JPH0815545B2 - Detachable and movable movable object loading / unloading device for vacuum processing equipment - Google Patents
Detachable and movable movable object loading / unloading device for vacuum processing equipmentInfo
- Publication number
- JPH0815545B2 JPH0815545B2 JP61254638A JP25463886A JPH0815545B2 JP H0815545 B2 JPH0815545 B2 JP H0815545B2 JP 61254638 A JP61254638 A JP 61254638A JP 25463886 A JP25463886 A JP 25463886A JP H0815545 B2 JPH0815545 B2 JP H0815545B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum processing
- vacuum
- purging
- processing chamber
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010926 purge Methods 0.000 claims description 53
- 230000009545 invasion Effects 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/03—Pressure vessels, or vacuum vessels, having closure members or seals specially adapted therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Packages (AREA)
- Physical Vapour Deposition (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、真空処理室に対して着脱自在に連設され、
有害な大気が真空処理室に侵入するのを防止できるよう
にした真空処理装置用着脱自在可動式被処理物搬入・搬
出装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of use] The present invention is detachably connected to a vacuum processing chamber,
The present invention relates to a detachable and movable movable object loading / unloading apparatus for a vacuum processing apparatus, which is capable of preventing harmful atmosphere from entering the vacuum processing chamber.
［従来の技術］ 従来の真空処理装置は、真空処理室に真空ポンプ、電
源およびその他の付帯装置を備えた排気設備と、パージ
用ガスを導入するパージ用ガス導入設備とを接続し、こ
の真空処理室の側壁の開口部に真空バルブを設け、この
真空バルブを設けて、被処理物を真空処理室内に搬入し
たりあるいは真空処理室より搬出するように構成されて
いるが、真空バルブの開閉時に有害な大気が真空処理室
内に侵入するのを防止するための工夫がなされていなか
った。[Prior Art] In a conventional vacuum processing apparatus, a vacuum processing chamber is connected to an exhaust facility equipped with a vacuum pump, a power source, and other auxiliary devices, and a purge gas introduction facility for introducing a purge gas. A vacuum valve is provided at the opening of the side wall of the processing chamber, and the vacuum valve is provided so that an object to be processed can be carried in or out of the vacuum processing chamber. At times, no measures were taken to prevent harmful atmosphere from entering the vacuum processing chamber.
［発明が解決しようとする問題点］ 従来の真空処理装置では、上記のように真空バルブの
開閉時に有害な大気が真空処理室内に侵入するのを防止
するための工夫がなされていないため、真空バルブを開
閉する際に、有害な大気が真空処理室内に侵入し、真空
処理室内の被処理物を酸化させ、被処理物に悪影響を与
える等の問題点を有していた。[Problems to be Solved by the Invention] In the conventional vacuum processing apparatus, since no measures have been taken to prevent harmful atmosphere from entering the vacuum processing chamber when the vacuum valve is opened and closed as described above, When the valve is opened and closed, harmful atmosphere enters the vacuum processing chamber, oxidizes the object to be processed in the vacuum processing chamber, and adversely affects the object to be processed.
本発明は、上記のような従来のもののもつ問題点を解
決して、有害な大気が真空処理室内に侵入するのを防止
できると共に、種々の形状、重量の被処理物を取り扱う
ことのできる真空処理装置用着脱自在可動式被処理物搬
入・搬出装置を提供することを目的としている。The present invention solves the problems of the conventional ones as described above, prevents harmful atmosphere from entering the vacuum processing chamber, and is a vacuum capable of handling objects of various shapes and weights. It is an object of the present invention to provide a detachable movable processing object loading / unloading device for a processing device.
［問題点を解決するための手段］ 本発明に係わる真空処理装置用着脱自在可動式被処理
物搬入・搬出装置は、台車に搭載され、側壁に二つの開
口を備え、内部に、パレット上に被処理物を載置して搬
送する昇降及び回転自在な搬送設備を設け、真空処理室
に対して着脱自在に連設するようにした移動自在なパー
ジ用コンテナから成り、上記二つの開口の一方を、真空
処理室の側壁の被処理物搬入・搬出口に対してそこに設
けた真空バルブを介して連通させかつ上記真空バルブが
上記パージ用コンテナの一方の開口内に位置するように
し、また他方の開口には大気の侵入を防止するフレキシ
ブルカーテンを設け、さらに上記パージ用コンテナに、
真空処理装置に組み合わせて設けたパージ用ガス供給設
備の自在連結部に連結されるパージ用ガス導入口を設け
たことを特徴としている。[Means for Solving Problems] A detachable and movable movable object carrying-in / carrying-out apparatus for a vacuum processing apparatus according to the present invention is mounted on a trolley, has two openings in a side wall, and is internally mounted on a pallet. It is composed of a movable purging container which is equipped with a lifting / rotating transport facility for placing and transporting an object to be treated and which is detachably connected to the vacuum processing chamber. Through a vacuum valve provided therein with respect to the workpiece loading / unloading port on the side wall of the vacuum processing chamber, and the vacuum valve is located in one opening of the purging container, and The other opening is provided with a flexible curtain to prevent the entry of air, and the purging container is
It is characterized in that a purge gas introduction port connected to a universal connection portion of a purge gas supply facility provided in combination with a vacuum processing apparatus is provided.
［実施例］ 以下、本発明の実施例について添付図面を参照しなが
ら説明する。Embodiments Embodiments of the present invention will be described below with reference to the accompanying drawings.
第１図は本発明の実施例の概略構成図であり、真空処
理室１には、真空ポンプ、電源およびその他の付帯装置
を備えた排気設備２と、パージ用ガス導入設備３とが接
続されている。真空処理室１の側壁には被処理物（図示
せず）の搬入・搬出口1aが形成され、この搬入・搬出口
1aには開閉自在な真空バルブ４が設けられている。FIG. 1 is a schematic configuration diagram of an embodiment of the present invention. An exhaust equipment 2 equipped with a vacuum pump, a power source and other auxiliary equipment, and a purge gas introduction equipment 3 are connected to a vacuum processing chamber 1. ing. A loading / unloading port 1a for an object to be processed (not shown) is formed on the side wall of the vacuum processing chamber 1.
1a is provided with a vacuum valve 4 which can be opened and closed.
パージ用コンテナ５の側壁には二つの開口5a、5bが形
成され、一方の開口5aには第２図に示すような大気の侵
入を防止するのれん式のプラスチック製のフレキシブル
カーテン６が設けられているが、他方の開口5bには何も
設けられていない。パージ用コンテナ５は台車７を備
え、移動自在に構成されている。パージ用コンテナ５の
内部にはパレット８上に被処理物を載置して搬送する昇
降および回動自在な搬送設備９が配設されている。また
パージ用コンテナ５にはその内部にパージ用ガスを導入
するためのパージ用ガス導入口10が設けられており、こ
のパージ用ガス導入口10は真空処理室１に固定または近
接して配置されたパージ用ガス供給設備11（ガス供給配
管11aとこのガス供給配管11aにパージ用ガス導入口10を
連結する自在連結部11bとを備えている）に連結され
て、このパージ用ガス供給設備11からパージ用ガスをパ
ージ用コンテナ５内に導入し、導入したガスでパージ用
コンテナ５の内部の大気を置換する。The side wall of the purging container 5 has two openings 5a and 5b, and one opening 5a is provided with a flexible curtain 6 made of goodwill plastic for preventing the invasion of the atmosphere as shown in FIG. However, nothing is provided in the other opening 5b. The purging container 5 is provided with a carriage 7 and is movable. Inside the purging container 5, a transfer facility 9 for placing and transferring the object to be processed on a pallet 8 is provided which can be raised and lowered and rotated. Further, the purging container 5 is provided with a purging gas introducing port 10 for introducing the purging gas therein, and the purging gas introducing port 10 is fixed to or disposed close to the vacuum processing chamber 1. And a purge gas supply facility 11 (which includes a gas supply pipe 11a and a free connecting portion 11b for connecting the purge gas inlet 10 to the gas supply pipe 11a). The purging gas is introduced into the purging container 5, and the introduced gas replaces the atmosphere in the purging container 5.
真空処理室１とパージ用コンテナ５とは、真空バルブ
４がパージ用コンテナ５の何も設けてない他方の開口5b
内に位置するようにしてシール12を介して着脱自在に連
設されており、第３図に真空処理室１とパージ用コンテ
ナ５とのシール部分の詳細が拡大して示されている。13
はパージガスのモニタ圧力計である。The vacuum processing chamber 1 and the purging container 5 are provided with the other opening 5b of the purging container 5 where the vacuum valve 4 is not provided.
They are arranged in a detachable manner via a seal 12 so as to be positioned inside, and FIG. 3 shows an enlarged detail of the sealing portion between the vacuum processing chamber 1 and the purging container 5. 13
Is a monitor pressure gauge for the purge gas.
次に、図示装置の動作について説明する。 Next, the operation of the illustrated apparatus will be described.
パージ用コンテナ５のフレキシブルカーテン６を通し
て被処理物をパレット８上に載置した後、パージ用ガス
供給設備11よりパージ用ガス導入口10を介してガスを導
入してパージ用コンテナ５の内部の大気を導入したガス
で置換する。その後、真空処理室１に設けられた真空バ
ルブ４を開き、搬送設備９を昇降および回動させてパー
ジ用コンテナ５内のパレット８上の被処理物を、搬入・
搬出口1aを通って真空処理室１内に搬入する。しかる
後、真空バルブ４を閉じ、真空処理室１内を排気設備２
により所望の真空状態にしてから、真空処理室１内で被
処理物を処理する。こうして被処理物を処理した後、真
空処理室１内を真空でない状態にしてから、真空バルブ
４を開き、搬送設備９を昇降および回動させて被処理物
を真空処理室１内よりパージ用コンテナ５に搬出する。
被処理物の搬出中、パージ用ガス導入口10を介してパー
ジ用ガス供給設備11からのガスを導入して、パージ用コ
ンテナ５の内部に大気が侵入するのを防止する。その
後、被処理物はフレキシブルカーテン６を通過させて大
気中に取り出される。After the object to be processed is placed on the pallet 8 through the flexible curtain 6 of the purging container 5, the gas is introduced from the purging gas supply facility 11 through the purging gas introduction port 10 so that the inside of the purging container 5 is Replace the atmosphere with the introduced gas. After that, the vacuum valve 4 provided in the vacuum processing chamber 1 is opened, and the transfer equipment 9 is moved up and down and rotated to carry in the object to be processed on the pallet 8 in the purging container 5.
It is carried into the vacuum processing chamber 1 through the carry-out port 1a. After that, the vacuum valve 4 is closed and the inside of the vacuum processing chamber 1 is evacuated to the exhaust equipment 2
After a desired vacuum state is obtained, the object to be processed is processed in the vacuum processing chamber 1. After processing the object to be processed in this way, the inside of the vacuum processing chamber 1 is brought into a non-vacuum state, and then the vacuum valve 4 is opened and the transfer equipment 9 is moved up and down and rotated to purge the object to be processed from the inside of the vacuum processing chamber 1. Unload to container 5.
During the unloading of the object to be processed, the gas from the purging gas supply equipment 11 is introduced through the purging gas introduction port 10 to prevent the invasion of the atmosphere into the purging container 5. Then, the object to be processed is passed through the flexible curtain 6 and taken out into the atmosphere.
なお、上記実施例では、真空処理室１とパージ用コン
テナ５とを連接しているが、これらを切り離す場合に
は、パージ用コンテナ５における台車７を動かしてパー
ジ用コンテナ５を動かせばよい。In the above embodiment, the vacuum processing chamber 1 and the purging container 5 are connected to each other. However, when they are separated, the carriage 7 of the purging container 5 may be moved to move the purging container 5.
ところで、上記実施例において、フレキシブルカーテ
ン６としてのれん式のものを使用しているが、大気を遮
断できるものであればよく、例えば第４図に示すような
放射式のもの等であってもよい。また、フレキシブルカ
ーテン６はプラスチック製のものであるが、その代わり
に、耐熱布製のものを使用してもよい。さらに、上記実
施例では、フレキシブルカーテン６は真空処理室１側と
反対側の開口5aにのみ設けられているが、真空バルブ側
の開口5bにフレキシブルカーテン６と同様な構造の遮蔽
手段を設けることもできる。さらにまた、フレキシブル
カーテン６の設けられた開口5aの内部に、パージ用コン
テナ５の内部と大気とを遮断するためのバルブまたは蓋
を設けてもよい。By the way, in the above-described embodiment, the flexible curtain 6 is used, but any flexible curtain 6 may be used as long as it can block the atmosphere, and for example, a radiation type as shown in FIG. 4 may be used. . Although the flexible curtain 6 is made of plastic, it may be made of heat-resistant cloth instead. Further, in the above embodiment, the flexible curtain 6 is provided only in the opening 5a on the side opposite to the vacuum processing chamber 1 side, but a shielding means having the same structure as the flexible curtain 6 is provided in the opening 5b on the vacuum valve side. You can also Furthermore, a valve or a lid for shutting off the inside of the purging container 5 from the atmosphere may be provided inside the opening 5a provided with the flexible curtain 6.
なお、図面には示していないが、当然パージ用ガス供
給設備11をパージ用ガス導入設備３と共通のパージ用ガ
ス供給源に連結するように構成することもできる。Although not shown in the drawings, the purge gas supply equipment 11 can of course be configured to be connected to the purge gas supply equipment 3 and a common purge gas supply source.
［発明の効果］ この発明は、上記のようにパージ用ガス供給設備から
導入したガスでパージ用コンテナ内部の大気を置換する
ようにしているので、有害な大気が真空処理室の内部に
侵入するのを防止することができると共に真空処理室側
に設けたパージ用ガス供給設備によりパージ操作を行な
うため操作性および制御性が向上することになる。ま
た、本発明は、上記のように真空処理室とパージ用コン
テナとを着脱自在に連接しているので、真空処理室の大
きさに応じた種々の形状、重量の被処理物を取り扱うこ
とができるようになる。さらに、本発明は、複数個の真
空処理室が各々並列運転を目的として設置されている場
合に一台の被処理物搬入、搬出機構で被処理物の搬入、
搬出作業を賄うことができ、これにより作業スペースを
より大きく取れしかも設備費は少なくて済むことにな
る。EFFECTS OF THE INVENTION According to the present invention, the atmosphere introduced into the purge container is replaced by the gas introduced from the purge gas supply facility as described above, so that harmful atmosphere enters the interior of the vacuum processing chamber. This can be prevented, and since the purging operation is performed by the purging gas supply facility provided on the vacuum processing chamber side, operability and controllability are improved. Further, in the present invention, since the vacuum processing chamber and the purging container are detachably connected as described above, it is possible to handle objects of various shapes and weights according to the size of the vacuum processing chamber. become able to. Furthermore, the present invention provides a single object to be processed when a plurality of vacuum processing chambers are installed for the purpose of parallel operation.
The carrying-out work can be covered, which allows the work space to be made larger and the equipment cost to be reduced.
【図面の簡単な説明】 第１図はこの発明の一実施例を示す概略構成線図、第２
図は第１図の装置に使用されたのれん式のプラスチック
性のフレキシブルカーテンを示す拡大斜視図、第３図は
第１図のＡ部の拡大詳細断面図、第４図は第１図の装置
に使用されるフレキシブルカーテンの別の実施例を示す
立面図である。 図中 １……真空処理室 1a……被処理物の搬入・搬出口 ４……真空バルブ ５……パージ用コンテナ 5a、5b……開口 ６……フレキシブルカーテン ８……パレット ９……搬送設備 10……パージ用ガス導入口 11……パージ用ガス供給設備BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic configuration diagram showing an embodiment of the present invention, and FIG.
1 is an enlarged perspective view showing a goodwill plastic flexible curtain used in the apparatus of FIG. 1, FIG. 3 is an enlarged detailed sectional view of a portion A of FIG. 1, and FIG. 4 is an apparatus of FIG. FIG. 8 is an elevational view showing another embodiment of the flexible curtain used in FIG. In the figure 1 ... Vacuum processing chamber 1a ... Intake / out port of the object to be processed 4 ... Vacuum valve 5 ... Purging containers 5a, 5b ... Opening 6 ... Flexible curtain 8 ... Pallet 9 ... Transporting equipment 10 …… Purge gas inlet 11 …… Purge gas supply facility
Claims (1)
え、内部に、パレット上に被処理物を載置して搬送する
昇降及び回動自在な搬送装置を設け、真空処理室に対し
て着脱自在に連設するようにした移動自在なパージ用コ
ンテナから成り、上記二つの開口の一方を、真空処理室
の側壁の被処理物搬入・搬出口に対してそこに設けた真
空バルブを介して連通させかつ上記真空バルブが上記パ
ージ用コンテナの一方の開口内に位置するようにし、ま
た他方の開口には大気の侵入を防止するフレキシブルカ
ーテンを設け、さらに上記パージ用コンテナに、真空処
理装置に組み合わせて設けたパージ用ガス供給設備の自
在連結部に連結されるパージ用ガス導入口を設けたこと
を特徴とする真空処理装置用着脱自在可動式被処理物搬
入・搬出装置。1. A trolley mounted on a trolley, provided with two openings in a side wall, and internally provided with a vertically movable and rotatable transport device for placing and transporting an object to be processed on a pallet, and to a vacuum processing chamber. It consists of a movable purging container that is detachably connected in series, and one of the above two openings is provided with a vacuum valve provided for the workpiece loading / unloading port on the side wall of the vacuum processing chamber. And the vacuum valve is located in one opening of the purging container, and the other opening is provided with a flexible curtain for preventing the invasion of the atmosphere, and the purging container is vacuum-treated. A detachable movable processing target loading / unloading apparatus for a vacuum processing apparatus, which is provided with a purging gas inlet connected to a universal coupling portion of a purging gas supply facility provided in combination with the apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61254638A JPH0815545B2 (en) | 1986-10-28 | 1986-10-28 | Detachable and movable movable object loading / unloading device for vacuum processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61254638A JPH0815545B2 (en) | 1986-10-28 | 1986-10-28 | Detachable and movable movable object loading / unloading device for vacuum processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63111937A JPS63111937A (en) | 1988-05-17 |
| JPH0815545B2 true JPH0815545B2 (en) | 1996-02-21 |
Family
ID=17267796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61254638A Expired - Lifetime JPH0815545B2 (en) | 1986-10-28 | 1986-10-28 | Detachable and movable movable object loading / unloading device for vacuum processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0815545B2 (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61106024U (en) * | 1984-12-19 | 1986-07-05 |
-
1986
- 1986-10-28 JP JP61254638A patent/JPH0815545B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63111937A (en) | 1988-05-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |