JPH08201025A - Noncontact coordinate dimension measuring machine - Google Patents

Abstract

PURPOSE: To provide a noncontact coordinate dimension measuring machine with improved operability which can be easily aligned to a part to be measured. CONSTITUTION: Image information taken by a low-magnification image pick-up device 6 and a high-magnification image pick-up device 8 is stored temporarily in an image memory part 24. A dimension measurement position is confirmed by a low-magnification image and a measurement position is specified by the input from an input device 38 in a high-magnification image. High-magnification image information is subjected to image processing and dimensions are calculated by an operation part 30 and displayed on a display 36.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-contact coordinate dimension measuring machine for non-contact measurement of coordinate dimensions based on image information, and more particularly to means for capturing image information and displaying images.

[0002]

2. Description of the Related Art FIG. 7 is a schematic block diagram showing the structure of a conventional coordinate dimension measuring machine.

Tables 10 and 4 each having a linear guide mechanism 16 in the X-axis direction and a linear guide mechanism 14 in the Y-axis direction are arranged, and a CCD (Charge Coupled Device) camera for capturing images on the X-axis direction moving table 10. 6 is installed.

The CCD camera 6 uses a revolver type focus adjustment mechanism to change the magnification of the lens, or
An appropriate magnification is set using the zoom mechanism and an image within the field of view of the camera is captured.

As a method of inputting the position for measuring the dimensions, while looking at the image from the CCD camera 6 displayed on the display device 36, the cursor is moved to the position of the target image and the position is input by the computer input device 38. There is a method of inputting and storing.

This situation will be described with reference to the screen shown in FIG. On this screen, the enlarged image of the measurement site of the DUT 22 (FIG. 7) is aligned with the screen center 44 of the measurement screen 40, and the cursor 46 is aligned with the measurement position by the input device 38, for example, a mouse. Specify the position and enter.

There is also a method of inputting pre-programmed measurement position data, for example, but even in that case, it is necessary to finely adjust the position while observing the screen. Moreover, the higher the magnification, the greater the need for fine adjustment from the input data values.

After the measurement position is designated as described above, image processing is performed from the image information taken in the raw image memory section 24, that is, A / D, inside the image processing section 100 composed of a computer. The conversion unit 26 performs processing of analog / digital conversion of image information. Then, this is binarized by the binarization unit 28, and the calculation unit 30 calculates the size corresponding to the pixel or the size from the reference position to calculate the distance between the two designated points. Done.

Further, the dimension calculation result is stored in the data storage unit 32.
Are simultaneously stored in the display device 36 and are also output to the display device 36.

[0010]

The conventional non-contact coordinate dimension measuring machine has the above-mentioned configuration, and when dimension measurement is performed, the measured portion is enlarged and displayed as much as possible in order to obtain measurement accuracy. The measurement is performed with the screen of the device 36 being filled. This is to improve the pixel resolution of the captured image. However, in this case, since only the portion to be measured is displayed on the screen, the operator cannot judge where the operator is looking because the positional relationship with the surroundings is unknown or there is insufficient positional information that can be a reference for visual inspection. There is.

Therefore, an object of the present invention is to provide a non-contact coordinate dimension measuring machine which enables an operator to specify a portion to be measured in a short time and prevent erroneous measurement.

Still another object of the present invention is to display a whole image of an object to be measured or a composite image of a peripheral image of a portion to be measured and a locally magnified image to be measured on the same screen of a display device. A non-contact coordinate dimensional measurement.

[0013]

A non-contact coordinate dimension measuring machine according to claim 1, wherein the object to be measured is imaged at a first magnification and a second magnification higher than the first magnification, respectively. 2 image pickup means, means for changing relative coordinate positions of the object to be measured and the 1st and 2nd image pickup means, and 1st and 2nd image information of each of the 1st and 2nd image pickup means are stored. Image information storage means for synthesizing the first and second image information, and the image synthesizing means for synthesizing a part of the first or second image information into the second or first image information. A means for displaying the image synthesized by the image synthesizing means, a means for replacing and synthesizing with the image information, a means for designating a dimension measurement position for the synthesized image information, and a means for designating the dimension measurement position. Calculate the size according to the image information and display it on the display. And means for.

The non-contact coordinate size measuring machine according to claim 2 is
The object to be measured has a first magnification and a second magnification higher than the first magnification.
Of the first image information of the first magnification and the second image information of the second magnification. An image information storage unit for storing the image information and an image synthesizing unit for synthesizing the first and second image information are provided, and the image synthesizing unit includes a part of the first or second image information as the second or first Means for displaying the image combined by the image combining means, means for designating a dimension measurement position for the combined image information, and a designated dimension measurement position. And a unit for calculating a dimension according to the image information from the image information and outputting it to the display unit.

The non-contact coordinate dimension measuring machine according to claim 3 is
In addition to the configuration of the image synthesizing means of the non-contact coordinate dimension measuring machine according to claim 1 or 2, the first responsive to an external signal
Of the second image information by replacing a part of the second image information with the second image information and outputting a part of the second image information by the first state.
Image output switching means for switching between a second state in which the image information is replaced and synthesized and output, a third state in which the first image information is output, and a fourth state in which the second image information is output. And a means for setting a position in the image information of a part of the image information to be replaced in the first or second state according to the control signal.

[0016]

In the non-contact coordinate dimension measuring machine according to the first aspect, the first and second image pickup means, for example, two CCD cameras having different image pickup magnifications are used, and the second image pickup means having a large image pickup magnification. Is taken in as image information of an enlarged screen full of the part to be measured, and the first imaging means having a small imaging magnification reduces the enlargement ratio and takes in image information of the periphery of the part to be measured or the entire object to be measured. The display means displays these two pieces of image information combined by the image combining means in one screen.

In the non-contact coordinate size measuring machine according to the second aspect, the two pieces of image information captured by the imaging means at the first and second magnifications are the same as those of the non-contact coordinate size measuring machine according to the first aspect. Then, it is displayed as one screen on the display means.

In the non-contact coordinate dimension measuring machine according to the third aspect, in addition to the function of the image synthesizing means of the non-contact coordinate dimension measuring machine according to the first or second aspect, the image synthesizing state is switched in the image information means. The display means displays one of the first and second images, or an image in which one of the first and second images is the main and the other is the sub. Moreover, when the main and sub images are displayed at the same time, the position of the sub image in the main image can be arbitrarily moved.

[0019]

1 is a schematic block diagram showing the structure of a first embodiment of the present invention. In the figure, the same symbols as in the conventional example of FIG. 7 represent the same components.

Similar to the conventional example, the Y-direction moving table 4 linearly guided on the base 2 and the X-direction movable table 4 similarly linearly guided.
A direction moving table 10 is arranged, and two image capturing CCD cameras 6 and 8 are arranged on the X direction moving table. The optical systems of the two cameras 6 and 8 are set so that different magnifications can be obtained. The image from the confirmation camera, which has the lowest enlargement ratio of the two cameras, is stored in the memory unit 24 in the image processing unit 100 including a computer when a measurement start command is issued by a signal from the input device 38. To be done. Further, the image of the measuring camera having a high enlargement ratio is also stored in the same memory unit 24, is combined with the image of the confirming camera and is displayed on the display device 36, and image processing and calculation necessary for the measurement are performed. And is used as dimension measurement data of the designated coordinates.

The images captured by the two cameras are
As shown in FIG. 5, the image of the confirmation camera is reduced to, for example, 1/4 of the display screen, and the image of the measurement camera is displayed on the remaining portion. Specifically,
When a low magnification image (entire image or wide-range image of the object to be measured) captured by the confirmation camera is stored in the computer, the center coordinates of the confirmation camera viewed from the reference position of the table are calculated. Next, in order to clarify the positional relationship between the confirmation camera and the measurement camera, the offset amount is stored in the computer in advance and the position of the image captured by the measurement camera is the image captured by the measurement camera. Make it clear what it is. Then, the center coordinates of the measuring camera are displayed by the cursor 48 on the screen of the confirming camera. In addition, the measuring camera has a motor 20 and a feed screw 1.
8, the result calculated by the calculation unit 30 is input to the image combining unit 34 so that the cursor 48 on the confirmation screen moves in association with the movement.

FIG. 2 is a flow chart showing the operation of the image processing unit 100 in the first embodiment. When the measurement is started, an image with a low magnification (hereinafter referred to as the whole image) is taken into the memory unit 24 (step S1),
Subsequently, an image with a high magnification (hereinafter referred to as an enlarged image) is taken into the memory section 24 (step S2).

A pixel image 48 indicating the center of the magnified image and the position in the magnified image is calculated and created by the calculation unit 30 based on the preset offset amount between the magnified image and the magnified image.
The image is output to the image composition unit 34 (step S3).

The screen display mode is judged on the basis of the signal from the input device 38 (step S4), and when the single screen display mode is selected, is it continuously in the enlarged image display mode?
It is determined whether or not it is the display mode of the whole image (step S11), and the enlarged image or the whole image is displayed according to the mode at that time (steps S121 and S12).
2).

On the other hand, when the screen display mode is the composite screen display mode, it is subsequently determined whether the enlarged image is the main screen or the entire image is the main screen (step S).
5) Depending on the mode at that time, a screen with the entire image as the main screen and the enlarged image as the sub screen, or a screen with the enlarged image as the main screen and the entire image as the sub screen is displayed (step S61). , S62).

As described above, when the measurement screen is displayed,
It is determined whether or not the mode is the dimension measurement mode (S
7) If it is not in the dimension measurement mode, the process returns to the step of determining the screen display mode (step S4).

On the other hand, in the dimension measuring mode, the dimension measuring position is designated by the dimension measuring position designating cursor 46 (step S8), and the image information is A / D converting section 26.
After being subjected to digital signal processing by, and binarization processing or grayscale image processing, dimension calculation is performed by the calculation unit 30 based on the image information (step S9).

The calculation result of the dimensions is output from the calculation unit 30 to the display device 36 (step S10), and a series of processing is completed.

FIG. 3 is a schematic block diagram showing the configuration of the second embodiment of the present invention. The difference from the first embodiment is that C
The point is that the magnification control unit 12 is controlled by the calculation unit 30 instead of the single CD camera 6.

FIG. 4 is a flow chart showing the operation of the image processing unit 100 in the second embodiment.

When the measurement is started, the data of the enlargement ratio is output from the arithmetic unit 30 to the magnification control unit 12 (step S
1), the image data of the enlarged image and the image data of the whole image are taken into the memory unit 24 (step S2).

The screen display mode is determined on the basis of the signal from the input device 38 (step S3). In the single screen display mode, either the enlarged image display mode or the whole image display mode is continuously displayed. It is determined whether or not there is any (step S10), and the enlarged image or the whole image is displayed according to the mode at that time (steps S101 and S).
102).

On the other hand, when the screen display mode is the composite screen display mode, the enlarged image is the main screen and the entire image is the sub screen, or the entire image is the main screen and the enlarged image is the sub screen. It is determined whether it is a screen (step S4), and an image according to the mode at that time is displayed (step S5).
1, S52). At this time, an image 48 of the cursor indicating the position of the center of the magnified image in the overall image is calculated by the calculation unit 30,
It is created and output to the image composition unit 34.

Subsequently, it is determined whether or not the size measurement mode is set (step S6). If the size measurement mode is not set,
Step of determining the screen display mode again (step S3)
The process returns to.

In the dimension measurement mode, the dimension measurement position is designated by the dimension measurement position designation cursor 46, the image data is digitally processed, and then the size calculation is performed (step S8) to calculate the size. The result is displayed (step S9), and the series of processes ends.

In the above embodiments, the position of the sub-screen in the main screen is fixed, but the position of the sub-screen in the main screen is changed by the signal given from the arithmetic unit 30 to the image synthesizing unit 34. It is also possible to make variable.

The means for moving the DUT 22 is X
Although it is a -Y two-dimensional movable stage, it can also be applied to the dimension measurement of an object to be measured having a three-dimensional structure by making it a three-dimensionally movable stage.

[0038]

In the non-contact coordinate size measuring machine according to the first aspect of the present invention, it is possible to operate while viewing the image of the measured portion of the object to be measured and the peripheral image on the same screen.
Accurate alignment with the measurement position is possible. Moreover, since the measurement is performed while observing the peripheral image at the same time, it is possible to prevent the measurement of an erroneous portion even when measuring the measurement object having a plurality of measurement portions having similar shapes. Moreover, the measurement time can be greatly shortened and the operability is improved.

In the non-contact coordinate size measuring machine according to the second aspect, by switching the magnification of one measuring means,
Since the configuration is such that the magnified image and the peripheral image of the measured portion are taken in, the configuration of the device can be simplified and the alignment accuracy is improved, and the same effect as the non-contact coordinate dimension measuring machine according to claim 1 can be obtained. Play.

In the non-contact coordinate size measuring machine according to the third aspect, it is possible to switch which of the enlarged image and the whole image is the main screen or the sub screen, and the sub screen in the main screen can be switched. Since it is also possible to move the position of the screen, it is possible to greatly improve the operability and shorten the measurement time even when the shape of the measured object is complicated.

[Brief description of drawings]

FIG. 1 is a schematic block diagram showing a first embodiment of the present invention.

FIG. 2 is a flowchart showing the operation of the first embodiment.

FIG. 3 is a schematic block diagram showing a second embodiment of the present invention.

FIG. 4 is a flowchart showing the operation of the second embodiment.

FIG. 5 is a schematic view showing a measurement display screen of the present invention.

FIG. 6 is a schematic diagram showing a conventional measurement display screen.

FIG. 7 is a schematic block diagram showing a configuration of a conventional non-contact coordinate dimension measuring machine.

[Explanation of symbols]

 2 Base 4 Y-axis direction movable part 6 First imaging means 8 Second imaging means 10 X-axis direction movable part 12 Magnification control part 14 Y-axis direction linear guide 16 X-axis direction linear guide 18 Feed screw 20 Motor 22 Measured Object 24 Image memory section 26 Analog / digital conversion section 28 Binarization processing section 30 Computing section 32 Data storage section 34 Image combining section 36 Display device 38 Input device 40 Measurement screen 42 Confirmation screen 44 Measurement screen center 46 Measurement position Cursor for designation 48 Cursor for displaying the center position of the measurement screen

Claims (3)

[Claims] 1. A non-contact coordinate dimension measuring machine for measuring a dimension between two designated points of an object to be measured based on image information of an image of the object to be measured, wherein each object to be measured has a first magnification. And first and second imaging means for imaging at a second magnification higher than the first magnification, means for changing relative coordinate positions of the object to be measured and the first and second imaging means, Image combining means for memorizing the first and second image information of each of the first and second imaging means, and image synthesizing means for synthesizing the first and second image information, The means includes means for replacing a part of the first or second image information with the second or first image information and synthesizing, and means for displaying the image synthesized by the image synthesizing means. , The dimension measurement position for the combined image information Means for specifying a dimension corresponding to the designated dimension measurement position calculated from the image information, and means for outputting to said display means, non-contact coordinate measuring machine. 2. A non-contact coordinate dimension measuring machine for measuring a dimension between two designated points of an object to be measured based on image information of an image of the object to be measured, wherein the object to be measured has a first magnification and Second higher than first magnification
, A means for changing the relative coordinate positions of the object to be measured and the image pickup means, first image information of the first magnification, and a second image of the second magnification. Image information storage means for storing information, and image synthesizing means for synthesizing the first and second image information, wherein the image synthesizing means stores a part of the first or second image information. A means for displaying the image combined by the image combining means, and a means for designating a dimension measurement position for the combined image information, And a unit for calculating a dimension corresponding to the designated dimension measurement position from image information and outputting the calculated dimension to the display unit. 3. The image synthesizing means replaces a part of the first image information with the second image information in response to a control signal from the outside, synthesizes the image, and outputs the synthesized image. A second state in which a part of the second image information is replaced with the first image information and combined and output, a third state in which the first image information is output, and a second state Image output switching means for switching between a fourth state in which the image information is output, and a part of the image information of the replaced image information in the first or second state in accordance with the control signal. The non-contact coordinate dimension measuring machine according to claim 1, further comprising a position setting means.