JPH0825207A - Wire reel whirl stop structure for wire saw - Google Patents

Abstract

PURPOSE:To provide a wire reel whirl stop structure for a wire saw capable of simply fitting a wire reel to a turntable. CONSTITUTION:Grooves 34, 34... started from a coupling projection 20A are radially formed at uniform angles on the upper face of the flange 20 of a turntable 10. Projections 36, 36... to be coupled with the grooves 34, 34... started froth a coupling recess 30A are radially formed at uniform angles on the lower face of the flange 30 of a wire reel 24 Even if the grooves 34, 34... and projections 36, 36... are not engaged with each other when the wire reel 24 is mounted on the turntable 10, the grooves 34, 34... and projections 36, 36... can be engaged with each other when the wire reel 24 is merely drifted slightly in the rotating direction. The wire reel 24 can be simply fitted to the turntable 10.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire reel detent structure for a wire saw, and in particular, a cylindrical semiconductor ingot, ceramic, glass, or other workpiece is cut into a large number of thin wafers by a traveling wire. The present invention relates to a wire reel rotation stop structure for a wire saw.

[0002]

2. Description of the Related Art A wire saw is one of the cutting devices for cutting a workpiece such as a semiconductor ingot, ceramic or glass into many thin plate-shaped wafers. In this wire saw, a wire is wound around a plurality of grooved rollers to form a wire row, and one end of the wire is wound around one wire reel and the other end is wound around the other wire reel. To be done. Then, when the wire reciprocates at a high speed between one wire reel and the other wire reel, while pressing the workpiece against the wire row, while supplying the working fluid containing abrasive grains to the wire row The lapping action of the abrasive grains cuts the workpiece into a large number of thin plate wafers.

This wire reel rotates by being connected to a turntable which is rotational power. And
To connect the wire reel to the turntable, place the wire reel on the turntable and screw the bolt into the center to connect. However, since the wire reel is not connected in the rotation direction only by bolting the central portion, there is a problem that the wire reel slides on the turntable during rotation. In order to prevent this, FIG.
A detent as shown in is provided.

As shown in FIG. 8, in this detent, a detent pin 3 is provided on the outer peripheral side of the mating surface of the turntable 1 with the wire reel 2, and the outer periphery of the mating surface of the wire reel 2 with the turntable 1 is provided. A pin hole 4 corresponding to the detent pin 3 is provided on the side. Then, when the wire reel 2 is placed on the turntable 1, the rotation stop pin 3 provided on the turntable 1 is inserted into the pin hole 4 formed on the wire reel 2 so that the wire reel 2 is turned on.
Prevents it from rolling over.

[0005]

However, in the conventional wire reel rotation stopping structure for the wire saw, while the positions of the fitting portion 5 of the turntable 1 and the fitting portion 6 of the wire reel 2 are aligned, Wire reel 2 so that rotation stop pin 3 and pin hole 4 are aligned.
Had to be placed on turntable 1. Therefore, the heavy wire reel 2 (usually 50 kgf ~
The position alignment of 100 kgf) is not easy, and there is a drawback that it is very troublesome.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a wire reel rotation stopping structure for a wire saw which can easily attach a wire reel to a turntable.

[0007]

In order to achieve the above-mentioned object, the present invention presses a work piece against a wire running between one wire reel and the other wire reel, and at the same time, abrasive grains are applied to the wire. A wire saw for supplying a working liquid containing the above to cut the workpiece into a large number of thin plate-shaped wafers, the wire saw rotating the wire reel by connecting the wire reel to a turntable on a rotary power side. In the above, a plurality of concave portions are formed on one side of the connecting portions of the turntable and the wire reel, and a plurality of convex portions are formed on the other side thereof at equal angles around the rotation axis, and the concave portions and the convex portions are formed. The parts are characterized by intermeshing with each other.

In order to achieve the above object, a work piece is pressed against a wire traveling between one wire reel and the other wire reel, and a working fluid containing abrasive grains is supplied to the wire. A wire saw for cutting the workpiece into a large number of thin plate-shaped wafers, wherein the wire reel is connected to a turntable on a rotation power side to rotate the wire reel, wherein the turntable and the wire A radial groove is formed on the wire reel side of the connecting portion of the reel, and a retractable pin urged in a protruding direction by an urging means is provided on the turntable side so that the groove and the pin are aligned with each other. When the pin is pushed, the pin is projected by the biasing means to engage with the groove.

[0009]

According to the first aspect of the invention, when the wire reel is placed on the turntable and connected, one of the concave portion and the convex portion engaging with each other is formed at the connecting portion at an equal angle with respect to the rotation axis. Therefore, the concave portion and the convex portion can be easily engaged with each other. That is, when the wire reel is placed on the turntable, even if the concave portion and the convex portion do not mesh with each other, the concave portion and the convex portion can easily mesh with each other by slightly shifting the wire reel in the rotational direction. This meshing prevents the wire reel from sliding and rotating on the turntable when the turntable is rotated.

According to the second aspect of the invention, since the turntable is provided with the pin which can be retracted and retracted by the biasing means, the pin and the groove can be easily engaged with each other. That is, even when the pin is not engaged with the groove when the wire reel is placed on the turntable, the pin and the groove can be easily engaged by slightly shifting the wire reel in the rotation direction on the turntable. it can. The engagement between the pin and the groove prevents the wire reel from slipping and rotating on the turntable when the turntable is rotated. Also, if the pin is engaged with the groove,
It can be judged by the movement of the rear end of the pin exposed from the turntable.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of a wire reel rotation stopping structure for a wire saw according to the present invention will be described in detail below with reference to the accompanying drawings. A first embodiment of a wire reel rotation stopping structure for a wire saw according to the present invention will be described. FIG. 1 is a cross-sectional view of a state in which the wire reels are connected on a turntable. Bolts 18, 18, ... Are fixed to the body frame wall of the wire saw (not shown), in which a casing 16 including a motor 12 for rotating the turntable 10 and a rotary power unit such as a rotary shaft 14 is incorporated. In addition, in the central portion of the upper surface of the flange 20 of the turntable 10, a cylindrical protrusion 20 is formed.
A is formed, and a screw hole 10B that is screwed into the screw portion 22A of the bolt 22 is formed. On the other hand, in the wire reel 24, a disk-shaped upper flange 28 and a disk-shaped lower flange 30 are fixed to both ends of a cylindrical body portion 26. A concave portion 30A that fits into the convex portion 20A provided on the flange 20 of the turntable 10 is formed at the center of the lower surface of the lower flange 30. In addition, a bolt hole 32 through which the bolt 22 penetrates is formed in the center of the wire reel 24.

Further, as shown in FIG. 2, gear-shaped protrusions 20B, 20B, ... Are formed on the protrusion 20A provided on the upper surface of the flange 20 of the turntable 10, and the wire reel 2
4 has a concave portion 30A formed on the lower surface of the lower flange 30, and the gear-shaped convex portions 20B, 20 formed on the convex portion 20A.
Recesses 30B, 30B, which fit into B, are formed. Then, when the wire reel 24 is mounted on the turntable 10 and coupled, the recess 30A formed on the lower surface of the lower flange 30 of the wire reel 24 is fitted into the projection 20A formed on the upper surface of the flange 20 of the turntable 10. The wire reel 24 is placed on the turntable 10 so as to fit together. Then, insert the bolt 22 into the bolt hole 34,
The screw portion 22A is screwed into the screw hole 10B of the turntable 10 to be connected.

Thus, according to the wire reel rotation stopping structure of the wire saw of the present invention, the fitting portion 30A,
20A has concave portions 30B, 30B ... and convex portions 20B,
Since 20B, ... Are formed, the fitting portion 30A,
20A also functions as a detent. Therefore, unlike the conventional wire reel rotation-stopping structure, it is not necessary to position the fitting pin while aligning the rotation-stopping pin. Further, the fitting portions 30A, 20A
The concave portions 30B, 30B ...
Since B, 20B, ... Are formed at an equal angle from the center, the positions where the wire reel 24 and the turntable 10 are fitted can be freely determined. As a result, workability of attaching the wire reel 24 to the turntable 10 can be improved.

Next, with reference to FIG. 3, a second embodiment of the wire reel rotation stopping structure of the wire saw of the present invention will be described. FIG. 3 is an explanatory diagram of a second embodiment of the wire reel detent structure. Since members other than the rotation stopping structure have the same configuration as in FIG. 1, only the rotation preventing structure will be described here, and the same members as those in FIG. 1 will be denoted by the same reference numerals.

In the first embodiment, the fitting portions 20A and 3A of the turntable 10 and the wire reel 24, respectively.
0A, gear-shaped protrusions 20B, 20B ...
The turntable 1 of the wire reel 24 is formed by forming recesses 30B, 30B ...
Slip in the direction of rotation on 0 was prevented. In the second embodiment, unevenness as shown in FIG. 3 is formed on the mating surfaces of the turntable 10 and the wire reel 24. That is, on the upper surface of the flange 20 of the turntable 10,
Equal-angled radial grooves 34, 34 starting from the convex portion 20A
Are formed, and on the lower surface of the flange 30 of the wire reel 24, convex portions 36, 36, ... Fitting into the grooves 34, 34 are radially formed at an equal angle from the concave portion 30A.

When connecting the wire reel 24 to the turntable 10, first, the turntable 10 is connected.
The wire reel 24 is placed on the surface of the flange 20, and the recess 30A formed on the lower surface of the lower flange 30 of the wire reel 24 is fitted into the recess 20A formed on the upper surface of the flange 20 of the turntable 10. Then, the wire reel 24 is rotated while the turntable 10 is fixed, and the convex portions 36, 36 of the wire reel 24 are rotated.
Are fitted into the grooves 34, 34 of the turntable 10. Then, insert the bolt 22 into the bolt hole 34,
The screw portion 22A is screwed into the screw hole 10B of the turntable 10 to be connected.

Therefore, according to the wire reel rotation stopping structure of the wire saw of the present invention, the wire reel 24
When the is mounted on the turntable 10, it is only necessary to align the fitting portion. Also, the wire reel 24
.. and the convex portions 36, 36 ... After the mounting on the turntable 10, the grooves 34, 34 ... And the convex portions 36, 36 are also formed radially at an equal angle. It is sufficient to move the wire reel 24 in the rotation direction at the intervals where the 34, 34 ... And the convex portions 36, 36. As a result, unlike the conventional wire reel rotation-stopping structure, it is not necessary to position the fitting portions while also positioning the rotation-stopping pins.
It is possible to improve the workability of the mounting work of the No. 4 on the turntable 10.

Next, with reference to FIGS. 4, 5, 6 and 7, a third embodiment of the wire reel rotation stopping structure of the wire saw of the present invention will be described. FIG. 4 is an explanatory view of a third embodiment of the wire reel rotation stopping structure of the wire saw of the present invention, and FIG. 5 is a sectional view taken along line AA of FIG. In addition, FIG.
And FIG. 7 is an enlarged view of a main part of the wire reel rotation stopping structure. Since members other than the detent structure have the same configuration as in FIG. 1, only the detent structure will be described here, and the same members as those in FIG.

As shown in FIG. 5, a cross-shaped groove 38 is formed in the lower surface of the lower flange 30 of the wire reel 24 with a width and a depth that allow engagement with a pin 40 described later.
On the other hand, on the outer peripheral side of the flange 20 of the turntable 10,
A pin 40 as shown in FIGS. 6 and 7 is installed.
This pin 40 is composed of two cylinders 40A, 40A having different shaft diameters.
The tip of the cylinder 40A having the larger shaft diameter, which is made of B, has a shape in which the tip of a cone is cut off. The spring 42 is attached to the cylinder 40B having the smaller shaft diameter of the pin 40.
And the flange 2 of the turntable 10 in this state.
It is inserted into the pin hole 44 provided on the outer peripheral side of 0. At this time, the lower end portion of the pin hole 44 has the same diameter as the column 40B of the pin 40 so that the lower end surface of the spring 42 is engaged.
Further, by providing a washer 46 below the column 40B of the pin 40, the pin 40 is prevented from coming off due to the reaction force of the spring 42, and the pin 40 is prevented from rising above a predetermined height.

In order to connect the wire reel 24 to the turntable 10, first, the recess 30A formed on the lower surface of the lower flange 30 of the wire reel 24 is formed on the upper surface of the flange 20 of the turntable 10. The wire reel 24 is placed on the turntable 10 so as to fit in the 20A. At this time, the pin 40 is pushed by the lower surface of the flange 30 of the wire reel 24, and the lower end portion of the pin 40 projects from the lower surface of the flange 20 of the turntable 10 (see FIG. 6). Then, the wire reel 24 is rotated while the turntable 10 is fixed, and the cross-shaped groove 38 formed on the lower surface of the lower flange 30 of the wire reel 24 is moved to the position where the pin 40 is provided. When the groove 38 reaches the position of the pin 40, the pin 40 projects by the force of the spring 42 and fits into the groove 38 (see FIG. 7). If the pin 40 fits in the groove 38, the wire reel 2
Since 4 is prevented from moving in the rotational direction, the bolt 22 is inserted into the bolt hole 34, and the screw portion 22A is screwed into the screw hole 10B of the turntable 10 to be connected. Further, the fact that the pin 40 is projected and fitted into the groove 38 can be confirmed by raising the washer 46.

Therefore, according to the wire reel wire retaining structure of the wire saw of the present invention, since the rotation preventing pin 40 is provided so as to be retractable by the biasing means, when the wire reel 24 is placed on the turntable 10, Only the position of the fitting portion needs to be adjusted. Further, even when the rotation preventing pin 40 is fitted into the groove 38, the wire reel 2
4 is placed on the turntable 10 and the pin 40 is in the groove 3
All you have to do is rotate it until it fits in 8. Also, pin 40
Whether or not is fitted in the groove 38 can be easily confirmed by checking the upper and lower ends of the lower end of the pin 40 protruding from the lower surface of the turntable 10. As a result, unlike the conventional wire reel detent structure, it is not necessary to position the detent pin while aligning the fitting portions, so the turntable 1 of the wire reel 24
It is possible to improve the workability of the work of attaching to 0.
Further, in the wire reel 24, the flanges 28 and 20 tend to warp when a wire (not shown) is wound, but the engagement portion of the pin 40 is formed into a cross-shaped groove 38,
Even if the wire reel 24 is slightly deformed, the pin 40 can be fitted.

[0022]

As described above, according to the wire reel rotation preventing structure of the wire saw of the first invention, when the wire reel is mounted on the turntable and connected, the concave portion and the convex portion that mesh with each other at the connecting portion. One of each
Since a large number are formed at equal angles with respect to the rotation axis, the concave portion and the convex portion can be easily meshed with each other. That is, when the wire reel is placed on the turntable, even if the concave portion and the convex portion do not mesh with each other, the concave portion and the convex portion can easily mesh with each other by slightly shifting the wire reel in the rotational direction. Therefore, unlike the conventional wire reel detent structure, it is not necessary to align the detent pins while aligning the fitting portions, and the wire reel can be easily attached to the turntable. You can

Further, according to the wire reel rotation stop structure of the wire saw of the second invention, when the wire reel is placed on the turntable and coupled, the rotation stop pin is provided so as to be retractable. Even when the rotation stopper pin is not engaged with the groove when the is mounted on the turntable, the pin and the groove can be easily engaged by slightly shifting the wire reel in the rotation direction. Therefore, unlike the conventional wire reel detent structure, it is not necessary to align the detent pins while aligning the fitting portions, and the wire reel can be easily attached to the turntable. You can

[Brief description of drawings]

FIG. 1 is an overall cross-sectional view of a wire reel rotation stopping structure for a wire saw according to the present invention.

FIG. 2 is an explanatory view explaining a first embodiment of a wire reel rotation stopping structure for a wire saw according to the present invention.

FIG. 3 is an explanatory view illustrating a second embodiment of the wire reel rotation stopping structure of the wire saw of the present invention.

FIG. 4 is an explanatory diagram for explaining a third embodiment of the wire reel rotation stopping structure for the wire saw of the present invention.

5 is a sectional view taken along line AA in FIG.

FIG. 6 is an enlarged view of an essential part of a third embodiment of the wire reel rotation stopping structure for a wire saw according to the present invention.

FIG. 7 is an enlarged view of an essential part of a wire reel rotation stopping mechanism of a wire saw according to a third embodiment of the present invention.

FIG. 8 is an explanatory diagram illustrating a wire reel rotation stopping structure of a conventional wire saw.

[Explanation of symbols]

 10 ... Turntable 20 ... Turntable flange 20A ... Fitting part (convex) 20B, 36 ... Detent for preventing rotation 22 ... Bolt 24 ... Wire reel 26 ... Wire reel body 28 ... Wire reel upper flange 30 ... Wire reel bottom Flange 30A ... Fitting portion (concave) 30B, 34 ... Rotation stop recess 38 ... Rotation stop cross-shaped groove 40 ... Rotation stop pin 42 ... Spring 46 ... Washer

Claims (3)

[Claims] 1. A plurality of thin plates are formed by pressing a work piece against a wire running between one wire reel and the other wire reel and supplying a working liquid containing abrasive grains to the wire. A wire saw for cutting the wafer into a wafer, the wire reel connecting the wire reel to a turntable on a rotation power side to rotate the wire reel, wherein one of the connecting portions of the turntable and the wire reel A concave portion is formed on one side and a plurality of convex portions are formed on the other side at equal angles around the rotation axis, and the concave portion and the convex portion mesh with each other. Construction. 2. A plurality of thin plates are formed by pressing a work piece against a wire running between one wire reel and the other wire reel and supplying a working liquid containing abrasive grains to the wire. A wire saw for cutting the wafer into a wafer, the wire reel rotating the wire reel by connecting the wire reel to a turntable on a rotary power side, wherein the wire reel is a connecting portion of the turntable and the wire reel. Side is provided with a radial groove, and a turntable side is provided with a retractable pin that is biased in a projecting direction by biasing means.When the groove and the pin are aligned, the pin is biased. A wire reel rotation stopping structure for a wire saw, characterized in that it is projected by means to be engaged with the groove. 3. The wire reel whirl-stop structure for a wire saw according to claim 2, wherein a rear end portion of the pin is exposed from the turntable.