating grindstone 14 that is vertically rotating, the polishing target surface 27 that is horizontally rotating is lowered.
Contact. At this time, the grindstone surface 16 is the horizontal rotation center 1
At 8, it contacts the surface 27 to be polished. The polishing target surface 27 is polished by pressing the rotary grindstone 14 downward to press the grinding wheel surface 16 against the polishing target surface 27.

The cross-sectional view of FIG. 20 shows the progress of the polishing process. As shown in FIG. 20, the surface to be polished 27 is a processed surface 1 corresponding to the grindstone surface 16.
7 is formed. Since the sample 5 is rotating horizontally,
The processed surface 17 has a dimple shape centered on the horizontal rotation center 18. When the processing is completed, the rotary grindstone 14 is raised, and then the rotation of the rotary grindstone 14 and the rotary base 1 is stopped. Then, the sample 5 is removed from the rotary table 1 together with the sample table 4.

21 and 22 are a front sectional view and a plan view, respectively, showing the shape of the sample 5 after completion of processing. As shown in FIGS. 21 and 22, the surface 27 to be polished has a dimple-shaped processing surface 17 centered on the horizontal rotation center 18. When the sample 5 is to be observed by the TEM, the deepest part of the dimple-shaped processed surface 17, that is, the thinnest part of the sample 5 is the observation target part.

[0009]

By the way, in the conventional dimple grinder 50, when the sample 5 is adhered to the sample table 4, the markings 6 formed in advance on the upper surface of the sample 5 are targeted to align them visually. Was going on. Further, the sample table 4 on which the sample 5 is mounted is attached to the rotary table 1
Even when it was installed on the upper surface of the, the alignment was performed by visual inspection targeting the marking 6.

Therefore, as shown in the front view of FIG. 23 and the plan view of FIG. 24, the portion of the surface to be polished 27 to be dimple-processed (the point where the marking 6 is applied) is the center of horizontal rotation. There is a problem that the sample 5 may be installed on the rotary table 1 in a state of being displaced from 18. That is, in the conventional dimple grinder 50,
There is a problem in that it is difficult to accurately align the portion to be processed with the horizontal rotation center 18 which is the original position.

As a result, the center point of the dimple-shaped processed surface 17 may deviate from the originally intended portion after the processing is completed. For this reason, when the sample 5 is subjected to, for example, TEM observation, it is difficult to precisely set the observation site in advance, and the observation site is finally determined according to the finish result of the processed surface 17.

In some cases, the marking 6 may be provided on the lower surface of the sample 5, that is, the surface opposite to the polishing target surface 27. At this time, since the lower surface of the sample 5 is adhered to the upper surface of the sample table 4, the marking 6 is applied. Since 6 is useless at all, there is a problem that the accuracy of alignment is further deteriorated.

The present invention has been made in order to solve the above problems in the conventional apparatus, and an object thereof is to obtain a dimple grinder capable of accurately and easily aligning a sample. An object of the present invention is to provide a dimple grinder that enables accurate positioning even when marking is provided on the lower surface of the sample.

[0014]

A dimple grinder according to a first aspect of the present invention is a plate-shaped sample table on which a sample can be fixedly mounted, and a rotary table which is rotatable while supporting the sample table. And a rotatable rotary whetstone, which imparts rotation to the sample by rotating the rotary table, and at the same time pressing the peripheral surface of the rotary whetstone against the center of rotation of the sample surface while rotating the rotary whetstone. In the dimple grinder that forms dimples on the surface of the sample, a recess is formed on the rotary table so that the sample table can be fitted therein.

A dimple grinder according to a second aspect of the present invention is the dimple grinder according to the first aspect, wherein the opening shape of the recess and the contour shape of the sample stand are non-rotationally symmetric. And

A dimple grinder according to a third aspect of the present invention includes a plate-shaped sample table on which a sample can be fixedly mounted, and a rotary table which is rotatable while supporting the sample table.
A rotatable rotating grindstone is provided, and rotation is imparted to the sample by rotating the rotary table, and at the same time, the peripheral surface is pressed against the rotation center of the sample surface while rotating the rotating grindstone, In a dimple grinder that forms dimples on the surface of a sample, a marking is provided on the sample table to indicate a target position where a desired polishing portion of the sample should be aligned.

A dimple grinder according to a fourth aspect of the present invention is the dimple grinder according to the third aspect, wherein the sample stage can see through one main surface to the other main surface at least in the vicinity of the target position. As described above, it is characterized by being made of a substantially transparent material.

A dimple grinder according to a fifth aspect of the present invention is the dimple grinder according to any one of the first to third aspects, wherein the sample stage has a first magnetic body, and the rotary stage is Has a second magnetic body, and at least one of the first and second magnetic bodies is a magnet and exerts a magnetic attraction force on each other, whereby the sample stage can be attracted and fixed to the rotary stage. It is characterized by

A dimple grinder according to a sixth aspect of the present invention includes a plate-shaped sample table on which a sample can be fixedly mounted, and a rotary table which is rotatable while supporting the sample table.
A rotatable rotating grindstone is provided, and rotation is imparted to the sample by rotating the rotary table, and at the same time, the peripheral surface is pressed against the rotation center of the sample surface while rotating the rotating grindstone, In a dimple grinder that forms dimples on a sample surface, the sample stage has a first magnetic body and an opening or a substantially transparent member through which one main surface of the sample base can be seen through, The turntable has a second magnetic body, and the turntable is provided with a cavity or a substantially transparent member penetrating at least along the rotation center axis thereof. At least one of the bodies is a magnet, and the sample table can be attracted and fixed to the rotary table by exerting a magnetic attraction force on each other.

[0020]

[Action]

<Operation of the Invention According to Claim 1> In the dimple grinder of the present invention, the sample is fitted in the concave portion formed on the rotary table, thereby accurately positioning the sample table on which the sample is mounted and the rotary table. Good and easy to do.

<Operation of the Invention According to Claim 2> In the dimple grinder of the present invention, since the opening shape of the concave portion and the contour shape of the sample table are non-rotationally symmetrical, when the sample table is fitted into the concave portion. The direction is uniquely determined. <Operation of the Invention According to Claim 3> In the dimple grinder of the present invention, since the sample table is marked, when the sample is fixed to the sample table, the marking is used as a reference to make the sample It is possible to easily align the desired polishing portion with the target position on the sample table.

<Operation of the Invention According to Claim 4> In the dimple grinder of the present invention, the vicinity of the target position of the sample table is made of a substantially transparent material so that the one main surface can be seen through from the other main surface. Since it is configured, the marking showing the portion to be polished can be seen through the marking of the sample table and the marking of the sample when fixing the sample provided on the surface opposite to the surface to be polished to the sample table. , The site of the sample desired to be polished can be easily aligned with the target position.

<Operation of the Invention According to Claim 5> In the dimple grinder of the present invention, the sample table is attracted and fixed to the rotary table by magnetic attraction, so that the sample table can be easily fixed and removed. .

<Operation of the Invention According to Claim 6> In the dimple grinder of the present invention, when a sample having a marking indicating a portion desired to be polished is provided on the surface opposite to the surface to be polished is fixed to the sample table. The marking is fixed so that it is located in the opening of the sample table or in the substantially transparent member. Then, the sample table on which the sample is fixed is placed on the rotary table. At this time, since the marking can be seen through the hollow portion or the substantially transparent member provided on the rotary table, the position of the sample table can be adjusted so that the position of the marking coincides with the rotation center. Since the sample table is attracted and fixed to the rotating table by magnetic attraction,
The position of the sample table can be easily adjusted.

[0025]

【Example】

<First Embodiment> First, the dimple grinder of the first embodiment will be described. 1 and 2 respectively,
It is a front view and a plan view showing a configuration of a dimple grinder 100 of this embodiment. In FIG. 2, the rotary grindstone 14 and the grindstone rotary shaft 15 are not shown. In the following figures, the same parts as those of the conventional device shown in FIGS. 15 to 24 are designated by the same reference numerals, and detailed description thereof will be omitted.

In FIGS. 1 and 2, 101 is a rotary table, and 103 is a rectangular recess formed on the upper surface of the rotary table 101. The recess 103 is formed so that the rectangular sample table 4 fits therein, and the depth thereof is preferably shallower than the thickness of the sample table 4. At least the bottom surface of the recess 103 of the rotary table 101 is made of a magnetic material, and the sample table 4 is made of a magnet. Sample 5
Is fixed to the sample table 4 with an adhesive or the like.

Since the dimple grinder 100 is constructed as described above, the position of the sample table 4 on which the sample 5 is mounted can be accurately determined by fitting it into the recess 103. Therefore, the position of the desired processed portion displayed by the marking 6 can be easily matched with the horizontal rotation center 18.

Further, since the recess 103 is formed to be shallower than the thickness of the sample table 4, when the sample table 4 is fitted to the rotary table 101, the upper end portion of the sample table 4 is exposed from the upper surface of the rotary table 101. To do. This makes it possible to easily take out the sample table 4 from the recess 103 after processing the sample 5.

The sample table 4 is composed of a magnet, and the recess 1 is formed.
Since the bottom surface of 03 is made of a magnetic material, the sample table 4 is fixed to the recess 103 by the magnetic attraction force acting between them. Therefore, when the sample 5 is processed, the recess 103
It is possible to prevent the sample table 4 from shifting in the horizontal direction or vibrating in the horizontal or vertical direction due to a minute gap between the sample table 4 and the sample table 4. Further, the sample table 4 can be easily fixed and removed.

<Second Embodiment> Next, the dimple grinder of the second embodiment will be described. FIG. 3 is a plan view showing the structure of the dimple grinder 200 of this embodiment. In FIG. 3, the rotary grindstone 14 and the grindstone rotary shaft 15 are not shown in the same manner as in FIG.

In FIG. 3, 201 is a turntable, 203 is a substantially rectangular recess formed on the upper surface of the turntable 201, 7 is an overhanging portion provided at one of the four corners of the recess 203, and 2
Reference numeral 04 is a plate-shaped sample stand that can be fitted into the recess 203.

That is, the dimple grinder 200
Is characteristically different from the dimple grinder 100 in that the protrusion 203 is provided in the recess 203. Further, the substantially rectangular sample table 204 fitted into the recess 203 has a
Notches corresponding to the overhang 7 are formed at one of the four corners.

Since the protrusion 203 is formed in the recess 203, the opening of the recess 203 is non-rotationally symmetric. In addition, the sample table 20 corresponding to the opening shape of the concave portion 203
The contour shape of 4 is also non-rotationally symmetric. For this reason,
When the sample table 204 is fitted into the recess 203, the orientation of the sample table 4 is uniquely determined. As a result, it is possible to prevent the position of the marking 6 from being displaced due to the difference in the orientation in which the sample table 204 is attached to the rotary table 201, and to further improve the positional accuracy of the marking 6.

<Third Embodiment> The dimple grinder of the third embodiment will be described below. FIG. 4 is a plan view of a sample table 304 used in the dimple grinder of this embodiment, and FIGS. 5 and 6 are a front view and a plan view of the sample table 304 on which the sample 5 is mounted, respectively.

In the dimple grinder of this embodiment, the marking 308 is provided on the upper surface 309 of the plate-shaped sample table 304, that is, the surface on which the sample 5 is fixed.
Characteristically different from the device of the embodiment. Marking 308
Displays the target position on the sample 5 to be processed, that is, the target position where the marking 6 should be aligned. For this reason, the marking 308 is preferably formed in two straight lines that are orthogonal to each other at the horizontal rotation center 18 when the sample table 304 is installed at a predetermined position of the rotary table 101, as shown in FIG. . The intersection of the two straight lines corresponds to the target position. Further, the marking 308 is formed by, for example, a V-shaped groove.

When the sample 5 is fixed on the upper surface 309, as shown in FIG.
The positioning between the sample 5 and the sample table 304 is performed so as to be positioned on the two straight lines 08, that is, so as to match the target position. Marking 6 and marking 308
Consistency with, for example, visual inspection or marking 308
Confirmed by placing a ruler on.

As described above, since the marking 308 is provided on the upper surface of the sample table 304, the sample 5 and the sample table 304 are
The alignment between and is performed accurately and easily.
Further, the sample table 304 is similar to the dimple grinder 100 of the first embodiment in that the concave portion 10 provided in the rotary table 101.
Since the sample table 304 and the rotary table 101 are fitted to each other, the alignment between the sample table 304 and the rotary table 101 can be performed well. As a result, the marking 6 is accurately and easily positioned on the horizontal rotation center 18.

<Fourth Embodiment> The dimple grinder of the fourth embodiment will be described below. FIG. 7 is a plan view of a sample table 404 used in the dimple grinder of this embodiment, and FIGS. 8 and 9 are a front view and a bottom view of the sample table 404 on which the sample 5 is mounted, respectively.

The dimple grinder of this embodiment is characteristically different from the dimple grinder of the third embodiment in that the plate-shaped sample stage 404 is made of a transparent material, for example, silicon dioxide (quartz). On the upper surface 409 of the sample table 404, that is, the surface on which the sample 5 is fixed, the sample table 30
Marking 408 is applied in the same manner as in No. 4. As shown in FIG. 7, the markings 408 are preferably formed in two linear shapes orthogonal to each other at the horizontal rotation center 18 when the sample table 404 is installed at a predetermined position on the rotary table 101. Further, the marking 408 is formed by, for example, a V-shaped groove.

In this dimple grinder, the lower surface 10
The sample 5 having the marking 6 on it is used. When fixing the sample 5 on the upper surface 409, as shown in FIG. 9, the positioning between the sample 5 and the sample table 404 is performed so that the marking 6 overlaps the intersection (target position) of the marking 408. Done. The coincidence between the intersection of the markings 408 and the marking 6 is confirmed by directly seeing through the intersection of the markings 408 and the marking 6 through the transparent sample stage 404. Therefore, the positioning of the sample 5 and the sample table 404 can be performed more accurately and more easily.

Further, as shown in the front view of FIG. 10, in the dimple grinder 400 of this embodiment, the sample table 40
Similarly to the dimple grinder 100 described above, the reference numeral 4 fits into the recess 103 provided in the rotary table 101, so that the sample table 404 and the rotary table 101 can be aligned well. As a result, the marking 6 is the horizontal rotation center 1
8 can be positioned accurately and easily.

<Fifth Embodiment> The dimple grinder of the fifth embodiment will be described below. FIG. 11 is a plan view of a sample table 504 used in the dimple grinder of this embodiment, and FIGS. 12 and 13 are a front view and a bottom view of the sample table 504 on which the sample 5 is mounted, respectively.

In the dimple grinder of this embodiment,
As shown in FIG. 11, the fourth embodiment is that the plate-shaped sample stand 504 includes a frame body 510 formed of a magnet and a transparent window plate portion 511 that covers a window portion that opens in the center thereof. It is characteristically different from the dimple grinder 400 of the example. The window plate portion 511 is made of, for example, silicon dioxide (quartz).
Composed of.

The upper surface of the window plate portion 511 and the upper surface of the frame 510 are flush with each other. That is, the sample table 5
The upper surface 509 of 04, that is, the surface on which the sample 5 is fixed is flat. A marking 508 is provided on the upper surface of the window plate portion 511 similarly to the sample table 404. Marking 50
8 is a sample stage 50, preferably as shown in FIG.
4 is formed in two straight lines orthogonal to each other at the horizontal rotation center 18 when the rotary table 101 is installed at a predetermined position on the rotary table 101. Further, the marking 508 is formed by, for example, a V-shaped groove.

Also in this dimple grinder, as in the dimple grinder 400, the marking 6 is formed on the lower surface 10.
The sample 5 having been subjected to is provided for use. When fixing the sample 5 on the upper surface 509, as shown in FIG. 13, the positioning between the sample 5 and the sample table 504 is performed so that the marking 6 overlaps with the intersection (target position) of the markings 508. Done. The matching between the intersections of the markings 508 and the markings 6 means that the markings 5 can be seen through the transparent window plate portion 511.
It is confirmed by directly looking through the intersection point 08 and the marking 6. Therefore, the positioning of the sample 5 and the sample table 504 can be performed accurately and easily.

Further, in the dimple grinder of this embodiment, like the dimple grinder 400, the sample table 5
Since 04 is fitted in the recess 103 provided in the rotary table 101, the sample table 504 and the rotary table 101 can be aligned well. As a result, the marking 6 is accurately and easily positioned on the horizontal rotation center 18.

Moreover, since the frame 510 is composed of a magnet, the sample table 504 is fixed to the rotary table 101 by a magnetic attraction force. Therefore, during polishing, the sample table 50
4 can be prevented from being displaced or vibrated. Moreover, the sample table 504 can be easily fixed and removed.

<Sixth Embodiment> The dimple grinder of the sixth embodiment will be described below. FIG. 14 is a front view of the dimple grinder of this embodiment. In FIG. 14, 600 is a dimple grinder, 601 is a rotary base, 602 is a drive shaft for transmitting horizontal rotation by being coupled to a drive unit such as an external motor, which is a part of the rotary base 1, and 604 is a plate-shaped sample. A table 613 is a cavity formed along the central axis of rotation of the sample table 601.
The cavity 613 may be filled with a transparent material such as silicon dioxide. The upper surface of the turntable 601 is made of a magnetic material.

The sample table 604, like the sample table 504 described above, is a transparent window plate portion 611 that covers a frame body 610 composed of a magnet and a window section (opening section) opened at the center thereof.
It has and. However, on the upper surface of the window plate portion 611,
It is different from the sample table 504 in that it is not marked.

Also in the dimple grinder 600, the sample 5 having the marking 6 on the lower surface 10 is used as in the dimple grinder 400. To use the dimple grinder 600, the lower surface 10 of the sample 5 is fixed to the upper surface of the sample table 604 by adhesion or the like, and then the sample table 604 on which the sample 5 is mounted is placed on the upper surface of the rotary table 601. Then, while confirming the position of the marking 6 formed on the lower surface 10 of the sample 5 visually from below through the hollow portion 613 or by a monitor using a small TV camera or the like, the sample table 604 is appropriately placed on the rotary table 601. The position of the sample 5 is determined by moving it horizontally.

As described above, in the dimple grinder 600 of this embodiment, the position of the sample 5 can be accurately determined because the sample 5 can be aligned by directly checking the marking 6 provided on the sample 5. There are advantages. Further, since the sample table 604 and the rotary table 601 are fixed by the magnetic attraction force, there is an advantage that the sample table 604 can be easily moved horizontally when the sample 5 is aligned.

<Other Embodiments> (1) In the above embodiments, the sample stands 4, 204, 304 are used.
Although the frame bodies 510 and 610 are composed of magnets, they may be structured to include magnets. For example, only the bottom surface portion of those members may be made of a magnet. Alternatively, magnets may be embedded in a plurality of places of those members.

(2) In the above embodiment, the recess 103,
The bottom surface portion of 203 and the upper surface portion of the rotary base 601 were made of a magnetic material, but generally, these portions may have a structure including a magnetic material. For example, a magnetic material may be embedded in a plurality of locations on the bottom surface of the recess 103 or the top surface of the turntable 601.

(3) In the above-mentioned embodiment, the magnet and the magnetic body may be arranged opposite to each other. For example, the sample table 4 may be made of a magnetic material, and magnets may be embedded in a plurality of locations on the bottom surface of the recess 103. Alternatively, magnets may be arranged on both sides so as to exert a magnetic attraction force on each other.

(4) In the first to third embodiments and the fifth embodiment, it is possible to adopt a structure in which the sample table 4, 204, 304, 504 and the rotary table 101, 201 are not provided with a magnet or a magnetic material. . At this time, it is desirable that the recess 103 and the sample stage 4, 304, 504 and the recess 203 and the sample stage 204 are closely fitted to each other without a gap. Alternatively, other fixing means may be taken, such as fastening with screws instead of utilizing magnetic attraction.

(5) In the sixth embodiment, the sample table 6
04 does not include the window plate portion 611, and the region corresponding to the window plate portion 611 may be hollow.

[0057]

【The invention's effect】

<Effect of the Invention According to Claim 1> In the dimple grinder of the present invention, the sample is fitted in the concave portion formed in the rotary table, thereby accurately positioning the sample table on which the sample is mounted and the rotary table. Since it can be performed satisfactorily and easily, it is possible to easily match the desired polishing site on the sample surface with the rotation center.

<Effect of the Invention According to Claim 2> In the dimple grinder of the present invention, the orientation when the sample stage is fitted into the recess is uniquely determined, so that the direction in which the sample stage is attached to the rotary table is different. Prevents the processing area from shifting due to
It is possible to further improve the positional accuracy of the processed portion.

<Effect of the Invention According to Claim 3> In the dimple grinder of the present invention, when the sample is fixed to the sample table, the marking is used as a reference, so that the portion where the sample is desired to be polished is set on the sample table. It is possible to easily align with the target position. Therefore, it is possible to easily match the desired polishing portion on the sample surface with the rotation center.

<Effect of the Invention According to Claim 4> In the dimple grinder of the present invention, a sample having a marking indicating a portion desired to be polished on the surface opposite to the surface to be polished is an object to be polished. When fixing to the sample table,
By seeing through the markings on the sample table and the markings on the sample, it is possible to easily align the desired polishing portion of the sample with the target position. Therefore, it is possible to easily match the desired polishing portion on the sample surface with the rotation center.

<Effect of the Invention According to Claim 5> In the dimple grinder of the present invention, since the sample table is attracted and fixed to the rotary table by the magnetic attraction force, the sample table can be easily fixed and removed. .

<Effect of the Invention According to Claim 6> In the dimple grinder of the present invention, a sample in which a marking showing a portion desired to be polished is provided on the surface opposite to the surface to be polished is the object to be polished. When fixing the sample to the rotary table together with the sample table, it is possible to see through the marking through the cavity or the substantially transparent member provided in the rotary table and the opening of the sample table or the substantially transparent member. Therefore, the position of the sample table can be adjusted so that the position of the marking coincides with the center of rotation. Therefore, it is possible to easily match the desired polishing portion on the sample surface with the rotation center. Further, since the sample table is attracted and fixed to the rotary table by the magnetic attraction force, there is an effect that the position of the sample table can be easily adjusted.

[Brief description of drawings]

FIG. 1 is a front view of a dimple grinder of a first embodiment.

FIG. 2 is a plan view of the dimple grinder of the first embodiment.

FIG. 3 is a plan view of a dimple grinder according to a second embodiment.

FIG. 4 is a plan view of a sample table according to a third embodiment.

FIG. 5 is a front view of a sample stand on which the sample of the third embodiment is mounted.

FIG. 6 is a plan view of a sample table on which the sample of the third embodiment is mounted.

FIG. 7 is a plan view of a sample table according to a fourth embodiment.

FIG. 8 is a front view of a sample table on which the sample of the fourth embodiment is mounted.

FIG. 9 is a bottom view of a sample table on which the sample of the fourth embodiment is mounted.

FIG. 10 is a front view of a dimple grinder of a fourth embodiment.

FIG. 11 is a plan view of the sample table of the fifth embodiment.

FIG. 12 is a front view of a sample table on which the sample of the fifth embodiment is mounted.

FIG. 13 is a bottom view of a sample table on which the sample of the fifth embodiment is mounted.

FIG. 14 is a front view of a dimple grinder of a sixth embodiment.

FIG. 15 is a front view of a conventional dimple grinder.

FIG. 16 is a side view of a conventional dimple grinder.

FIG. 17 is a plan view of a conventional dimple grinder.

FIG. 18 is a perspective view of a conventional dimple grinder.

FIG. 19 is a perspective view of a conventional dimple grinder.

FIG. 20 is a front sectional view of a conventional dimple grinder.

FIG. 21 is a front sectional view of a sample table on which a processed sample is mounted.

FIG. 22 is a plan view of a sample table on which a processed sample is mounted.

FIG. 23 is a front view of a conventional dimple grinder.

FIG. 24 is a plan view of a conventional dimple grinder.

[Explanation of symbols]

5 samples, 4,204,304,404,504,60
4 sample table, 101, 201, 601 rotating table, 14
Rotary grindstone, 18 horizontal rotation center (rotation center), 16 grindstone surface (circumferential surface), 100, 200, 400, 600 dimple grinder, 103, 203, 404 concave portion, 3
08,408,508 marking, 510,610
Frame body, 613 hollow portion.

Claims (6)

[Claims] 1. A plate-shaped sample table on which a sample can be fixedly mounted, a rotary table that is rotatable while supporting the sample table, and a rotatable grindstone, and the rotary table is rotated. By applying rotation to the sample by pressing the peripheral surface of the sample while rotating the rotating grindstone to the center of rotation of the sample surface at the same time, in the dimple grinder forming dimples on the sample surface, in the rotary table, A dimple grinder characterized in that a recess into which a sample table can be fitted is formed. 2. The dimple grinder according to claim 1, wherein the opening shape of the recess and the contour shape of the sample stage are non-rotationally symmetrical. 3. A plate-shaped sample base on which a sample can be fixedly mounted, a rotary base that can rotate while supporting the sample base, and a rotatable rotary grindstone, and the rotary base is rotated. By applying rotation to the sample by pressing, while simultaneously rotating the rotating grindstone by pressing its peripheral surface to the center of rotation of the sample surface, in the dimple grinder forming dimples on the sample surface, polishing in the sample A dimple grinder characterized in that a marking indicating a target position where a desired portion is to be aligned is provided on the sample stage. 4. The dimple grinder according to claim 3, wherein the sample stage is made of a substantially transparent material so that the one main surface and the other main surface can be seen through at least in the vicinity of the target position. The dimple grinder characterized by having. 5. The dimple grinder according to claim 1, wherein the sample stage is first.
The magnetic base, the rotary table has a second magnetic body, and at least one of the first magnetic body and the second magnetic body is a magnet, and exerts a magnetic attraction force on each other. Is capable of being adsorbed and fixed to the rotary table. 6. A plate-shaped sample base on which a sample can be fixedly mounted, a rotary base that is rotatable while supporting the sample base, and a rotatable rotary grindstone, and the rotary base is rotated. In the dimple grinder that forms dimples on the sample surface by applying rotation to the sample by pressing the peripheral surface of the rotary grindstone against the center of rotation of the sample surface while rotating the rotary grindstone, 1 has a magnetic body and has an opening or a substantially transparent member through which one main surface can be seen through from the other main surface, and the rotary base has a second magnetic body and is attached to the rotary base. Is provided with a cavity or a substantially transparent member penetrating at least along the central axis of rotation,
At least one of the first and second magnetic bodies is a magnet, and by exerting a magnetic attraction force on each other,
A dimple grinder characterized in that the sample table can be fixed to the rotary table by suction.