JPH0815067B2 - UV light source - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a structure of a light source for irradiating a flat object to be irradiated uniformly and close to the light source, and particularly,
The present invention relates to an ultraviolet light source suitable for a semiconductor process using ultraviolet rays and ozone.

[Conventional technology]

The conventional ultraviolet light source is known to have a structure as shown in USP No. 3,679,928, but in practice, the object to be irradiated is uniformly irradiated, and the processing gas is uniformly flowed onto the object to be irradiated and the object to be irradiated is also irradiated. No concrete structure was shown to increase the irradiation intensity by making the distance between the light source and the light source as close as possible, and practically effective consideration was not given. From these conventional techniques,
A light source of the structure shown is suggested.

[Problems to be solved by the invention]

The above-mentioned prior art is concerned with a method of flowing a processing gas uniformly over an object to be irradiated and a structure of a practical concrete light source that makes the distance between the light source and the object to be irradiated as close as possible and makes the irradiation illuminance uniform and uniform. This was not done, and there was a problem that it was necessary to unnecessarily increase the output of the light source.

An object of the present invention is to uniformly irradiate a large-sized irradiation target with a plurality of light sources, and to provide a processing gas uniformly on the surface of the irradiation target, close to above the surface of the irradiation target. To provide an ultraviolet light source capable of increasing the illuminance of ultraviolet rays on an object to be irradiated, by arranging an ultraviolet-transparent glass and separating the processing house and the lamp house to make the distance between the light source and the object to be irradiated as close as possible. It is in.

[Means for solving problems]

The above object can be achieved by making the structure of the light source as shown in FIGS. 1 (a) and 1 (b). That is, by making the ridge line between the small diameter portion that is the light emitting portion 1 and the large diameter portion of the tube end portion 3 that stores the filament straight, as shown in FIG. In the processing system including the part 4 and the ultraviolet-transparent quartz plate 9 that partitions the boundary between the irradiation target 6 and the processing chamber 5, the quartz plate 9 and the light emitting part 1 can be brought close to each other, and Since the distance to the irradiation target 6 can be shortened, the irradiation illuminance can be increased. Further, in order to uniformly irradiate the irradiation object 6 having a large size, a plurality of light sources shown in FIG. 1 (a) are required, and the gap between the light sources is equal to the gear d of one light source. In addition, the width W ₁ of one light source, the width W _{2 of the} holding portion that fixes the light source at the end, and the gap d are W ₂ −W ₁ d. Even if the light sources of (1) and (2) are arranged, it is possible to uniformly irradiate.

[Action]

First, by connecting the ridges of the small-diameter light emitting portion 1 and the large-diameter tube end portion 2 so as to form a straight line, the partition plate 9 for partitioning the lamp house and the processing chamber can be arranged extremely close to the light source. it can. As a result, the irradiation object under the partition plate can be brought as close as possible to the light source, so that the illuminance on the irradiation surface can be increased.

Further, even if a plurality of light sources are arranged, the gear gap between the light sources is almost the same as the gear d between the light emitting tubes of one light source. Even if it is irradiated, uniform illuminance can be obtained, so that the processing efficiency can be greatly improved.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS. Small diameter (outer diameter 8.5 mm) part 1 made of synthetic quartz and large diameter (outer diameter 23 mm) part 3 for housing filament 10
The pipe ends are moved to one side, and both pipe ends are partially inserted into, for example, the aluminum metal fitting 2 and adhered and fixed with cement or the like, and at the same time, a power line for supplying electric power to the filament is connected. In the light emitting unit, the ridge line between the small diameter portion 1 and the large diameter portion 2 which is airtightly sealed by previously exhausting the air in the tube and containing mercury and argon gas as a starting gas is shown in FIG. They are connected in a straight line as shown in b).
As shown in FIG. 3, by arranging the light source in the lamp house 4 so that the straight ridge line 12 is located on the side of the partition plate 9 made of synthetic quartz and having a thickness of 1.2 mm, the partition plate 9 and the light source 1 are arranged. The gap between and is close to about 1mm. The object 6 to be irradiated is placed on the processing table 7 on the opposite side of the partition plate 9 with a gear (for example, 3 mm) necessary for allowing the processing gas to flow uniformly on the object to be irradiated. The processing table 7 can heat the object to be irradiated, and at the same time, can rotate it by the rotating shaft 8. As described above, the distance between the light source 1 and the object 6 to be irradiated can be maximized.

Further, as shown in FIG. 1 (a), the width of the light emitting part of one light source is W ₁ = 50, and the gear tap d of each light emitting part of the small diameter part which is the light emitting part is d = 5.3. The width W _{2 of the} holder for fixing and holding the large-diameter portion of the end portion was set to W ₂ = 55 mm, and by arranging the three lamps, the illuminance on the irradiated object having a diameter of 150 mm could be made uniform.

〔The invention's effect〕

According to the present invention, the distance between the light source and the object to be irradiated can be shortened to the maximum, and the illuminance of the object to be irradiated can be increased. Further, even if a plurality of light sources are arranged, the distance between the lamps becomes the same as the gap between the lamps, so that the illuminance on the surface of the irradiated object can be made uniform. As described above, since the illuminance can be increased and uniformized, the processing speed can be greatly improved.

[Brief description of drawings]

1 (a) and 1 (b) are a front view and a side view of a light source for explaining an embodiment of the present invention, and FIG. 2 is a side view of a light source for explaining a conventional example, and a third view. The figure is a conceptual diagram showing an example of a processing method for explaining the effect of the light source of the present invention. 1 ... small diameter light emitting part, 3 ... large diameter tube end part, 2 ...
Pipe end fixed holding part, 9 ... quartz partition plate, 6 ... irradiation object.

Claims (1)

[Claims] 1. A ridge line between a small-diameter portion and a large-diameter portion, which are bent so that the pipe end portion is moved to one side, is straight on one surface,
Between the total width W _{1 of the} plurality of small-diameter light emitting portions, the width W _{2 of the} holding portion that fixes the tube end portion of the large diameter portion, and the interval d of the plurality of light emitting portions, W ₂ −W ₁ d An ultraviolet light source characterized by satisfying the relational expression of.