JPH08220324A - Production of color filter - Google Patents

Abstract

PURPOSE: To provide a production method of a color filter having excellent heat resistance by which a base film of a photosensitive film can be smoothly peeled and a multicolored fine pattern having uniform thickness and high accuracy can be formed with good following-up property, workability on a substrate without producing any steps, fault in the follow-up property or dropping of pixels. CONSTITUTION: This production method of a color filter includes the following processes. The photosensitive resin layer 2 of the second and succeeding colors is laminated in such a manner that the resin layer 2 faces the substrate 4 to form a space between pixels. The photosensitive resin layer of the second or succeeding color is heated and transferred from the base film 1 to the space between pixels. Then the base film 1 is peeled from the filter. The peeling process of the base film 1 is performed in such a temp. range that the adhesion strength between the colored photosensitive resin layer 2 and the pixel 3 is larger than the adhesion strength between the base film 1 and the colored photosensitive resin layer 2 and that the fracture stress of the colored photosensitive resin layer 2 is larger than the adhesion strength between the base film 1 and the colored photosensitive resin layer 2.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to a method for manufacturing a color filter.

[0002]

2. Description of the Related Art A color filter is an extremely transparent stripe-like or mosaic-like pattern having two or more different hues, which are parallel to each other on a surface of an optically transparent substrate such as glass. Or, they are crossed and arranged. These patterns must be arranged in order in a predetermined order with hues at a predetermined interval, and it is necessary to form a uniform layer with little thickness unevenness, and the color filters of the screen printing method, the photolithography method, the dyeing method, etc. Manufacturing methods have been proposed.

There is also known a method for producing a color filter, which uses a base film and a photosensitive film having a photosensitive resin layer and can easily form a multi-color fine stripe-shaped or mosaic-shaped pattern with high accuracy. There is. Photosensitive films are known and disclosed in Japanese Patent Publication No. 45-25231.

As a method for preparing a color filter using a photosensitive film, a photosensitive resin composition of a photosensitive film obtained by applying a photosensitive resin composition colored in one color to a base film and drying the photosensitive resin composition on a transparent substrate is used. And then exposed to light through a predetermined pattern mask and developed to form a pattern (JP-A-61-99102 and JP-A-3-1).
No. 60454, No. 3-111802, No. 2-151805, No. 4-212161.
Japanese Patent Application Laid-Open No. 4-301602, Japanese Patent Application Laid-Open No. 5-2
No. 107, etc.) is known.

In order to obtain a good pattern, the photosensitive film needs to improve its followability. As a method of improving the followability of the photosensitive film, for example, even if there is a step on the substrate, the three-layer resist method (J.Vac.Sci.Te
chnol., 16: 1620, published in 1968, etc.), the photosensitive resist layer is heated before development and after exposure at 50 to 150 ° C. for 30 to 60 seconds to cause reaction of the lower layer portion which is not sufficiently exposed to UV light. After-bake method for promoting heat treatment (Japanese Patent Application Laid-Open No. 3-19659)
No. 6, etc.) and the like. In addition, in a color filter using a pigment-dispersed photopolymer, the generation of monomer radicals induced by the radicals of the photoinitiator and its polymerization chain reaction are promoted, and a photosensitive resist layer is applied using a spinner to remove the solvent. Pre-bake (eg, 85 ℃
Prebaking method (J.Photopolym.Sci.Tec)
hnol., Vol.2, No.2, 1989, pp. 244-248).

Conventional color filter manufacturing methods (eg,
Dyeing method, pigment-dispersed liquid resist method, printing method, roll coater method, pigment-dispersed film resist method, etc.), when forming the layer of the second color or later, the colored layer of the second color or later on the already formed color layer. A step is formed between the colored layer and the colored layer that is in direct contact with the substrate. This step exceeds 1.0 μm at maximum, and if ITO is directly sputtered on this step, the ITO
Since the wire breakage and the distance between the electrodes sandwiching the liquid crystal become non-uniform and a good color display cannot be obtained, a film of 2 to 5 μm generally called a protective film or an overcoat film is formed, and the surface is covered. It is being made uniform. In the film method, this step is the thickness of the already formed colored layer (1-5
μm), and this step makes it difficult for the new colored layer to come into contact with the base (transparent glass), and because the adhesive pressure is insufficient, the new colored layer does not adhere to the base,
When the base film is peeled off, a part where the new color layer is not adhered is peeled off along with the base film, and when exposed and developed as it is, disadvantages such as exposure of a part where the new color layer does not exist are generated, and the desired There is a drawback that a color filter cannot be obtained. In addition, on the pixels of the second and subsequent colors, part of the colored photosensitive resin layer that had been on the pixels of the first color flows in, and in the second color, the edge close to the pixels of the first color is lifted and the pixel surface is slanted. (J-shaped, n-shaped cross section). On the pixel of the third color, the colored photosensitive resin layer flows in from the adjacent pixels on both sides, so that both ends of the pixel are lifted (it becomes an M-shaped cross section). FIG. 2 shows a schematic view of a cross section of J-shaped, n-shaped, and M-shaped pixels. If there is a J-shaped or M-shaped lifting, the unevenness of the surface of the three-color pixels is not obtained, the desired flatness cannot be obtained, and the lifted edge comes into contact with the counter electrode, resulting in pixel failure and uneven color. There was a defect such as causing it. The film followability cannot be improved only by adhering the colored photosensitive resin layer to the substrate and passing it through a pressure roll (laminating) while peeling off the protective film of the photosensitive film after heating the substrate.

[0007]

DISCLOSURE OF THE INVENTION The present invention solves the above-mentioned problems of the prior art and allows the base film of the photosensitive film to be peeled off smoothly, with good followability and workability, and with a uniform thickness on the substrate. It is intended to provide a method of manufacturing a color filter having high heat resistance, in which a multi-color fine pattern having no steps with high precision, no defect in followability, and lack of pixels is formed.

[0008]

According to the present invention, there is provided a photosensitive film comprising a base film and a photosensitive resin layer colored in one color on a transparent substrate, wherein (1) the colored photosensitive resin layer is A step of bonding so as to face the substrate,
A method for manufacturing a color filter, wherein a multi-color pattern is formed by repeating a step of (2) exposing in a pattern and a step of (3) a developing step, wherein the second and subsequent colored photosensitive resin layers are formed on the substrate. To form a space between the pixels so that they face each other.
In the manufacturing method of the color filter, the base film is peeled off during the step of performing a transfer step of moving the photosensitive resin layer of the second and subsequent colors from the base film to the inter-pixel space by heating and a peeling step of peeling the base film. In the peeling process, the adhesive force between the colored photosensitive resin layer and the front pixel is greater than the adhesive force between the base film and the colored photosensitive resin layer, and the colored photosensitive resin layer is stronger than the adhesive force between the base film and the colored photosensitive resin layer. The present invention relates to a method for manufacturing a color filter, which is characterized in that it is carried out in a temperature range in which the breaking stress is higher.

The present invention will be described in detail below. In order to flatten the surface of the pixels of the color filters of the second and subsequent colors, the photosensitive resin layer of the second and subsequent colors is heated from the base film to a space on the substrate surface by heating between the steps (1) and (3). The aspect of the transition step of transition will be described in more detail with reference to FIG. FIG. 1 is a sectional view of a photosensitive film and a color filter showing a production method of the present invention. The base film 1 is PET (polyethylene terephthalate film), and the colored photosensitive resin layers are red (R) and green (G). An example will be described in which the layers are formed in order.

(A) is a colored photosensitive resin layer (green) 2 of a photosensitive film comprising a base film 1 (PET (polyethylene terephthalate film)) and a colored photosensitive resin layer (green) 2 and a front pixel (red). ) 3 shows a state in which the transparent substrate 4 in which the elements are arranged in order is facing. (B) is a colored photosensitive resin layer (green) 2 and a front pixel (red) of the photosensitive film.
3 shows the bonding in which the space 5 is formed between the pixels of the transparent substrate 4 and the transparent substrate 4 arranged in an orderly manner. The colored photosensitive resin layer (green) 2 does not need to follow the front pixel (red) 3 and the transparent substrate 4, but remains completely flat and contacts the front pixel (red) 3 surface. Is preferred. (B) shows a state in which the colored photosensitive resin layer (green) 2 is in close contact with the front pixel (red) 3, and the portion indicated as space 5 is the colored photosensitive resin layer (green). ) 2 is also a front pixel (red) 3
Is a part that does not exist.

(C) is a diagram showing a state after the transfer step of the present invention, wherein the transfer step is performed between the steps (1) to (3) described above, and the colored photosensitive resin layer (green) ) 2 for replacing the space 5 with the space 5 of the colored photosensitive resin layer (green) 2
The transfer to the part is performed by heating. Immediately after bonding in the state of (b), the colored photosensitive resin layer (green) 2 is in close contact with the base film 1, but the fluidity is increased by heating, and the space 5 on the surface of the transparent substrate 4 is increased by gravity. The transition begins within. The colored photosensitive resin layer (green) 2 has a larger adhesion to the transparent substrate 4 than the base film 1, and the contact angle of the colored photosensitive resin layer (green) 2 is more transparent than the contact angle of PET (polyethylene terephthalate). Since it is larger than 4, when it flows down the wall of the front pixel (red) 3,
A transparent film is formed on the transparent surface of the base film 1 by increasing the number of droplets formed on one surface.
After contacting with, it spreads on the transparent substrate 4 to complete the transition.

When the transfer process is completed, the colored photosensitive resin layer (green) 2 completes the transfer to the space 5 on the surface of the transparent substrate 4 and a space appears on the surface, and the colored photosensitive resin layer (green) is formed. ) 2 and space 5 interchange. At this time, since the colored photosensitive resin layer (green) 2 is made uniform by its surface tension, the surface flatness is excellent, and the pixel after development has a cross-sectional shape almost the same as that of the first color. . Although the case where the first color is red and the second color is green has been described above as an example, the order of colors is not limited to this, and any color order is possible.

The heating in the transfer step is carried out at room temperature or above and below the temperature at which the colored photosensitive resin layer starts the thermosetting reaction, and the transfer is completed at a low temperature for a long time and at a high temperature for a short time.
The surface of the transferred colored photosensitive resin layer has a high degree of flatness. For heating, hot plate heating, oven heating, ultrasonic heating,
There are, but not limited to, infrared heating, electromagnetic induction heating, frictional heating, and the like. The transition step in the present invention is performed between the above (1) to (3), but may be performed before or after the exposure step of (2), or may be performed twice before and after the exposure step. It is also possible to perform it in the exposure step. As the transfer step, the transfer step in the state where the base film exists has been described above, but the transfer step may be performed after the base film is peeled off. That is, even without the presence of the base film, the colored photosensitive resin layer can be moved to the space between the pixels and can be finally brought into close contact with the substrate surface.

The peeling step for peeling the base film can be carried out between the above steps (1) to (3) and may be carried out before or after the transferring step, or before or after the exposing step. FIG. 3 shows an example of performing the transfer step after the peeling step.

In order to smoothly peel off the base film, the adhesive force (A) between the base film and the colored photosensitive resin layer and the adhesive force (B) between the colored photosensitive resin layer and the front pixel.
And the breaking stress (C) of the colored photosensitive resin layer, (A)
When (A) <(B) in <(C), the colored photosensitive resin layer is smoothly peeled off from the base film and adheres to the surface of the front pixel. (C) depends on the material of the colored photosensitive resin layer, and shows a larger value as the storage elastic modulus of the colored photosensitive resin layer is higher.
Since the value of (C) is inversely proportional to temperature, it becomes large at low temperatures and small at high temperatures. Since the transition step is a phenomenon in which the colored photosensitive resin layer adheres to the substrate surface due to surface tension, the smaller the value of (C), the better the temperature is preferably maintained until the colored photosensitive resin layer melts and softens. In the present invention, the peeling step of peeling the base film from the viewpoint of smoothly peeling the base film, the adhesion of the colored photosensitive resin layer and the front pixel is more than the adhesion of the base film and the colored photosensitive resin layer. It is necessary to carry out in a temperature range in which the breaking stress of the colored photosensitive resin layer is larger than the adhesive force between the base film and the colored photosensitive resin layer. The temperature range is preferably −10 to 30 ° C. If this temperature range is lower than -10 ° C or higher than 30 ° C, the colored photosensitive resin tends to remain on the base film. In addition, the peeling speed of the base film in the peeling step is from 1 to 2 from the viewpoint of smoothly peeling the base film.
It is preferably 0 m / sec. This peeling speed is 1 m
If it is less than / sec and exceeds 20 m / sec, the colored photosensitive resin tends to remain on the base film. In the present invention, between the steps (1) and (3), the base film is peeled off after performing a transfer step of transferring the photosensitive resin layers of the second and subsequent colors from the base film to the inter-pixel space by heating. It is preferable to perform a peeling step.

(D) shows the shape of the cross section of the pixel of the color filter after the development of the colored photosensitive resin layer (green) 2 after exposure. The base film is peeled off after the exposure step and before the development step or before the exposure step.

The photosensitive film used in the present invention is formed by coating a transparent base film, for example, a film of polyethylene terephthalate or the like, with a photosensitive resin composition colored in one color, and drying it to color the film in one color. A photosensitive resin layer is formed. Since this colored photosensitive resin layer is uncured, flexible and adhesive, a protective film such as a polyethylene film may be further laminated on the colored photosensitive resin layer to prevent external damage or adhesion of foreign matter. desirable. The colored photosensitive resin layer formed on the photosensitive film is attached on a transparent substrate while peeling off the protective film, and the base film on the surface of the colored photosensitive resin layer is removed after exposure through a negative mask having a predetermined pattern. It

The photosensitive resin composition colored in one color contains the ethylenically unsaturated compound (a), the carboxyl group-containing film-forming polymer (b), the photopolymerization initiator (c) and the pigment or dye (d). It is preferable to contain the photosensitive resin composition, and the thickness of the photosensitive resin composition layer of the photosensitive film using this photosensitive resin composition is preferably 0.5 to 15 μm.

As the ethylenically unsaturated compound (a),
For example, a compound obtained by adding an α, β-unsaturated carboxylic acid to a polyhydric alcohol (trimethylolpropane di (meth) acrylate (means methacrylate or acrylate; hereinafter the same), trimethylolpropane tri (meth)) Acrylate, tetramethylolmethane tri (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, etc., obtained by adding α, β-unsaturated carboxylic acid to a glycidyl group-containing compound Compounds (trimethylolpropane triglycidyl ether triacrylate, bisphenol A diglycidyl ether di (meth) acrylate, etc.), polyvalent carboxylic acids (phthalic anhydride, etc.) and compounds having a hydroxyl group and an ethylenically unsaturated group (β-hydroxy ether Chill (meth) acrylate etc.)
And an ester of (meth) acrylic acid (meaning methacrylic acid or acrylic acid, the same applies hereinafter) (methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, ( (Meth) acrylic acid 2-ethylhexyl), trimethylhexamethylene diisocyanate, dihydric alcohol and divalent (meth)
Examples thereof include urethane diacrylate compounds obtained by reacting with acrylic acid monoester. These compounds are used alone or in combination of two or more.
The blending amount of the component (a) is preferably 90 to 50 parts by weight based on 100 parts by weight of the total amount of the components (a) and (b).

Examples of the carboxyl group-containing film-forming polymer (b) include copolymers of (meth) acrylic acid alkyl ester and (meth) acrylic acid, (meth) acrylic acid alkyl ester and (meth) acrylic acid. And a vinyl monomer copolymerizable therewith. Examples of alkyl (meth) acrylates include methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, and (meth) acrylate.
2-ethylhexyl acrylate and the like can be mentioned. Also,
Examples of (meth) acrylic acid alkyl ester, (meth) acrylic acid and vinyl monomers copolymerizable therewith include dimethylethyl (meth) acrylate, tetrahydrofurfuryl (meth) acrylate, diethyl (meth) acrylate, and 2 , 2,2-trifluoroethyl (meth) acrylate, 2,2,3,3-tetrafluoropropyl (meth) acrylate, acrylamide, diacetone acrylamide, styrene, vinyltoluene and the like. Polyester using terephthalic acid, isophthalic acid, sebacic acid and the like, copolymer of butadiene and acrylonitrile, cellulose acetate, cellulose acetate butyrate, methyl cellulose, ethyl cellulose and the like can be added to the component (b). By using the component (b), the coating properties and the film properties of the cured product are improved, and the blending amount is 10 to 50 parts by weight based on the total amount of the components (a) and (b) being 100 parts by weight. Is preferred. If the blending amount is less than 10 parts by weight, the ethylenically unsaturated compound is increased, so that the photosensitivity tends to decrease, and if it exceeds 50 parts by weight, the photocured product tends to become brittle. Also,
The weight average molecular weight of the component (b) is preferably 10,000 or more in view of the coating property and film strength.

Examples of the photopolymerization initiator (c) include aromatic ketones (benzophenone, N, N'-tetramethyl-4,4'-diaminobenzophenone (Michler's ketone), N, N'-tetramethyl-). 4,4'-diaminobenzophenone, 4-methoxy-4'-dimethylaminobenzophenone, 4,4'-diethylaminobenzophenone, 2-ethylanthraquinone, phenanthrenequinone, etc., benzoin ether (benzoin methyl ether, benzoin ethyl ether, benzoinphenyl) Ether, etc.), benzoin (methylbenzoin, ethylbenzoin, etc.), 2,4,5-triarylimidazole dimer (2- (o-chlorophenyl) -4,5-diphenylimidazole dimer, 2- (o- Chlorophenyl)
-4,5-Di (m-methoxyphenyl) -4,5-diphenylimidazole dimer, 2- (o-fluorophenyl) -4,5-diphenylimidazole dimer, 2-
(O-Methoxyphenyl) -4,5-diphenylimidazole dimer, 2- (p-methoxyphenyl) -4,5
-Diphenylimidazole dimer, 2,4-di (p-methoxyphenyl) -5-phenylimidazole dimer,
2- (2,4-dimethoxyphenyl) -4,5-diphenylimidazole dimer, 2- (p-methylmercaptophenyl) -4,5-diphenylimidazole dimer and the like) are used. These are used alone or in combination of two or more. The blending amount of the component (c) is
The total amount of the components (a) and (b) is preferably 0.1 to 10 parts by weight based on 100 parts by weight. If the amount is less than 0.1 parts by weight, the photosensitivity tends to be insufficient, and if it exceeds 10 parts by weight, the light absorption on the surface of the composition increases during exposure, and the internal photocuring Tends to be insufficient.

As the pigment or dye (d), a generally known coloring agent can be used, and compatibility with a photosensitive resin layer, particularly an ethylenically unsaturated compound or a carboxyl group-containing film imparting polymer, is targeted. It is selected in consideration of hue, light transmittance and the like. As the pigment that can be used in the color filter, various compounds can be used, for example,
There are inorganic pigments such as barium sulfate, zinc oxide, lead sulfate, titanium oxide, red iron oxide, carbon black, graphite and chromium oxide, and the following organic pigments (color index numbers). Yellow pigment: CI Pigment Yellow 20, 24, 83,
86, 93, 109, 110, 117, 125, 13
7, 138, 139, 147, 148, 153, 15
4, 166, 168 Orange Pigment: CI Pigment Orange 36, 43, 5
1, 55, 59, 61 Red pigment: CI Pigment Red 9, 97, 122, 1
23, 149, 168, 177, 180, 092, 21
5, 216, 217, 220, 223, 224, 22
6, 227, 228, 240, 48: 1 violet pigment: CI pigment violet 19,
23, 29, 30, 37, 40, 50 Blue Pigment: CI Pigment Blue 15, 15: 6, 2
2, 60, 64 Green pigment: CI Pigment Green 7, 36 Black pigment: CI Pigment Black 7 (d) is blended in an amount of 1 to 50 parts by weight based on 100 parts by weight of the total amount of (a) and (b). Preferably. If the content is less than 1 part by weight, coloring tends to be insufficient, and if it exceeds 50 parts by weight, the light transmittance tends to decrease.

In the colored photosensitive resin layer, a melamine resin and / or an epoxy resin which thermally reacts with a carboxyl group of a carboxyl group-containing film-forming polymer in order to enhance heat-curability, a component (a) and a component (b). Total amount of ingredients 10
It is preferable to add 1 to 20 parts by weight to 0 parts by weight and heat. The heating temperature is preferably 130 to 200 ° C., and the heating time is preferably 30 to 60 minutes from the viewpoint of improving the crosslink density and heat resistance of the colored layer.

[0024]

EXAMPLES The present invention will be described below with reference to examples. Example 1 (1) Production of coating liquid for colored photosensitive resin layer 135 parts by weight of the pigment paste of any one of Table 2 and 200 parts by weight of a solution prepared by uniformly dissolving the materials of Table 1 and 5 of melamine resin
Parts by weight and 5 parts by weight of a silane coupling agent were added and dissolved and dispersed to obtain a coating liquid for a colored photosensitive resin layer.

[0025]

[Table 1]

[0026]

[Table 2]

Melamine resin Cymel 300 (trade name of hexamethoxymethyl melamine manufactured by Mitsui Toatsu Co., Ltd.) Silane coupling agent KBM503 (manufactured by Shin-Etsu Chemical Co., Ltd.) Preparation of coating liquid Ultrasonic wave is applied immediately before using the coating liquid. It was dispersed and adjusted for 5 hours.

(2) Production of Photosensitive Film The obtained coating solution was applied to a polyethylene terephthalate film having a thickness of 6 μm (Tetron film S6 manufactured by Teijin Ltd.).
It was applied to a uniform thickness using a kiss-touch reverse type coating machine and dried in a dryer at 100 ° C. for 2 minutes. As a protective film, a 30-μm-thick polyethylene film was laminated to obtain a photosensitive film. The thickness of the photosensitive resin layer after drying was 2.0 μm for each of red, blue and green.

(3) Production of color filter (a) Substrate heating step The base substrate for the color filter was heated at 80 ° C. for 10 minutes. (B) Laminating step While peeling off the protective film of the photosensitive film, the colored photosensitive resin layer is rolled at a temperature of 60 ° C. and a roll pressure of 1.0 kg.
It was laminated on the base substrate for the color filter at f / cm ² and a speed of 2.5 m / min. (C) Exposure step Predetermined pattern (normal stripe-shaped pattern,
Exposure machine HMW-201B through a negative mask of 0 μm (white) / 230 μm (black) and 150 mm long)
(3 kW, ultra-high pressure mercury lamp, manufactured by Oak Manufacturing Co., Ltd.) was used for exposure. (D) Transition process When forming the second and third color pixels, heating is performed at 60 ° C. for 15
It was carried out for a minute, and the colored photosensitive resin layer that had been through the space was transferred to the substrate surface.

(E) Peeling Process For the first color red, the polyethylene terephthalate film was peeled at room temperature with an automatic peeling device (home-made prototype, a device for peeling polyethylene terephthalate film with a roll having double-sided tape stuck). The following peeling conditions were applied to the second and third colors, blue and green. Peeling temperature is -10 ° C, 0 ° C, 10 ° C, 15 ° C, 20 ° C, 2
5 ° C, 30 ° C, 35 ° C, 40 ° C, 60 ° C, 80 ° C and 1
The peeling speed is 1 m / min, 3 m / min, 5 m /
Minutes, 0.1 m / sec, 0.3 m / sec, 0.5 m / sec, 0.
It was set to 7 m / sec and 1.0 m / sec. In the present embodiment, the adhesive force (A) between the base film of the colored photosensitive resin layer and the colored photosensitive resin layer, the adhesive force (B) between the colored photosensitive resin layer and the front pixel, and the breaking stress of the colored photosensitive resin layer The relationship of (C) was judged by the peeling process, in which the colored photosensitive resin layer remained (x) and did not remain (◯) on the base film. That is, when (A) <(C), (A) <(B), ○, (A)> (C),
When (A) <(B), it becomes x. In all of the present and subsequent examples, (A) <(B). Even if (A) <(B), when (A)> (C), the colored photosensitive resin layer in contact with the space portion of FIG. 1 adheres to the base film and does not move to the substrate. It will be. When the colored photosensitive resin layer is completely transferred to the substrate, it does not remain on the base film after the peeling process because it is not attached to the base film. vice versa,
If the transfer is insufficient, the colored photosensitive resin remains on the base film even after the process, resulting in insufficient peeling. As the peeling property of the green photosensitive film, the adhesion of the colored photosensitive resin layer after peeling according to the peeling temperature and the peeling speed was evaluated as XX,
The results are shown in Table 3.

[0031]

[Table 3]

(F) Developing Step The colored photosensitive resin layer which could be peeled off under the conditions of evaluation ○ in the above peeling step was developed. 0.08 wt% N at 30 ° C
Spray development was carried out for 15 seconds with an aqueous solution of a ₂ Co ₃ to remove the unexposed portion, and after development, it was washed with water and dried by heating in an oven to form a colored pattern. The steps of forming the colored patterns (a) to (f) were repeated using a photosensitive film of each color in the order of red, blue and green. When laminating the second color blue, the film was fed with the feeding direction of the film orthogonal to the red stripe pattern of the front pixels. The surface of the obtained substrate with the blue photosensitive film was flat, and even if it was obliquely watermarked, it was flat without light scattering. When the surface roughness was measured and the flatness of the film surface was examined, no deformation due to front pixels was observed. The same was applied to the third color, green, to form a multicolor pattern. The exposure dose at this time is 50 mJ for the red, blue and green photosensitive resin layers.
/ cm ² . The pattern of the mask used is one in which the stripes form an independent rectangle for each pixel and a gap is provided in the longitudinal direction of the stripes. The resulting multicolor pattern was irradiated at 3 J / cm ² with an ultraviolet irradiation device (lamp H5600L / 2, manufactured by Toshiba Denshi Co., Ltd.) and then heated at 150 ° C. for 45 minutes to obtain a color filter. The obtained color filter had red, blue and green patterns (striped patterns) arranged in order, and had good followability. Further, there was no step in the pixel, and neither M-shaped nor J-shaped was observed in the cross section of the pixel.

Example 2 The same as Example 1 except that the materials in Table 1 were replaced with the materials in Table 4 below, and for the second and third colors blue and green, the bonding step (b) was as follows. went. Laminating Step of this Example While removing the protective film of the photosensitive film for the color filter, the colored photosensitive resin layer was laminated on the base substrate for the color filter under the following conditions. Roll temperature 80 ℃ Roll pressure 4.0kgf / cm ² Speed 1.5m / min

[0034]

[Table 4] As the peeling property of the green photosensitive film, the adhesion of the colored photosensitive resin layer after peeling depending on the peeling temperature and the peeling speed is ○ ×
The evaluation was performed and the results are shown in Table 5.

[0035]

[Table 5] The surface of the obtained substrate with the blue photosensitive film was flat, and even if it was obliquely watermarked, it was flat without light scattering. When the surface roughness was measured and the flatness of the film surface was examined, no deformation due to front pixels was observed. The color filter thus obtained had red, blue and green patterns arranged in order, and had good followability. Further, there was no step in the pixel, and neither M-shaped nor J-shaped was observed in the cross section of the pixel.

Example 3 The same as Example 1 except that the materials in Table 1 were replaced with the materials in Table 6 below, and for the second and third colors, blue and green, the bonding step (b) was as follows. went. Laminating Step of this Example While removing the protective film of the photosensitive film for the color filter, the colored photosensitive resin layer was laminated on the base substrate for the color filter under the following conditions. Roll temperature 100 ℃ Roll pressure 4.0kgf / cm ² Speed 1.0m / min

[0037]

[Table 6] As the peeling property of the green photosensitive film, the adhesion of the colored photosensitive resin layer after peeling depending on the peeling temperature and the peeling speed is ○ ×
The evaluation was performed and the results are shown in Table 7.

[0038]

[Table 7] The surface of the obtained substrate with the blue photosensitive film and the surface of the substrate with the green photosensitive film were flat, and even when obliquely perforated, light was not scattered and was flat. When the surface roughness was measured and the flatness of the film surface was examined, no deformation due to front pixels was observed. The obtained color filter had red, blue and green patterns (striped patterns) arranged neatly, and had good followability. In addition, there is no step in the pixel, and the cross section of the pixel has an M shape of J.
No condition was observed.

Example 4 Example 4 was repeated except that the materials in Table 1 were replaced with the materials in Table 8 below.

[Table 8] The surface of the obtained substrate with the blue photosensitive film and the surface of the substrate with the green photosensitive film were flat, and even when obliquely perforated, light was not scattered and was flat. When the surface roughness was measured and the flatness of the film surface was examined, no deformation due to front pixels was observed. The obtained color filter had red, blue and green patterns (striped patterns) arranged neatly, and had good followability. In addition, there is no step in the pixel, and the cross section of the pixel has an M shape of J.
No condition was observed.

Example 5 The same procedure as in Example 1 was carried out except for the following (d) peeling step for the second and third colors, blue and green. (D) Peeling step The temperature of the surface of the substrate before peeling the polyethylene terephthalate film was 33 ° C. This was immersed in cold water at 10 ° C. and kept for 10 minutes. When the film was pulled up from cold water and peeled off, the peeling was good. Example 1
Similarly to the above, the surface of the obtained substrate with the blue photosensitive film and the surface of the substrate with the green photosensitive film obtained were flat, and even if the light was obliquely reflected, there was no light scattering and the surface was flat. When the surface roughness was measured and the flatness of the film surface was examined, no deformation due to front pixels was observed. The obtained color filter had red, blue and green patterns (striped patterns) arranged neatly, and had good followability. Further, there was no step in the pixel, and neither M-shaped nor J-shaped was observed in the cross section of the pixel.

Example 6 In Example 1, (a) substrate heating step, (b) production of color filters for blue and green of the second and third colors,
Laminating step, (c) exposure step, (d) transition step,
Although (e) peeling step and (f) developing step were performed in this order, in this embodiment, the substrate heating step, the bonding step, the exposure step,
The peeling step, the transferring step and the developing step were performed in this order. That is, when the transfer process was performed after peeling (see FIG. 3), the same results as in Example 1 were obtained.

Example 7 In Example 1, the production of color filters for the second and third colors, blue and green, was carried out by (a) substrate heating step, (b)
Laminating step, (c) exposure step, (d) transition step,
Although the steps of (e) peeling step and (f) developing step were performed in this order, in the present example, the second and third color blue and green steps were followed by the substrate heating step, the bonding step, the peeling step, the exposure step, and the transfer. When the step and the developing step were performed in this order and the exposure amount in the exposure step was 10 times that in Example 1, the same result as in Example 1 was obtained.

Example 8 In Example 1, the production of color filters for the second and third colors, blue and green, was carried out by (a) substrate heating step, (b)
Laminating step, (c) exposure step, (d) transition step,
Although the steps of (e) peeling step and (f) developing step were performed in this order, in the present example, the second and third colors of blue and green were changed to the substrate heating step, the bonding step, the transfer step, the exposure step, and the peeling step. When the steps were followed by the developing step, the same results as in Example 1 were obtained.

Example 9 In Example 1, (a) substrate heating step, (b) production of color filters for blue and green of the second and third colors,
Laminating step, (c) exposure step, (d) transition step,
Although (e) peeling step and (f) developing step were carried out in this order, in the present embodiment, the second and third color blue and green steps are the substrate heating step, the bonding step, the transfer step, the peeling step, and the exposure step. When the step and the developing step were performed in this order and the exposure amount in the exposure step was 10 times that in Example 1, the same result as in Example 1 was obtained.

Example 10 In Example 1, (a) substrate heating step, (b) production of color filters for blue and green of the second and third colors,
Laminating step, (c) exposure step, (d) transition step,
Although (e) peeling step and (f) developing step were carried out in this order, in the present embodiment, the second and third color blue and green steps are the substrate heating step, the bonding step, the peeling step, the transfer step, and the exposure step. When the step and the developing step were performed in this order and the exposure amount in the exposure step was 10 times that in Example 1, the same result as in Example 1 was obtained.

[0046]

According to the manufacturing method of the present invention, the base film of the photosensitive film can be peeled off smoothly, and the followability and workability are good, and the high-precision multi-colored steps of uniform thickness and white spots on the substrate are obtained. It is possible to manufacture a color filter having excellent heat resistance with a fine pattern formed without defects.

[Brief description of drawings]

FIG. 1 is a schematic view showing an example of the production method of the present invention.

FIG. 2 is a schematic view of a cross section of a pixel of a conventional color filter.

FIG. 3 is a schematic view showing an example of the production method of the present invention.

[Explanation of symbols]

 1 Base Film 2 Colored Photosensitive Resin Layer (Green) 3 Front Pixel (Red) 4 Transparent Substrate 5 Space 6 First Color Pixel 7 Second Color Pixel 8 Third Color Pixel

Claims (1)

[Claims] 1. A photosensitive film comprising a base film and a photosensitive resin layer colored in one color on a transparent substrate,
A color in which a multicolor pattern is formed by repeating steps including (1) a step of attaching a colored photosensitive resin layer so as to face the substrate, (2) a step of exposing in a pattern, and (3) a developing step. A method of manufacturing a filter, which comprises performing a step of forming a space between pixels so that the second and subsequent colored photosensitive resin layers face the substrate, and then bonding them together. In the manufacturing method of the color filter, the base film is peeled off during the step of performing a transfer step of moving the photosensitive resin layer of the second and subsequent colors from the base film to the inter-pixel space by heating and a peeling step of peeling the base film. In the peeling process, the adhesive force between the base film and the colored photosensitive resin layer is larger than the adhesive force between the base film and the colored photosensitive resin layer. Preparation of a color filter, which comprises carrying out in a temperature range larger rupture stress of the colored photosensitive resin layer.