JPH0817193B2 - Liquid crystal display lighting inspection method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Field of Industrial Application) The present invention relates to an inspection method for inspecting lighting of a liquid crystal display device by a probe device.

(Prior art) In recent years, large-sized liquid crystal plates (hereinafter, LC
The manufacturing technology called D (Liquid Charged Device) is being completed. Furthermore, the development of mass production technology for this LCD is proceeding at a rapid pace. However, for the inspection of the characteristics, development of a probe device corresponding to mass production is required.

The electrical characteristic inspection of LCD is usually performed using a probe card or a tester. In addition, LCD electrical characteristics inspection
There is a demand to irradiate outside light to the environment and use it in a bad environment.

That is, in the LCD, the visible state of the image displayed on the screen changes significantly depending on the state of the illuminating light. In other words, the quality of the LCD cannot be determined unless the LCD is irradiated with light.

(Problems to be Solved by the Invention) However, conventionally, there has been no electric characteristic inspection method using a probe device having a function of inspecting an electric characteristic while illuminating an LCD. Therefore, in order to inspect the electrical characteristics of the LCD in a bad environment caused by light, first attach the jig to the L
Install the CD and energize it. Then, the LCD is irradiated with light from the outside. Then, the quality of the LCD is visually judged. There was only such a means.

In other words, if the light source is placed in the inspection section of the probe device,
This makes it possible to inspect the electrical characteristics of LCDs under adverse light conditions. However, in this case, the light source unit has heat. Then, the temperature environment inside the inspection unit is disturbed. In addition, a space corresponding to the installation space of the light source is required in the inspection unit. Further, there is a problem that various problems are brought about in practical application.

Therefore, an object of the present invention is to provide a lighting inspection method for a liquid crystal display device, which can automatically perform a lighting inspection for the liquid crystal display device.

Another object of the present invention is to provide a lighting inspection method for a liquid crystal display device, which does not require a light source installation space in the inspection unit and does not disturb the environmental temperature in the inspection unit.

[Structure of Invention]

(Means for Solving the Problem) The present invention is a method of inspecting a liquid crystal display device for lighting with a probe device, comprising a step of taking out the liquid crystal display device from a storage unit that accommodates a plurality of the liquid crystal display devices. , A step of delivering the taken out liquid crystal display device to an inspection section, a step of placing the liquid crystal display apparatus on a mounting table provided in the inspection section, and a contact with an electrode of the liquid crystal display apparatus on the mounting table And a step of supplying a signal, and during the supply of the signal, light is emitted from the light emitting portion provided on the mounting table toward the back surface of the liquid crystal display device, and an image is displayed on the liquid crystal display device. A lighting inspection method for a liquid crystal display device, comprising: a step of displaying.

(Operation) According to the present invention, after the step of taking out the liquid crystal display device from the housing portion, the step of passing it to the inspection portion, and the step of placing it on the mounting table, the electrodes of the liquid crystal display device are contacted to send a signal. The step of supplying and the step of irradiating light toward the back surface of the liquid crystal display device are simultaneously performed. As a result, an image can be displayed on the liquid crystal display device, and by visually inspecting this, the lighting inspection of the liquid crystal display device can be automatically performed.

Moreover, by performing light irradiation on the liquid crystal display device necessary for this lighting inspection from the light emitting portion provided on the mounting table, it is possible to reliably irradiate light toward the back surface of the liquid crystal display device.

According to another aspect of the present invention, in order to irradiate the liquid crystal display device with light, light is guided from the light source unit outside the inspection unit to the inspection unit by the light supply unit. Therefore, there is no need for a space for disposing the light source unit in the inspection unit. Moreover, the lighting inspection of the liquid crystal display device can be easily performed without disturbing the temperature environment in the inspection unit.

(Example) Hereinafter, the method of the present invention was applied to an LCD (Liq
An example applied to the characteristic inspection of a uid charged device will be described with reference to the drawings. FIG. 1 (A) is a plan view of a probe device used for carrying out the method of the present invention,
FIG. 1 (B) is a side view of the probe device.

This probe device comprises a loader section (1), an inspection section (2), a fiber storage box (3) and a light source section (4).

The loader unit (1) takes out the LCD from the cassette. Then, the LCD is pre-aligned and then delivered to the inspection unit (2). Then, the LCD after the inspection is returned to the cassette. A large number of LCDs having an outer diameter of, for example, 5 inches are stacked and accommodated in the cassette at predetermined intervals. A keyboard (5) is arranged on the upper surface of the loader section (1). The keyboard (5) is for inputting predetermined information in order to operate the probe device.

In the inspection unit (2), the LCD conveyed from the loader unit (1) is placed and fixed on the chuck. Next, the chuck is driven and controlled in the X, Y and θ directions to align the LCD. Then, the probe card and the sensor are used to inspect the electrical characteristics of the LCD. A scope (6) is arranged above the inspection unit (2). The scope (6) is for visually observing the positioning state of the LCD and the like.

The inspection unit (2) will be further described with reference to FIGS. 2 (A) and 2 (B).

In the figure, (10) is a chuck as an example of a mounting table for mounting and fixing the LCD. A fiber attachment hole (10a) is formed in the chuck (10) from its side surface toward the center. A light emitting hole (10b) is provided at the center of the chuck (10). The light emitting hole (10b) and the fiber mounting hole (10a) are in communication with each other.

Further, the inspection section (2) is provided with an emitting fiber probe (20). Output fiber probe (2
One end of (0) faces the light emission hole (10b) through the fiber attachment hole (10a). The other end of the emitting fiber probe (20) is fixed to the fiber attachment plate (12).

The emission fiber probe (20) is housed in a tube (21) by bundling a plurality of fibers as shown in FIG. An output fitting (22) is attached to one end of the tube (21). The emitting fitting (22) has a hole (22a). The drilling position of the hole (22a) is
It is a position facing the light emitting hole (10b) when the emitting fiber probe (20) is inserted into the fiber attachment hole (10a). Tube (21) fiber mounting holes (10
Reinforce the tube (23) in the area near the exit of a).
Is provided.

A plug (25) is provided at the other end of the tube (21) via a joint connector (24). The disc (25a) of the plug (25) has a hole (25b). The emitting fiber probe (20) is screwed and fixed to the fiber mounting plate (12) through the hole (25b).
A bolt portion (25c) is formed on the outer peripheral surface of the cylindrical portion of the plug (25).

An incident fiber probe (30) is connected to the plug (25). The entrance fiber probe (30) and the exit fiber probe (20) form an optical fiber cable.

The incident fiber probe (30) has the structure shown in FIG. That is, a plurality of fibers are bound together and the periphery thereof is covered with the flexible tube (31). The flexible tube (31) is covered with, for example, a polyethylene tube (32). The length of the incident fiber probe (30) is set to the length from the fiber mounting plate (12) to the light source section (4). A joint connector (33) is provided on the connection end side of the input fiber probe (30) with the output fiber probe (20).
Is provided. A cap nut (34) having a nut (34a) formed on the inner cylindrical portion is attached to the joint connector (33). The nut (34a) is adapted to be screwed onto the bolt portion (25c) of the plug (25). The entrance fiber probe (30) and the exit fiber probe (20) are coupled by screwing. Further, a light source side metal fitting (35) is provided on the light source side of the incident fiber probe (30).

Next, regarding the fiber storage box (3),
It will be described with reference to the drawings.

The fiber storage box (3) stores the incident fiber probe (30) by bending it into a u-shape and further guides it to the light source section (4). Incident fiber probe (30)
Is guided to the outside of the probe apparatus main body through the opening (7). The opening (7) is formed on the back surface of the probe apparatus main body, for example.

The incident fiber probe (30) is housed in the housing (41) in a bent state. The housing (41) has a first notch (42) at a position facing the opening (7). The incident fiber probe (30) is guided into the housing (41) through the first notch (42). The incident fiber probe (30) is guided to the light source section (4) through the second cutout section (43). The second notch (43) is formed on the corner side of the same plane as the surface on which the first notch (42) is formed.

Inside the second notch (43), the fixing block (4
4) and (45) are fixed. Incident fiber probe (30) is fixed block (44), (45)
It is supported by being sandwiched between. The incident fiber probe (30) is supported by holding the portion to which the shield sponge (36) is attached between the fixing blocks (44) and (45) with the screw (46).

The casing (41) is screwed and fixed to the back side of the probe device main body via the reinforcing plate (47). Case (4
The upper surface of 1) is sealed by a cover (48).

Next, the light source section (4) will be described. Light source part (4)
The internal structure of is not shown. The light source side metal fitting (3) of the incident fiber probe (30) can be jointed. A light source is provided facing the incident fiber probe (30). The light source is composed of, for example, a halogen lamp with a dichroic mirror.

The dimming of the halogen lamp can be varied from 0 to 100% by the PWM method, for example. Halogen lamp on,
The OFF is performed, for example, by opening and closing a mechanical shutter. For example, by attaching two sets of filters to the light source, adjustments of up to 25 levels are possible. In this case, one set of filters is composed of five types of filter points. Further, in order to suppress heat generation of the halogen lamp, forced air cooling can be performed by, for example, a fan.

The light source unit (4) may be driven either automatically or manually. In the case of automatic driving, the shutter is opened and closed and the filter is switched according to the data transmitted from the probe device main body.

In the case of manual operation, the shutter is opened and closed and the filter is switched by operating the panel switch of the light source controller in the light source section (4).

Next, using the probe device configured in this way,
A method for inspecting the characteristics of the LCD according to the present invention will be described.

First, the flow of steps of the method of the present invention will be described with reference to FIG.

First, take out the LCD from the cassette (Fig. 6A). Next, center the LCD (pre-alignment)
(FIG. 6B). Next, the centered LCD is delivered to the inspection unit (Fig. 6C). Next, LCD alignment is performed on the inspection unit, that is, the test stage (FIG. 6D). In this alignment, first, LC measured by the height sensor, XY table and θ rotation mechanism.
Perform parallel, orthogonal, and directional alignment of D. Then, the probe needle is aligned with the reference chip by the joystick, and the teaching operation of the test procedure is executed.

Next, the probing of the LCD is started (Fig. 6E).
That is, the probe needle row is brought into contact with many electrode leads of the LCD (Fig. 6F). In the contact step, a large number of probe needles arranged on the probe card are brought into contact with the electrodes of the LCD. In this state, a pre-programmed measurement signal is switched and applied to illuminate with an optical fiber. Then, the next measuring step is performed (Fig. 6G). After this, the presence or absence of probing is confirmed (Fig. 6H). Then, the measurement is completed (Fig. 6I), and the LCD is returned to the cassette (Fig. 6J).

Next, the flow of the method of the present invention using the above apparatus will be specifically described.

The loader unit (1) takes out one LCD from the cassette, conveys it, pre-aligns it, and then transfers it to the inspection unit (2). In the inspection unit (2), this LCD is mounted and fixed on the chuck (10) by, for example, vacuum suction, and X
The LCD is aligned by the Y-table mechanism and the rotating mechanism, a large number of probe needles arrayed and fixed to the probe card are brought into contact with the LCD electrodes, and the electrical characteristics of the LCD are inspected by energization.

Next, the halogen run in the light source unit 4 is turned on to open the mechanical shutter. The light emitted from this halogen lamp enters from one end of the incident fiber probe (30).

The incident fiber probe (30) is introduced into the inside of the apparatus main body through the fiber storage box (3).

The input fiber probe (30) is connected to the plug (25) of the output fiber probe (20) at the position of the fiber mounting plate (12) fixed to the chuck (10). Light is transmitted from the incident fiber probe (30) to the emission fiber probe (20).

Moreover, the emission end side of the emission fiber probe (20) is inserted and supported in the fiber attachment hole (10a) of the chuck (10). The hole (22a) which is the light emitting portion of the fiber probe (20) is arranged so as to face the light emitting hole (0b) located at the center of the chuck (10). The light emitted from the halogen lamp illuminates the back surface of the LCD via the light emission hole (10b). Then, the illuminance of the light emitted in this way can be secured at about 50000LX, and by changing the configuration of the light source unit (4) or the fiber bundle diameter,
Even higher illuminance is possible.

Here, the LCD usually has transparency. Therefore, it is possible to create a bad environment similar to the case where external light is directly incident from the LCD surface by the light emitted from the back surface. Therefore, it is possible to observe, for example, how the predetermined pattern displayed on the LCD screen can be visually observed in the state where the back surface of the LCD is irradiated with light in this way. As a result,
The characteristic test can be easily performed under the external light irradiation.

By the way, the LCD inspection may be performed by moving the chuck (10) to change the position where the probe needle contacts. In this case, it becomes necessary to move the optical fiber fixed to the chuck (10) following this movement.

The movement of the chuck (10) on the two-dimensional surface is set at each position shown by a solid line and a chain line in FIG. 7, centering on the chuck center position a in FIG.

Therefore, in the probe device of the present embodiment, the fiber storage box (3) is provided. In the fiber storage box (3), the incident fiber probe (30) is arranged in a U-shaped bent state. When the chuck (10) is moved farthest as shown in FIG. 7A, the deflection of the fiber probe (30) in the fiber storage box (3) is minimized. Further, as shown in FIGS. 7B and 7C, the flexure inside the fiber storage box (3) is set so as to maximize the flexure when the chuck (10) moves to the closest position.

Here, the optical fiber itself has a predetermined rigidity. Therefore, the fiber slides in the fiber storage box (3) according to the movement of the chuck (10). Then, the bending amount is changed to, for example, a minimum bending radius of 40 to 50 mm and a maximum bending radius of 120 to 140 mm. As a result, the optical fiber can be moved in accordance with any movement position of the chuck (10).

In order to ensure the sliding of the optical fiber in the fiber storage box (3) described above, a sheet (for example, product name SoniTac) that reduces frictional resistance is attached to the inner bottom surface of the housing (41). You can also

In the above-mentioned embodiment, as a means for supporting the optical fiber cable in the inspection section (2), a structure in which this is fixed to the chuck (10) and light is irradiated from the back surface of the object to be inspected,
It is not limited to this.

The above embodiment is excellent in that by supporting the optical fiber cable on the chuck (10), the object to be inspected can always be irradiated no matter where the chuck (10) is set.

In addition, only one optical fiber cable inspection unit (2)
The optical fiber cables are not limited to those arranged inside, and a plurality of optical fiber cables may be arranged on the lower surface of the device under test.

FIGS. 8A and 8B show an embodiment in which a plurality of optical fibers, for example, five optical fibers, are attached to the chuck (10).

In this case, the chuck (10) is configured so that light can be emitted not only to the center but also to the peripheral edge thereof.

Further, the shape of the optical fiber, the internal structure of the fiber storage box (3), etc. are merely examples, and various other shapes and structures may be substituted for the embodiment.

Further, as shown in FIG. 9, an XY slide mechanism may be attached in the fiber storage box so that the XY stage and the fiber storage box work together. In this case, as the driving means, the XY slide mechanism may be freely moved by being pulled by the movement of the XY stage (inspection unit). Alternatively, the XY slide mechanism may be driven by a motor by following the movement of the XY stage (inspection unit).

ADVANTAGE OF THE INVENTION According to this invention, without disposing a light source in the inspection unit, the disturbance of the environmental temperature in the inspection unit is prevented, and moreover, the electrical characteristic inspection of the inspection object is performed under the bad environment such as when the external light is irradiated. Can be executed.

[Brief description of drawings]

FIG. 1 (A) is a plan view of a probe apparatus used for explaining an embodiment of the method of the present invention, FIG. 1 (B) is a side view of the probe apparatus of FIG. 1 (A), 2 (A) is a plan view of the chuck equipped with the optical fiber cable of the probe device of FIG. 1, FIG. 2 (B) is a side view of the chuck of FIG. 2 (A), and FIG. Fig. 4 is a schematic explanatory view of an outgoing fiber probe of the probe device, Fig. 4 is a schematic explanatory view of an incident fiber probe of the probe device, and Fig. 5 is an assembled state of a fiber storage box of the probe device of Fig. 1. FIG. 6 is a perspective view, FIG. 6 is an explanatory view showing a flow of steps of an inspection method by the probe device, FIG. 7 is a plan view showing chuck movement of the probe device and routing of optical fibers, FIG. Figure (A) shows the plot in Figure 1. A plan view of a chuck provided with a plurality of optical fiber cables for explaining another embodiment of the device, FIG. 8 (B) is a side view of the chuck of FIG. 8 (A), and FIG. 1 is an explanatory diagram showing a fiber storage box of the probe device with an XY slide mechanism attached. 2 …… Inspection section 3 …… Fiber storage box 4 …… Light source section, 10 …… Chuck 20,30 …… Optical fiber probe

Continuation of the front page (51) Int.Cl. ⁶ Identification number Office reference number FI technical display location G09G 3/36

Claims (5)

[Claims] 1. A method of inspecting a liquid crystal display device for lighting with a probe device, the step of taking out the liquid crystal display device from an accommodation portion accommodating a plurality of the liquid crystal display devices, and the liquid crystal display device taken out. And a step of placing the liquid crystal display device on a mounting table provided in the inspection part, and a step of contacting electrodes of the liquid crystal display device on the mounting table and supplying a signal. During the supply of the signal, a step of irradiating light toward the back surface of the liquid crystal display device from a light emitting portion provided on the mounting table to display an image on the liquid crystal display device is included. A method for inspecting lighting of a liquid crystal display device, comprising: 2. The lighting inspection method for a liquid crystal display device according to claim 1, wherein light is emitted toward the back surface of the liquid crystal display device from a plurality of light emitting portions provided on the mounting table. 3. The liquid crystal display device is irradiated with light from a light source provided outside the inspection section, and light is emitted from the light source by the light emitting end supported by the mounting table. A lighting inspection method for a liquid crystal display device according to claim 1. 4. An intermediate portion of the light supplying means is accommodated and arranged between the inspection part and the light source in a bent state, and the light supplying means follows the movement of the mounting table due to the bending of the light supplying means. The lighting inspection method for a liquid crystal display device according to claim 3, wherein the lighting inspection method moves. 5. The liquid crystal according to claim 3, further comprising an openable and closable shutter for blocking the light from the light source, the light from the light source being incident on the light supply means by opening the shutter. Display device inspection method.