JPH08220111A - Probe device - Google Patents

Abstract

PURPOSE: To detect the gap between the tip of a conductive needle set in a probe and the surface of a facing member with extremely high accuracy by extracting only the electrical amount contributive to detection of the gap among the electrical amounts variable depending on the size of the gap. CONSTITUTION: The probe unit comprises at least one probe set 24 composed of two probe members having substantially identical shape, and a circuit 52 for detecting the gap between the tip of a conductive needle 251 being set in one probe member 241 and the surface of a member 33 disposed oppositely to the tip of the needle based on a predetermined electrical amount (e.g. capacitance). The gap detection circuit detects the size of gap by canceling the electric amount uncontributive to gap detection, among the electrical amounts obtained through the probe member 241, and the electric amount obtained through the other probe member 242.

Description

Detailed Description of the Invention

[0001]

[Industrial application] Depends on the gap between the tip of a conductive needle (hereinafter simply referred to as "needle") provided on a probe and the surface of a facing member arranged facing the tip of the needle. The present invention relates to a probe device such as a probe microscope, an atomic level manipulator, and a recording / reproducing device that can detect accurately based on an electrical quantity.

[0002]

2. Description of the Related Art Devices such as a semiconductor evaluation device and a recording / reproducing device to which a scanning tunneling microscope is applied have been proposed (for example, Takimoto et al .: Proceedings of the 40th Joint Lecture on Applied Physics 29pZH13, p1111 1993) etc.).

In a scanning tunneling microscope, the tip of a minute needle and the surface of a facing member (conductive sample surface) are brought close to each other via a minute gap (tunnel gap), and a DC bias is applied between them. Then, a DC current (tunnel current) flowing between the tip of the needle and the sample surface is detected by the gap detection circuit, and the size of the gap is controlled by the gap control device so that this DC current becomes constant. Scan. Further, an atomic level manipulator and a recording / reproducing apparatus using the technique in the scanning tunneling microscope are also known.

Furthermore, a scanning capacitance microscope has also been developed, which is applicable to insulator samples. In this scanning capacitance microscope, an insulating sample is placed between the needle and the counter electrode, and an AC bias is applied between them. The amplitude of the alternating current flowing due to this alternating bias depends on the capacitance of the insulating sample and the capacitance of the gap between the needle tip and the surface of the insulating sample. This capacitance changes with the size of the gap. Therefore, the size of the gap can be detected by measuring the amplitude of the alternating current flowing through the gap.

The technique in the scanning capacitance microscope is also applied to an atomic level manipulator, a recording / reproducing apparatus, etc. (for example, RC Barretet).
al. J. ppl. Phys. 70, 2725 (199
See 1) etc.). Note that the needle is usually provided at the end of a minute probe. As such a micro probe, a cantilever type probe is often adopted. Further, in the above recording / reproducing apparatus, a large number of probes are provided in order to increase the recording density.

[0006]

By the way, in a scanning capacitance microscope, a manipulator or a recording / reproducing apparatus to which the technique in the microscope is applied, a change in the alternating current flowing in the gap between the tip of the needle and the surface of the facing member is considered. ,
The size of the gap can be detected (such a detection circuit is called a "gap detection circuit").

However, a parasitic capacitance exists between the counter electrode and a portion other than the tip of the needle, and the magnitude of this parasitic capacitance is significantly larger than the amount of change in capacitance due to the change in the gap. .

For this reason, the conventional probe device cannot accurately measure the amount of change in the current due to the change in the gap, and as a result, the gap between the tip of the needle and the surface of the facing member can be detected accurately. Can not do it.

In order to eliminate such inconvenience, a method of sufficiently separating the surface of the facing member and the probe main body to reduce the parasitic capacitance can be considered, but the distance from the probe main body to the tip of the needle becomes large. Therefore, the lateral deflection of the needle tip becomes large during vertical movement of the probe,
There is a problem that the tip of the needle is displaced from the target point of the facing member.

It is also conceivable to adopt a method of simply eliminating the influence of the parasitic capacitance by incorporating an electric circuit capable of eliminating only the parasitic capacitance in each gap detection circuit. However, this method has a low relative sensitivity, complicates the gap detection circuit, and requires a large area for incorporating the electric circuit. Therefore, in a recording / reproducing apparatus having a large number of probes, it is difficult to incorporate the gap detection circuit in all the probes, and as a result, there is a problem that the number of probes provided in the probe apparatus has to be limited. .

An object of the present invention is to extract only the electric quantity that contributes to the gap detection among the electric quantities that change depending on the size of the gap between the tip of the needle and the surface of the facing member.
It is an object of the present invention to provide a probe device capable of detecting the gap with extremely high accuracy.

[0012]

The probe device of the present invention is provided with at least one probe set having a main probe member and a compensating probe member having substantially the same shape. The compensation probe member is, so to speak, a dummy member. These probe members are minute, and their formation is significantly easier than in the past with the progress of micromachining technology such as micromachining technology and electron beam drawing technology. Therefore, even if the compensation probe member is added as the original probe member (main probe), the entire probe device does not become large.

The above-mentioned probe members are driven at the same time, but they do not necessarily have to be integrally formed, and a drive mechanism such as a piezoelectric drive type or an electrostatic drive type can be adopted as the drive mechanism. . In addition, these probe members are normally arranged in parallel in an electrically insulated state (that is, in a state where they do not electrically interfere with each other).
As the shape of the probe member, various types such as a cantilever type and a triaxial type can be used.

The probe device of the present invention can be used not only as a probe microscope but also as, for example, an atomic level manipulator and a recording / reproducing device. Further, when the probe device of the present invention is used as a recording / reproducing device, the probe device is provided with a plurality of sets of probes.

Further, in the probe device of the present invention, the size of the gap between the tip of the needle provided on the main probe member and the surface of the facing member arranged facing the tip of the needle is set to a predetermined electric value. It is equipped with a gap detection circuit that detects based on the target quantity. Here, the "predetermined electrical quantity" is usually between the needle and an electrode provided in a lower layer of the facing member (the facing member may be the electrode; hereinafter referred to as "counter electrode"). AC current or DC current that flows through. Since these alternating current and direct current depend on the capacitance and conductance in the gap, the above electrical quantity can be considered as capacitance and conductance.

On the other hand, the compensating probe member may or may not be provided with a needle. When the compensation probe member is provided with a needle, the length of the needle is preferably shorter than the needle provided on the main probe member. The needle provided on the compensation probe member does not directly contribute to the measurement of the gap size. The parts that are sensitive to gap detection are
It is the capacitance formed between the tip of the needle and the counter electrode.

The gap detection circuit determines the electric quantity that does not contribute to the gap detection among the electric quantities (not limited to those that change according to the size of the gap) acquired through the main probe member. The size of the gap is detected with high accuracy by canceling it by the electric quantity acquired through the compensation probe member.

The gap detection circuit can have various gap detection functions. The gap detection circuit
In the simplest case, it is arranged such that the difference between the current flowing through the main probe member and the current flowing through the compensation probe member can be measured and the gap can be detected on the basis of the difference.

In the probe device of the present invention, the size of the gap can be controlled by the gap control device based on the detection result of the gap detection circuit described above. By using this gap control device, the size of the gap between the tip of the needle provided on the main probe member and the surface of the facing member can be kept constant. Further, the tip of the needle may be brought into contact with a facing member or the like to perform manipulation at the atomic level. Further, writing / reading of information can be performed by bringing the tip of the needle close to the facing member.

The probe device of the present invention is usually provided with a scanning means for moving the needle relatively along the surface of the facing member arranged facing the tip of the needle. As the scanning means, the technique in the conventional scanning probe device (scanning tunnel microscope etc.) is applied as it is.

The probe device of the present invention having the scanning means as described above can also be used as a recording / reproducing device. In this case, the needle provided on the main probe member is formed by a needle for writing / reading information, and the layer forming the surface of the facing member disposed facing the tip of the needle is formed by It is formed by a writable / readable recording / reproducing layer. Further, usually, a large number of probe sets are provided for one probe device.

[0022]

【Example】

<< First Embodiment >> FIG. 1 is a schematic view showing a first embodiment of the probe apparatus of the present invention. In the figure, the probe device 1 includes a probe-side element 2, a facing member-side element 3, and XY.
Fine movement mechanism 4, AC bias generation circuit 51, gap detection circuit 52, gap control circuit 53, XY control circuit 54
It is configured to include. The probe-side element 2 is configured to include a probe substrate 21, an actuator 22, a base 23, and a probe set 24. The probe set 24 includes probe members 241 and 242. The probe members 241 and 242 are cantilevers having substantially the same shape, and are arranged in parallel.

The probe members 241 and 242 are attached to the lower surface of the probe substrate 21 via the actuator 22 and the base 23. The actuator 22 is made of a piezoelectric material and can move the probe members 241 and 242 up and down at the same time by a signal from the gap control circuit 53. 2A and 2B, the bottom view and the front view of the probe set 24 are shown for reference. At the tip of the probe member 241, a fine needle 251 is provided on the opposite member side element 3
It is provided for. The probe member 242 is not provided with a needle in this embodiment. An aluminum layer (not shown) is formed on the facing member side element 3 side of the probe members 241 and 242. The aluminum layer of the probe member 241 is electrically connected to the needle 251, and the region of the aluminum layer of the probe member 242 corresponding to the needle attachment portion (the needle 25 of the probe member 241).
The aluminum layer in the minute area (corresponding to the area where 1 is attached) is removed. The formation of the fine needles, the removal of the aluminum layer in the fine regions, and the like can be realized by using a lithography technique using an electron beam drawing apparatus which is widely used at present.

The probe set 21 is mounted on the probe substrate 21.
4 is provided with a gap detection circuit 52, and the detection result by the gap detection circuit 52 (details of detection will be described later) is obtained by the gap control circuit 53.
Sent to

The facing member side element 3 is constructed by laminating a substrate 31, a facing electrode layer 32 formed on the substrate, and a facing member layer 33. The facing member layer 33 is located on the probe set 24 side. An AC bias generation circuit 51 is connected to the counter electrode layer 32. The facing member side element 3 is fixed on the XY fine movement mechanism 4. The XY fine movement mechanism 4 is operated by the XY control circuit 54, and the opposing member side element 3 is connected to the probe side element 2.
Can be moved in X-Y.

In the probe device 1 shown in FIG. 1, only one element each of the probe members 241, 242, the actuator 22, the base 23, the gap detection circuit 52, and the gap control circuit 53 is shown. When the probe device is used as a scanning probe microscope or a manipulator, each of the above elements may be provided one by one. Probe device 1 shown in FIG.
For example, when used as a recording / reproducing apparatus, a large number of sets of the above elements can be formed on the probe substrate 21.

FIG. 3 is a diagram for explaining the operation principle of the gap detection circuit 52. In the figure, the gap detection circuit 52 receives a current from the main probe member 241 and the compensation probe member 242 as an input, converts the current into a voltage, and outputs the current / voltage converter (I / V converter) 52.
1, 522, and a subtractor 523 that receives the voltage output from each of the I / V converters 521 and 522 as an input and outputs the difference between the inputs. That is,
A current flowing through the main probe member 241 and a current flowing through the compensation probe member 242 are supplied to each other via I / V converters 521 and 522 (each converter preferably having an equal input voltage). after being converted into a voltage signal, respectively, are subtracted by the subtracter 523, and output as a signal V _o. In FIG. 3, probe members 241, 241,
Although the difference between the respective voltages is obtained after converting the currents from 42 into the respective voltages, the difference between the respective currents may be obtained without converting the respective currents from the probe members 241 and 242 into the voltages. .

The gap detection circuit 52 is provided on the probe substrate 2
3 is formed on. In particular, the gap detection circuit 52 of FIG.
Is composed of I / V converters 521 and 522 and a subtractor 523, and can be constituted by a small number of elements. It should be noted that the number of elements and wiring newly required in association with the compensation probe member 242 is small. Therefore, even when the probe device 1 of the present invention is used as a recording / reproducing device and the probe substrate 21 is provided with a large number of probe sets 24, a gap detection circuit can be provided for each probe.

The operation of the probe device of FIG. 1 will be described with reference to the principle diagram of operation of FIG. AC bias generation circuit 5
1, the probe members 241, 242 and the counter electrode layer 3
An AC bias having a predetermined amplitude is applied between the two. As a result, an alternating current flows between the tip of the needle 251 provided at the tip of the main probe member 241 and the counter electrode layer 32, and between the body of the main probe member 241 and the counter electrode layer 32. Further, the main probe member 241 is also provided between the main body of the compensation probe member 242 and the counter electrode layer 32.
An alternating current having the same amplitude as the alternating current flowing between the main body of P and the counter electrode layer 32 flows.

As described with reference to FIG. 3, the current flowing through the entire main probe member 241 and the current flowing through the entire compensation probe member 242 are input to the I / V converters 521 and 522 of the gap detection circuit 52, respectively. , Converted to a voltage signal. I / V converters 521 and 52
The voltage output from 2 is input to the subtractor 523, and the subtractor 523 converts the alternating current flowing between the tip of the needle 251 provided substantially at the tip of the main probe member 241 and the counter electrode layer 32. And outputs a signal V _o based on it.

That is, the gap detection circuit 52 determines whether or not the electric quantity (in this case, alternating current or capacitance) acquired by the main probe member 241.
The electrical quantity that does not contribute to the gap detection can be canceled by the electrical quantity acquired through the compensation probe member 242 to detect the size of the gap with high accuracy.

<Specific Example> In this specific example, the probe device was constructed under the following conditions.

[Counter Member Layer 33] A SrTiO ₃ thin film having a relative dielectric constant of 100 and a thickness of 100 nm was used.

[Main probe member 241] The main body used was a non-conductive member having a width of 1 μm, a length of 30 μm and a thickness of 0.5 μm. As the needle 251 (formed on the tip of the main body), a cylindrical needle having a diameter of 30 nm and a height of 0.5 μm was used.

[Compensation probe member 242] The main body has the same shape as the main probe member 241, and has an aluminum layer on the side of the facing member layer 33. Further, as described above, the compensation probe member 242 is not provided with the conductive needle. Then, the aluminum layer in the portion to which the conductive needle is attached is removed.

[AC bias] Needle 251 and counter electrode layer 3
The AC bias applied between 2 and 2 has an amplitude of 100 mV,
The frequency was 100 MHz.

Here, the above-mentioned AC bias is applied, the AC current i _m1 (amplitude I _m1 ) flowing between the tip of the needle 251 and the counter electrode layer 32 is detected by the gap detection circuit 52, and the main part is driven by the actuator 22. The gap control circuit 53 is configured so that the gap between the tip of the needle 251 of the probe member 241 and the facing member layer 33 is always 1 nm.
It is controlled by. Hereinafter, description will be given with reference to FIG.

[0038] In this specific example, the gap is _I m1 = _62.5pA of _{i m1} flows between the tip and the surface of the counter electrode layer 32 of the needle 251 when the 1 nm, also the gap 0.1nm reduced or when _{increased, I m1} is increased or decreased by 6.25pA from 62.5PA.

Further, in this example, the probe member 241 is used.
AC current i _m2 (amplitude I _m2 ) flows between the body portion B of the probe member 242 and the counter electrode layer 32 due to parasitic capacitance.
Between and due to the parasitic capacitance, the alternating current i
_d2 (amplitude I _d2 ) flows. Where i _m2 = i _d2
(Ie, the phase and amplitude of i _m2 and i _d2 are equal).

I _m1 + i _m2 (represented by i _ms ) and i _d2 are I / V converters 521 and 522, respectively.
After being converted into voltage outputs V (i _ms ) and V (i _d2 ) via, are input to the subtractor 523. The subtractor 523 performs V (i _ms ) -V (i _d2 ). A component (represented by V (i _m2 )) based on _{im 2} of V (i _ms ) and i _{d2
Has the} same value as the component (denoted by V (i _d2 )). Therefore, the subtractor 523 calculates V (i _m2 ) and V (i _m2 )
_{(I d2)} and offset, and outputs only the V (represented by V _{(i m1))} component based on _{i m1} of _{(i ms)} as _{V o.}

Therefore, when the gap between the tip of the needle 251 and the surface of the counter electrode layer 32 changes, V (corresponding to the increase in _im1 due to the change in the gap is not affected by the parasitic capacitance. i _m1) only is output as _{V o} from the subtractor 523. That is, in the present specific example, when the gap is decreased or increased by 0.1 nm from 1 nm, I _m1 is changed from 62.5 pA to 6.
Increase or decrease by 25 pA.

Although the AC bias is used for the gap detection in this example, a DC bias may be used instead. That is, when the facing member-side element moves in the XY direction, the distance between the probe member and the facing member changes, which causes a direct current to flow between the main body of the probe member and the facing electrode. The DC current flowing between the body of the member and the counter electrode can be canceled by the DC current flowing between the body of the compensation probe member and the counter electrode.

In this embodiment, Sr is used as the facing member layer 33.
TiO ₃ was used, but in addition to this, PZT, PLZ
T, LiNbO ₃ , BaTiO ₃ , SrTiO ₃ , (B
a, Sr) TiO ₃ , KNbO ₃ , PbTiO ₃ , Li
Ferroelectric materials such as TaO ₃ and VDF, SiO ₂ , Si ₃ N
₄ , Ta ₂ O ₃ , Y ₂ O ₃ , HfO ₂ and other dielectrics, Si, Ge, GaAs, InSb and other semiconductors, A
metals such as u, Pt, Ir, Cu, Al, Sb compounds,
Needless to say, similar effects can be obtained even with phase change materials such as Te compounds, In compounds and Ge compounds.

<Second Embodiment> FIGS. 4 and 5 are views showing a second embodiment of the probe apparatus of the present invention. The probe apparatus 1 of FIG. 4 is similar to the probe apparatus 1 of FIG. 1, and the probe side element 2, the facing portion side element 3, the XY fine movement mechanism 4, the AC bias generation circuit 51, and the gap detection circuit 5 are included.
2. A gap control circuit 53 is included. The probe device shown in FIG. 4 basically differs from the probe device of FIG. 1 only in the probe-side element 2.

In the probe apparatus 1 of FIG. 4, the probe set 26 is composed of a probe set 26 (a cantilever type main probe member 261 and a compensating probe member 262) operated by an electrostatic actuator. These probe members 261 and 262 are integrally connected by an insulating joint member 27. Probe member 261
A needle 281 is provided at the tip of the needle toward the facing element 3 and the electrostatic actuator electrode 2 is provided on the surface opposite to the needle 281.
91 is formed. Although the probe member 262 is not provided with a needle, the electrostatic actuator electrode 292 is formed at the same position as the probe member 262. Although not shown in the drawing, each probe member 26
As with the probe members 241, 242 of FIG. 1, an aluminum layer is formed on the surface of the opposing side element 3 side of the reference numerals 1, 262. In the probe device 1 of FIG. 4, two probe sets 26 are shown. Of course, the probe apparatus 1 of FIG. 4 can also be provided with only one probe set 26. Further, when the probe device 1 of FIG. 4 is used as a recording / reproducing device, the probe device 1 can include a large number of probe sets 26.

Electrostatic actuator electrodes 291 and 29
Reference numeral 2 denotes one of a pair of electrodes forming the electrostatic actuator. In FIG. 4, illustration of the other of the electrodes forming the electrostatic actuator is omitted. The other electrostatic actuator electrode 293 is formed so as to face the upper surfaces of the electrostatic actuator electrodes 291 and 292, as shown in FIG. 5 (a sectional view taken along the line AA in FIG. 4).

Also in the probe apparatus 1 shown in FIG. 4, the gap detection circuit 52 (I / V converters 521 and 522 and the subtraction circuit 523) is formed on the probe substrate 21. In FIG. 4, for the sake of convenience, the floating state is shown. The area occupied by the gap detection circuit 52 on the probe substrate 21 is small as in the case of the probe device of FIG. Therefore, even when the probe board 21 includes a large number of probe sets 26, the gap detection circuit 52 (and the gap control circuit 53) can be provided for each probe set 26.

Also in the probe apparatus 1 of the present embodiment, the accuracy of gap detection is extremely high as compared with the conventional probe apparatus, as in the first embodiment.

<< Third Embodiment >> Next, a third embodiment of the probe apparatus of the present invention will be described. As shown in FIG. 6, the probe device 1 of the third embodiment has a compensation probe member 24.
The probe device 1 is the same as the probe device 1 of the first embodiment except that a needle 252 having a different shape from the needle 251 of the main probe 241 is attached to the second probe 2. The shape of the needle 252 is the material forming the needle 252 and the needle 251, the main probe 2
41, the shape of the compensation probe 242 is determined in relation to the electrical characteristics of the material forming the compensation probe 242. That is, the phase of the current flowing through the main probe and the height from the compensation probe are lower than the height of the needle 251 from the main probe with respect to the applied voltage for gap measurement as shown in the first embodiment. It is better to do so. At this time, needle 2
The material of 52 may be different than the material of needle 251.

<< Fourth Embodiment >> Next, a fourth embodiment of the probe apparatus of the present invention will be described. In this embodiment, the probe device is used as a scanning microscope. Since the probe device 1 in this embodiment is basically the same as the probe device 1 shown in FIG. 1, it will be described below with reference to FIG. The probe device 1 includes a probe-side element 2, a facing-side element 3, an XY fine movement mechanism 4, an AC bias generation circuit 51, a gap detection circuit 52, and a gap control circuit 53.
It includes an XY control circuit 54. Further, in the probe device 1 of the present embodiment, as shown in FIG. 7, the signal from the gap control circuit 52 is passed through the analog / digital converter (A / D) 55 and the digital signal processor (DSP) 56. And is output to the image output unit 6.

In the present embodiment, as shown in FIG. 8, the XY fine movement mechanism 4 (see FIG. 1) is caused to scan a predetermined distance L in the X direction at a constant distance d in the Y direction, and then scan the scanning line. The gap is detected and is processed by the DSP. Thereby, the shape of the surface of the facing member layer 33 as shown in FIG. 9 can be evaluated with high accuracy.

As described above, the probe device of the present invention includes [1] at least one set of probes having a substantially identical shape, each of which includes a main probe member and a compensation probe member, and is provided on the main probe member. A gap detection circuit for detecting the size of the gap between the tip of the conductive needle and the surface of the facing member arranged facing the tip of the needle based on a predetermined electrical quantity. In the probe device, the gap detection circuit is configured so that, of the electric quantities acquired via the main probe member, an electric quantity not contributing to gap detection is an electric quantity acquired via the compensation probe member. Cancel by quantity,
The size of the gap is detected, and the preferred embodiments such as [2] to [7] are included.

[2] The gap detection circuit detects the gap based on a difference between a current flowing through the one probe member and a current flowing through the other probe member. [1] The described probe device.

[3] The electric quantity is the capacitance between the conductive needle provided on the one probe member and the facing member, and the electric quantity acquired via the one probe member is the capacitance. The electrical quantity that does not contribute to the gap detection is the capacitance between the main body of the one probe member and the facing member [1].
Alternatively, the probe device according to [2].

[4] The other probe member is provided with a conductive needle shorter than the conductive needle provided on the one probe member, or the other probe member is not provided with a conductive needle. [1] to [3] characterized by
The probe device according to 1.

[5] The probe device according to any one of [1] to [4], wherein the size of the gap is controlled by a gap control device based on the detection result of the gap detection circuit.

[6] The probe device according to any one of [1] to [5], characterized in that it comprises a scanning means for relatively moving the conductive needle along the surface of the facing member.

[7] A layer of the probe device according to [6] used as a recording / reproducing device, wherein the conductive needle is formed by an information writing / reading needle to form a surface of the facing member. Is formed by a recording / reproducing layer capable of writing / reading information.

[0059]

As is apparent from the above, according to the present invention, the following effects can be achieved. (1) Of the electric quantities that change depending on the size of the gap between the tip of the needle and the surface of the facing member, only the electric quantity that contributes to gap detection is extracted, and the gap is detected with extremely high accuracy. Can be detected.

(2) It is possible to provide a probe device in which the influence of parasitic capacitance is extremely small when the electrical quantity is capacitance. Further, it is possible to provide a probe device that does not complicate a circuit for removing the influence of parasitic capacitance.

(3) Since the gap detection accuracy can be increased, the distance from the probe body to the tip of the needle can be reduced when the probe set is of the cantilever type. Therefore, there is no problem that the tip of the needle is displaced from the target point of the facing member when the probe is vertically moved. (4) Not only can it be used as an original probe microscope, but it can also be used as an atomic level manipulator, and also as a recording / reproducing device, evaluation device, information processing device, etc. that requires gap detection, and has an extremely high industrial value. .

[Brief description of drawings]

FIG. 1 is a schematic diagram showing a first embodiment of the present invention.

2A is a bottom view of the probe set according to the present invention, and FIG. 2B is a front view of the same.

FIG. 3 is a diagram for explaining the operation principle of the gap detection circuit in FIG.

FIG. 4 is a schematic diagram showing a second embodiment of the present invention.

5 is an explanatory diagram showing a cross section taken along line AA in FIG.

FIG. 6 is a diagram showing a probe member (set) according to a third embodiment of the present invention.

FIG. 7 is a diagram showing a part of an electric circuit according to a fourth embodiment of the present invention.

FIG. 8 is a diagram showing an example of a scanning method in the fourth embodiment.

FIG. 9 is a diagram showing an example of image output in the fourth embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Probe device 2 Probe side element 21 Probe board 22 Actuator 23 Base 24 Probe set 241 Main probe member 242 Compensation probe member 251 Needle 3 Opposing part side element 31 Substrate 32 Opposing electrode layer 33 Opposing member layer 4 XY fine movement mechanism 51 AC bias generation circuit 52 Gap detection circuit 53 Gap control circuit 54 XY control circuit

Claims (1)

[Claims] 1. A probe set having at least one main probe member and a compensating probe member, which have substantially the same shape.
The size of the gap between the tip of the conductive needle provided on the main probe member and the surface of the facing member arranged facing the tip of the needle is detected based on a predetermined electrical quantity. In the probe device, the gap detection circuit includes an electric quantity that does not contribute to gap detection among the electric quantities acquired through the main probe member. A probe device, wherein the size of the gap is detected by canceling the electric amount acquired through a member.