JPH08201064A - Angular velocity sensor - Google Patents

Abstract

(57) [Abstract] [Purpose] To provide an angular velocity sensor that is small in size, has an extremely simple assembly / connection process, and whose characteristics are less likely to change due to changes in ambient temperature. [Structure] The drive input electrode 5 is arranged in the extending direction of the vibrating branches 3, 4, 6, 7 of the drive side vibrating section 1A and the detection side vibrating section 1B.
1, 52 and the detection output electrodes 81 and 82 are attached to the intermediate holding branches 5 and 8, and the elastic pins 5 are attached to the intermediate holding branches 5 and 8.
It is suspended above the substrate 11 via 4, 55, 84, and 85.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an angular velocity sensor having a piezoelectric vibrating body composed of two vibrating branches, a driving side vibrating section having an intermediate holding branch between the vibrating branches, and a detecting side vibrating section.

[0002]

2. Description of the Related Art Various angular velocity sensors used for camera shake correction, automobile navigation, and attitude control of a moving body have been proposed. As a structure of a piezoelectric vibrating body used for such an angular velocity sensor, for example, US Pat. No. 4,524,619 and Japanese Patent Laid-Open No. 3-291517,
There has been proposed a piezoelectric vibrating body in which a driving-side vibrating portion and a detecting-side vibrating portion are coupled by a coupling base portion.

As shown in FIG. 10, the piezoelectric vibrating body 91 is basically an H-shaped piezoelectric substrate, that is, a driving side vibrating portion 91A and a detecting side vibrating portion 91B in the direction of both end surfaces with a coupling base portion 92 interposed therebetween. Are arranged on the four side surfaces of the two vibrating branches 93, 94 of the driving-side vibrating section 91A, and the vibration driving electrodes 93a to 93d, 94a to 94d (here, 93b,
(93c, 94b, 94c do not appear in the figure) are respectively formed. In addition, the two vibrating branches 9 of the detection-side vibrating unit 91B
The first and second vibration detection electrodes 9 are provided on the respective side surfaces of the reference numerals 5 and 96.
5a to 95d, 96a to 96d (95a, 95b,
(96a and 96b do not appear in the figure) are formed.

The vibrating branches 93, 9 of the drive side vibrating portion 91A
Vibration drive electrodes 93a to 93d, 9 formed on the four side surfaces of No. 4
When a driving alternating voltage signal is applied to 4a to 94d, tuning fork vibration is generated in one plane in the driving side vibrating portion 91A. Since the vibration frequencies of the tuning fork vibration modes of the vibrating portions 91A and 91B are different, the vibrating portion 91B on the detection side does not resonate.

However, when a rotational movement (angular velocity) is applied to the piezoelectric vibrating body 91, Coriolis force acts on the two vibrating branches 93 and 94 of the driving side vibrating portion 91A to cause vibration proportional to the angular velocity of the rotational movement. Occurs in a direction perpendicular to the plane of the piezoelectric substrate. This vibration is called flap vibration. This fluttering foot vibration is transmitted to the entire piezoelectric substrate, and the detection side vibrating section
B first and second vibration detection electrodes 95a to 95d, 96a
Between -96d, an electric field determined by the vibration direction of the flap and the polarization direction of the piezoelectric substrate (the polarization electric axis direction in the quartz substrate) is generated, and a detection signal corresponding to a predetermined angular velocity can be obtained.

As the above-mentioned piezoelectric substrate, for example, a quartz substrate cut in a predetermined crystal plane in consideration of the crystal axis direction is used, and the piezoelectric substrate is subjected to etching treatment so that the whole becomes H-shaped, The vibration driving electrodes 93a to 93d, 94 are formed on the both main surfaces and both side surfaces orthogonal to the both main surfaces by vapor deposition, respectively.
a-94d, vibration detection electrodes 95a-95d, 96a-9
6d is adhered and formed.

When such a piezoelectric vibrating body 91 is used as an angular velocity sensor, the vibrating body is used as a vibrating section on the driving side and the detecting side on a stem substrate (not shown) which is a part of the container. It is important to fix the vibrating branches 93, 94, 95, 96 so that they can freely vibrate. Therefore, in the above-described conventional piezoelectric vibrating body 91, the vibrating branches 93, 94, 95, 96 are held in the direction orthogonal to the extending direction of the vibrating branches 93, 94, 95, 96 on the coupling base 92 that couples the two vibrating portions 91A, 91B. The parts 97 and 98 were provided.

[0008]

However, in order to obtain stable characteristics in the above-mentioned piezoelectric vibrating body 91, the first and second vibration detecting electrodes 95a to 95d, 96a formed on the detecting side vibrating portion 91B are required. It is very important to form ~ 96d with high accuracy, and it is necessary to take care not to increase the size of the angular velocity sensor when it is housed in a container or the like and used as the angular velocity sensor.

Further, the holding portions 97 and 98 are piezoelectric vibrating bodies 91.
Since it projects in the width direction, it becomes extremely large when it is used as an angular velocity sensor by being housed in a container or the like.

When the piezoelectric vibrating body 91 is fixed to a container body or the like by adhesive bonding,
If thermal expansion, thermal contraction or the like occurs particularly in a member that fixes the piezoelectric vibrating body 91 due to a change in ambient temperature, the holding portion 9
7 and 98, the stress due to this contraction is generated by the vibration branch 93,
There is a problem that the characteristics are not stable due to the influence on 94, 95 and 96.

The present invention has been devised in view of the above-mentioned problems, and an object thereof is to provide an angular velocity sensor in which the fluctuation of the characteristic due to the temperature is small and the assembling / connecting process is very simple. Become.

[0012]

SUMMARY OF THE INVENTION According to the present invention, two vibrating branches having vibration driving electrodes are formed on one end face of a coupling base portion facing each other, and one vibrating branch is formed on both main faces. And a drive side vibrating section, which is composed of two vibrating branches on the other end surface of which vibration detection electrodes are formed and one intermediary holding branch of which detection output electrodes are formed on both main surfaces. The piezoelectric vibrating body is composed of a piezoelectric vibrating body integrally formed with a detection-side vibrating section and a substrate having a predetermined wiring conductor, and the piezoelectric vibrating body is attached to the two intermediate holding branches of the piezoelectric vibrating body by using an elastic pin. An angular velocity sensor characterized by being suspended above.

According to a second aspect of the present invention, the piezoelectric vibrating body is formed by a substantially C-shaped elastic pin that is joined to the drive input electrode and the detection output electrode formed on the upper main surface of the intermediate holding branch of the piezoelectric vibrating body. Is an angular velocity sensor in which is suspended above the substrate.

According to a third aspect of the present invention, both main surfaces of the intermediate holding branch of the piezoelectric vibrating body are clamped by one end of the elastic pin, and the other end of the elastic pin is fixed to a holder member arranged on the substrate. It is an angular velocity sensor.

[0015]

According to the present invention, in the structure of the piezoelectric vibrating body, the driving side vibrating portion and the detecting side vibrating portion arranged at both ends of the coupling base portion extend in the same direction as the extending direction of each vibrating branch. An intermediate holding branch is formed, and a drive input electrode and a detection output electrode connected to the vibration driving electrode and the vibration detecting electrode formed on each vibrating branch are formed on the main surface of the intermediate holding branch.

The piezoelectric vibrating body having such a structure is
An elastic pin joined to the intermediate holding branch suspends the wiring from above the substrate on which a predetermined wiring conductor for connecting to an external circuit is formed.

Therefore, since the piezoelectric vibrating body in the shape of the piezoelectric vibrating body, that is, the intermediate holding branch which is the holding means is arranged so as to extend in the same direction as the other vibrating branch, the piezoelectric vibrating body of the conventional type is vibrated. Since the width direction does not become extremely large, it becomes a small angular velocity sensor.

Further, since the piezoelectric vibrating body is suspended by the elastic pins, even if thermal expansion or the like occurs in a substrate or the like which constitutes the container due to a change in ambient temperature, stress caused by the thermal expansion is generated. Will be absorbed by the elastic pin that suspends the piezoelectric vibrating body, and the fluctuation of the characteristics can be suppressed without affecting the piezoelectric vibrating body due to the temperature change.

Further, this elastic pin is connected to each drive input electrode,
By bonding to each detection output electrode or the like, it is possible to serve as a mechanical bonding means and an electrical connecting means of the piezoelectric vibrating body, and the assembling / connecting process becomes very simple.

Further, according to the second aspect of the invention, since the shape of the elastic pin is approximately C-shaped, the molding of the elastic pin is very simple, and the piezoelectric vibrating body can be reliably and stably mounted on the upper part of the substrate. Can be hung.

According to the third aspect of the present invention, the two main elastic faces of the intermediate holding branch are sandwiched by one end of the two linear elastic pins extending in the same direction as the extending direction of the intermediate holding branch. The other end is fixed to the holder member. That is, the processing of the elastic pin becomes very easy, and since the piezoelectric vibrating body is suspended from the longitudinal direction of the piezoelectric vibrating body, the entire angular velocity sensor does not become large in the width direction, and a small angular velocity sensor is achieved. it can.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The angular velocity sensor of the present invention will be described below with reference to the drawings.

FIG. 1 is an external perspective view of an angular velocity sensor of the present invention. FIG. 2 (a) is a plan view with a lid omitted, FIG. 2 (b) is the same plan view, and FIG. 2 (c) is a plan view. FIG. 3 is a sectional view taken along the line AA of FIG. 1, FIG. 3 is an external perspective view of a piezoelectric vibrating body used in this angular velocity sensor, and FIGS. 4A to 4D are both main surfaces and both side surfaces of the piezoelectric vibrating body. FIG. 5 is a schematic view for explaining a connection state and a vibration state of electrodes of a driving-side vibrating portion and a detecting-side vibrating portion, and FIG. 6 is an equivalent circuit diagram of an external detection circuit including an angular velocity sensor. Is.

The angular velocity sensor of the present invention comprises a piezoelectric vibrating body 1 and a container body 10 for hermetically containing the piezoelectric vibrating body 1.
It consists of and. For example, the container body 10 is composed of a substrate 11 on which predetermined wiring conductors 12 to 15 and input / output terminals 16 to 19 are formed, and a lid body 20.

As shown in FIG. 1, the container body 10 is hermetically sealed by a hermetically sealing material 29 between the substrate 11 and the lid body 20 so as to form a hollow portion inside. The substrate 11 and the lid 20 are made of a ceramic material such as alumina, and the hermetic sealing material 29 is made of an epoxy resin, a low melting point glass member, or the like.

Inside the container body 10 as shown in FIG. 2, intermediate holding branches 5 and 8 of the piezoelectric vibrating body 1 shown in FIG. 3 are arranged so as not to hinder the vibration of the piezoelectric vibrating body 1. Elastic pins 54, 55, 84, 85 having a predetermined shape to be joined to
The piezoelectric vibrating body 1 is suspended above the substrate 11. In FIG. 2, the vibration drive electrode and the vibration detection electrode of the piezoelectric vibrating body 1 are omitted.

The substrate 11 has four wiring conductors 12 to 15 formed on its surface and input / output terminals 16 to 19 formed on its end face. The wiring conductors 12 to 15 are Ag
The thick film conductor film whose main component is, for example, is Ni-plated or solder-plated as necessary, and the input / output terminals 16 to 19 are formed in a semicircular shape on the end surface of the substrate 11. The thick conductor film is formed on the inner wall of the concave portion, and if necessary, the surface thereof is plated with Ni or solder.

The wiring conductor 12 is connected to the input terminal 16,
The wiring conductor 13 is connected to the input terminal 17, the wiring conductor 14 is connected to the output terminal 18, and the wiring conductor 15 is connected to the output terminal 19.

The elastic pins 54, 55, 84, 85 are made of a material such as Au-plated or Ni-plated piano wire or phosphor bronze, and have a diameter of 0.10 to 0.20 mm. .

The elastic pins 54, 55, 84, 85 are each formed in an L-shape having a leg portion.
Of the elastic pin 55 to the wiring conductor 13 on the substrate 11, the leg of the elastic pin 55 to the wiring conductor 12 on the substrate 11, the leg of the elastic pin 84 to the wiring conductor 15 on the substrate 11, and the leg of the elastic pin 85. The parts are joined to the wiring conductors 14 on the substrate 11 via a conductive adhesive such as solder.

The other ends of the elastic pins 54, 55, 84 and 85 are connected to the drive input electrodes 51 and 52 and the detection output electrode 8 respectively.
1 and 82 connection pad portions 51a, 52a, 81a, 8
It is joined to 2a. The elastic pins 54, 55, 8
Reference numerals 4 and 85 are formed outside the holding branches 5 and 8 of the piezoelectric vibrating body 1, respectively, by an insulating member such as resin, and extend in the respective connection pad portions 51a, 52a, 81a, and 82a. It doesn't matter.

Such elastic pins 54, 55, 84, 8
Specifically, the piezoelectric vibrating body 1 suspended by 5 has a structure shown in FIGS. 3 and 4.

The piezoelectric vibrating body 1 is composed of a driving side vibrating portion 1A, a detecting side vibrating portion 1B, and a coupling base portion 2, and is made of, for example, a quartz substrate which is cut or Z-cut in accordance with the crystal axis of quartz. There is. Other examples include a piezoelectric ceramic substrate that is polarized in a predetermined direction.

As described above, the piezoelectric vibrating body 1 has a central portion 2
It has a bonding base 2 for connecting the two vibrating parts 1A and 1B, and each vibrating part 1 is provided on both end surfaces of the bonding base 2 facing each other.
A plurality of, for example, two vibrating branches for forming A and 1B extend. In addition, in the drive-side vibrating portion 1A arranged on one side of the coupling base portion 2, in addition to the two vibrating branches 3 and 4, an intermediate holding branch 5 is extended to a crossing portion of the vibrating branches 3 and 4. Further, the detection-side vibrating portion 1B arranged on the other side of the coupling base portion 2
In addition to the two vibrating branches 6 and 7, the intermediate holding branch 8 is extended to the other part of the vibrating branches 6 and 7. As a result, the piezoelectric vibrating body 1 has a "king" shape as a whole. Therefore, the piezoelectric vibrating body 1 has the intermediate holding branch 5 of the drive-side vibrating section 1A and the intermediate holding branch 8 of the detection-side vibrating section 1B which are not particularly related to the predetermined vibration.

Explaining the electrode structure of the piezoelectric vibrating body 1, predetermined electrodes and connecting conductors are formed on the vibrating portions 1A and 1B and the coupling base 2 by a thin film technique such as vapor deposition of a metal conductor such as chrome or Au. Has been done.

Vibration drive electrodes 31 to 34, 41 to 44 for converting a predetermined drive signal into vibration are formed on each of the four surfaces of the two vibration branches 3 and 4 constituting the drive side vibration portion 1A. , The first drive input electrode 51 and the second drive input electrode 5 to which alternating drive signals are input to both main surfaces of the intermediate holding branch 5.
2 is formed.

The two vibrating branches 6 and 7 and the intermediate holding branch 8 which constitute the detecting side vibrating portion 1B have a vibration detecting electrode 6 for converting a foot vibration corresponding to an angular velocity into a detection signal.
1 to 64 and 71 to 74 are detection output electrodes 81 for outputting converted detection signals to both main surfaces of the intermediate holding branch 8.
The detection output electrode 82 is formed. Specifically, the first vibration detection electrode 61 and the second vibration detection electrode 62 are formed on one main surface of the vibrating branch 6 so as to be parallel to each other in the length direction of the vibrating branch 6. A first vibration detection electrode 71 and a second vibration transfer electrode 72 are provided on one main surface of the branch 7.
Are formed side by side in parallel with each other in the length direction of the first vibration detection electrodes 63, 73 and the second vibration detection electrodes 64, 74 are parallel to each other on the other main surface of the vibration branches 6, 7. They are formed side by side.

Further, in the coupling base 2 for coupling the driving side vibrating section 1A and the detecting side vibrating section 1B, connection conductors 21, 22, 23 for connecting the respective electrodes and the respective input / output electrodes are provided.
2425, 26 are formed, and the vibrating branches 3, 4, 6,
At the tip of 7, the connection conductors 35,
5, 65, and 75 are formed respectively, and the lead-out connecting conductor 3 is further provided at the base portion of the vibrating branches 3 and 4 of the drive-side vibrating portion 1A.
6, 46 are formed.

The first drive input electrode 51 on the one main surface side of the drive-side vibrating portion 1A shown in FIG. 4A has a connection pad portion 51a at the tip of the intermediate holding branch 5, and has a connecting base portion 2a. The vibrating branch 3 is connected to the vibration drive electrode 41 of the vibrating branch 4 via the connecting conductor 21, and the vibrating branch 3 via the connecting conductor 21 and the lead conductor 36.
Is connected to the vibration driving electrode 34. Further, the connection conductor 21 connected to the first drive input electrode 51 is
Vibration drive electrode 4 extending to the side surface shown in (d), connected to vibration drive electrode 32, and connected to first drive input electrode 51.
1 is connected to the vibration drive electrode 43 via a lead-out connection conductor 45.

The second main surface side second side shown in FIG. 4 (c)
The drive input electrode 52 has a connection pad portion 52a at the tip of the intermediate holding branch 5 and is connected to the vibration drive electrode 33 of the vibration branch 3 via the connection conductor 22 of the coupling base 2.
2. The vibration drive electrode 42 of the vibrating branch 4 is connected via the lead conductor 46. In addition, the second drive input electrode 52
4B extends to the side surface shown in FIG. 4B, is connected to the vibration drive electrode 44, and the vibration drive electrode 33 connected to the second drive input electrode 52 is the vibration drive electrode 33.
Are connected to each other via the connection conductor 35.

The first detection output electrode 81 on the one main surface side of the detection-side vibrating portion 1B shown in FIG. 4A has a connection pad portion 81a at the tip of the intermediate holding branch 8 and is connected to the coupling base portion 2. It is connected to the first vibration detection electrode 61 of the vibration branch 6 and the second vibration detection electrode 71 of the vibration branch 7 via the connection conductor 23.
The second vibration detecting electrode 62 of the vibrating branch 6 and the second vibration detecting electrode 72 of the vibrating branch 7 are connected via the connecting conductor 24.

The second main surface side second side shown in FIG.
The detection output electrode 82 has a connection pad portion 82a at the tip of the intermediate holding branch 8, and the first vibration detection electrode 63 of the vibration branch 6 and the first vibration detection electrode 7 of the vibration branch 7 via the connection conductor 25 of the coupling base 2. 1
Is connected to the vibration detection electrode 73. The second vibration detection electrode 64 of the vibration branch 6 and the vibration detection electrode 74 of the vibration branch 7
Are connected via the connection conductor 26.

Further, one end of the first vibration detecting electrode 61 on the one main surface side of the vibrating branch 6 is connected to the second vibration detecting electrode 64 on the other main surface side of the vibrating branch 6 via the lead-out connecting conductor 65. One end of the second vibration detecting electrode 72 on the one main surface side of the vibrating branch 7 that is connected to the vibrating branch 7 is connected via the lead-out connecting conductor 75.
It is connected to the first vibration detecting electrode 73 on the other main surface side of the vibrating branch 7.

The electrodes 31 to 3 of the drive side vibrating section 1A described above.
4, 41 to 44, drive input electrodes 51 and 5 of the intermediate holding branch 5.
2, and the electrodes 61 to 6 of the detection-side vibrating section 1B.
4, 71 to 74, drive input electrodes 81 and 8 of the intermediate holding branch 8.
The relationship with 2 is the schematic diagram shown in FIG.

In the piezoelectric vibrating body 1 having the above-described structure, by applying a driving alternating voltage to the connection pad portions 51a and 52a of the driving input electrodes 51 and 52, the vibrating branches 3 and 4 of the driving side vibrating portion 1A are, for example, The tuning fork vibrates in the direction of the solid arrow shown in FIG. 5 or in the direction of the dotted arrow. Since the lengths and widths of the vibrating branches 3, 4, 6, 7 are set so that the natural resonance frequencies of the vibrating portions 1A and 1B in this tuning fork vibration mode are different, the tuning fork vibration of the driving side vibrating portion 1A is set. Therefore, the detection-side vibrating section 1B does not resonate.

In this state, when a rotary motion is applied to the entire piezoelectric vibrating body 1, Coriolis force acts to cause a flap vibration. As a result, in the detection-side vibrating portion 1B, as shown by the arrow in FIG. 5, the vibrating branch 6 vibrates in the lower surface direction and the vibrating branch 7 vibrates in the upper surface direction in the solid arrow direction with respect to the plane of the piezoelectric substrate. At the next moment, the vibrating branch 6 vibrates in the upper surface direction and the vibrating branch 7 vibrates in the lower surface direction in the direction of the dotted arrow. The natural resonance frequency of this mode is set near the resonance frequency of the drive-side vibrating section 1A.

Further, as described above, the first vibration detecting electrodes 61, 63, 71, 73 are provided on the main surfaces of the vibrating branches 6, 7, respectively.
And the second vibration detection electrodes 62, 64, 72, 74 are arranged in parallel in parallel, so that the first vibration detection electrodes formed on both main surfaces of the vibrating branches 6, 7 by the vibrations of the flaps. 6
1, 63, 71, 73 and the second vibration detection electrodes 62, 6
Potential differences occur between Nos. 4, 72, and 74, respectively.

One of the potentials is formed on the upper surface side of the intermediate holding branch 8 and the first vibration detecting electrodes 71, 6 on the upper surface side.
From the connection pad portion 81a of the detection output electrode 81 connected to No. 1, the other potential is formed on the lower surface side of the intermediate holding branch 8 and connected to the first vibration detection electrodes 73, 63 on the lower surface side. It is output from the connection pad portion 82a of the electrode 82.

Such connection pad portions 81a, 82a
The detection signal obtained in the meantime is processed by the external equivalent circuit shown in FIG. 6 to measure and detect the actual angular velocity. That is, in the figure,
The dotted line is the angular velocity sensor shown in FIGS. 1 and 2, and includes the drive input electrode 51 of the drive-side vibrating section 1A that constitutes the piezoelectric vibrating body 1.
The reference numeral 52 is connected to an oscillation circuit 60A that gives a predetermined vibration to the drive-side vibrating section 1A.

Further, both detection output electrodes 81 and 82 of the detection side vibrating portion 1B constituting the piezoelectric vibrating body 1 shown by the dotted line are connected to the amplifier 60B. Further, the amplifier 60B is
It is connected to the phase detection circuit 60C. This phase detection circuit 60C is also connected to the oscillation circuit 60A that gives a predetermined vibration to the drive side vibration unit 1A at the same time, and compares the phase of the detection signal supplied from the amplifier 60B with the phase of the drive signal of the oscillation circuit 60A. This is output via the DC amplifier circuit 60D.

Here, the portion indicated by the dotted line in FIG. 6 is the angular velocity sensor, and the oscillator circuit 6 is provided on the substrate 11 constituting the angular velocity sensor.
0A, the amplifier 60B, the phase detection circuit 60C, and the DC amplification circuit 60D may be formed.

Next, a mechanical joint structure and an electrical connection structure of the piezoelectric vibrating body 1 with the substrate 11 will be described.

As described above, the piezoelectric vibrating body 1 has the elastic pins 54, 55, 84, 8 joined to the intermediate holding branches 5, 8.
A predetermined vibration space is maintained between the piezoelectric vibrating body 1 and the substrate 11 by means of 5, and is suspended above the substrate 11.

The tip ends of the elastic pins 54 and 84 are connected to the drive input electrode 51 connecting pad portion 51a and the detection output electrode 81 connecting pad portion 8 which are formed on the upper main surface of the intermediate holding branches 5 and 8.
1a via a conductive adhesive such as solder, and the leg portions of the elastic pins 54 and 84 are connected to the wiring conductors 13 and 15 on the substrate 11.
Via a conductive adhesive such as solder, they are mechanically joined and electrically connected to each other. The piezoelectric vibrating body 1 is suspended above the substrate 11 by the two elastic pins 54 and 84.

Further, the tips of the elastic pins 55 and 85 are soldered to the connection pad portion 52a of the drive input electrode 52 and the connection pad portion 82a of the detection output electrode 82 which are formed on the lower main surface of the intermediate holding branches 5 and 8. , And the leg portions of the elastic pins 55 and 85 are mechanically bonded to the wiring conductors 12 and 14 on the substrate 11 via a conductive adhesive material such as solder, respectively. And it is electrically connected. This 2
The two elastic pins 55 and 85 support the piezoelectric vibrating body 1 suspended above the substrate 11.

What is important here is that the elastic pin 54 that suspends the intermediate holding branch 5 side and the elastic pin 55 that supports the intermediate holding branch 5 and the elastic pin 84 that suspends the intermediate holding branch 8 side and the intermediate holding branch. That is, the piezoelectric vibrating body 1 is stably suspended without short-circuiting with the elastic pin 85 supporting the piezoelectric vibrating body 8.

Therefore, for example, on the side of the intermediate holding branch 8, the extending directions of the elastic pins 84 and 85 can be selected from various directions so long as they do not come into contact with each other and short-circuit. The same applies to the side of the intermediate holding branch 5.

As a result, the four elastic pins 54, 55,
84 and 85 suspend the piezoelectric vibrating body 1 above the substrate 11,
It is further supported and connected to wirings 12 to 15 (input / output terminals 16 to 19) for connection with an external circuit.

For example, the two drive input electrodes 51 and 52 of the piezoelectric vibrating body 1 receive drive signals from an external circuit via the elastic pins 54 and 55, the wiring conductors 12 and 13 of the substrate 11, and the input terminals 16 and 17. The detection signals are supplied to the two detection output electrodes 81 and 82, and the detection signals are led to an external circuit via the elastic pins 84 and 85, the wiring conductors 14 and 15 of the substrate 11, and the output terminals 18 and 19. .

As described above, in the angular velocity sensor, the structure of the piezoelectric vibrating body 1 is such that the intermediate holding branches 5 and 8 are formed in the driving side vibrating portion 1A and the detecting side vibrating portion 1B arranged at both ends of the coupling base portion 2. Mechanical connection and electrical connection are made via the intermediate holding branches 5, 8. That is, the mechanical joining means and the electrical connecting means of the piezoelectric vibrating body 1 can be performed only by the intermediate holding branches 5 and 8, and actually, the elastic pins 54, 55, 84 and 85 are attached to the substrate 11. Since only the piezoelectric vibrating body 1 is hung via the via, it is possible to serve both as mechanical holding and electrical connection, and the assembly / connection process becomes simple.

The intermediate holding branches 5 and 8 of the piezoelectric vibrating body 1 are also provided.
However, since it is arranged so as to extend in the same direction as the other vibrating branches 3, 4, 6, and 7, the width direction of the piezoelectric vibrating body 91 does not become extremely large as in the conventional case, so that a small angular velocity sensor is obtained.

Moreover, even if the piezoelectric vibrator 1 is hung on the substrate 11 and then covered with the lid 20, the ambient temperature fluctuates and thermal expansion / contraction occurs on the substrate 11, etc. Elastic pins 54, 55, 84, 85 for suspending the vibrating body 1
Since the stress due to the thermal expansion / contraction can be absorbed by, the stress does not affect the piezoelectric vibrating body 1, and the fluctuation of the characteristics due to the ambient temperature change can be suppressed.

In the above-mentioned embodiment, the four elastic pins 54, 55, 84, 85 are used, and in particular, the elastic pins 54, 84 and the intermediate holding branch 5 which are joined to the upper surface side of the intermediate holding branches 5, 8. Elastic pins 55, 85 joined to the lower surface side of
It has a different shape from.

Further, the elastic pins 54, 55, 84, 85 are erected on the substrate 11 substantially by the elastic pins 54, 55, 8.
It is performed only at the tip on one end side of 4, 85. As a result, it is necessary to carry out the assembling work with great care for the stable joining of the elastic pins 54, 55, 84, 85 and the substrate 11.

FIG. 7 shows an angular velocity sensor in which the piezoelectric vibrating body 1 is suspended by two elastic pins 841. In the figure, only the detection side vibrating portion 1B side, that is, the intermediate holding branch 8 side is shown, and the drive side vibrating portion 1A side has the same structure. Further, the vibration drive electrode and the vibration detection electrode are omitted.

The structure of the piezoelectric vibrating body 1 of this embodiment is shown in FIG.
As shown in, among the connection pad portions of the detection output electrodes 81 and 82 formed on both main surfaces of the intermediate holding branch 8 of the detection-side vibrating portion 1B, in particular, the connection pad portion of the detection output electrode 82 is held intermediately. It is formed on the upper surface side of the branch 8. That is, the connection pad portions 81a and 82b of the detection output electrodes 81 and 82 are juxtaposed at the tip portion on the upper surface side of the intermediate holding branch 8. Such a connection pad portion 82b can be achieved by forming a connection conductor 83 on the tip end surface of the intermediate holding branch 8.

The substrate 11 is formed so that the tip of the wiring conductor 141 connected to the output terminal 18 is close to the position corresponding to the tip of the intermediate holding branch 8. The output terminal 19 is provided in the vicinity of the width direction of the piezoelectric vibrating body 1 on the same straight line as the position where the connection pad portion 81a of the piezoelectric vibrating body 1 is formed.
A wiring conductor 151 and a dummy conductor (not shown in the figure) that are connected to the wiring conductor 151 are formed. The wiring conductor 151, the dummy conductor, and one strip conductor may be formed.

Elastic pins 8 for suspending the piezoelectric vibrating body 1
Reference numeral 41 is a substantially C-shape so as to traverse the whole in the width direction of the piezoelectric vibrating body 1, and the wiring conductor 151 and leg portions 841a and 841b (not shown in the figure) joined to the dummy conductor are provided at both ends thereof. A joining portion 841c that is joined to the intermediate holding branch 8 is formed so as to project near the central portion thereof.

In order to suspend the piezoelectric vibrating body 1 on the upper portion of the substrate 11 via the elastic pin 841, first, the connection pad portion of the detection output electrode 81 on the upper surface side of the intermediate holding branch 8 of the piezoelectric vibrating body 1 is connected. 81a and the joint portion 841c of the elastic pin 841 are joined by a conductive adhesive such as solder, and in this state, one leg portion 841a of the elastic pin 841 and the wiring conductor 15 are connected to the other leg portion of the elastic pin 841. 841b and the wiring conductor 151 are joined by a conductive adhesive such as solder. Thereby, the piezoelectric vibrating body 1 can be stably suspended above the substrate 11, and the detection output electrode 81 and the wiring conductor 151 (output terminal 19) formed on the upper main surface of the intermediate holding branch 8 The electrical connection will be completed.

Subsequently, the wiring conductor 141 extending to the vicinity of the tip of the intermediate holding branch 8 and the connection pad portion 82b laid out on the upper surface side of the intermediate holding branch 8 are electrically connected by a wire bonding thin wire 86. To do.

According to the above-described embodiment shown in FIG. 7, the elastic pin 841 is substantially C-shaped, and both ends thereof are the leg portions 841a and 841b.
The elastic pin 841 can be stably erected on the upper side, whereby the piezoelectric vibrating body 1 can be stably suspended.

Further, the shape of the elastic pin 841 is symmetrical with respect to the piezoelectric vibrating body 1, and the molding thereof can be made very simple and reliable.

In the above embodiment, the elastic pins 54, 55,
Each of 84, 85, and 841 needs to be bent into a predetermined shape.

In FIGS. 8 and 9, a linear elastic pin is used,
1 shows a structure for suspending the piezoelectric vibrating body 1. The vibration drive electrode and the vibration detection electrode are omitted in FIGS. 8 and 9.

FIG. 8A is a sectional view showing the suspension structure of the piezoelectric vibrating body 1 with the lid omitted, and FIG.
[Fig. 4] is a perspective view showing a joint structure of an intermediate holding branch 8 portion.

Further, in FIG. 8A, both main surfaces of the intermediate holding branch 5 of the driving side vibrating portion 1A of the piezoelectric vibrating body 1 shown in FIG. 3 are respectively joined to substantially linear elastic pins 542 and 552. Further, both main surfaces of the intermediate holding branch 8 of the detection-side vibrating portion 1B of the piezoelectric vibrating body 1 are respectively substantially linear elastic pins 84.
It is joined to 2,852. That is, the intermediate holding branches 5 and 8
Is a linear elastic pin 542, 55 on the upper and lower main surfaces.
It is sandwiched by the tip portions of 2, 842 and 852. still,
This joining is performed via a conductive adhesive such as solder.

The elastic pins 542, 552, 8 described above are also used.
The other end of 42, 852 is the holder member 5
It is joined by 7, 87.

The holder member 87 includes an insulator main body 871 having a substantially rectangular parallelepiped shape, a groove 872 for holding an elastic pin 842 formed on the upper surface of the main body, and an elastic pin 852 formed on the lower surface of the main body. Groove part 87 for holding
3 are formed.

A conductor film 874 including the groove 872 of the insulating main body 871 is formed on a part of the upper surface, side surface and lower surface of the main body, and a conductor film 875 including the groove 873 is formed on the lower surface of the conductor film 875. It is formed on a part of the lower surface so as not to short-circuit with the film 874.

Further, in the substrate 11, the wiring conductor 142 connected to the output terminal 18 and extending to a part of the arrangement position of the holder member 87 is connected to the output terminal 19 and extended to a part of the arrangement position of the holder member 87. The wiring conductor 152 is formed.

In such a structure, the connection pad portion 81 of the detection output electrodes 81 and 82 of the intermediate holding branch 8 of the piezoelectric vibrating body 1 is formed.
Linear elastic pins 842 and 8 joined to a and 82a, respectively.
52 is joined to the groove portions 872 and 873 of the holder member 87 with solder or the like via a conductive adhesive, and the holder member 87 is electrically conductive so as to straddle the wiring conductors 142 and 152 of the substrate 11. Just place it through the adhesive,
The piezoelectric vibrator 1 can be suspended above the substrate 11,
Moreover, electrical connection can be easily made.

In particular, since the elastic pins 842 and 852 are substantially linear, the machining thereof is very simple and the suspension reliability of the piezoelectric vibrating body 1 is very high.

The two conductor films of the holder member 87 are
The elastic pin 852, which is separately formed on the upper surface side including the groove portion 873 and the lower surface side including the groove portion 872, and is joined to the groove portion 873, is connected to the wiring conductor 1 via the conductive adhesive as described above.
42 and the elastic pin 842 connected to the groove 872.
May be connected using a wire bonding thin wire between the conductor film formed on the upper surface of the holder member 87 and the wiring conductor 152.

Further, as shown in FIG. 9, the holder members 58 and 88 are downsized so that they can be arranged at intervals between the vibrating branches 3, 4 and 6, 7, and further, the intermediate holding branch 8 is formed.
By shortening the length by which 9, 59 extend from the bonding base 2, it is possible to achieve an angular velocity sensor that is extremely miniaturized in the length direction.

In any of the above-mentioned embodiments, the substrate 11 has a flat plate shape, but a substrate having a cavity inside may be used.

Further, the substrate 11 and the elastic pins 54, 55, 8
4, 85, 841 are connected to the wiring conductors 12 to 15, 14
1, 151 via conductive adhesive,
A recess into which the leg portion of the elastic pin is fitted may be formed in this wiring conductor portion.

In the above-described embodiment, as the piezoelectric vibrating body 1, as shown in FIGS. 3 to 5, the detection output electrodes 81 and 82 are used.
The vibration detection electrodes 61 to 64, 71 to 74 are respectively connected so as to obtain a detection signal whose polarity is reversed between them. For example, by connecting the vibration detection electrodes 62, 64, 72, 74 to a reference potential, A detection signal in which the polarity is inverted between the upper surface side detection output electrode connected to the vibration detection electrodes 61 and 71 and the lower surface side detection output electrode connected to the vibration detection electrodes 63 and 73 is obtained. It doesn't matter.

[0088]

As described above, according to the present invention, the intermediate holding branch extending from the coupling base portion in the same direction as the extending direction of each vibrating branch is formed, and the intermediate holding branch is formed on each vibrating branch. Since the drive input electrode and the detection output electrode connected to the vibration drive electrode and the vibration detection electrode are formed, the shape of the piezoelectric vibrating body can be made smaller than in the conventional case.

Since the piezoelectric vibrating body is hung on the substrate of the container body by using the elastic pin in the intermediate holding branch portion, the assembly and electrical connection structure is very simple.

Further, since the piezoelectric vibrating body is suspended by the elastic pins, even if thermal expansion or the like occurs in the substrate or the like due to changes in ambient temperature, the elastic pins absorb the stress caused by the thermal expansion. Therefore, it is possible to stably suppress fluctuations in characteristics due to changes in ambient temperature.

Further, in particular, by making the shape of the elastic pin approximately C-shaped, the piezoelectric vibrating body can be reliably and stably suspended above the substrate.

Further, in particular, two linear elastic pins extending in the same direction as the extending direction of the intermediate holding branch are used, and one end portion thereof holds both main surfaces of the intermediate holding branch and the other end side thereof is held. By fixing the end portion to the holder member and suspending the piezoelectric vibrating body above the substrate, the entire angular velocity sensor does not become large in the width direction, and a small angular velocity sensor can be achieved.

[Brief description of drawings]

FIG. 1 is an external perspective view of an angular velocity sensor of the present invention.

FIG. 2A is a plan view with a lid omitted, and FIG.
Is also a front view, and (c) is a sectional view taken along the line AA in FIG. 1.

FIG. 3 is an external perspective view of a piezoelectric vibrating body used in the angular velocity sensor of the present invention.

4A to 4D are plan views of both main surfaces and both side surfaces of the piezoelectric vibrating body.

5A is a schematic diagram for explaining a connection state and a vibration state of electrodes of a drive-side vibrating section, and FIG. 5B is a schematic diagram for explaining a connection state and a vibration state of electrodes of a detection-side vibrating section. FIG.

FIG. 6 is a schematic diagram illustrating an external circuit connected to the angular velocity sensor of the present invention.

FIG. 7 is a partial perspective view showing another suspension structure of the angular velocity sensor of the present invention.

8A and 8B show still another joining structure of the angular velocity sensor of the present invention, FIG. 8A is a cross-sectional view with a lid body omitted, and FIG. 8B is a partial perspective view of the suspension structure. .

FIG. 9 is a perspective view showing still another suspension structure.

FIG. 10 is an external perspective view of a conventional piezoelectric vibrating body.

[Explanation of symbols]

1 ... Piezoelectric vibrating body 1A ... Driving side vibrating section 1B ... Detection side vibrating section 5 ... Intermediate holding branch of driving side vibrating section 8 ... Detection side vibration Intermediate holding branches 51, 52 ... Drive input electrodes 81, 82 ... Detection output electrodes 51a, 52a, 81a, 82a, 82b ... Connection pad portions 54, 55, 84, 85, 841, 851 ... · Elastic pin 11 ··· Substrate 20 ···· Lid 12 to 15, 141, 142, 151, 152, ... Wiring conductor

Claims (3)

[Claims] 1. A driving side comprising two vibrating branches having vibration driving electrodes formed on opposite one ends of a coupling base and one intermediate holding branch having driving input electrodes formed on both main surfaces thereof. The vibrating section is integrally formed with a vibrating section on the other end, which is composed of two vibrating branches having vibration detecting electrodes and one intermediate holding branch having detection output electrodes formed on both main surfaces. The piezoelectric vibrating body and a substrate having a predetermined wiring conductor, and the piezoelectric vibrating body is suspended above the substrate by an elastic pin joined to two intermediate holding branches of the piezoelectric vibrating body. Angular velocity sensor. 2. The piezoelectric vibrating body is attached to the upper part of the substrate by a substantially C-shaped elastic pin that is joined to the drive input electrode and the detection output electrode formed on the upper main surface of the intermediate holding branch of the piezoelectric vibrating body. The angular velocity sensor according to claim 1, wherein the angular velocity sensor is suspended. 3. An intermediate holding branch of the piezoelectric vibrating body is sandwiched between both main surfaces of one end of an elastic pin, and the other end of the elastic pin is fixed to a holder member arranged on a substrate. The angular velocity sensor according to claim 1.