JPH0822899A - Method for causing asymmetrical polyphase ac discharge - Google Patents

Abstract

PURPOSE:To provide a method for causing a planar or three-dimensional discharge by applying asymmetrical polyphase currents, in the order of phases, to the same number of discharge electrodes as the phases. CONSTITUTION:A three-phase transformer and six single-phase leakage transformers S1-S6 are arranged in pairs S1 and S4, S5 and S2, and S3 and S6 for every phase of symmetrical three-phase voltage, and each of the pairs are connected in parallel with each other. The three sets of six single-phase transformers S1-S6 have their secondary windings made into diametrical connections. The transformers S1, S4 have their respective output terminals taken out from the middle point of their secondary windings at which the winding ratio is 1/2. When their asymmetrical six-phase alternating currents are displayed in a stationary vector diagram, the end points of vectors E1-E6 form a rectangle. Discharge electrodes T1-T6 are arranged so that a rectangle which the ends of the discharge electrodes T1-T6 form is similar to the former rectangle, whereby a high-yield, rectangular plane discharge is obtained within an area surrounded by the discharge electrodes T1-T6.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an asymmetric polyphase alternating current multi-electrode discharge system capable of producing a very high-density planar discharge or three-dimensional discharge in a desired shape. , Sputtering method and plasma CDV
The present invention can be applied to any discharge device that utilizes a discharge phenomenon, such as a high-density plasma source used for the above, a waste treatment heat source by arc discharge, a high-intensity light source, and the like.

[0002]

2. Description of the Related Art The gas discharge phenomenon has various forms such as corona discharge, glow discharge, arc discharge, etc. depending on atmospheric pressure and current / voltage value, and each discharge phenomenon is caused by high temperature, high brightness light,
Alternatively, it is used as a charged body supply source in various devices, and various improvements have been made in each field in order to efficiently use the high energy generated by discharge. However, in all of the conventional discharge methods, a single-phase AC or DC power supply is used as the power supply, and the discharge phenomenon with high energy itself is linear between the pair of electrodes. There has been a limit to the improvement of the utilization efficiency of these discharge energy.

Therefore, the applicant of the present application sequentially applies a symmetrical six-phase alternating current to the six discharge electrodes arranged at the respective vertex positions of the regular hexagon in the order of their phases so that a voltage corresponding to the distance between the electrodes is applied to each electrode. We have developed a 6-phase AC 6-electrode arc discharge device that applies a plurality of arc discharges between 6 electrodes to generate a planar shape while rotating at high speed without interruption (Japanese Patent Application Laid-Open No. H6-6240).
-76945). Furthermore, the applicant of the present application has found that this planar discharge is not limited to arc discharge, and can be generated in symmetrical n-phase alternating current-n electrode devices other than symmetrical 6-phase alternating current (Japanese Patent Application No. 5-250806). No. 5, Japanese Patent Application No. 5-325026).

The applicant of the present invention takes advantage of the fact that higher density plasma can be generated as the number of symmetrical n-phase alternating currents applied increases, and this multi-phase alternating current multi-electrode discharge is sputtered. Applied to a wide range of applications through experimental research such as thin film forming technology such as plasma CDV method and plasma CDV method, use as a light source for planar fluorescent lamps, or large volume plasma reactor. Is coming.

However, in all of the multi-phase AC multi-electrode discharge methods that have been developed so far, since the symmetrical n-phase AC having the same voltage magnitude and phase difference of each phase is used as the power source, the discharge electrode must be a regular n-gon type. It must be arranged at the apex position, which has been a factor preventing further improvement of discharge efficiency and expansion of application range. That is, according to the conventional multi-phase AC multi-electrode discharge, although a high-density planar or three-dimensional discharge can occur, the discharge shape of this planar discharge is limited to a regular polygon, so the discharge efficiency is limited. It was not possible to cause the planar discharge to have, for example, a rectangular shape in order to further improve the above-mentioned condition or to make the entire device compact.

For example, a thin film forming apparatus utilizing high density plasma by symmetrical multi-phase AC multi-electrode discharge (Japanese Patent Application No. 6-28566).
No.) makes it possible to form a three-dimensional thin film collectively on the entire surface of the work by positioning the work in the generated three-dimensional plasma region. The sectional shape of the region was limited to a regular polygon. Therefore, even if the work is plate-shaped, it is not possible to generate high-density plasma in a rectangular cross-section according to the work, and it is necessary to always generate a large-volume plasma of a regular polygonal shape, which is an effective power source. There was room for improvement in terms of usage. and again,
In order to improve the processing efficiency of thin film formation and the uniformity of thin film, it has been desired to generate high density plasma having various shapes suitable for various work shapes.

On the other hand, even when the multi-phase alternating current multi-electrode discharge is used as illumination, the planar discharge is restricted to the regular polygonal shape, and therefore, the basic shape of the illuminating device is conventionally required to be the regular polygonal shape. In order to obtain a light source device having a desired shape, it is necessary to combine some regular polygonal light source devices while sacrificing uniform light emission and simplification of the structure.

[0008]

Therefore, the present invention is directed to an asymmetric multi-phase AC-multi-electrode capable of causing a planar discharge that emits high energy to any shape including not only a regular polygonal shape but also a rectangular shape. It is a technical subject to provide a discharge method.

Another technical object of the present invention is to dispose a discharge electrode that forms a planar discharge inside a discharge region generated in various polygonal shapes, so that discharge can be started easily and more evenly. An object of the present invention is to provide an asymmetric multi-phase AC-multi-electrode discharge method capable of generating a planar discharge.

The applicant of the present invention continued to carry out experimental research on the above-mentioned conventional multi-electrode discharge device using symmetrical multi-phase AC, and as a result, it was found that the efficient and efficient planar discharge is not only asymmetrical poly-phase AC but also asymmetrical. They have found that they can occur even when using polyphase alternating current, and have reached the solution to the above technical problem by utilizing the laws of nature that act there.

[0011]

[Means adopted for solving the problem] That is, by applying asymmetric polyphase alternating current to the discharge electrodes T _{1 to} Tn in the same order as the number of phases of the asymmetric polyphase alternating current, a planar or three-dimensional shape is obtained. In the discharge system that causes discharge, the discharge electrodes T _{1 to} Tn to which the single-phase alternating currents of the asymmetrical multi-phase alternating currents should be applied respectively are expressed by the static vector diagram of the asymmetrical multi-phase alternating currents. The means of arranging them at the positions corresponding to the vector end points of the stationary vectors that represent the phase alternating current was adopted.

Further, if necessary, the ground electrode T ₀ is arranged at a position corresponding to the vector starting point of the static vector diagram of the asymmetric polyphase AC in addition to the discharge electrodes T _{1 to} Tn to which the asymmetric polyphase AC is applied. We adopted the technical means of punishment.

[0013]

EXAMPLES Prior to the description of the discharge system by the asymmetrical multi-phase alternating current according to the present invention, first, the symmetrical 6-phase alternating current-6-electrode discharge (Japanese Patent Laid-Open No. 6-76945), which is the basis of the completion of the present invention, is taken as an example. The principle of the planar discharge that acts there will be described with reference to FIGS. FIG. 1 is a schematic perspective view illustrating a configuration of a symmetrical 6-phase AC 6-electrode discharge device, FIG. 2 is an explanatory view of a discharge path of a planar discharge generated by the device, and FIG. 3 is a symmetrical 6-phase AC applied to the device. Fig. 4 is a static vector diagram, and Fig. 4 is an explanatory diagram showing distances between electrodes in the apparatus.

As shown in FIG. 1, a symmetrical 6-phase AC-6 electrode discharge device is constructed by connecting a symmetrical 6-phase AC power supply unit and rod-shaped discharge electrodes indicated by reference numerals T _{1 to} T ₆ in a predetermined connection order. Composed. The symmetrical 6-phase AC power supply unit has six single-phase AC voltages E _{1 to} E ₆ (phase order is E
₆ → E ₅ → ... → E ₁ → E ₆ ) is output, and the six discharge electrodes T _{1 to} T ₆ are provided with insulating electrode holders indicated by the symbol H, and their tips are formed into a regular hexagon. It is held in a state of being arranged close to each vertex position.

The phase difference 120 of the _six single-phase AC voltages E _{1 to} E ₆ output from the symmetrical 6-phase AC power supply unit
The three discharge electrodes T _{1 to} T ₁
Every other one is applied to ₆ , and the single-phase alternating currents having opposite phases are connected to the discharge electrodes facing each other. When this connection method was adopted and the discharge was started, as shown in FIG. 2, a total of 15 discharges in the region surrounded by the discharge electrodes T _{1 to} T ₆ were aligned in the discharge direction without interruption, and the discharge speed was high according to the discharge order. It was possible to obtain a surface discharge that was surprisingly highly efficient because it generated a flat surface while rotating.

FIG. 2 shows the discharge path at each instant when the phase advances by 30 °. The thick arrows in the figure indicate that the maximum voltage value is applied between the electrodes and the discharge current flows in the direction of the arrow. The thin arrows in the figure indicate that a voltage is applied between the electrodes, but a discharge current flows in the direction of the arrow, although not the maximum value.

In the symmetrical 6-phase AC 6-electrode discharge, such a planar discharge can be realized because the applied voltage per unit distance between the electrodes is constant between all the electrodes. A correspondingly high discharge voltage is applied between the electrodes having a large distance, and a discharge is generated not only between the adjacent electrodes having a short distance but also with another electrode having a large distance. This discharge principle will be described in more detail with reference to FIGS. 3 and 4.

FIG. 3 is a static vector diagram showing the magnitude and phase relationship of the symmetrical 6-phase AC voltage. Six single-phase alternating current outputted from the symmetrical six-phase AC power supply unit, if is represented by a thick line vector E ₁ to E ₆ in the figure, the voltage applied between the electrodes, the thick line vector E ₁ to E ₆ Can be represented by the vector difference of. In the figure 3, thin line vector V ₁₂ ~
V ₁₆ represents an inter-electrode voltage applied between the discharge electrode T ₁ and the other electrodes T _{2 to} T ₆ .

Here, when the magnitudes of the thick line vectors E _{1 to} E ₆ are E, the thin line vector V ₁₂ representing the voltage between the electrodes T _{1 and} T ₂ is the thick line vector E ₁ and the thick line vector E ₂ . Therefore, the magnitude thereof is E, and similarly, the magnitude of the vector V ₁₃ representing the voltage between the electrodes T _{1 and} T ₃ is √3E and the voltage between the electrodes T _{1 and} T _4. The magnitude of the vector V ₁₄ is 2E, the magnitude of the vector V ₁₅ representing the voltage between the electrodes T _{1 and} T ₅ is √3E, and the magnitude of the electrode T ₁ −
The magnitude of the vector V ₁₆ representing the voltage between T ₆ is 1E
become.

On the other hand, the discharge electrode T ₁ and the other electrodes T _{2 to} T ₆
Looking at the distance between and, when the distance between the center of the regular hexagon and each vertex is L, the distance between the electrodes T ₁ and T ₂ is L, as shown in FIG. , Electrode T ₁
-T ₃ distance; √3L, electrodes T ₁ -T ₄ distance; 2
L, distance between discharges T ₁ -T ₅ ; √3L, electrodes T ₁ -T ₆
Distance between them: 1L.

As can be seen from this relationship, in the symmetrical 6-phase AC 6-electrode discharge, the voltage V ₁₂ -V ₁₆ applied between the electrodes and the distance between the electrodes between the electrodes T ₁ -the other electrodes T ₂ -T _6. Responds brilliantly. For example, if the distance between the electrodes is the electrode T
₁ between the electrodes T ₁ -T ₃ as a √3 times between -T _2, √3 times the discharge voltage between the electrodes T ₁ -T ₂ is applied, the inter-electrode distance between electrodes T ₁ -T ₂ That is, twice the discharge voltage between the electrodes T _{1 and} T ₂ is applied between the electrodes T _{1 and} T ₄ which is twice that of the above. This relationship can be seen not only between the discharge electrode T ₁ and the other electrodes T _{2 to} T ₆ , but also between the discharge electrode T ₂ and the other electrodes T _{3 to} T ₆ , although not shown. it can. As a result, than is highly efficient surface discharge is generated as a whole discharge electrodes T ₁ through T _6.

The applicant of the present application has found that the proportional relationship between the voltage applied between the electrodes and the distance between the electrodes is not limited to the symmetrical 6-phase AC-6 discharge method using six electrodes, but also when the asymmetric polyphase AC is used. This time, they have found that they can be maintained as long as the arrangement conditions of the discharge electrodes described below are satisfied.

The arrangement condition of the discharge electrodes is that the discharge electrodes T _{1 to} Tn to which n single-phase alternating currents of the asymmetrical n-phase alternating current are respectively applied are expressed by the static vector diagram method of the asymmetrical multi-phase alternating currents. It means that they are arranged at positions corresponding to the end points of each vector representing each single-phase alternating current. Since the discharge voltage applied between all the n discharge electrodes is represented by the vector difference of each vector of the asymmetric n-phase alternating current as described above, the discharge electrodes should be arranged under the above conditions. It is possible to make these vector differences (voltage applied between electrodes) proportional to the side length and diagonal length of the n-sided polygon formed by the discharge electrodes T _{1 to} Tn.

This electrode arrangement condition will be described below with respect to the symmetrical 6-phase AC 6-electrode discharge shown in FIG. When the symmetrical 6-phase alternating current is expressed by a static vector diagram, the bold line vectors E _{1 to} E ₆ respectively representing the 6 single-phase alternating currents are
A regular hexagon is formed at the end point of the vector (see the dotted line in FIG. 3). Therefore, in this symmetrical 6-phase AC 6-electrode discharge, the discharge electrodes T _{1 to} T ₆ are arranged at the respective vertex positions of the same regular hexagon.

In this way, the discharge voltage applied between the electrodes corresponds to the sides or diagonals of the regular hexagon formed by the vector end points (thin line vectors V _{12 to} V ₁₆ etc.), and these discharge voltages are used. the size of the discharge electrodes T ₁ through T ₆ is to become correspond proportionally to the side length and the diagonal length of the regular hexagon forming. That is, a regular hexagon (see FIG. 3) formed by the end points of each vector in the static vector diagram and the discharge electrodes T ₁ to
Since the regular hexagon formed by T ₆ (see FIG. 4) has a similar relationship, the above-mentioned proportional relationship between the applied voltage between electrodes and the distance between electrodes is maintained between all electrodes. .

Therefore, even in the case of asymmetrical n-phase alternating current n-electrode discharge, n in the static vector diagram of the asymmetrical n-phase alternating current
N-shaped polygons formed by the end points of each vector and the discharge electrodes T ₁ to
Each of the discharge electrodes T _{1 to} Tn is arranged at a predetermined position so as to have a similarity relationship with the n-gon formed by Tn, and each single-phase alternating current of the asymmetric n-phase alternating current is correspondingly positioned on the virtual n-gon. If the voltage is applied to each of the discharge electrodes in turn, a proportional relationship between the voltage applied between the electrodes and the distance between the electrodes can be realized among all the electrodes, and highly efficient planar discharge can be generated.

The first to seventh embodiments according to the present invention will be described below with reference to FIGS.

[First Embodiment] The first embodiment is a rectangular discharge system using an asymmetrical 6-phase AC-6 electrode. As shown in FIG. 5, the rod-shaped discharge electrodes T _{1 to} T ₆ are supported by an insulating electrode holder (not shown) so that each electrode tip forms a rectangular shape. The discharge electrodes T _{1 to} T
₆ to 6 6-phase AC voltage E _{1 to} E ₆ output from the asymmetric 6-phase AC power supply section (phase order is E ₆ → E ₅ → ... → E ₁ →
E ₆ ) are respectively applied.

As shown in FIG. 5, the asymmetrical 6-phase AC power supply unit in this embodiment comprises one three-phase transformer S ₀ and six single-phase magnetic leakage transformers S _{1 to} S _6. It The three-phase transformer S ₀ is a three-phase AC power supply U− whose primary winding side is external.
Delta connection (or star connection is also possible) with V, V-W, and W-U, and the secondary winding side is star-connected at the neutral point o ₁ and terminals u, v, and w are provided. ing.

Then, this neutral point o ₁ -each terminal u, v,
by two symmetrical 3-phase AC voltages each phase outputted from the inter-w single-phase transformers _{S 1 · S 4, S 5} · S 2, and S ₃ · S ₆ are connected in parallel, the three sets of six It is single-phase transformer S ₁ to S ₆ of the secondary winding side is so-called diamond metrical connection (6 relative angular connection). That is, one of the two single-phase transformers S ₁ and S ₅ connected in parallel as a pair for each three-phase alternating current phase.
The end of the secondary winding of S ₃ and the other transformer S ₄
The winding start of the secondary winding of S ₂ · S ₆ is connected, and these connecting portions are further connected by the neutral wire o ₂ .

Then, the single-phase transformers S ₁ , S ₄ , S ₅
S _2, S ₃ · commonly connected to not the terminal (1) of S ₆ ·
(4), terminals (5) and (2) and terminals (3) and (6)
From the discharge voltage E ₁ · E ₄ , E ₅ · E ₂ , E _{3 respectively}
・ E ₆ is output. However, the output terminal of the transformer _{S 1 · S 4 (1)} · (4) is for the intermediate terminals drawn out from the transformer S ₁ · S ₄ turns ratio 1/2 becomes the midpoint of the secondary winding, thus The magnitude of the AC voltages E ₁ and E ₄ output from the intermediate terminals (1) and (4) is half that of the other AC voltages.

When the asymmetrical 6-phase AC output from the asymmetrical 6-phase AC power supply unit is expressed by using a static vector diagram, the vector end points of the _six vectors E _{1 to} E ₆ form a rectangle as shown in FIG. (Shown in dotted line in FIG. 6). The discharge electrodes T _{1 to} T ₆ are arranged in a rectangular shape (see FIG. 7) so that the rectangular shape formed by the end points of the vector and the rectangular shape formed by the tips of the discharge electrodes T _{1 to} T ₆ have a similar shape relationship (see FIG. 7). Then, the discharge voltages E _{1 to} E ₆ are sequentially applied to the discharge electrodes T _{1 to} T _{6 at} corresponding positions on the virtual rectangle, respectively.

By adopting the electrode arrangement and the voltage application order as described above, the magnitude of the discharge voltage applied between all the electrodes in this embodiment (corresponding to the side length of the rectangle or the diagonal line length depending on the vector end point). Is the discharge electrode T ₁ shown in FIG.
~ T ₆ corresponds proportionally to the side length and the diagonal length of the rectangle, and therefore, the proportional relationship between the electrode applied voltage and the electrode distance is maintained between all electrodes, and the discharge electrode T
It is possible to generate a highly efficient rectangular planar discharge in the area surrounded by _{1 to} T ₆ .

[Second Embodiment] The second embodiment is also a rectangular discharge system using an asymmetric 6-phase AC 6-electrode. In the above-mentioned first embodiment, the rectangular planar discharge is generated by setting the magnitude of two AC voltages of the six single-phase AC voltages to the other half, but this embodiment In (1), not only the magnitude of each single-phase AC voltage but also the phase relationship is made asymmetric so that any rectangular planar discharge can be generated.

The asymmetrical 6-phase AC power supply unit in this embodiment is also one three-phase transformer S ₀ and six single-phase magnetic leakage transformers S ₁ as in the first embodiment as shown in FIG. to S ₆ Prefecture is composed of a three-phase transformer S ₀ is one three-phase winding side of the external AC power supply U-V, V-W, and W-U and delta connection (or may be a star connection) , The secondary winding side is star-connected at the neutral point o ₁ and terminals u, v, w are provided.

However, in the power supply section of this embodiment, the secondary winding between the neutral point o _{1 of} each of the three-phase transformer S ₀ and each of the terminals u, v, w has an intermediate terminal u ₁ and an intermediate terminal, respectively. v ₁ and v ₂ and intermediate terminals w ₁ and w ₂ are provided. The positions where these intermediate terminals are pulled out are as follows.

The intermediate terminal u ₁ is the number of turns of the secondary winding between the neutral point o ₁ and the terminal u, which is o ₁ -u ₁ : o ₁ -u = 25: 1
The intermediate terminal v ₁ is drawn from the position 00, and the intermediate terminal v ₁ is the number of turns o ₁ −v ₁ of the secondary winding between the neutral point o ₁ and the terminal v: o ₁ −
v turns = 25: drawn from 100 consisting position, the intermediate terminal v ₂ is the neutral point o ₁ - of the secondary winding between the terminals v, o ₁ -
v ₂ turns: o ₁ -v turns = 75: drawn from 100 consisting position, intermediate terminal w ₁ is the neutral point o ₁ - of the secondary winding between the terminals w, o ₁ -w ₁ turns: o ₁ -W winding number = 25: 100
And the intermediate terminal w ₂ has a neutral point o.
₁ - of the secondary winding between the terminals w, o ₁ -w ₂ turns: o ₁ -w
The number of turns is 75: 100.

As shown in FIGS. 8 and 9, the transformers S ₁ and S ₄ having the output terminals (1) and (4) are the intermediate terminals u ₁ -neutral of the three-phase transformer S _0. AC voltage is input between points o ₁ and discharge voltage E ₁ toward discharge electrodes T ₁ and T ₄ .
The transformers S ₅ and S ₂ that output E ₄ respectively and have the output terminals (5) and (2) are the intermediate terminals v of the three-phase transformer S _0.
AC voltage is input between the ₂ -intermediate terminal w ₁ and the discharge electrode T
Transformers S ₃ and S ₆ that output discharge voltages E ₅ and E ₂ respectively toward ₅ and T ₂ and that have output terminals (3) and (6)
AC voltage is input from between the intermediate terminal w ₂ and the intermediate terminal v ₁ of the three-phase transformer S ₀ , and the discharge voltages E ₃ and E ₆ are output toward the discharge electrodes T ₃ and T ₆ , respectively. It is connected.

The asymmetrical 6-phase AC output from the asymmetrical 6-phase AC power supply section is shown in a static vector diagram as shown in FIG.
As shown in FIG. 10, the vector end points of the _six vectors E _{1 to} E ₆ form a rectangle (shown by the dotted line in FIG. 10). The discharge electrodes T _{1 to} T ₆ are arranged in a rectangular shape so that the rectangular shape formed by the end points of the vector and the rectangular shape formed by the tips of the discharge electrodes T _{1 to} T ₆ have a similar shape (see FIG. 11), Then, the discharge voltages E _{1 to} E ₆ are sequentially applied to the discharge electrodes T _{1 to} T _{6 at} corresponding positions on the virtual rectangle, respectively.

However, also in this embodiment, as in the first embodiment, the magnitude of the discharge voltage applied between all electrodes (corresponding to the side length and diagonal length of the rectangle depending on the vector end point) is The discharge electrodes T _{1 to} T ₆ shown in FIG. 11 proportionally correspond to the side length and the diagonal length of the rectangle. Therefore, the proportional relationship between the applied voltage between electrodes and the distance between electrodes is maintained among all the electrodes. Thus, it becomes possible to generate a highly efficient rectangular planar discharge within the region surrounded by the discharge electrodes T _{1 to} T ₆ .

As described above, by applying an AC voltage of a desired magnitude from a predetermined intermediate terminal of each phase of the three-phase transformer S ₀ , a single-phase AC of any phase and magnitude can be easily obtained. , Can output any asymmetric polyphase alternating current. In other words, any shape of planar discharge can occur.

[Third Embodiment] The third embodiment is a distorted quadrilateral discharge system using four asymmetrical four-phase AC electrodes. In the above-described first and second embodiments, two six single-phase AC voltages are in opposite phase relation to each other (for example, voltage E).
₁ and voltage E ₄ etc.). However, the discharge method according to the present invention is not limited to this, and planar discharge can be generated from an asymmetric n-phase alternating current in which no single-phase alternating current has a reverse phase relationship.

As shown in FIG. 12, the asymmetrical four-phase AC power supply unit used in the third embodiment comprises one three-phase transformer S ₀ and four single-phase magnetic leakage transformers S _{1 to} S _4. Is configured,
The three-phase transformer S ₀ has a three-phase AC power source U whose primary winding side is external.
-V, V-W, and (which may be a or star connection) is W-U and delta connection, the secondary winding side terminals are star-connected at a neutral point o ₁ u, v, w are provided.

In the power supply section of this embodiment, the three-phase transformer S
_{In the} secondary winding between the neutral point o _{1 of} each terminal ₀ and each terminal u, v, w,
Intermediate terminals u ₁ and u ₂ and intermediate terminals v ₁ and v ₂ and v, respectively
₃ , and intermediate terminals w ₁ , w _2, and w ₃ are provided.
The lead-out position of each intermediate terminal is as follows.

The intermediate terminal u ₁ is the number of turns of the secondary winding between the neutral point o ₁ and the terminal u, that is, o ₁ −u ₁ turns: o ₁ −u turns = 17.7: 1
The intermediate terminal u ₂ is drawn out from the position 00, and the intermediate terminal u ₂ is the number of turns o ₁ −u ₂ of the secondary winding between the neutral point o ₁ and the terminal u: o ₁ −
The number of turns u = 32.8: 100, and the intermediate terminal v ₁ is the secondary winding between the neutral point o ₁ and the terminal v o ₁ −
v ₁ turns: o ₁ -v turns = 11.8: drawn from 100 consisting position, the intermediate terminal v ₂ is the neutral point o ₁ - of the secondary winding between the terminals v, o ₁ -v ₂ turns: o ₁ -V number of turns = 24.4: 100
, The intermediate terminal v ₃ is connected to the neutral point o.
₁ - of the secondary winding between the terminals v, o ₁ -v ₃ turns: o ₁ -v
The number of turns = 31.5: 100, and the intermediate terminal w ₁ is o ₁ -w of the secondary winding between the neutral point o ₁ and the terminal w.
₁ turns: o ₁ -w turns = 11.2: drawn from 100 consisting position, the intermediate terminal w ₂ is the neutral point o ₁ - of the secondary winding between the terminals w, o ₁ -w ₂ turns: o ₁ - w Number of turns = 25.1: 100
And the intermediate terminal w ₃ has a neutral point o ₁
- the secondary winding between the terminals w, o ₁ -w ₃ turns: o ₁ -w turns = 30.9: it's being drawn from 100 consisting position.

As shown in FIGS. 12 and 13, the transformer S ₁ provided with the output terminal (1) generates an AC voltage from the intermediate terminal u ₁ -intermediate terminal v ₂ of the three-phase transformer S _0. Input,
The transformer S ₂ that outputs the discharge voltage E ₁ toward the discharge electrode T ₁ and has the output terminal (2) outputs the AC voltage from between the intermediate terminal w ₂ and the intermediate terminal v ₁ of the three-phase transformer S _0. Input and output discharge voltage E ₂ toward discharge electrode T ₂ and output terminal (3)
Transformers S ₃ having a, the intermediate terminals v ₃ of the three-phase transformer S ₀
-By inputting an AC voltage from between the intermediate terminals w ₁ , the discharge electrode T ₃
The discharge voltage E ₃ is output to the transformer S _{4 and} the transformer S ₄ having the output terminal (4) receives the AC voltage from between the intermediate terminal u ₂ and the intermediate terminal w ₃ of the three-phase transformer S ₀ and discharges. It is connected so as to output the discharge voltage E ₄ toward the electrode T ₄ .

The asymmetrical four-phase alternating current output from the asymmetrical four-phase alternating current power supply section is shown in FIG.
As shown in 14, the vector end points of the _four vectors E _{1 to} E ₄ form a distorted quadrangle (shown by the dotted line in FIG. 14). The discharge electrodes T _{1 to} T ₄ are arranged in a distorted quadrangle so that the distorted quadrangle due to the end point of this vector and the polygonal shape formed by the tips of the discharge electrodes T _{1 to} T ₄ have a similar shape relationship (see FIG. 15). ,
Then, the discharge voltages E _{1 to} E ₄ are sequentially applied to the discharge electrodes T _{1 to} T _{4 at} corresponding positions on the virtual strained quadrangle.

In the present embodiment, however, the magnitude of the discharge voltage applied between all the electrodes (corresponding to the side length and diagonal length of the distorted quadrangle depending on the vector end point) is the discharge electrode T shown in FIG. _This corresponds proportionally to the side length and the diagonal length of the distorted quadrangle by _{1 to} T ₄ , so that the proportional relationship between the applied voltage between electrodes and the distance between electrodes is maintained between all electrodes, and the discharge electrode T ₁ it is to become possible to generate a surface discharge of the high-efficiency strain rectangle in the area where through T ₆ surrounds.

In the asymmetrical four-phase AC power supply unit of this embodiment, a plurality of intermediate terminals are provided at required positions of the secondary winding of each phase of the three-phase transformer S ₀ , and the intermediate of each phase is provided. Although each single-phase alternating current of a desired size and phase is obtained directly from the terminal, of course, the present invention is not limited to this.
The size of each discharge voltage may be adjusted by the turns change of the secondary winding of each single-phase transformer S ₁ to S _4. The same applies to the other examples according to the present invention.

[Fourth Embodiment] The fourth embodiment is a positive hexagonal discharge system using an asymmetric 6-phase AC-6 electrode. In the present embodiment, although the planar discharge is formed in a regular hexagonal shape, the center point of the regular hexagonal planar discharge and the AC center (zero potential point) of the asymmetrical 6-phase AC should be the same. Therefore, it is possible to generate a planar discharge in which the discharge voltage displacement of each discharge electrode is unbalanced.

As shown in FIG. 16, the asymmetrical 6-phase AC power supply unit used in this embodiment comprises one three-phase transformer S ₀ and six single-phase magnetic leakage transformers S _{1 to} S _6. Has been done,
The three-phase transformer S ₀ has a three-phase AC power source U whose primary winding side is external.
-V, V-W, and (which may be a or star connection) is W-U and delta connection, the secondary winding side terminal u are star-connected at a neutral point o _1, v, w are provided .

In the power source of this embodiment, the three-phase transformer S
_{In the} secondary winding between the neutral point o _{1 of} each terminal ₀ and each terminal u, v, w,
Intermediate terminals u ₁ , intermediate terminals v ₁ and v ₂ and intermediate terminals w ₁ and w ₂ are provided, respectively. The lead-out position of each intermediate terminal is as follows.

The intermediate terminal u ₁ is the number of turns of the secondary winding between the neutral point o ₁ and the terminal u, that is, o ₁ −u ₁ turns: o ₁ −u turns = 33.3: 1
The intermediate terminal v ₁ is drawn from the position 00, and the intermediate terminal v ₁ is the number of turns o ₁ −v ₁ of the secondary winding between the neutral point o ₁ and the terminal v: o ₁ −
The number of v turns = 33.3: 100, the intermediate terminal v ₂ is the neutral point o ₁ −the secondary winding between the terminals v, o ₁ −
v ₂ turns: o ₁ -v turns = 66.7: drawn from 100 consisting position, intermediate terminal w ₁ is the neutral point o ₁ - of the secondary winding between the terminals w, o ₁ -w ₁ turns: o ₁ -W number of turns = 33.3: 100
And the intermediate terminal w ₂ has a neutral point o.
₁ - of the secondary winding between the terminals w, o ₁ -w ₂ turns: o ₁ -w
The number of turns is 66.7: 100.

As shown in FIGS. 16 and 17, the transformers S ₁ and S ₄ having the output terminals (1) and (4) are the intermediate terminal u ₁ -intermediate terminal of the three-phase transformer S _0. AC voltage is input between v ₂ and discharge voltage E toward discharge electrodes T ₁ and T ₄ .
_The transformer S ₂ which outputs ₁ · E ₄ respectively and has the output terminal (2) receives the AC voltage from between the intermediate terminal u ₁ and the intermediate terminal v ₂ of the three-phase transformer S ₀ , and the discharge electrode T A transformer S that outputs a discharge voltage E ₂ toward ₂ and has an output terminal (6)
₃ receives an AC voltage from between the intermediate terminal u ₁ and the intermediate terminal w ₂ of the three-phase transformer S ₀ , outputs the discharge voltage E ₆ toward the discharge electrode T ₆ , and outputs the output terminals (3) and (6 ) transformers S ₃ · S ₆ with the can, a three-phase transformer S ₀ intermediate terminals v ₁ - enter the AC voltage from between the intermediate terminals w _1, discharge voltage E towards the discharge electrodes T ₃ · T ₆ Wired to output ₃ · E ₆ .

The output terminal (4) is connected to the transformer S ₄
The winding ratio seen from the neutral wire o ₂ on the secondary winding is drawn from a position of 1/3, and the discharge voltage E ₄ output from the output terminal (4) has a magnitude of discharge. Voltage E ₁
1/3 of that.

The asymmetrical 6-phase AC output from the asymmetrical 6-phase AC power supply section is shown in a static vector diagram as shown in FIG.
As shown in 18, the vector end points of the six vectors E _{1 to} E ₆ form a regular hexagon (shown by the dotted line in FIG. 18). The discharge electrodes T _{1 to} T ₆ are arranged in a regular hexagon so that the regular hexagon formed by the end points of the vector and the polygonal shape formed by the tips of the discharge electrodes T _{1 to} T ₆ have a similar shape relationship (see FIG. 19),
Then, the discharge voltages E _{1 to} E ₆ are sequentially applied to the discharge electrodes T _{1 to} T _{6 at} corresponding positions on the virtual regular hexagon.

However, also in this embodiment, the magnitude of the discharge voltage applied between all the electrodes (corresponding to the side length and the diagonal length of the regular hexagon depending on the vector end point) is the discharge electrode T shown in FIG. _{1 to} T ₆ corresponds to the side length and the diagonal length of the regular hexagon in proportion to each other. Therefore, the proportional relationship between the applied voltage between electrodes and the distance between electrodes is maintained between all electrodes, and the discharge electrode T ₁ it is to become possible to generate a high efficiency regular hexagon planar discharge in the area where through T ₆ surrounds.

However, in the case of the discharge method of this embodiment, FIG.
As shown in, the neutral point o ₂ is the vector starting position of the asymmetric six-phase AC E ₁ to E ₆ (zero voltage point), the discharge electrode T ₄ side from the center C of the virtual regular hexagon shaping the vector end point Therefore, the applied voltage displacement of the discharge electrode T ₁ becomes larger than that of the discharge electrode T ₄ . Therefore, if the discharge method is adopted in the above-described sputtering apparatus or the like, even if the work is positioned at the axial center position of the regular hexagonal column area surrounded by the target electrode, the amount of thin film formed on the work can be partially different. Further, by positively utilizing the difference in the thin film formation amount, it is possible to form a uniform thin film even on works of various shapes.

[Fifth Embodiment] The fifth embodiment is a regular hexagonal discharge system using an asymmetrical four-phase AC-6 electrodes. In the present embodiment as well, as in the fourth embodiment, the planar discharge is made into a regular hexagonal shape, and the center point of this regular hexagonal planar discharge and the AC center of the asymmetrical four-phase alternating current (zero potential position) Do not match. In this embodiment, the AC center (zero potential position) of the asymmetrical four-phase AC exists outside the planar discharge region.

As shown in FIG. 20, the asymmetrical four-phase AC power supply unit used in this embodiment is composed of one three-phase transformer S ₀ and six single-phase magnetic leakage transformers S _{1 to} S _6. Has been done,
The three-phase transformer S ₀ has a three-phase AC power source U whose primary winding side is external.
-V, V-W, and (which may be a or star connection) is W-U and delta connection, the secondary winding side terminal u are star-connected at a neutral point o _1, v, w are provided .

In the power supply section of this embodiment, the three-phase transformer S
_{In the} secondary winding between the neutral point o _{1 of} each terminal ₀ and each terminal u, v, w,
Intermediate terminals u ₁ and u ₂ , intermediate terminals v ₁ and v ₂ , and intermediate terminals w ₁ and w ₂ are provided, respectively. The lead-out position of each intermediate terminal is as follows.

The intermediate terminal u ₁ is the secondary winding between the neutral point o ₁ and the terminal u, and the number of turns is o ₁ −u ₁ : o ₁ −u = 25: 1
The intermediate terminal u ₂ is drawn out from the position 00, and the intermediate terminal u ₂ is the number of turns o ₁ −u ₂ of the secondary winding between the neutral point o ₁ and the terminal u: o ₁ −
u turns = 50: drawn from 100 consisting position, intermediate terminal v ₁ is the neutral point o ₁ - of the secondary winding between the terminals v, o ₁ -
v ₁ turns: o ₁ -v turns = 25: drawn from 100 consisting position, the intermediate terminal v ₂ is the neutral point o ₁ - of the secondary winding between the terminals v, o ₁ -v ₂ turns: o ₁ -V number of turns = 50: 100
And the intermediate terminal w ₁ has a neutral point o.
₁ - of the secondary winding between the terminals w, o ₁ -w ₁ turns: o ₁ -w
Turns = 25: drawn from 100 consisting position, the intermediate terminal w ₂ is the neutral point o ₁ - of the secondary winding between the terminals w, o ₁ -w
_The number of windings is _two : o ₁ -w The number of windings is 50: 100.

As shown in FIGS. 20 and 21, the transformer S ₁ having the output terminal (1) receives the AC voltage from the terminal u of the three-phase transformer S _{0 and} the intermediate terminal v _1. , towards the discharge electrodes T ₁ outputs a discharge voltage E _1, the output terminal (6)
The transformer S ₆ provided with inputs an AC voltage from between the terminal u and the intermediate terminal w ₁ of the three-phase transformer S ₀ , outputs the discharge voltage E ₆ toward the discharge electrode T ₆ , and outputs the output terminal (2 transformers S ₂ having a), the intermediate terminal of the three-phase transformer S ₀ u ₂ - intermediate terminal v
_An AC voltage is input from between the _two , a discharge voltage E ₂ is output toward the discharge electrode T ₂ , and a transformer S ₅ having an output terminal (5) is provided.
Inputs an AC voltage from between the intermediate terminal u ₂ and the intermediate terminal w ₂ of the three-phase transformer S ₀ , and discharges the discharge voltage E toward the discharge electrode T ₅ .
_The transformer S ₃ that outputs _{5 and} has the output terminal (3) inputs the AC voltage from between the intermediate terminal u ₁ and the intermediate terminal v ₁ of the three-phase transformer S ₀ , and directs it toward the discharge electrode T ₃ . The transformer S ₄ that outputs the discharge voltage E _{3 and} has the output terminal (4) inputs the AC voltage from the intermediate terminal u _{1 to the} intermediate terminal w ₁ of the three-phase transformer S ₀ , and discharges the electrode T _4. Is connected so as to output the discharge voltage E ₄ toward the.

In the power supply section of this embodiment, as can be seen from FIG. 21, the discharge voltage E ₂ and the discharge voltage E ₃ are in phase with each other and their magnitude is 2: 1. Therefore, it is possible to output the discharge voltage E ₂ and the discharge voltage E ₃ with one single-phase transformer. Specifically, the single-phase transformer S
_It suffices to pull out the intermediate terminal from the center point of the output secondary winding ₂ and output the discharge voltage E ₃ from this intermediate terminal. The same applies to the discharge voltage E ₅ and the discharge voltage E ₄ .

The asymmetrical four-phase alternating current output from the asymmetrical four-phase alternating current power supply section is shown in a static vector diagram as shown in FIG.
As shown in 22, the vector end points of the six vectors E _{1 to} E ₆ form a regular hexagon (shown by the dotted line in FIG. 22). The discharge electrodes T _{1 to} T ₆ are arranged in a regular hexagon so that the regular hexagon formed by the end points of the vector and the polygonal shape formed by the tips of the discharge electrodes T _{1 to} T ₆ have a similar shape relationship (FIG. 19). reference),
Then, the discharge voltages E _{1 to} E ₆ are sequentially applied to the discharge electrodes T _{1 to} T _{6 at} corresponding positions on the virtual regular hexagon.

However, also in this embodiment, the magnitude of the discharge voltage applied between all the electrodes (corresponding to the side length and the diagonal length of the regular hexagon depending on the vector end point) is shown in FIG. It corresponds to the side length and the diagonal length of the regular hexagon by T _{1 to} T ₆ in a proportional manner, so that the proportional relationship between the applied voltage between the electrodes and the distance between the electrodes is maintained between all the electrodes, and the discharge electrodes are maintained. It is possible to generate highly efficient regular hexagonal planar discharge in the region surrounded by T _{1 to} T ₆ .

However, in the case of the discharge system of this embodiment, FIG.
As shown in, the neutral point o ₂ which is the vector start point position (zero potential point) of the asymmetrical four-phase alternating current exists outside the virtual regular hexagon formed by the vector end point. Therefore, the applied voltage displacement of the discharge electrodes T ₁ and T ₆ is
It is larger than that of ₃ · T ₄ . Therefore, if the discharge method of this embodiment is adopted in the above-described sputtering apparatus or the like, it is possible to partially make the amount of thin film formation on the work different, as in the fourth embodiment.

[Sixth Embodiment] The sixth embodiment is a rectangular discharge system using an asymmetric 6-phase AC-6 electrode. This embodiment employs almost the same discharge method as the above-described first embodiment including the power supply section, and all six single-phase AC voltages are 6
It has a phase difference of 0 °, and the shape of the planar discharge that is generated is also a rectangular shape similar to that of the first embodiment. However, in the present embodiment, the discharge electrode T ₁ through T ₆ of the six is formed a concave hexagon (see FIG. 24).

[0069] 6-phase alternating current source asymmetry of this embodiment, the first embodiment the power output terminal of the unit (1) shown FIG. 5 described supra (4), single-phase transformer S ₁ - S ₄ two It is constructed by extracting from the point on the next winding where the turns ratio seen from the neutral point o ₂ is 1: 4. Therefore, as shown in the static vector diagram of FIG. 23, the discharge voltages E ₁ and E ₄ output from the power supply unit of this embodiment have a magnitude that is ¼ of other discharge voltages.
Becomes

Therefore, as shown by the dotted line in FIG. 23, in the present embodiment, the vector end points of the _six vectors E _{1 to} E ₆ are different from those in the first embodiment (see FIG. 6) in the long side portion. Form a concave hexagonal shape with a constriction. The concave hexagonal shape due to the end point of this vector and the polygonal shape formed by the tips of the discharge electrodes T _{1 to} T ₆ have a similar shape relationship with each other.
_{1 to} T ₆ are arranged in a concave hexagonal shape (see FIG. 24), and the discharge voltages E _{1 to} E ₆ are sequentially applied to the discharge electrodes T _{1 to} T _{6 at} corresponding positions on the virtual concave hexagon. To do.

However, also in this embodiment, the magnitude of the discharge voltage applied between all the electrodes (corresponding to the side length and the diagonal length of the concave hexagon depending on the vector end point) is shown in FIG. Since the side length and the diagonal length of the concave hexagon due to T _{1 to} T ₆ are proportionally corresponded to each other, a planar discharge is generated.

However, it should be noted that in the discharge method of this embodiment, the generated planar discharge is as shown in FIG.
That is, the four discharge electrodes T ₂ , T ₃ , T _5, and T ₆ are formed within a rectangular region surrounded by the discharge electrodes. That is, between the discharge electrodes T ₂ -T _6, and also discharge is made in between the discharge electrodes T ₃ -T _5, whereas the discharge electrodes T ₁ · T ₄ is contained within the occurrence is the surface discharge region It will be. Therefore, the discharge method of the present embodiment is suitable especially when it is desired to generate this planar discharge in a large area. That is, in this embodiment, two discharge electrodes are provided inside the rectangular discharge region by the asymmetrical four-phase AC-four-electrode discharge method in order to facilitate discharge initiation or to obtain a more uniform and stable planar discharge. It can be seen as the addition of.

[Seventh Embodiment] The final seventh embodiment is a rectangular parallelepiped three-dimensional discharge system using asymmetric 12-phase AC-12 electrodes, and is applied to a sputtering process as shown in FIG. Twelve rod-shaped discharge electrodes T _{1 to} T ₁₂ are arranged in parallel with each other at equal intervals so that the tips thereof form a rectangular shape in a decompression chamber K capable of enclosing decompressed various gases, and with respect to the plate-shaped work W. The sputtering process is performed.

As shown in FIG. 25, the asymmetrical 12-phase AC power supply unit used in this embodiment comprises one three-phase transformer S ₀ and twelve single-phase magnetic leakage transformers S _{1 to} S _12. Has been done,
The three-phase transformer S ₀ has a three-phase AC power source U whose primary winding side is external.
-V, V-W, and (which may be a or star connection) is W-U and delta connection, the secondary winding side terminal u are star-connected at a neutral point o _1, v, w are provided .

In the power source of this embodiment, the three-phase transformer S
_{In the} secondary winding between the neutral point o _{1 of} each terminal ₀ and each terminal u, v, w,
Intermediate terminal u ₁ , intermediate terminals v ₁ , v ₂ , v ₃ , v, respectively
₄ and intermediate terminals w ₁ , w ₂ , w _3, and w ₄ are provided. The lead-out position of each intermediate terminal is as follows.

The intermediate terminal u ₁ is the number of turns of the secondary winding between the neutral point o ₁ and the terminal u, that is, o ₁ −u ₁ turns: o ₁ −u turns = 21.1: 1
The intermediate terminal v ₁ is drawn from the position 00, and the intermediate terminal v ₁ is the number of turns o ₁ −v ₁ of the secondary winding between the neutral point o ₁ and the terminal v: o ₁ −
v turns = 19.3: drawn from 100 consisting position, the intermediate terminal v ₂ is the neutral point o ₁ - of the secondary winding between the terminals v, o ₁ -
v ₂ turns: o ₁ -v turns = 21.1: drawn from 100 consisting position, the intermediate terminal v ₃ is the neutral point o ₁ - of the secondary winding between the terminals v, o ₁ -v ₃ turns: o ₁ -V number of turns = 59.9: 100
, And the intermediate terminal v ₄ has a neutral point o.
₁ - of the secondary winding between the terminals v, o ₁ -v ₄ turns: o ₁ -v
The number of turns = 80.7: 100, the intermediate terminal w ₁ is the secondary winding between the neutral point o ₁ and the terminal w, o ₁ -w
₁ turns: o ₁ -w turns = 19.3: drawn from 100 consisting position, the intermediate terminal w ₂ is the neutral point o ₁ - of the secondary winding between the terminals w, o ₁ -w ₂ turns: o ₁ - Number of w = 21.1: 100
And the intermediate terminal w ₃ has a neutral point o ₁
- the secondary winding between the terminals w, o ₁ -w ₃ turns: o ₁ -w turns = 59.9: drawn from 100 consisting position, the intermediate terminal w
₄ is o ₁ -w ₄ of the secondary winding between the neutral point o ₁ and terminal w
The number of turns: o ₁ -w the number of turns = 80.7: 100.

As shown in FIGS. 25 and 26, the transformers S ₁ and S ₇ having the output terminals (1) and (7) are the intermediate terminal u ₁ -intermediate terminal of the three-phase transformer S _0. An AC voltage is input between v _{2 and} discharge voltages E ₁ and E ₇ are output toward discharge electrodes T ₁ and T ₇ , respectively, and transformers S ₁₂ and S having output terminals (12) and (6) are provided. _An AC voltage is input from between the intermediate terminal u ₁ and the intermediate terminal w ₂ of the three-phase transformer S _{0, and} the discharge voltage E ₁₂ and E ₆ are output to the discharge electrodes T ₁₂ and T ₆ , respectively, and output. Transformers S ₈ and S ₂ with terminals (8) and (2)
AC voltage is input between the intermediate terminal v ₃ of the three-phase transformer S _{0 and} the neutral point o ₁ and outputs discharge voltages E ₈ and E ₂ to the discharge electrodes T ₈ and T ₂ , respectively, and outputs Terminal (5) ・ (1
The transformers S ₅ and S ₁₁ equipped with 1) input AC voltage from between the intermediate terminal w ₃ and the neutral point o ₁ of the three-phase transformer S ₀ , and direct them toward the discharge electrodes T ₅ and T ₁₁ , respectively. A transformer S ₃ that outputs discharge voltages E ₅ and E ₁₁ and that has output terminals (3) and (9)
S ₉ is a three-phase transformer S ₀ intermediate terminals w ₁ - intermediate terminal v ₄
AC voltage is input from between the terminals, and discharge voltages E ₃ and E ₉ are output toward the discharge electrodes T ₃ and T ₉ , respectively, and the output terminal (10)
The transformers S ₁₂ and S ₆ equipped with (4) are three-phase transformers S ₀
AC voltage is input between the intermediate terminal v ₁ and the intermediate terminal w _{4 of the} discharge voltage E ₁₀ toward the discharge electrodes T ₁₀ and T ₄ , respectively.
-Connected to output E ₄ .

The asymmetrical 12-phase alternating current output from the asymmetrical 12-phase alternating current power supply section is shown in a static vector diagram as shown in FIG.
As shown in FIG. 27, the vector end points of the _twelve vectors E _{1 to} E ₁₂ form a rectangle, and the vector end points forming the long sides of this rectangle are equally spaced (interval t) (shown by the dotted line in FIG. 27). ). The tips of the discharge electrodes T _{1 to} T ₁₂ are arranged in a rectangular shape so that the rectangle formed by the end points of the vector and the rectangle formed by the tips of the discharge electrodes T _{1 to} T ₁₂ have a similar shape (see FIG. 28), and The discharge voltages E _{1 to} E ₁₂ are sequentially applied to the discharge electrodes T _{1 to} T _{12 at} corresponding positions on the virtual rectangle.

However, also in this embodiment, the magnitude of the discharge voltage applied between all the electrodes (corresponding to the side length and the diagonal length of the rectangle depending on the vector end point) is equal to the discharge electrode T.
It corresponds proportionally to the side length and the diagonal length of the rectangle formed by the tips of _{1 to} T _12, and the proportional relationship between the electrode applied voltage and the electrode distance is maintained among all the electrodes.

As a result, the discharge electrodes T _{1 to} T in the decompression chamber K are
_A rectangular parallelepiped-shaped three-dimensional discharge is generated in the area surrounded by _12, and the plate-like work W existing inside this three-dimensional discharge area is subjected to the sputtering treatment. As described above, in this embodiment, the discharge electrodes T _{1 to} T ₁₂ are arranged at equal intervals. Therefore, the sputtering process on the plate-shaped work W can be performed uniformly.

As described above, with the first to seventh embodiments,
Although the asymmetric polyphase alternating current-multielectrode discharge system according to the present invention has been described, the present invention is not limited to these examples, and various modifications can be made within the scope of the claims.

For example, in each of the above embodiments, each discharge electrode is arranged only at the vector end position of the static vector diagram of the asymmetric n-phase alternating current, but the discharge method according to the present invention is not limited to this. However, the ground electrode T ₀ is placed at the starting point position (zero potential position) of the stationary vector of the asymmetric n-phase alternating current.
May be arranged. The distance between the starting point and the ending point of the stationary vector in the stationary vector diagram (that is, the length of each vector) naturally corresponds proportionally to the distance between the ground electrode T ₀ and the other electrode. The discharge can be easily started, and a more uniform and stable planar discharge or three-dimensional discharge can be generated.

For example, in the distorted quadrilateral discharge method using the asymmetrical four-phase AC four electrodes described in the third embodiment (see FIGS. 12 to 15), the stationary vector starting point position (zero potential) of this asymmetrical four-phase AC is used. By arranging the ground electrode T ₀ at the position (see FIG. 29), the ground electrode T ₀ and the other electrode T ₀
Discharge is also generated between _{1 and} T ₄ , and it becomes possible to cause a more uniform and stable strained quadrangular planar discharge.

[0084]

As described above with reference to the embodiments, in the asymmetric polyphase alternating current-multielectrode discharge method according to the present invention, the polygon formed by each vector end point in the static vector diagram of the asymmetric polyphase alternating current is formed. If a plurality of discharge electrodes are arranged according to the above, and each single-phase AC voltage of the asymmetric polyphase AC is applied to the discharge electrodes at the corresponding positions on this polygon in order, the electrodes will be connected between all electrodes. Since the proportional relationship between the applied voltage between electrodes and the distance between electrodes can be realized, it is possible to generate a planar discharge of any shape, not limited to a regular polygon, by applying an appropriate asymmetric polyphase alternating current to the discharge electrodes. Became.

Therefore, if the discharge method of the present invention is used in, for example, a sputtering apparatus, it is possible to form a plasma region having a shape suitable for various work shapes, and even for a work having a large area, or a partial projection. It becomes possible to form a uniform thin film with high efficiency even on a work having a certain shape, and when the discharge method of the present invention is used as a light source, the light source is not limited to a regular polygon, but a light source having various shapes. There is a very high industrial utility value, such as the ability to provide equipment.

[Brief description of drawings]

FIG. 1 is a schematic perspective view illustrating the configuration of a conventional symmetrical 6-phase AC 6-electrode discharge device.

FIG. 2 is an explanatory diagram of a discharge path of a planar discharge generated by the device.

FIG. 3 is a static vector diagram of symmetrical 6-phase alternating current applied to the device.

FIG. 4 is an explanatory diagram showing a distance between electrodes in the same apparatus.

FIG. 5 is an asymmetric 6-phase AC-6 according to the first embodiment of the present invention.
It is a connection diagram of an electrode discharge method.

FIG. 6 is a static vector diagram of an asymmetrical 6-phase AC of the same discharge method.

FIG. 7 is a layout view of respective discharge electrodes of the same discharge method.

FIG. 8 is an asymmetrical 6-phase AC-6 of the second embodiment according to the present invention.
It is a connection diagram of an electrode discharge method.

FIG. 9 is a vector diagram of each single-phase AC voltage of asymmetric 6-phase AC of the same discharge method.

FIG. 10 is a static vector diagram of an asymmetric 6-phase alternating current of the same discharge method.

FIG. 11 is a layout view of respective discharge electrodes of the same discharge method.

FIG. 12 is an asymmetrical four-phase AC-4 according to a third embodiment of the present invention.
It is a connection diagram of an electrode discharge method.

FIG. 13 is a vector diagram of each single-phase AC voltage of an asymmetric 4-phase AC of the same discharge method.

FIG. 14 is a static vector diagram of an asymmetrical four-phase alternating current of the same discharge method.

FIG. 15 is a layout view of respective discharge electrodes of the same discharge method.

FIG. 16 is an asymmetrical 6-phase AC-6 of the fourth embodiment according to the invention.
It is a connection diagram of an electrode discharge method.

FIG. 17 is a vector diagram of each single-phase AC voltage of an asymmetric 6-phase AC of the same discharge method.

FIG. 18 is a static vector diagram of an asymmetric 6-phase alternating current of the same discharge method.

FIG. 19 is a layout view of respective discharge electrodes of the same discharge method.

FIG. 20 shows an asymmetrical four-phase AC-6 according to a fifth embodiment of the present invention.
It is a connection diagram of an electrode discharge method.

FIG. 21 is a vector diagram of each single-phase AC voltage of an asymmetric 4-phase AC of the same discharge method.

FIG. 22 is a static vector diagram of an asymmetric 4-phase alternating current of the same discharge method.

FIG. 23 is a static vector diagram of an asymmetric 6-phase alternating current according to a sixth embodiment of the present invention.

FIG. 24 is a layout view of respective discharge electrodes of the same discharge method.

FIG. 25 is an asymmetrical 12-phase AC-12 of the seventh embodiment according to the present invention.
It is a connection diagram of an electrode discharge method.

FIG. 26 is a vector diagram of each single-phase AC voltage of an asymmetric 12-phase AC of the same discharge method.

[Fig. 27] Fig. 27 is a static vector diagram of an asymmetric 12-phase AC of the same discharge method.

FIG. 28 is an explanatory diagram of a schematic configuration of a sputtering device to which the same discharge method is applied.

FIG. 29 is a layout view of each discharge electrode and a ground electrode in an asymmetrical four-phase AC-5 electrode discharge system which is a modified example of the third embodiment according to the present invention.

[Explanation of symbols]

T _{1 to} T ₁₂ discharge electrode T ₀ ground electrode E _{1 to} E ₁₂ applied discharge voltage S ₀ three-phase transformer S _{1 to} S ₁₂ single-phase transformer

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Office reference number FI technical display location H05B 7/144 Z

Claims (7)

[Claims] 1. A discharge method for producing a planar or three-dimensional discharge by sequentially applying asymmetric polyphase alternating current to the discharge electrodes T _{1 to} Tn in the same order as the number of phases of the asymmetric polyphase alternating current. , A static vector representative of each single-phase alternating current when the discharge electrodes T _{1 to} Tn to which each single-phase alternating current of the asymmetric multi-phase alternating current is to be applied are expressed by using the static vector diagram The asymmetric multi-phase AC discharge method is characterized in that they are arranged at the positions corresponding to the end points of the vector. 2. A discharge electrode T to which an asymmetric polyphase alternating current is applied.
_2. The asymmetric multi-phase AC discharge method according to claim 1, wherein _{1 to} Tn are arranged so that at least one discharge electrode is located on a straight line connecting other discharge electrodes on both sides of the discharge electrode. 3. A discharge electrode T to which an asymmetric polyphase alternating current is applied.
The ₁ to Tn, the discharge electrodes T ₁ to Tn is claim 1 or claim 2 asymmetric polyphase AC discharge type according to, characterized in that arranged as forming a concave angle shape. 4. A discharge electrode T to which an asymmetric polyphase alternating current is applied.
The ₁ to Tn, the discharge electrodes T ₁ to Tn is claim 1 or claim 2 asymmetric polyphase AC discharge type according to, characterized in that arranged as forming a regular polygon. 5. A discharge electrode such that a point corresponding to a vector starting point of a static vector representing the asymmetric polyphase alternating current exists on a side of a polygon formed by the discharge electrodes T _{1 to} Tn to which the asymmetric polyphase alternating current is applied. asymmetric polyphase AC discharge system according to any one of claims 1 to 4, characterized in that a T ₁ to Tn. 6. A discharge electrode T such that a point corresponding to a vector starting point of a static vector representing the asymmetric polyphase alternating current exists outside a polygon formed by the discharge electrodes T _{1 to} Tn to which the asymmetric polyphase alternating current is applied. The asymmetric multi-phase AC discharge method according to any one of claims 1 to 4, wherein _{1 to} Tn are arranged. 7. A discharge electrode T to which an asymmetric polyphase alternating current is applied.
7. The asymmetrical electrode according to any one of claims 1 to 6, characterized in that a ground electrode T ₀ is arranged at a position corresponding to a vector starting point of the static vector of the asymmetrical polyphase alternating current in addition to _{1 to} Tn. Multi-phase AC discharge method.