JPH08250026A - Light exposure device and light exposure method - Google Patents

Light exposure device and light exposure method

Info

Publication number
JPH08250026A
JPH08250026A JP5386895A JP5386895A JPH08250026A JP H08250026 A JPH08250026 A JP H08250026A JP 5386895 A JP5386895 A JP 5386895A JP 5386895 A JP5386895 A JP 5386895A JP H08250026 A JPH08250026 A JP H08250026A
Authority
JP
Japan
Prior art keywords
light source
panel
exposure
filter
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5386895A
Other languages
Japanese (ja)
Inventor
Yoshiharu Tajima
喜治 田島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Original Assignee
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Semiconductor Manufacturing Co Ltd, Kansai Nippon Electric Co Ltd filed Critical Renesas Semiconductor Manufacturing Co Ltd
Priority to JP5386895A priority Critical patent/JPH08250026A/en
Publication of JPH08250026A publication Critical patent/JPH08250026A/en
Pending legal-status Critical Current

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  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)

Abstract

PURPOSE: To obtain a light exposure device and a light exposure method, which makes light exposure intensity uniform over the whole area of a panel, and can make a black matrix film provided with an uniform opening section which is turned out to be areas for forming the respective colors of fluorescent substance dots only by adjusting the inclination of a filter in response to the amount of deviation of a light source out of the center of the panel. CONSTITUTION: The device is equipped with a light source 4, a support table which positions a panel mounted with a shadow mask, and rest it, and with a correction lens and a filter 7 located between the aforesaid light source and panel. In the aforesaid light exposure device, the device is also equipped with an inclination mechanisms 8a and 8b which inclines the aforesaid filter 7 by its specified quantity in response to the aforesaid light source 4 at the time of light exposure for forming fluorescent substances for the three colors of red, green and blue.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はカラー陰極線管の蛍光面
形成に用いる露光装置に関し、特にドット型カラー陰極
線管の3色蛍光体ドット形成領域となる均一な開口部を
有するブラックマトリクス膜の形成に好適する露光装置
および露光方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure apparatus used for forming a phosphor screen of a color cathode ray tube, and more particularly to forming a black matrix film having a uniform opening which becomes a three-color phosphor dot forming region of a dot type color cathode ray tube. The present invention relates to a suitable exposure apparatus and exposure method.

【0002】[0002]

【従来の技術】一般に、カラー陰極線管は、パネル内側
に装着されたシャドウマスクに対向して、パネル内面に
赤、緑、青の3色蛍光体ドットを規則正しく配列した蛍
光面が形成されている。そして、電子銃から放出される
3本の電子ビームを、外部に装着した偏向ヨークの形成
する磁界により水平方向および垂直方向に偏向して蛍光
面を走査することにより発光させカラー画像を表示して
いる。したがって、この蛍光面に色純度の良好なカラー
画像を表示するためには、それぞれの蛍光体ドットが画
面全域に亘り均一に規則正しく配列し、かつコントラス
トを向上させるため、それぞれの蛍光体ドットの形成領
域を規制し、蛍光体ドット間を非発光にする目的で、蛍
光体ドツト形成領域に開口部を有するブラックマトリク
ス膜が形成されている。
2. Description of the Related Art Generally, in a color cathode ray tube, a phosphor screen in which red, green, and blue phosphor dots are regularly arranged is formed on the inner surface of the panel so as to face a shadow mask mounted inside the panel. . Then, the three electron beams emitted from the electron gun are deflected in the horizontal and vertical directions by the magnetic field formed by the deflection yoke attached to the outside, and the phosphor screen is scanned to emit light to display a color image. There is. Therefore, in order to display a color image with good color purity on this phosphor screen, the respective phosphor dots are arranged uniformly and regularly over the entire screen, and in order to improve the contrast, formation of each phosphor dot is performed. A black matrix film having an opening is formed in the phosphor dot formation region for the purpose of controlling the region and not emitting light between the phosphor dots.

【0003】ところで、この開口部を有するブラックマ
トリクス膜の形成は、各色の蛍光体ドット形成領域毎に
同一露光装置を用いてシャドウマスクを介して、順次露
光焼き付けして形成されている。そこで、このブラック
マトリクス膜形成に用いられる露光装置としては、光源
から放射される光の軌道を電子ビームの軌道に近似させ
て各蛍光体ドット形成領域を露光形成するため、各蛍光
体ドット形成領域毎に光源の位置を変化させている。
By the way, the formation of the black matrix film having the openings is formed by sequentially exposing and printing through the shadow mask using the same exposure apparatus for each phosphor dot formation region of each color. Therefore, as an exposure device used for forming the black matrix film, since the orbit of the light emitted from the light source is approximated to the orbit of the electron beam to form each phosphor dot forming region by exposure, each phosphor dot forming region is formed. The position of the light source is changed every time.

【0004】この露光装置は、図4に示すように、シャ
ドウマスク2を装着してテーブル3に位置決め載置した
パネル1と光源4との間に、光源4から放射される光の
軌道を電子ビームの軌道に近似させる補正レンズ5を調
光フィルタ6とともに配置し、光源4は、センタードッ
トとなる緑色蛍光体ドット形成領域露光時は、パネル1
の中心線上の位置4Gに、サイドドットとなる赤、青蛍
光体ドット形成領域露光時は、パネル1の中心線上から
それぞれ蛍光体ドットの配列方向の左右に変位させた位
置4R,4Bに配置して露光が行なわれている。したが
って、この露光装置によれば、例えば青色蛍光体ドット
形成領域を露光する場合、図5に示すように、光源4の
位置がパネル1の中心より左に変位した位置4Bにある
ため、パネル1の左側部1Lと右側部1Rと光源4の距
離D1、D2はD1<D2の関係となり、パネル1の左
側部1Lと右側部1Rの露光強度L1、L2の関係はL
1>L2となり、ブラックマトリクス膜の開口部の面積
が不均一となるという問題があった。
In this exposure apparatus, as shown in FIG. 4, an orbit of light emitted from the light source 4 is emitted between a panel 1 and a light source 4 which are mounted on a table 3 with a shadow mask 2 mounted thereon. A correction lens 5 for approximating the trajectory of the beam is arranged together with the light control filter 6, and the light source 4 uses the panel 1 during the exposure of the green phosphor dot forming area to be the center dot.
At the position 4G on the center line of, the red and blue phosphor dot forming areas to be the side dots are arranged at positions 4R and 4B displaced from the center line of the panel 1 to the left and right in the arrangement direction of the phosphor dots, respectively. Is being exposed. Therefore, according to this exposure apparatus, when exposing, for example, a blue phosphor dot formation region, the position of the light source 4 is at the position 4B displaced leftward from the center of the panel 1 as shown in FIG. The distances D1 and D2 between the left side portion 1L and the right side portion 1R and the light source 4 are D1 <D2, and the relationship between the exposure intensities L1 and L2 of the left side portion 1L of the panel 1 and the right side portion 1R is L.
Since 1> L2, the area of the opening of the black matrix film becomes nonuniform.

【0005】そこで、特開昭64−38942号公報に
開示されているように、光の透過率分布が調光フィルタ
の中心に対して非対称な調光フィルタを使用し、サイド
ドットの青、赤色蛍光体ドット形成領域露光時は、光源
の変位に対して、該調光フィルタを180°対称に配置
し、センタードットの緑色蛍光体ドット露光時の光源が
中央に位置する時は、該調光フィルタを回転させて露光
する方法が提案されている。
Therefore, as disclosed in JP-A-64-38942, a dimming filter whose light transmittance distribution is asymmetric with respect to the center of the dimming filter is used, and blue and red of side dots are used. When the phosphor dot formation area is exposed, the dimming filter is arranged 180 ° symmetrically with respect to the displacement of the light source, and when the light source at the center dot green phosphor dot exposure is located at the center, the dimming control is performed. A method of exposing by rotating a filter has been proposed.

【0006】[0006]

【発明が解決しようとする課題】ところが、上述した露
光方法では、光源の変位量により、光の透過率分布が変
化するため、パネルのサイズや露光装置の特性により数
種類の透過率分布を有する調光フィルタを用意する必要
があり、調光フィルタの交換や調整に煩雑な作業を要す
るという問題があった。また、非対称な光の透過率分布
を有する調光フィルタを精度よく製造することも困難で
あり、光源位置が中央に位置する場合の調光フィルタの
回転機構等の複雑な機構を要するという問題もあった。
本発明の目的は、光源の中心からの変位量に対応して、
調光フィルタの傾斜量を調整するだけで、パネル面全域
に亘り露光強度を均一にして、各色蛍光体ドット形成領
域となる均一な開口部を有するブラックマトリクス膜を
形成することのできる、構成の簡易で作業性の良好な露
光装置および露光方法を提供することにある。
However, in the above-mentioned exposure method, since the light transmittance distribution changes depending on the displacement amount of the light source, there are several kinds of light transmittance distributions depending on the size of the panel and the characteristics of the exposure apparatus. There is a problem that it is necessary to prepare an optical filter, and a complicated work is required to replace or adjust the light control filter. Further, it is also difficult to manufacture a dimming filter having an asymmetric light transmittance distribution with high precision, and a complicated mechanism such as a rotating mechanism of the dimming filter when the light source position is located in the center is required. there were.
The object of the present invention corresponds to the displacement amount from the center of the light source,
By simply adjusting the amount of inclination of the light control filter, the exposure intensity can be made uniform over the entire panel surface, and a black matrix film having uniform openings to become phosphor dot forming regions of each color can be formed. An object is to provide an exposure apparatus and an exposure method that are simple and have good workability.

【0007】[0007]

【課題を解決するための手段】本発明は、光源と、その
上方に配設されシャドウマスクを装着したパネルを位置
決めして載置するテーブルと、前記光源と前記パネルと
の間に補正レンズ、調光フィルタを具備した露光装置に
おいて、赤、緑、青の3色蛍光体形成の露光時の前記光
源の位置に対応して、それぞれ前記調光フィルタを所定
量傾斜させて保持する可動手段を具備する露光装置を提
供する。また、前記可動手段が、調光フィルタのホルダ
と該ホルダの傾斜機構とからなるか、あるいは、前記可
動手段が、予め所定量傾斜させて3枚の調光フィルタを
配置した回転テーブルと、該回転テーブルを回転させて
所定位置に調光フィルタを位置決め保持する機構とから
なるのが望ましい。
According to the present invention, there is provided a light source, a table on which a panel having a shadow mask mounted thereon is positioned and mounted, a correction lens is provided between the light source and the panel, In an exposure device equipped with a light control filter, movable means for holding the light control filter by inclining a predetermined amount respectively corresponding to the position of the light source at the time of exposure for forming three color phosphors of red, green and blue. Provided is an exposure apparatus provided. Further, the movable means comprises a holder of the light control filter and a tilting mechanism of the holder, or the movable means has a rotary table in which three light control filters are arranged by pretilting a predetermined amount, and It is desirable that it comprises a mechanism for rotating the rotary table to position and hold the light control filter at a predetermined position.

【0008】また、本発明は、シャドウマスクを装着し
たパネルを位置決めしてテーブルに載置し、光源と前記
パネルとの間に補正レンズ、調光フィルタを介して、前
記光源の位置を変化させて、順次赤、緑、青の3色蛍光
体形成領域となる開口部を有するブラックマトリクス膜
を形成する露光方法において、赤、緑、青の3色蛍光体
形成の露光時の前記光源の位置に対応して、それぞれ前
記調光フィルタを所定量傾斜させて露光する露光方法を
提供する。
Further, according to the present invention, a panel having a shadow mask is positioned and placed on a table, and the position of the light source is changed between the light source and the panel via a correction lens and a dimming filter. In the exposure method for forming a black matrix film having openings for sequentially forming red, green, and blue three-color phosphors, the position of the light source at the time of exposure for forming red, green, and blue three-color phosphors Corresponding to the above, there is provided an exposure method of exposing each of the light control filters by inclining them by a predetermined amount.

【0009】[0009]

【作用】上記構成によれば、調光フィルタは光源に近付
けると光の透過率が増加し、遠ざけると低下する特性を
有しているため、光源の変位方向の側の調光フィルタが
光源から遠ざかるように、すなわち、光源が右側に変位
する赤色蛍光体ドット形成領域の露光時は左下がりに、
光源が左側に変位する青色蛍光体ドット形成領域の露光
時は右下がりにそれぞれ調光フィルタを傾斜させ、光源
が中央にある緑色蛍光体ドット形成領域の露光時には調
光フィルタを水平に保持すれば、パネル面全域に亘り均
一な各色蛍光体ドット形成領域の開口部を有するブラッ
クマトリクス膜を形成できる。したがって、パネルのサ
イズや露光装置の特性により数種類の透過率分布を有す
る調光フィルタを用意して、その調光フィルタの交換や
調整をする必要がなく、非対称な光の透過率分布を有す
る製造困難な調光フィルタを製造することも必要でな
く、光源位置が中央に位置する場合の調光フィルタの回
転機構等の複雑な機構の不要な簡易な構成の露光装置を
提供できる。
According to the above construction, the light control filter has a characteristic that the light transmittance increases when it is brought closer to the light source, and decreases when it is moved farther away. To move away, that is, when the red phosphor dot forming area where the light source is displaced to the right is exposed, it goes down to the left,
When exposing the blue phosphor dot forming area where the light source is displaced to the left side, tilt the dimming filter respectively to the lower right, and hold the dimming filter horizontally when exposing the green phosphor dot forming area in the center of the light source. It is possible to form the black matrix film having the openings of the phosphor dot forming regions of the respective colors that are uniform over the entire panel surface. Therefore, it is not necessary to prepare a dimming filter having several kinds of transmittance distributions depending on the size of the panel and the characteristics of the exposure apparatus, and it is not necessary to replace or adjust the dimming filter, and to manufacture asymmetrical light transmittance distributions. It is not necessary to manufacture a difficult light control filter, and it is possible to provide an exposure apparatus having a simple configuration that does not require a complicated mechanism such as a rotation mechanism of the light control filter when the light source position is located in the center.

【0010】[0010]

【実施例】以下、本発明の露光装置の実施例について、
図面を参照して説明する。従来例と同一部分には同一参
照符号を付し説明を省略する。本発明の一実施例の露光
装置は、調光フィルタ部以外は従来例と同様に構成され
ており、調光フィルタ7は、図1に示すように、光源4
の変位方向の両端部の位置を上下方向に昇降可能な傾斜
機構8a,8bを具備したホルダ9に取り付けられてい
る。この実施例の露光装置によるブラックマトリクス膜
の形成は下記のように実施される。すなわち、図2に示
すように、光源4がパネルの中心線上の4Gに位置する
緑色蛍光体ドット形成領域の露光時は、両端部の傾斜機
構8a,8bの位置を同一高さとしてホルダ9を水平に
保持して調光フィルタ7を水平に配置し(図2a)、光
源4が左に変位した4Bの位置にある青色蛍光体ドット
形成領域露光時は、左端部の傾斜機構8aを上昇し、右
端部の傾斜機構8bを下降させ、ホルダ9を右下がりに
傾斜させて保持して調光フィルタ7を所定量傾斜して配
置し(図2b)、光源4が右に変位した4Rの位置にあ
る赤色蛍光体ドット形成領域露光時は、左端部の傾斜機
構8aを下降し、右端部の傾斜機構8bを上昇させ、ホ
ルダ9を左下がりに傾斜させて保持して調光フィルタ7
を所定量傾斜して配置して(図2c)、それぞれ露光す
る。
EXAMPLES Examples of the exposure apparatus of the present invention will be described below.
This will be described with reference to the drawings. The same parts as those of the conventional example are designated by the same reference numerals and the description thereof will be omitted. The exposure apparatus of one embodiment of the present invention is configured in the same manner as the conventional example except for the light control filter section, and the light control filter 7 includes a light source 4 as shown in FIG.
Is attached to a holder 9 provided with tilting mechanisms 8a and 8b capable of vertically moving the positions of both ends in the displacement direction of. The black matrix film is formed by the exposure apparatus of this embodiment as follows. That is, as shown in FIG. 2, during exposure of the green phosphor dot forming region where the light source 4 is located at 4G on the center line of the panel, the holders 9 are set so that the positions of the tilting mechanisms 8a and 8b at both ends are at the same height. While holding it horizontally, the light control filter 7 is disposed horizontally (FIG. 2a), and when the blue phosphor dot forming area at the position 4B where the light source 4 is displaced to the left is exposed, the tilting mechanism 8a at the left end is raised. , The right end tilting mechanism 8b is lowered, the holder 9 is tilted downward to the right and held, the light control filter 7 is tilted by a predetermined amount (FIG. 2b), and the light source 4 is displaced to the right at the 4R position. At the time of exposure to the red phosphor dot forming area at, the tilting mechanism 8a at the left end portion is lowered, the tilting mechanism 8b at the right end portion is raised, and the holder 9 is held tilted downward to the left and held.
Are tilted by a predetermined amount (FIG. 2c) and exposed.

【0011】このように露光することにより、光源の変
位に伴い、光源とパネル内面との距離が変化して生じる
パネル内面での露光強度の強弱が、調光フィルタの光源
との距離による光透過率の増減で補正され、パネル内面
全域に亘り均一な露光強度でブラックマトリクス膜の開
口部が形成される。本発明の他の実施例の露光装置は、
図3に示すように、水平、右下がり傾斜、左下がり傾斜
に3枚の調光フィルタ7a,7b,7cがそれぞれ配置
された回転テーブル10を具備するもので、この実施例
によっても、各色蛍光体ドット形成領域の露光時に、回
転テーブル10を回転して、所定の調光フィルタを露光
位置に簡単に配置することができ、前述の実施例と同様
に、パネル内面全域に均一な開口部を有するブラックマ
トリクス膜が形成できる。
By performing the exposure as described above, the intensity of the exposure intensity on the inner surface of the panel caused by the change in the distance between the light source and the inner surface of the panel due to the displacement of the light source causes the light transmission depending on the distance from the light source of the light control filter. The opening of the black matrix film is formed with uniform exposure intensity over the entire inner surface of the panel, which is corrected by the increase or decrease of the rate. An exposure apparatus according to another embodiment of the present invention is
As shown in FIG. 3, a rotary table 10 in which three dimming filters 7a, 7b, 7c are respectively arranged horizontally, downwardly to the right, and downwardly to the left is provided. At the time of exposure of the body dot formation area, the rotary table 10 can be rotated to easily dispose a predetermined light control filter at the exposure position, and similar to the above-described embodiment, a uniform opening is formed on the entire inner surface of the panel. A black matrix film having the same can be formed.

【0012】以上、調光フィルタのホルダの両端部を昇
降させる傾斜機構や3枚の調光フィルタを傾斜配置した
回転テーブルを有する露光装置により、左右方向に3色
蛍光体ドット形成領域となる開口部を配列したブラック
マトリクス膜を形成する例について説明したが、本発明
は上記例に限定されず、例えば調光フィルタのホルダの
中心部に設けた回転軸を中心に回転して傾斜させる機構
を具備した露光装置や3色蛍光体ドットの配列が三角形
状に配列された蛍光体ドットの形成等光源の変位に伴う
光源とパネル間の距離が異なることにより生ずる露光強
度のばらつきを調光フィルタの傾斜により補正するもの
にも適用できる。
As described above, the opening which becomes the three-color phosphor dot forming region in the left-right direction is provided by the exposure device having the tilting mechanism for moving up and down both ends of the holder of the light control filter and the rotary table in which the three light control filters are disposed in the tilted manner. Although the example of forming the black matrix film in which the parts are arranged has been described, the present invention is not limited to the above example. For example, a mechanism for rotating and tilting a rotating shaft provided at the center of the holder of the light control filter as a center is provided. The variation of the exposure intensity caused by the difference in the distance between the light source and the panel due to the displacement of the light source, such as the formation of phosphor dots in which the arrangement of the three-color phosphor dots is arranged in a triangular shape with the exposure device provided, It can also be applied to those that are corrected by inclination.

【0013】[0013]

【発明の効果】本発明によれば、パネルのサイズや露光
装置の特性により数種類の透過率分布を有する調光フィ
ルタを用意して、その調光フィルタの交換や調整をする
必要がなく、非対称な光の透過率分布を有する製造の困
難な調光フィルタを製造する必要もなく、光源位置が中
央に位置する場合の調光フィルタの回転機構等の複雑な
機構の不要な簡易な構成の露光装置により、均一な各色
蛍光体ドット形成領域の開口部を有するブラックマトリ
クス膜を形成でき、画面全域に亘り正常な蛍光体ドット
の配列した蛍光面を有するカラー陰極線管を提供でき
る。
According to the present invention, it is not necessary to prepare a dimming filter having several kinds of transmittance distributions depending on the size of the panel and the characteristics of the exposure apparatus, and it is not necessary to replace or adjust the dimming filter. It is not necessary to manufacture a dimming filter that has a difficult light transmittance distribution that is difficult to manufacture, and exposure with a simple structure that does not require a complicated mechanism such as a rotating mechanism of the dimming filter when the light source position is located in the center The apparatus can form a black matrix film having a uniform opening of each color phosphor dot formation region, and can provide a color cathode ray tube having a phosphor screen in which normal phosphor dots are arranged over the entire screen.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の一実施例である露光装置の調光フィ
ルタ部の要部断面図
FIG. 1 is a cross-sectional view of a main part of a light control filter section of an exposure apparatus that is an embodiment of the present invention.

【図2】 a〜c本発明における調光フィルタと光源と
の位置関係を説明するための略示断面図
2A to 2C are schematic cross-sectional views for explaining the positional relationship between the light control filter and the light source in the present invention.

【図3】 本発明の他の実施例の露光装置の調光フィル
タ部の略示斜視図
FIG. 3 is a schematic perspective view of a light control filter section of an exposure apparatus according to another embodiment of the present invention.

【図4】 従来の一般的な露光装置の略示断面図FIG. 4 is a schematic sectional view of a conventional general exposure apparatus.

【図5】 光源の位置による露光強度の変化を説明する
ための略示断面図
FIG. 5 is a schematic sectional view for explaining a change in exposure intensity depending on the position of a light source.

【符号の説明】[Explanation of symbols]

4 光源 7,7a,7b,7c 調光フィルタ 8a,8b 傾斜機構 9 ホルダ 10 回転テーブル 4G 緑色蛍光体ドット露光時の光源の位置 4B 青色蛍光体ドット露光時の光源の位置 4R 赤色蛍光体ドット露光時の光源の位置 4 Light source 7, 7a, 7b, 7c Light control filter 8a, 8b Inclination mechanism 9 Holder 10 Rotating table 4G Position of light source when exposing green phosphor dot 4B Position of light source when exposing blue phosphor dot 4R Red phosphor dot exposure Position of the light source at time

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】光源と、その上方に配置されシャドウマス
クを装着したパネルを位置決めして載置するテーブル
と、前記光源と前記パネルとの間に補正レンズと調光フ
ィルタを具備した露光装置において、赤、緑、青の3色
蛍光体形成の露光時の前記光源の位置に対応して、それ
ぞれ前記調光フィルタを所定量傾斜させて保持する可動
手段を具備することを特徴とする露光装置。
1. An exposure apparatus comprising a light source, a table disposed above the light source and a panel on which a shadow mask is mounted and positioned and mounted, and a correction lens and a dimming filter between the light source and the panel. An exposure apparatus, which comprises movable means for holding the light control filters by inclining them by a predetermined amount in correspondence with the position of the light source at the time of exposure for forming three-color phosphors of red, green, and blue. .
【請求項2】前記可動手段が、調光フィルタのホルダと
該ホルダの傾斜機構とからなることを特徴とする請求項
1記載の露光装置。
2. The exposure apparatus according to claim 1, wherein the movable means comprises a holder for a light control filter and a tilting mechanism for the holder.
【請求項3】前記可動手段が、予め所定量傾斜させて3
枚の調光フィルタを配置した回転テーブルと、該回転テ
ーブルを回転させて所定位置に調光フィルタを位置決め
保持する機構とからなることを特徴とする請求項1記載
の露光装置。
3. The movable means is tilted in advance by a predetermined amount, and
2. The exposure apparatus according to claim 1, comprising a rotary table on which a plurality of light control filters are arranged, and a mechanism for rotating the rotary table to position and hold the light control filter at a predetermined position.
【請求項4】シャドウマスクを装着したパネルを位置決
めしてテーブルに載置し、光源と前記パネルとの間に補
正レンズと調光フィルタを介して前記光源の位置を変化
させ順次赤、緑、青の3色蛍光体形成領域となる開口部
を有するブラックマトリクス膜を形成する露光方法にお
いて、赤、緑、青の3色蛍光体形成の露光時の前記光源
の位置に対応してそれぞれ前記調光フィルタを所定量傾
斜させて露光することを特徴とする露光方法。
4. A panel equipped with a shadow mask is positioned and placed on a table, and the position of the light source is sequentially changed between a light source and the panel through a correction lens and a light control filter, and red, green, and In an exposure method for forming a black matrix film having an opening to be a blue three-color phosphor forming region, the adjustment is performed corresponding to the position of the light source at the time of exposure for forming the red, green and blue three-color phosphors. An exposure method, which comprises exposing the optical filter by inclining it by a predetermined amount.
JP5386895A 1995-03-14 1995-03-14 Light exposure device and light exposure method Pending JPH08250026A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5386895A JPH08250026A (en) 1995-03-14 1995-03-14 Light exposure device and light exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5386895A JPH08250026A (en) 1995-03-14 1995-03-14 Light exposure device and light exposure method

Publications (1)

Publication Number Publication Date
JPH08250026A true JPH08250026A (en) 1996-09-27

Family

ID=12954748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5386895A Pending JPH08250026A (en) 1995-03-14 1995-03-14 Light exposure device and light exposure method

Country Status (1)

Country Link
JP (1) JPH08250026A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107023757A (en) * 2015-09-11 2017-08-08 百奇股份有限公司 LED illumination module and the light fixture with LED illumination module

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107023757A (en) * 2015-09-11 2017-08-08 百奇股份有限公司 LED illumination module and the light fixture with LED illumination module
CN107023757B (en) * 2015-09-11 2020-10-16 百奇股份有限公司 LED lighting module and lighting assembly with LED lighting module

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