JPH0817341A - Exposure equipment - Google Patents

Abstract

PURPOSE:To prevent the effective amount of light ray emitted from a linear light source from decreasing so as to enhance the efficiency of utilizing the light source by covering the linear light source enclosed in a lamp house in an exposure device with a translucent, hollow cylindrical face cover whose axis is in the same direction as that of the linear light source. CONSTITUTION:A linear arc tube 2 comprising an extra-high pressure mercury lamp, and a lamp house 3 holding the arc tube 2 in place are arranged on the bottom of the inside of an exposure device casing 1 to constitute a light source portion 4. A correcting lens 9 and a filter 10 are mounted above the lamp house 3, and a plate 8 on which to place the panel 7 of a color cathode-ray tube which is a subject to be exposed is installed at the top. A hollow, cylindrical face cover 5 made of glass having an axis in the same direction as that of the arc tube 2 is disposed on the panel 7 side of the lamp house 3, and the lamp house 3 including the portion around the arc tube 2 is filled with cold water. Divergent ray of light emitted from the arc tube 2 are converged by a predetermined angle, emitted from the cover 5, and allowed to pass through the filter 10 and the lens 9, and a phosphor coating on the inner surface of the panel 7 is exposed to the ray of light passed through a shadow mask 11 installed on the panel 7.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure apparatus having at least a light source housed in a lamp house and a correction optical system installed between the light source and an object to be exposed.
The present invention relates to an exposure apparatus provided with a lamp house having a linear light source filled with a cooling medium.

[0002]

2. Description of the Related Art An exposure device equipped with a light source and an optical system is used to form a film surface having a desired function by optically pattern-exposing and developing the film. . In particular, an exposure apparatus for forming a fluorescent screen of a color cathode ray tube having a slot-shaped or grill-shaped shadow mask is installed between a linear light source housed in a lamp house and the linear light source and the inner surface of the panel. At least the correction optical system described above is provided, and in order to form a so-called black matrix or a phosphor mosaic of a plurality of colors, the light source position is changed and a plurality of exposure and development processes are performed.

FIG. 8 is a sectional view for explaining an example of the structure of a color cathode ray tube. 20 is a shadow mask type color cathode ray tube, 21 is a panel coated with a fluorescent screen, 22 is a neck for accommodating an electron gun, and 23 is A funnel connecting the panel and neck, 24 is a phosphor screen made of phosphor mosaic of three colors,
Reference numeral 25 is a shadow mask that is a color selection electrode, 26 is a mask frame that holds the shadow mask fixedly, 27 is a magnetic shield that shields the electron beam from an external magnetic field, 28 is a shadow mask suspension mechanism including a spring, and 29 is three. An electron gun for emitting an electron beam, 30 a deflection yoke, 3
An external magnetic device 1 is used for correcting the purity and the centering.

The three electron beams (Bc, Bs × 2) emitted from the electron gun 29 are deflected in two directions, horizontal and vertical, by the deflection yoke 30, and after the colors are selected by the shadow mask 25, the fluorescent screen 24 is selected. A predetermined image is generated by hitting a predetermined phosphor constituting the. The fluorescent screen 24 uses an optical exposure device, and is composed of a coating film on which a black matrix and a three-color phosphor mosaic are formed by exposure by the optical exposure device and a predetermined development process. Develop color.

FIG. 9 is a schematic view for explaining the structure of an exposure apparatus according to the prior art, in which 01 is an apparatus housing, 02 is a linear light source, 03 is a lamp house, 04 is a light source section, 05 is a flat glass cover, Reference numeral 06 is a cooling medium, 07 is a panel, 08 is a panel mounting plate, 09 is a correction lens, 010 is a filter, and 011 is a shadow mask. In the figure,
This exposure apparatus is provided with a lamp house 03 accommodating a linear light source 02 at the bottom of an apparatus housing 01, and a phosphor-forming coating film applied on the inner surface of a panel 07 mounted on an upper panel mounting plate of a shadow mask 011. Exposure is performed with light from the linear light source 02 that reaches through the mask hole.

Between the linear light source 02 and the panel 07, a correction lens 09 for matching the exposure light beam with the electron beam trajectory and various filters 010 are inserted. Also,
The lamp house 03 houses a linear light source, has a flat glass cover 05 on its upper open surface, and is filled with a cooling medium such as water inside. As a disclosure of the prior art relating to this type of exposure apparatus, for example, Japanese Patent Application Laid-Open No. 2-253537 can be cited.

[0007]

In the above prior art, the linear light source 02 is installed in a cooling medium such as water (hereinafter also simply referred to as water), and the upper surface thereof, that is, the exit opening of the exposure light beam is flat glass. Because it is covered with the cover 05,
There is a problem that the effective light amount decreases due to refraction when the light beam from the linear light source 02 is emitted from the cooling medium 06 into the air, and the time required for exposure becomes long.

FIG. 10 is an explanatory view of the operating principle of the light source section in the conventional exposure apparatus. The light beam emitted from the light source 02 is emitted from the flat surface of the glass cover 05 into the air. At the interface, the light beam is perpendicular to the interface. Since it has a certain angle that does not pass through, it is refracted at the interface, and as a result, the amount of light that can be effectively used is reduced. That is, the light source 02
A light beam emitted at an angle θ ₂ from the vertical direction enters the flat glass cover 05 and is refracted by the difference in the refractive index between water and the glass. When it goes out into the air, it is refracted by the difference in the refractive index between the glass and the air. And proceed at an angle of θ ₁ with the vertical direction.

Light rays from the light source 02 are emitted in a direction of 360 ° around the light source, but not all the light rays can be used for exposure. For example, in the case of a cathode ray tube having a horizontal deflection angle of 80 °. For example, only rays with θ _{1 up} to 40 ° can be used. When a flat glass cover is used for a water-filled lamp house, only light rays with θ _{2 up} to about 29 ° can be effectively used, and about 30% of light rays are wasted.

An object of the present invention is to solve the above-mentioned drawbacks of the prior art, and to reduce the effective amount of light rays emitted from the linear light source in an exposure apparatus provided with a lamp house having a linear light source filled with a cooling medium. It is an object of the present invention to provide an exposure apparatus that prevents the above and improves the utilization efficiency of the light source.

[0011]

In order to achieve the above object, the present invention provides a surface of a translucent cover which is installed on the exposed side of a lamp house containing a linear light source and filled with a cooling medium. It is characterized in that it is a cylindrical surface having an axis in the same direction as the axis of the linear light source. That is, the first invention according to claim 1 is an exposure apparatus comprising at least a linear light source housed in a lamp house, and a correction optical system installed between the linear light source and an object to be exposed, The linear light source is covered with a translucent hollow cylindrical surface cover having an axis in the same direction as the axis, and the lamp house including the inside of the hollow cylindrical surface cover is filled with a cooling medium. Is characterized by.

A second aspect of the present invention is characterized in that the hollow cylindrical surface cover has a cylindrical shape having a uniform thickness over the entire surface. A third aspect of the present invention is characterized in that the hollow cylindrical surface cover has a flat surface at least in an area of an inner surface of the exposed light source facing the longitudinal direction of the linear light source.

According to a fourth aspect of the present invention, the hollow cylindrical surface cover is expanded toward the linear light source side in at least an area of an inner surface of the exposed surface facing the linear light source. It has a curved surface opposite to the curved surface of the hollow cylindrical surface cover as it appears. A fifth invention according to a fifth aspect is characterized in that the hollow cylindrical surface cover has an opening portion on a side opposite to the exposed side along a longitudinal direction of the linear light source.

[0014]

According to the structure of the first invention described above, the light beam emitted from the linear light source is refracted at the interface where it exits from the surface of the hollow cylindrical surface cover into the air because the light beam is transmitted perpendicularly to the interface. Never. Further, according to the configuration of the second invention, since the hollow cylindrical surface cover is made to have a uniform thickness, the light from the linear light source causes the cooling medium and the hollow cylindrical surface cover, and the hollow cylindrical surface cover and the air. Since there is no refraction at each interface, there is no loss due to refraction at each interface.

According to the third aspect of the invention, the light beam emitted from the linear light source is refracted in the vertical axis direction by the plane formed on the light source side inner surface of the hollow cylindrical surface cover, and the light beam emitted from the hollow cylindrical surface cover is Use efficiency is improved. According to the configuration of the fourth invention, the light beam emitted from the linear light source is further refracted in the vertical axis direction by the curved surface formed on the light source side inner surface of the hollow cylindrical surface cover, and the utilization efficiency of the light beam emitted from the hollow cylindrical surface cover is improved. Will improve further.

According to the structure of the fifth invention, the cooling medium can be effectively circulated in the hollow cylindrical surface cover, and the linear light source and the hollow cylindrical cover can be easily attached and detached, which facilitates maintenance. become.

[0017]

Embodiments of the present invention will now be described in detail with reference to the drawings. FIG. 1 is a schematic diagram for explaining a first embodiment in which the exposure apparatus according to the present invention is applied to a fluorescent screen producing apparatus for a color cathode ray tube, wherein 1 is a device housing, 2 is a linear light source, 3 is a lamp house, 4 is a light source unit, 5 is a transparent hollow cylindrical surface cover, 6 is water as a cooling medium, 7 is a panel,
Reference numeral 8 is a panel mounting plate, 9 is a correction lens, 10 is a filter, and 11 is a shadow mask.

In the figure, a linear arc tube 2 made up of an ultra-high pressure mercury lamp constituting a linear light source is provided on the inner bottom of the apparatus housing 1.
Then, the lamp house 3 for fixing and holding the light emitting tube 2 is arranged to configure the light source unit 4. A correction lens 9 and a filter 10 are mounted above the lamp house 3, and a panel mounting plate 8 on which a panel 7 of a color cathode ray tube which is an exposed object is mounted is installed on the uppermost part.

On the panel 7 side of the lamp house 3, a glass hollow cylindrical surface cover 5 having an axis in the same direction as the axis of the arc tube 2 is arranged, and the lamp house 3 including the circumference of the arc tube 2 is arranged. The inside is filled with cooling water. In the above structure, the light beam emitted from the light source unit 4 passes through the filter 10 and the correction lens 9, and further through the shadow mask 11 installed on the panel 7, exposes the phosphor coating film applied to the inner surface of the panel 7.

FIG. 2 is an explanatory view of the relative positional relationship between the arc tube and the hollow cylindrical surface cover in this embodiment. The inner surface of the hollow cylindrical surface cover 5 is also a cylindrical surface, is made of glass of the same thickness as a whole, and is arranged at the same axis as the axis of the arc tube 2. 3 is a sectional view taken along the line AA of FIG.
Since the hollow cylindrical surface cover 5 has the same thickness as the axis of the arc tube 2 and has the same axial center, the light beam emitted from the arc tube 2 at θ ₁ is emitted from the surface of the hollow cylindrical surface cover 5 at θ ₁ . Emit.

Therefore, there is no decrease in the amount of light as described in the prior art, and it is possible to provide an exposure apparatus in which the utilization efficiency of the light source is improved. It should be noted that the hollow cylindrical surface cover 5 may be a tubular shape that surrounds the arc tube 2. FIG.
5'is an explanatory view of the relative positional relationship between the arc tube and the hollow cylindrical surface cover for explaining the second embodiment in which the exposure apparatus according to the present invention is applied to the apparatus for producing the phosphor screen of the color cathode ray tube. The same reference numerals as in the cover and FIG. 2 correspond to the same parts.

In this embodiment, the hollow cylindrical surface cover 5'has a flat surface at least in the area of the panel-side inner surface facing the arc tube 2 in the longitudinal direction. FIG. 5 is a cross-sectional view taken along the line BB of FIG. 4, in which the hollow cylindrical surface cover 5 ′ is arranged at the same axis as the axis of the arc tube 2 and faces at least the longitudinal direction of the arc tube 2. A flat surface is provided in the area of the panel-side inner surface.

The light beam emitted from the arc tube 2 at θ ₃ enters the plane of the inner surface of the hollow cylindrical surface cover 5 ′ and then exits at θ ₁ from the surface. Therefore, there is no decrease in the amount of light as described in the prior art, and it is possible to provide an exposure apparatus with improved light source utilization efficiency. FIG. 6 is an explanatory view of a relative positional relationship between a light emitting tube and a hollow cylindrical surface cover for explaining a third embodiment in which the exposure apparatus according to the present invention is applied to a fluorescent screen producing apparatus for a color cathode ray tube. The cylindrical surface cover, the same reference numerals as in FIG. 2 correspond to the same parts.

In this embodiment, the hollow cylindrical surface cover 5 "is opposite to the curved surface of the hollow cylindrical surface cover so that the hollow cylindrical surface cover 5" bulges toward the arc tube 2 at least in the region of the inner surface on the panel side facing in the longitudinal direction of the arc tube 2. 7 has a curved surface of FIG.
5 is a cross-sectional view taken along line C, showing a hollow cylindrical surface cover 5 ″.
Are arranged at the same axis as the axis of the arc tube 2 and have a curved surface at least in the region of the panel-side inner surface facing the arc tube 2 in the longitudinal direction.

The light beam emitted from the arc tube 2 at θ ₄ enters the plane of the inner surface of the hollow cylindrical surface cover 5 ″ and then exits at θ ₁ from the surface thereof. It is possible to provide an exposure apparatus in which the utilization efficiency of the light source is further improved without any decrease.The hollow cylindrical surface covers 5'and 5 "of the second and third embodiments are also tubular so as to surround the arc tube 2. You can also

Incidentally, in both the second embodiment and the third embodiment,
The area through which the effective light ray passes exhibits a kind of convex lens effect, and the hollow cylindrical surface cover 5'is formed as an arc tube so that the light ray incident on the inner surface of the hollow cylindrical surface cover does not totally reflect beyond the critical angle. The space between them and the width (width) of the region covering the arc tube are selected, and the curvature is selected for the hollow cylindrical surface cover 5 ″.

Furthermore, the curved surface of the inner surface of the hollow cylindrical surface cover 5 "in the third embodiment does not necessarily have to have a uniform curvature, and the cross section can be a non-cylindrical surface. Although the exposure apparatus for forming the fluorescent screen on the panel of the color cathode ray tube has been described as an example, the present invention is not limited to this, and for various devices and apparatuses that employ a so-called optical exposure method. Needless to say, the present invention can be applied to the above exposure apparatus.

[0028]

As described above, according to the present invention,
In an exposure apparatus provided with a lamp house having a linear light source filled with a cooling medium, solving the problems of the above-mentioned conventional technology,
It is possible to provide an exposure apparatus in which the effective amount of light rays emitted from the linear light source is prevented from decreasing and the utilization efficiency of the light source is improved.

In particular, when it is applied to an exposure device for forming a fluorescent film on the inner surface of the panel of a color cathode ray tube, a high quality fluorescent screen can be produced with high production efficiency.

[Brief description of drawings]

FIG. 1 is a schematic diagram illustrating a first embodiment in which an exposure apparatus according to the present invention is applied to an apparatus for forming a phosphor screen of a color cathode ray tube.

FIG. 2 is an explanatory diagram of a relative positional relationship between the arc tube and the hollow cylindrical surface cover in the first embodiment of the present invention.

3 is a cross-sectional view taken along the line AA of FIG.

FIG. 4 is an explanatory diagram of a relative positional relationship between an arc tube and a hollow cylindrical surface cover for explaining a second embodiment in which the exposure apparatus according to the present invention is applied to an apparatus for forming a phosphor screen of a color cathode ray tube.

5 is a cross-sectional view taken along the line BB of FIG.

FIG. 6 is an explanatory view of a relative positional relationship between a light emitting tube and a hollow cylindrical surface cover for explaining a third embodiment in which the exposure apparatus according to the present invention is applied to a fluorescent screen producing apparatus for a color cathode ray tube.

7 is a cross-sectional view taken along the line CC of FIG.

FIG. 8 is a cross-sectional view illustrating a structural example of a color cathode ray tube.

FIG. 9 is a schematic diagram illustrating a configuration of an exposure apparatus according to a conventional technique.

FIG. 10 is an explanatory diagram of an operation principle of a light source unit in a conventional exposure apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Device housing 2 Linear light source 3 Lamp house 4 Light source part 5, 5 ', 5 "Transparent hollow cylindrical surface cover 6 Water as a cooling medium 7 Panel 8 Panel mounting plate 9 Correction lens 10 Filter 11 Shadow mask.

Claims (5)

[Claims] 1. An exposure apparatus comprising at least a linear light source housed in a lamp house and a correction optical system installed between the linear light source and an object to be exposed. An exposure apparatus which is covered with a light-transmissive hollow cylindrical surface cover having an axis in the same direction as, and is filled with a cooling medium in the lamp house including the inside of the hollow cylindrical surface cover. 2. The exposure apparatus according to claim 1, wherein the hollow cylindrical surface cover has a cylindrical shape having a uniform thickness over the entire surface. 3. The exposure apparatus according to claim 1, wherein the hollow cylindrical surface cover has a flat surface in at least a region of an inner surface of the linear light source facing the longitudinal direction of the object to be exposed. 4. The hollow cylindrical surface cover according to claim 1, wherein the hollow cylindrical surface cover bulges toward the linear light source in at least a region of an inner surface of the linear light source facing the longitudinal direction of the linear light source. An exposure apparatus having a curved surface opposite to the curved surface of the cylindrical surface cover. 5. The hollow cylindrical surface cover according to any one of claims 1, 2, 3 and 4, wherein the hollow cylindrical surface cover has an opening portion on a side opposite to the exposed side along a longitudinal direction of the linear light source. Exposure equipment.