JPH08201065A - Angular velocity sensor - Google Patents

Abstract

(57) [Abstract] [Purpose] To provide an angular velocity sensor that is small and has a very simple assembly / connection process. [Structure] The drive input electrode 5 is arranged in the extending direction of the vibrating branches 3, 4, 6, 7 of the drive side vibrating section 1A and the detection side vibrating section 1B.
1, 52 and the detection output electrodes 81 and 82 are attached to the intermediate holding branches 5 and 8, and the intermediate holding branches 5 and 8 are provided with the predetermined wiring conductors 12 to 15 via the spacer members 30 and 40. It is placed and fixed on the substrate 11.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an angular velocity sensor having a piezoelectric vibrating body composed of two vibrating branches, a driving side vibrating section having an intermediate holding branch arranged between the vibrating branches, and a detecting side vibrating section. Is.

[0002]

2. Description of the Related Art Various angular velocity sensors used for camera shake correction, automobile navigation, and attitude control of a moving body have been proposed. As a structure of a piezoelectric vibrating body used for such an angular velocity sensor, for example, US Pat. No. 4,524,619 and Japanese Patent Laid-Open No. 3-291517,
There has been proposed a piezoelectric vibrating body in which a driving-side vibrating portion and a detecting-side vibrating portion are coupled by a coupling base portion.

As shown in FIG. 13, this piezoelectric vibrating body 91 is basically an H-shaped piezoelectric substrate, that is, a driving side vibrating portion 91A and a detecting side vibrating portion 91B in the direction of both ends with a coupling base portion 92 interposed therebetween. Are arranged on the four side surfaces of the two drive vibrating branches 93, 94 of the drive-side vibrating section 91A, and the vibration drive electrodes 93a to 93d, 94a to 94d (here, 93).
b, 93c, 94b, 94c are not shown in the figure), respectively. In addition, the first and second vibration detection electrodes 95a to 95d and 96a to 96d (95a, 95a, 95a, and 95d, respectively) are provided on the respective side surfaces of the two detection vibration branches 95 and 96 of the detection side vibration unit 91B.
95b, 96a, 96b are not shown in the figure) are formed.

The vibrating branches 93, 9 of the drive side vibrating portion 91A
Vibration drive electrodes 93a to 93d, 9 formed on the four side surfaces of No. 4
When a driving alternating voltage signal is applied to 4a to 94d, tuning fork vibration is generated in one plane in the driving side vibrating portion 91A. In this state, since the natural resonance frequencies of the vibrating sections 91A and 91B are different, the detecting-side vibrating section 91B does not resonate.

However, when a rotational movement (angular velocity) is applied to the piezoelectric vibrating body 91, Coriolis force acts on the two vibrating branches 93 and 94 of the driving side vibrating portion 91A to cause vibration proportional to the angular velocity of the rotational movement. Occurs in a direction perpendicular to the plane of the piezoelectric substrate. This vibration is hereinafter referred to as flap vibration.
This fluttering foot vibration will be transmitted to the entire piezoelectric substrate, and the first and second vibration detection electrodes 95a to 91c of the detection side vibration section 91B will be transmitted.
Between 95d and 96a to 96d, an electric field determined by the vibration direction of the flap and the polarization direction of the piezoelectric substrate (the polarization electric axis direction in the quartz substrate) is generated, and a detection signal corresponding to a predetermined angular velocity is extracted. be able to.

As the above-mentioned piezoelectric substrate, for example, a quartz substrate cut in a predetermined crystal plane in consideration of the crystal axis direction is used, and the piezoelectric substrate is subjected to etching treatment so that the whole becomes H-shaped, The vibration driving electrodes 93a to 93d, 94 are formed on the both main surfaces and both side surfaces orthogonal to the both main surfaces by vapor deposition, respectively.
a-94d, 95a-95d, 96a-96d are adhered and formed.

When such a piezoelectric vibrating body 91 is used as an angular velocity sensor, the vibrating section is used as a vibrating section on the driving side and the detecting side on a stem substrate (not shown) which is a part of the container. It is important to fix the vibrating branches 93, 94, 95, 96 so that they can freely vibrate. Therefore, in the above-described conventional piezoelectric vibrating body 91, the vibrating branches 93, 94, 95, 96 are held in the direction orthogonal to the extending direction of the vibrating branches 93, 94, 95, 96 on the coupling base 92 that couples the two vibrating portions 91A, 91B. The parts 97 and 98 were provided.

[0008]

However, in order to obtain stable characteristics in the above-mentioned piezoelectric vibrating body 91, the first and second vibration detecting electrodes 95a to 95d, 96a formed on the detecting side vibrating portion 91B are required. It is very important to form ~ 96d with high accuracy, and it is necessary to take care not to increase the size of the angular velocity sensor when it is housed in a container or the like and used as the angular velocity sensor.

On the other hand, in the piezoelectric vibrating body 91 described above, the vibration detecting electrodes 95a to 95d and 96a to 9 are used.
Of 6d, especially vibration detection electrodes 95c, 95d, 96a,
96b must be formed on the inner side surface of the tuning fork portion of the vibrating branches 95, 95, the vapor deposition max is devised by oblique vapor deposition, and the vapor deposition is performed a plurality of times, which complicates the manufacturing process and stabilizes the shape. It is difficult to form electrodes, and the holding portions 97 and 98 project in the width direction of the piezoelectric vibrating body 91. Therefore, when the electrodes are housed in a container or the like and used as an angular velocity sensor, the size becomes extremely large.

The present invention has been devised in view of the above problems, and an object thereof is to provide an angular velocity sensor that is small in size and has a very simple assembly / connection process.

Another object of the present invention is to provide an angular velocity sensor which can be electrically connected by a single connection method and whose vibration operation is stable.

Another object of the present invention is to provide an angular velocity sensor capable of suppressing variations in characteristics due to joining.

[0013]

SUMMARY OF THE INVENTION According to the present invention, two vibrating branches having vibration driving electrodes are formed on one end face of a coupling base portion facing each other, and one vibrating branch is formed on both main faces. Of the drive side vibrating section, which is composed of two intermediate vibrating branches having the vibration detecting electrodes formed on the other end surface and one intermediate retaining branch having the detection output electrodes formed on both main surfaces. An angular velocity including a piezoelectric vibrating body integrally formed with a side vibrating portion and a substrate having a predetermined wiring conductor, and two intermediate holding branches of the piezoelectric vibrating body supported on the substrate via two spacer members. It is a sensor.

Further, the invention according to claim 2 is, in particular, that the spacer member is made of a metal member, and the spacer member is formed on the lower surface side main surface of the intermediate holding branch of the piezoelectric vibrating body and / or the detection. It is an angular velocity sensor joined to an output electrode via a conductive adhesive.

Further, according to a third aspect of the present invention, the drive input electrode and / or the detection output electrode formed on one main surface of the intermediate holding branch of the piezoelectric vibrating body is drawn to the other main surface of the intermediate holding branch. It is an angular velocity sensor which is rotated and in which each drive input electrode and / or detection output electrode of the other main surface is electrically connected to a predetermined wiring conductor of the substrate.

Further, in the invention of claim 4, the spacer member is formed into a flat plate shape which is substantially the same as or slightly smaller than the outer dimension of the piezoelectric vibrating body, and supports the intermediate holding branch of the piezoelectric vibrating body on the upper surface. It is an angular velocity sensor in which a protrusion is formed.

[0017]

According to the present invention, in the structure of the piezoelectric vibrating body, the driving side vibrating portion and the detecting side vibrating portion arranged at both ends of the coupling base portion extend in the same direction as the extending direction of each vibrating branch. An intermediate holding branch is formed, and drive input electrodes and detection output electrodes connected to the vibration drive electrodes and the vibration detection electrodes formed on each vibration branch are formed on both main surfaces of the intermediate holding branch. Then, the substrate on which the predetermined wiring conductor for connecting to the external circuit is formed is mechanically joined and electrically connected through the intermediate holding branch. That is, the mechanical joining means and the electrical connecting means of the piezoelectric vibrating body are concentrated on the intermediate holding branch, and furthermore, the piezoelectric vibrating body is mounted on the substrate via the spacer member supporting the intermediate holding branch. So only
The assembly and connection process becomes very simple.

Further, since the intermediate holding branch, which is a means for holding the piezoelectric vibrating body, is arranged so as to extend in the same direction as the other vibrating branches, the width direction of the piezoelectric vibrating body does not become extremely large unlike the conventional case. It becomes a small angular velocity sensor.

Further, in the invention of claim 2, by using the metal member for the spacer member, the intermediate vibrating branch is placed on the spacer member to fix the piezoelectric vibrating body, and at the same time, the lower surface side of the intermediate holding branch. It can also serve as an electrical connection with the wiring conductor with the connection electrode arranged on the main surface,
Furthermore, the assembly / connection process is simplified.

According to the third aspect of the invention, the drive input electrode and / or the detection output electrode formed on one main surface of the intermediate holding branch are drawn to the other main surface side and concentrated on the same main surface side.

For example, by concentrating only on the upper surface side main surface of the intermediate holding branch, the piezoelectric vibrating body is held and fixed by the lower surface side main surface of the intermediate holding portion through the spacer member, and the intermediate holding portion Electrical connection to the drive input electrode and / or the detection output electrode on the upper surface side is achieved by a single connecting means such as a wire bonding thin wire. At this time, since a material that does not affect vibration can be widely used as a bonding material for the spacer member and the intermediate holding member, the vibration operation is stabilized at the same time.

For example, if the drive input electrode and / or the detection output electrode can be routed only to the lower surface side main surface of the intermediate holding branch, all the electrical connections can be completed by joining the spacer members.

Further, in the invention of claim 4, when the spacer member is a flat plate member having a protrusion, the piezoelectric vibrator is post-processed, for example, for frequency adjustment, on the auxiliary substrate which is the flat plate spacer member. It can be done with the body joined, and by finally making the connection with the substrate,
It is possible to effectively prevent characteristic variations due to mechanical joining of the piezoelectric vibrating body.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The angular velocity sensor of the present invention will be described below with reference to the drawings.

FIG. 1 is an external perspective view of an angular velocity sensor of the present invention, FIG. 2 is a sectional structural view thereof, FIG. 3 is an external perspective view of a piezoelectric vibrating body used in this angular velocity sensor, and FIG.
FIGS. 5A to 5D are plan views of both main surfaces and both side surfaces of the piezoelectric vibrating body, and FIG. 6 is an equivalent circuit diagram of an external detection circuit including an angular velocity sensor, FIG. 7 is an external perspective view of a substrate forming a container used for this angular velocity sensor, and FIG. 8 is a diagram showing a piezoelectric vibrating body and a substrate. It is an expansion schematic diagram of a joining part.

The angular velocity sensor of the present invention comprises a piezoelectric vibrating body 1 and a container body 10 for hermetically containing the piezoelectric vibrating body 1.
It consists of and. For example, the container body 10 is composed of a substrate 11 on which predetermined wiring conductors 12 to 15 and input / output terminals 16 to 19 are formed, and a lid body 20.

As shown in FIG. 1, the container body 10 is hermetically sealed by a hermetically sealing material 29 between the substrate 11 and the lid body 20 so as to form a hollow portion inside. The substrate 11 and the lid 20 are made of a ceramic material such as alumina, and the hermetic sealing material 29 is made of an epoxy resin, a low melting point glass member, or the like.

Inside the container body, as shown in FIG. 2, the intermediate holding branches 5 and 8 shown in FIG. 3 are supported so as not to hinder the vibration of the piezoelectric vibrating body 1. Spacer members 30, 40 arranged at predetermined positions on the substrate 11
The intermediate holding branches 5 and 8 of the piezoelectric vibrating body 1 are placed thereon.

The piezoelectric vibrating body 1 mounted on the spacer members 30 and 40 has the structure shown in FIGS. 3 and 4.

The piezoelectric vibrating body 1 is composed of a driving side vibrating portion 1A, a detecting side vibrating portion 1B, and a coupling base portion 2, and is made of, for example, a quartz substrate or the like that is cut or Z-cut in accordance with the crystal content of quartz. There is. Other examples include a piezoelectric ceramic substrate that is polarized in a predetermined direction.

As described above, the piezoelectric vibrating body 1 has a central portion 2
It has a bonding base 2 for connecting the two vibrating parts 1A and 1B, and each vibrating part 1 is provided on both end surfaces of the bonding base 2 facing each other.
A plurality of, for example, two vibrating branches for forming A and 1B extend. In addition, in the drive-side vibrating portion 1A arranged on one side of the coupling base portion 2, in addition to the two vibrating branches 3 and 4, an intermediate holding branch 5 is extended to a crossing portion of the vibrating branches 3 and 4. Further, the detection-side vibrating portion 1B arranged on the other side of the coupling base portion 2
In addition to the two vibrating branches 6 and 7, the intermediate holding branch 8 is extended to the other part of the vibrating branches 6 and 7. As a result, the piezoelectric vibrating body 1 has a "king" shape as a whole.

Therefore, the piezoelectric vibrating body 1 becomes the intermediate holding branch 5 of the driving side vibrating portion 1A and the intermediate holding branch 8 of the detecting side vibrating portion 1B which are not particularly related to the predetermined vibration.

Explaining the electrode structure of the piezoelectric vibrating body 1, predetermined electrodes and connecting conductors are formed on each of the vibrating portions 1A and 1B and the coupling base portion 2 by vapor deposition of a metal conductor such as chromium or Au. There is.

Drive electrodes 31 to 34, 41 to 44 for converting a predetermined drive signal into vibration are formed on each of the four faces of the two vibrating branches 3 and 4 constituting the drive side vibrating section 1A. A first drive input electrode 51 and a second drive input electrode 52 to which a drive signal is input are formed on both main surfaces of the intermediate holding branch 5.

Further, in the two vibrating branches 6 and 7 and the intermediate holding branch 8 which constitute the detecting side vibrating portion 1B, vibration detecting electrodes 61 to 64 and 71 for converting the Coriolis vibration corresponding to the angular velocity into a detecting signal. Up to 74, detection output electrodes 81 and 82 for outputting the converted detection signals to an external circuit are formed on both main surfaces of the intermediate holding branch 8. Specifically, the first vibration detection electrode 61 and the second vibration detection electrode 61 are provided on one main surface of the vibration branch 6.
Vibration detection electrodes 62 are formed in parallel in the longitudinal direction of the vibration branch 6 at a predetermined interval, and the first vibration detection electrode 71 and the second vibration are formed on one main surface of the vibration branch 7. The detection electrodes 72 are formed in parallel with each other in the length direction of the vibrating branch 7 at a predetermined interval, and similarly, the first vibration detecting electrodes 63, 73 are formed on the other main surfaces of the vibrating branches 6, 7. And the second vibration detection electrodes 64 and 74 are formed in parallel.

That is, the vibration detecting electrodes 61 of the vibrating branches 6 and 7,
62, 71, 72 are arranged on the same main surface (one main surface side) as the first detection output electrode 81 of the intermediate holding branch 8, and the vibration detection electrodes 63, 64, 73, 74 of the vibration branches 6, 7 are , The second detection output electrode 82 of the intermediate holding branch 8 is arranged on the same main surface (the other main surface side).

Further, the coupling base 2 for coupling the driving side vibrating section 1A and the detecting side vibrating section 1B has electrodes 61 to 6 respectively.
4, 71-74 and the input / output electrodes 51, 52, 81, 82
Connection conductors 21, 22, 23, 24 for connecting to
25, 26 are formed, and the connecting conductors 35, 45, which are routed to the three side surfaces, are formed at the tip ends of the vibrating branches 3, 4, 6, 7.
65 and 75 are formed respectively, and further, the drive side vibrating portion 1A
The connecting conductors 36, 4 are connected to the bases of the vibrating branches 3, 4 of
6 is formed.

The connection state of these electrodes will be described in detail with reference to FIG. In the drive-side vibrating portion 1A, as shown in FIG. 4A on the one main surface, the drive input electrode 51 of the intermediate holding branch 5 has a connection pad portion 51a at its tip, and its base portion is connected to the connection conductor 21. It is connected. This connecting conductor 21 is connected to the vibration drive electrode 41 of the vibrating branch 4, and further, by the lead-out connecting conductor 45 at the tip of the vibrating branch 4,
It is connected to the vibration drive electrode 43 shown in FIG.
Further, the connection conductor 21 is connected to the vibration drive electrode 34 via a lead-out connection conductor 36 formed in the base portion of the vibrating branch 3, and further extends to the side surface shown in FIG.
It is connected to the vibration drive electrode 32 of the vibrating branch 3.

Similarly, as shown in FIG. 4C on the other main surface, the drive input electrode 52 of the intermediate holding branch 5 has a connection pad portion 52a at its tip, and its base portion is connected to the connection conductor 22. Has been done. The connection conductor 22 is connected to the vibration drive electrode 33 of the vibrating branch 3, and is further connected to the vibration drive electrode 31 shown in FIG. The connecting conductor 22 is connected to the vibration drive electrode 42 via a lead-out connecting conductor 46 formed at the base portion of the vibrating branch 4, and further extends to the side surface shown in FIG. Vibration drive electrode 44
It is connected to the.

In the detection side vibrating portion 1B, the detection output electrode 81 of the intermediate holding branch 8 in FIG.
Has a connection pad portion 81a at its tip, and its base portion is connected to the connection conductor 23. Both ends of the connection conductor 23 are connected to the first vibration detection electrodes 61 and 71 arranged on the intermediate holding branch 8 side of the vibration branches 6 and 7.

Further, the second vibration detecting electrodes 6 arranged in parallel with the first vibration detecting electrodes 61, 71 on the vibrating branches 6, 7.
The reference numerals 2 and 72 are connected to each other by the connecting conductor 24 formed on the coupling base 2.

Similarly, in FIG. 4C on the other main surface, the detection output electrode 82 of the intermediate holding branch 8 has a connection pad portion 82a at its tip, and its base portion is connected to the connection conductor 25. . Both ends of the connecting conductor 25 are the first vibration detecting electrodes 63 arranged on the intermediate holding branch 8 side of the vibrating branches 6 and 7,
It is connected to 73.

Further, the second vibration detecting electrodes 6 arranged on the vibrating branches 6 and 7 in parallel with the first vibration detecting electrodes 63 and 73.
The reference numerals 4 and 74 are connected to each other by the connecting conductors 26 formed on the coupling base 2.

Further, the first vibration detecting electrode 61 formed on the one main surface side of the vibrating branch 6 is formed on the other main surface side of the vibrating branch 6 via the leading conductor 65 at the tip portion of the vibrating branch 6. It is connected to the second vibration detection electrode 64. In addition, the second vibration detection electrode 72 formed on the one main surface side of the vibrating branch 7
Through the routing conductor 75 at the tip of the vibrating branch 7,
The first vibration detecting electrode 7 formed on the other main surface side of the vibrating branch 7.
Connected to 3.

Therefore, when the electrodes are connected, the drive-side vibrating section 1A moves to the detection-side vibrating section 1A as shown in FIG. 5 (a).
B becomes like FIG.5 (b).

In the piezoelectric vibrating body 1 having the above-mentioned structure, by applying a driving AC voltage between the connecting pad portions 51a and 52a of the driving input electrodes 51 and 52, the driving side vibrating portion 1A.
Then, as indicated by the solid arrow, the tuning fork vibration mode occurs at the next moment as indicated by the dotted arrow. This tuning fork vibration is not transmitted to the detection side vibrating section 1B having a different natural resonance frequency.

In this state, when a rotary motion (angular velocity) is applied to the entire piezoelectric vibrating body 1, Coriolis force acts and a fluttering leg vibration is generated. This fluttering vibration is transmitted to the entire piezoelectric substrate, and in the detection-side vibrating portion 1B, as shown in FIG. 5 (b), the vibrating branch 6 is directed downward with respect to the plane of the piezoelectric substrate as indicated by the solid arrow. The vibrating branch 7 vibrates in the upper surface direction, and at the next moment, the vibrating branch 6 vibrates in the upper surface direction and the vibrating branch 7 in the lower surface direction as shown by the dotted arrow. The natural resonance frequency of this mode is set near the resonance frequency of the drive-side vibrating section 1A.

Further, as described above, the detection side vibrating section 1B
The first vibration detection electrode 6 is formed on each of the main surfaces of the vibration branches 6 and 7.
1, 63, 71, 73 and the second vibration detection electrodes 62, 6
Since 4, 72, and 74 are arranged in parallel in parallel, the first vibration detection electrode 61 and the second vibration detection electrode 62 on the one main surface of the vibrating branch 6 and the other main surface of the vibration branch 6 are caused by this vibration of the foot. Between the first vibration detecting electrode 63 and the first vibration detecting electrode 71 on the one main surface of the vibrating branch 7 and between the second vibration detecting electrode 72 and the first vibration detecting electrode 73 on the other main surface. Similarly, between the first vibration detection electrode 63 and the second vibration detection electrode 64 on the other main surface of the vibration branch 6 and the first vibration detection electrode 61 on the one main surface, the vibration branch 7 A potential difference is generated between the first vibration detection electrode 73 and the second vibration detection electrode 74 on the other main surface, and the first vibration detection electrode 71 on the one main surface.

One of the potentials is formed on the one main surface side of the intermediate holding branch 8, that is, the upper surface, and is connected to the first vibration detection electrodes 71, 61 on the upper surface side. The connection pad portion 81a of the detection output electrode 81. Therefore, the other potential is formed on the other main surface side of the intermediate holding branch 8, that is, on the lower surface side, and the first potential on the lower surface side.
Detection output electrode 82 connected to the vibration detection electrodes 73, 63 of
Is output from the connection pad portion 82a.

Such a signal is processed by the external circuit shown in FIG. 6, and the actual angular velocity is measured and detected. In the figure, the dotted line indicates the angular velocity sensor 1 shown in FIGS.

Driving side vibrating portion 1A constituting the piezoelectric vibrating body 1.
An oscillating circuit 60A for causing the drive-side oscillating portion 1A to vibrate in a predetermined manner is connected to the drive input electrodes 51 and 52.

Further, both detection output electrodes 81 and 82 of the detection side vibrating portion 1B constituting the piezoelectric vibrating body 1 shown by the dotted line are connected to the amplifier 60B. Further, the amplifier 60B is
It is connected to the phase detection circuit 60C. This phase detection circuit 60C is also connected to the oscillation circuit 60A that gives a predetermined vibration to the drive side vibration unit 1A at the same time, and compares the phase of the detection signal supplied from the amplifier 60B with the phase of the drive signal of the oscillation circuit 60A. This is output via the DC amplifier circuit 60D.

Here, the portion shown by the dotted line in FIG. 6 is the angular velocity sensor, but the oscillator circuit 6 is formed on the substrate 11 constituting the angular velocity sensor.
0A, the amplifier 60B, the phase detection circuit 60C, and the DC amplification circuit 60D may be formed.

Next, the structure of the container body 10 used in the angular velocity sensor of the present invention, particularly the external perspective view of the substrate 11 in FIG. 7, will be described. Further, FIG. 8 is a schematic diagram showing a joined state of the intermediate holding branch 8 of the detection-side vibrating section 1B. The joint structure of FIG. 8 is the same structure for the intermediate holding branch 5 of the drive-side vibrating portion 1A.

The substrate 11 is a flat alumina substrate,
A semi-circular concave portion which becomes the input / output terminals 16 to 19 is formed on the end surface. The input / output terminals 16 to 19 are formed by forming, on the inner wall surface of this recess, a conductor film obtained by plating a thick conductor film containing Ag as a main component with Ni or solder. On the substrate 11, for example, A
Wiring conductors 12 to 15 each having a predetermined shape are formed by forming a conductor film plated with Ni, Au, or the like on a thick conductor film containing g as a main component.

Further, the spacer member 3 is provided on the surface of the substrate 11 at positions substantially corresponding to the connection pad portions 52a and 82a formed on the lower surfaces of the intermediate holding branches 5 and 8 of the piezoelectric vibrating body 1.
0 and 40 are formed. These spacer members 30, 4
0 is a conductive member, for example, a substantially rectangular parallelepiped member made of Ag or phosphor bronze, or a member having a conductor film formed on the surface of a ceramic member of the substantially rectangular parallelepiped member.

The spacer members 30 and 40 having conductivity at least on their surfaces are connected to a part of the wiring conductors 14 and 15 via conductive adhesives 37 and 47. Further, the tip end portions of the wiring conductors 13 and 15 have widened pad portions for connection with the wire bonding thin wires.

On the substrate 11 having such a structure, as shown in FIGS. 2 and 8, the piezoelectric vibrating body 1 has intermediate holding branches 5 and
It is mounted on the eight portions via spacer members 30 and 40.

Specifically, the connection pad portions 52a and 82a located on the lower surface side of the intermediate holding branches 5 and 8 of the piezoelectric vibrating body 1.
And the spacer members 30 and 40 are electrically conductive adhesives 38 and 48.
The piezoelectric vibrating body 1 is mechanically held on the substrate 11 so as to straddle the spacer members 30 and 40.

As a result, the connection pad portion 52a of the drive input electrode 52 formed on the lower surface of the intermediate holding branch 5 is connected to one side of the conductive adhesive 38, the spacer member 30, the conductive adhesive 37, and the wiring conductor 12. The connection pad portion 82a of the detection output electrode 82 electrically connected to the input terminal 16 and formed on the lower surface of the intermediate holding branch 8 includes the conductive adhesive 48, the spacer member 40, the conductive adhesive 47, and the wiring conductor 14. It will be electrically connected to one of the output terminals 18 through.

The connection pad portion 51a of the drive input electrode 51 and the connection pad portion 81a of the detection output electrode 81 formed on the upper surfaces of the intermediate holding branches 5 and 8 are connected to the connection pad portions 51a and 8a.
1a and the tip portions of the wiring conductors 13 and 15 of the substrate 11 are electrically connected to each other via wire bonding thin wires 39 and 49. As a result, the connection pad portion 51a of the drive input electrode 51 formed on the upper surface side of the intermediate holding branch 5 is electrically connected to the other input terminal 17 via the thin wire bonding wire 39 and the wiring conductor 13, and the intermediate holding branch is formed. The connection pad portion 81a of the detection output electrode 81 formed on the upper surface side of 8 is electrically connected to the other output terminal 19 via the wire bonding thin wire 49 and the wiring conductor 15.

In this way, the piezoelectric vibrating body 1 is mounted on the substrate 11.
After arranging, the lid 20 is covered so as to cover the piezoelectric vibrating body 1.
Is hermetically sealed to the substrate 11 via the hermetic sealing member 29,
The angular velocity sensor shown in FIGS. 1 and 2 is obtained.

Here, the shape of the upper surfaces of the spacer members 30 and 40 is such that the vibrating branches 3, 4, 6 and 7 do not come into contact with each other even if they vibrate, and the height thereof is 3 to 4. , 7
Is set to such a height that it does not come into contact with the substrate 11 even if it vibrates, and the shape of the hollow portion of the lid 20 also vibrates.
The shape is set so that even if 6 and 7 vibrate, they do not come into contact with the inner surface of the lid 20.

Therefore, the spacer members 30 and 40 are electrically conductive, and it is sufficient that a space is provided to the extent that the substrate 11 and the vibrating branches 3, 4, 6, 7 are not in contact with each other. Then, coarse particles or the like that can secure a sufficient space can be mixed in the conductive adhesive material to simultaneously perform the bonding / fixing action and the conducting action between the substrate 11 and the piezoelectric vibrating body 1. Further, the substrate 11 itself may be provided with protrusions and used as the spacer members 30 and 40.

In the angular velocity sensor having the above structure, the piezoelectric vibrating body 1 is structured such that the intermediate holding branches 5 and 8 are formed in the driving side vibrating portion 1A and the detecting side vibrating portion 1B arranged at both ends of the coupling base portion 2. A mechanical connection and an electrical connection are made via the intermediate holding branches 5 and 8. That is, the mechanical joining means and the electrical connecting means of the piezoelectric vibrating body 1 can be performed only by the intermediate holding branches 5 and 8, and actually, on the spacer members 30 and 40 arranged on the substrate 11. Since it is only placed, the assembly and connection process is extremely simple.

The intermediate holding branches 5, 8 of the piezoelectric vibrating body 1 are also provided.
However, since it is arranged so as to extend in the same direction as the other vibrating branches 3, 4, 6, and 7, the width direction of the piezoelectric vibrating body 91 does not become extremely large as in the conventional case, so that a small angular velocity sensor is obtained.

In particular, since the spacer members 30 and 40 are made of conductive spacer members having conductivity at least on their surfaces, it is possible to simply mount the intermediate holding branches 5 and 8 on the spacer members 30 and 40 and thereby to make the piezoelectric material. Simultaneously with the holding of the vibrating body 1, the connection pad portion 52a of the drive input electrode 51, the connection pad portion 82a of the detection output electrode 82, and the wiring conductors 12 and 14 formed on the lower surface side main surface of the intermediate holding branches 5 and 8 are formed. It can also serve as an electrical connection, further simplifying the assembly and connection process.

In the above-described embodiment, the electrical connection is made by two kinds of means, that is, the connection by the conductive adhesive 38, 48 and the connection by the wire bonding fine wires 39, 49. Therefore, the electrical connection work may be complicated.

FIGS. 9A and 9B show an angular velocity sensor for simplifying this electrical connection. still,
9A and 9B, only the detection-side vibrating portion 1B side is illustrated, and the drive-side vibrating portion 1A is shown as necessary.
May have the same structure.

In the angular velocity sensor of this embodiment, the mechanical holding between the substrate 11 and the piezoelectric vibrating body 1 is performed by the wiring conductors 141 and 151 of the substrate 11 via the insulating spacer member 401.
And the piezoelectric vibrating body 1 are electrically connected by the wire bonding thin wires 491 and 492.

As shown in FIGS. 9 (a) and 9 (b), the structure of the piezoelectric vibrating body 1 for achieving such a joining / connecting structure is as shown in FIG. 9 (a) and FIG. 9 (b). Among the connection pad portions of the detection output electrodes 81 and 82 formed on both main surfaces, particularly the connection pad of the detection output electrode 82 is formed on the upper surface side of the intermediate holding branch 8. That is, the connection pad portions 81a and 82b of the detection output electrodes 81 and 82 are arranged in parallel at the tip portion on the upper surface side of the intermediate holding branch 8.

Then, the connection pad portions 81a and 82b located on the upper surface side and the wiring conductors 141 and 151 are electrically connected by the wire bonding thin wires 491 and 492 as described above, respectively.

In order to make the connection pad portion connected to the detection output electrode 82 on the lower surface side of the intermediate holding branch 8 to be the connection pad portion 82b on the upper surface side, the connection conductor 83 is routed to the tip end surface of the intermediate holding branch 8. Can be easily achieved by forming

The spacer member 401 is made of a ceramic substantially rectangular parallelepiped-shaped insulating member, and also has an insulating adhesive between the intermediate holding branch 8 and the spacer member 401 and between the substrate 11 and the spacer member 401. Materials 471 and 481 can be used.

Therefore, according to the angular velocity sensor having the structure shown in FIGS. 9A and 9B, the mechanical holding means of the piezoelectric vibrating body 1 does not have material restrictions such as insulation and conductivity, and the piezoelectric vibration is eliminated. It is possible to use a material that has little influence on the connection strength between the body 1 and the spacer member 401 and vibration, and the adhesive 47
The degree of freedom in selecting 1,481 is improved.

As a preferable adhesive 481 between the piezoelectric vibrating body 1 and the spacer member 401, an adhesive such as a rubber-like silicone resin having elastic characteristics can be exemplified. As a result, at this portion that is mechanically joined to the piezoelectric vibrating body 1, it is possible to reduce the leakage of vibration of the piezoelectric vibrating body 1 to the outside and stabilize the characteristics.

Further, since the electrical connecting means can be performed by a single means such as the wire bonding thin wires 490 and 491, the electrical connecting work can be efficiently performed.

As another structure for unifying the electrical connection means, the structure shown in FIGS. 10A and 10B may be used. 10A and 10B, only the detection-side vibrating portion 1B side is illustrated, and the drive-side vibrating portion 1A may have the same structure as necessary.

In the embodiment shown in FIG. 10, the conductive adhesive 47 is used.
a, 47b, 48a, 48b,
As shown in FIG. 10A, the connection pad portion of the detection output electrode 81 formed on the upper surface side of the intermediate holding branch 8 is formed on the lower surface side of the intermediate holding branch 8, and the connection pad portions 81b and 82a are arranged side by side. I am setting it up. In the detection output electrode 81 on the upper surface side of the intermediate holding branch 8, two connection pad portions 81b and 82a can be arranged in parallel on the lower surface side of the intermediate holding branch 8 by the lead-out connection conductor 84.

The intermediate holding branch 8 and the substrate 11 having such a structure
Mechanical connection and electrical connection with the two conducting parts 4
Achieved by conductive adhesive 47a, 47b, 48a, 48b through a spacer member 402 having 03, 404.

The main body 405 of the spacer member is provided with two conductive paths 403, 404 which are electrically connected to the upper surface, the lower surface and either side surface of the main body. A groove may be formed between the two conductive paths 403 and 404 in order to prevent a short circuit.

The conductive adhesive 4 is formed between the upper surface portion of the one conductive portion 403 and the connection pad portion 82a of the piezoelectric vibrating body 1.
8a, the upper surface portion of the other conductive portion 404 and the connection pad portion 81b of the piezoelectric vibrating body 1 are electrically conductive adhesive 4
8b, the lower surface portion of one conductive portion 403 and the wiring conductor 142 of the substrate 11 are further connected via the conductive adhesive 47a to the lower surface portion of the other conductive portion 404 and the wiring conductor 152 of the substrate 11. It is connected via a conductive adhesive material 47b.

Therefore, according to the structure shown in FIG. 10, the electrically connecting means are electrically conductive adhesives 48a, 48b, 47a,
This can be performed by a single means such as adhesion by 47b, and can also serve as a mechanical holding means for the piezoelectric vibrating body 1.

By the way, as described above, the piezoelectric vibrating body 1
To the spacer members 30, 40, 401, 402 with the adhesives 38, 48, 481, 48a, 48b,
The basic characteristics of the piezoelectric vibrating body 1 may change.
Although this can be effectively suppressed by joining with a rubber-like adhesive as the insulating adhesive 481 as shown in FIG. 9B, it cannot completely suppress the fluctuation of the characteristics.

In such a case, after the piezoelectric vibrating body 1 is mounted and fixed on the substrate 11, the characteristic of the piezoelectric vibrating body 1 is measured and the fluctuation of the characteristic due to the mounting on the substrate 11 is adjusted. Is required.

As a method for adjusting the characteristics of the piezoelectric vibrating body 1,
This is carried out by polishing and removing a part of the vibrating branches 3, 4, 6, 7 of the piezoelectric vibrating body 1, especially the ridge line portion of the outer surface. At this time, it is very difficult to polish and remove the piezoelectric vibrator 1 after mounting it on the substrate 11 having a shape much larger than that of the piezoelectric vibrator 1. That is, the vibrating branches 3, 4, of the piezoelectric vibrating body 1,
Even if the ridge portion of the side surface appearing on the upper surface of 6, 7 can be polished, the ridge portion of the side surface located on the lower surface side of the vibrating branches 3, 4, 6, 7 is obstructed by the substrate 11, and This is because you cannot.

11 (a) and 11 (b) finally show the container 1
When the piezoelectric vibrating body 1 is housed in 0, the angular velocity sensor has no characteristic fluctuation.

Specifically, the auxiliary substrate 50 in which the spacer members 30 and 40 are integrally formed is used. This auxiliary substrate 5
Reference numeral 0 indicates a flat plate shape that is the same as or slightly smaller than the outer dimensions of the piezoelectric vibrating body 1 (the outermost rectangular shape of the general “king” shape is particularly referred to as outer shape). A protrusion 50 for supporting the intermediate holding branches 5, 8 of the body 1.
1, 502 are formed.

In accommodating the piezoelectric vibrating body 1 in the container body 10, first, the piezoelectric vibrating body 1 and the flat plate-shaped auxiliary substrate 50 are integrated with the adhesive materials 503 and 504, and the flat plate-shaped auxiliary substrate 50 is placed on the substrate 11. It is placed and fixed on top of this with an adhesive 505.

In such a structure, the piezoelectric vibrating body 1 has a structure in which connecting pad portions 51a, 52b, 81a and 82b are arranged in parallel on the upper surface side of the intermediate holding branches 5 and 8 shown in FIG. 9A. It is desirable to use.

First, the piezoelectric vibrating body 1 is attached to the flat auxiliary substrate 50.
Using the protrusions 501 and 502 of the
Place and fix via 04.

Next, the drive input electrode 51 of the piezoelectric vibrating body 1,
52, the connection pad portion 51a of the detection output electrodes 81, 82,
Basic characteristics are measured using 52b, 81a, and 82b.

Next, the adjustment is performed by polishing a part of the vibrating branches 3, 4, 6, 7 of the piezoelectric vibrating body 1 in consideration of the characteristic deviation.

Next, the flat piezoelectric auxiliary substrate 50 integrated with the adjusted piezoelectric vibrating body 1 is placed on the substrate 11 with an adhesive 505.

Next, the connection pad portion 51 of the piezoelectric vibrating body 1
a, 52b, 81a, 82b and the predetermined wiring conductors 12 to 15 of the substrate 11 between the wire bonding thin wires 506 to 50.
Make electrical connection at 9.

Finally, the lid 20 is covered with the substrate 11 so that the piezoelectric vibrating body 1 and the flat auxiliary substrate 50 are covered with the lid 20.
Airtightly seal on top.

As described above, according to the structure shown in FIG. 11, even if there is a slight change in characteristics due to mechanical joining of the piezoelectric vibrating body 1 and another member, that is, the flat plate-shaped auxiliary substrate 50, the flat plate-shaped auxiliary substrate. The piezoelectric vibrating body 1 can be subjected to a polishing treatment in a state of being integrated with 50.

At this time, in order to perform the polishing process with high accuracy, the workpiece to be polished must be stably fixed by a clamp or the like. According to the structure of FIG. Since the fixing can be performed using the flat plate-shaped auxiliary substrate 50 instead of the crystal substrate that is easily damaged, as a result, the polishing process can be performed accurately and easily. Since the shape of the flat plate-shaped auxiliary substrate 50 is set to be the same as or smaller than the outer shape of the piezoelectric vibrating body 1, the flat plate-shaped auxiliary substrate 50 does not interfere with the polishing process of the piezoelectric vibrating body 1. Absent.

Further, in the arrangement of the piezoelectric vibrating body 1 on the substrate 11, since the flat plate-shaped auxiliary substrate 50 and the substrate 11 are bonded via the adhesive 505, the characteristics of the already adjusted piezoelectric vibrating body 1 vary. There is no such thing.

Therefore, the piezoelectric vibrating body 1 having very stable characteristics can be stably arranged on the substrate 11 without causing subsequent change in characteristics, and as a result, the angular velocity sensor having stable characteristics. Can be easily obtained.

In any of the above-described embodiments, the substrate 11 has a flat plate shape and the piezoelectric vibrating body 1 is mounted on the substrate 11. For example, the housing in which the piezoelectric vibrating body 1 is mounted / stored. It does not matter if a substrate having a recess is used.

FIG. 12A is an external perspective view showing a part of the substrate, and FIG. 12B is a sectional structure in which the piezoelectric vibrating body 1 is bonded and connected on the substrate.

For example, the substrate 60 is a multi-layer substrate composed of three or more insulating layers, for example, insulating layers 11a, 11b, 1c, and a storage recess 66 for storing the piezoelectric vibrating body 1 in a vibrating manner is formed in the center thereof. Has been done.

The first insulating layer 1c which constitutes the substrate 60 is an insulating layer which serves as a bottom member of the accommodating recess 66, and is the second and third insulating layers.
In the insulating layers 1a and 1b, a window portion slightly larger than the outer shape of the piezoelectric vibrating body 1 is formed in the central portion, and the accommodating recess portion 66 is constituted by this. In particular, the second insulating layer 1
A part of b protrudes to the side surface of the storage recess 66 and corresponds to a spacer member for mounting only the intermediate holding branches 5 and 8 of the piezoelectric vibrating body 1 (where the intermediate holding branch 5 is mounted). The stepped portion is not shown in the figure).

In such a substrate 60, the wiring conductor 1
43 and 153 are formed on the surface of the substrate 60 or between the insulating layers 11a and 11b. For example, the wiring conductor 153 connected to the connection pad portion 81a of the detection output electrode 81 on the upper surface side of the intermediate holding branch 8 is formed on the insulating layer 1a. Further, the wiring conductor 143 connected to the connection pad portion 82a of the detection output electrode 82 on the lower surface side of the intermediate holding branch 8 is formed between the insulating layers 1a and 1b and is exposed on the mounting surface of the step portion 67. Is formed. The portion of the wiring conductor 143 exposed on the mounting surface of the step 67 is referred to as a mounting connection pad 143a.

Then, when the piezoelectric vibrating body 1 is housed in the housing recess 66, the intermediate holding branch 8 is placed and fixed to the stepped portion 67 via the conductive adhesive 482. As a result, the connection pad portion 82a of the detection output electrode 82 formed on the intermediate holding branch 8 outputs the output terminal 181 via the conductive adhesive 482, the placement connection pad portion 143a, and the wiring conductor 143.
Will be connected to.

Further, the connection pad portion 81a on the upper surface of the intermediate holding branch 8 of the piezoelectric vibrating body 1 housed in the housing recess 66 and the wiring conductor 153 are electrically connected via the conductive adhesive 483. As a result, the connection pad portion 81 a of the detection output electrode 81 formed on the upper surface of the intermediate holding branch 8 has the output terminal 191 via the conductive adhesive 483 and the connection wiring 153.
Will be connected to. The storage recess 66 having the above-described structure
It is also possible to form the substrate having the above by press molding of ceramics, and form the wiring conductors 12 and 14 on the inner surface of the accommodating recess 66 and the wiring conductors 14 and 153 around the accommodating recess.

With such a structure, it is not necessary to use a single plate substrate for the substrate 11, and the step portion 67 corresponding to the spacer members 30 and 40 can be integrally formed on the substrate 60.

Further, as shown in FIG. 9, the electrical connection is made by connecting pad portions 51a and 81b on the upper surface of the intermediate holding branch 8.
May be arranged, and the wire conductors 14 and 153 on the surface of the substrate 60 may be wire-bonded finely.

Further, by disposing an insulating layer on the ring on the insulating layer 1a, the shape of the lid 20 can be made flat.

In the above-mentioned embodiment, as the piezoelectric vibrating body 1, as shown in FIGS.
The vibration detection electrodes 61 to 64 and 71 to 74 are connected to each other so as to obtain a detection signal whose polarity is reversed between them. For example, the second vibration detection electrodes 62, 64, 72 and 74 are connected to a reference potential. Then, the first vibration detection electrodes 61 and 71 are connected to the detection output electrode on the upper surface side, and the first motion detection electrode 63
And 73 may be connected to the second detection output electrode on the lower surface side so that the detection signal in the state where the polarities are inverted is obtained between both detection output electrodes.

[0112]

As described above, according to the present invention, the intermediate holding branch extending from the coupling base portion in the same direction as the extending direction of each vibrating branch is formed, and the intermediate holding branch is formed on each vibrating branch. A drive input electrode and a detection output electrode connected to the vibration drive electrode and the vibration detection electrode are formed, and by using this intermediate holding branch, the mechanical holding and electrical Connection is made.

Since only the spacer member for supporting the intermediate holding branch is placed on the substrate, the assembling / connecting process becomes very simple.

Further, since the intermediate holding branch, which is a means for holding the piezoelectric vibrating body, is arranged so as to extend in the same direction as the other vibrating branches, the width direction of the piezoelectric vibrating body does not become extremely large unlike the conventional case. It becomes a small angular velocity sensor.

Specifically, by using a conductive member for the spacer member, it is possible to combine mechanical joining and electrical connection, and further the assembly / connection process is simplified.

Further, if the formation positions of the connection pad portions for connecting the drive input electrodes and the detection output electrodes on the upper and lower main surfaces of the intermediate holding branch are arranged on the one main surface side, the electrical connection between the piezoelectric vibrating body and the external circuit can be achieved. Since various connections can be performed by a single connection method, the assembling / connecting process is further simplified.

Further, when the spacer member and the piezoelectric vibrating body are used only for the mechanical joining action, a rubber-like adhesive can be used, and the angular velocity sensor has a stable vibrating action.

Further, between the piezoelectric vibrating body and the substrate, an auxiliary substrate having the same or slightly smaller outer shape as that of the piezoelectric vibrating body is used.
Since the piezoelectric vibrating body can be mounted on the substrate in a state in which the variation in the characteristic due to the joining to the auxiliary substrate is corrected, the angular velocity sensor having the extremely stable characteristic is provided.

[Brief description of drawings]

FIG. 1 is an external perspective view of an angular velocity sensor of the present invention.

FIG. 2 is a sectional view showing a structure of a longitudinal section of an angular velocity sensor of the present invention.

FIG. 3 is an external perspective view of a piezoelectric vibrating body used in the angular velocity sensor of the present invention.

4A to 4D are plan views showing four surfaces of the piezoelectric vibrating body, that is, an upper surface main surface, one side surface, a lower surface main surface, and the other side surface, respectively.

FIG. 5A is a schematic diagram illustrating an electrical connection state of a drive-side vibrating portion that constitutes a piezoelectric vibrating body, and FIG. 5B is a schematic diagram illustrating an electrical connection state of a detection-side vibrating portion. is there.

FIG. 6 is a schematic diagram illustrating an external circuit connected to the angular velocity sensor of the present invention.

FIG. 7 is an external perspective view of a substrate used in the angular velocity sensor of the present invention.

8 is a partial perspective view for explaining a bonding state between the substrate shown in FIG. 7 and the piezoelectric vibrating body shown in FIG.

9A and 9B show another joining structure, wherein FIG. 9A is a partial cross-sectional view of the piezoelectric vibrating body, and FIG. 9B is a partial perspective view illustrating the joined state.

FIG. 10 shows still another joining structure,
(A) is a partial cross-sectional view thereof, and (b) is a partial perspective view of a substrate used for the bonding structure.

FIG. 11 shows still another joining structure,
(A) is a partial cross-sectional view thereof, and (b) is an external perspective view of a state in which the piezoelectric vibrating body and the auxiliary substrate are joined.

FIG. 12 shows still another joining structure,
(A) is a partial perspective view of the substrate, and (b) is a partial cross-sectional view of a state where the piezoelectric vibrating body and the auxiliary substrate are joined.

FIG. 13 is an external perspective view of a conventional piezoelectric vibrating body.

[Explanation of symbols]

1 ... Piezoelectric vibrating body 1A ... Driving side vibrating section 1B ... Detection side vibrating section 5 ... Intermediate holding branch of driving side vibrating section 8 ... Detection side vibration Holding electrodes 51, 52 ... Drive input electrodes 81, 82 ... Detection output electrodes 51a, 52a, 81a, 81b, 82a, 82b ...
Connection pad section 11, 60 ... Substrate 20 ... Lid 12-15, 141, 142, 143, 151, 15
Wire conductors 30, 40, 401, 402 ... Spacer member 50 ... Auxiliary substrate (spacer member) 67 ... Stepped portion (spacer member)

Claims (4)

[Claims] 1. A drive side comprising two vibrating branches having vibration drive electrodes formed on opposite end faces of a coupling base, and one intermediate holding branch having drive input electrodes formed on both main surfaces thereof. The vibrating section is integrally formed with a vibrating section on the other end, which is composed of two vibrating branches having vibration detecting electrodes formed thereon and one intermediate holding branch having detection output electrodes formed on both principal surfaces thereof. 2. An angular velocity sensor, comprising: the piezoelectric vibrating body described above; and a substrate having a predetermined wiring conductor, wherein two intermediate holding branches of the piezoelectric vibrating body are supported on the substrate via two spacer members. 2. The spacer member is made of a metal member,
2. The spacer member is joined to a drive input electrode and / or a detection output electrode formed on the lower surface side main surface of the intermediate holding branch of the piezoelectric vibrating body via a conductive adhesive material. The described angular velocity sensor. 3. The drive input electrode and / or the detection output electrode formed on one main surface of the intermediate holding branch of the piezoelectric vibrating body is routed to the other main surface of the intermediate holding branch, and 2. The angular velocity sensor according to claim 1, wherein each drive input electrode and / or detection output electrode on the other main surface is electrically connected to a predetermined wiring conductor on the substrate. 4. The spacer member has a flat plate shape that is substantially the same as or slightly smaller than the external dimensions of the piezoelectric vibrating body, and has a protrusion formed on its upper surface for supporting an intermediate holding branch of the piezoelectric vibrating body. The angular velocity sensor according to claim 1, wherein: