JPH08336790A - Transport detection device and multi-chamber system to which the same is applied - Google Patents

Abstract

(57) [Summary] [Object] The present invention surely recognizes the existence of a transferred object on a hand when the transferred object is placed on a hand and transferred. A semiconductor wafer 2 is placed on a hand 1, and a carrier position sensor 5 detects a carrying position of the hand 1 during carrying, and a wafer sensor 6 detects a claw portion of the semiconductor wafer 2 in the hand 1. The sensor signals s1 and s2 of the hand position sensor 5 and the wafer sensor 6 are ANDed by the AND logic 7, and whether or not the semiconductor wafer 2 exists on the hand 1 is recognized from the recognition signal s3 as a result.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer detection device for detecting whether or not a semiconductor wafer is present on a hand when a semiconductor hand is transferred using a robot hand (hereinafter abbreviated as "hand"). .

[0002]

2. Description of the Related Art For example, in a semiconductor manufacturing process, there is a process in which a semiconductor wafer is transferred by leaf using a hand.
In such transportation of the semiconductor wafer, the semiconductor wafer is gripped by a hand, and therefore, contamination and scratches on the semiconductor wafer may pose a problem.

For this reason, semiconductor wafer transfer is
In many cases, a hand without a chuck is used and the friction between the hand and the semiconductor wafer is used to place and carry the semiconductor wafer on the hand.

FIG. 7 is a block diagram of an object type twin hand without such a chuck. This hand is arranged in, for example, a transfer chamber in a multi-chamber system, and its operation is a swiveling operation or a straight-moving operation as shown in FIG.

For example, when the transfer direction of the hand is aligned with the process chamber to which the semiconductor wafer is transferred in the transfer chamber, the hand swings as shown in FIG. When the wafer is taken in and out, it goes straight as shown in FIG.

When carrying by such a hand without a chuck, it is necessary to surely recognize in the carrying sequence that the semiconductor wafer is present on the hand. As a method of recognizing the presence of this semiconductor wafer, for example, a sensor for each semiconductor wafer is arranged at a handling point of the semiconductor wafer, and the presence or absence of the semiconductor wafer is confirmed by these sensors each time.

Further, the transmission type sensor is arranged at one place of the conveyance path by the hand, and during the conveyance by the hand, the temporary conveyance is stopped at the arrangement position of the transmission type sensor to recognize the presence of the semiconductor wafer.

However, in the method of arranging the sensors at the handling point, the number of sensors increases because a plurality of sensors are arranged. Further, when the transfer in the vacuum chamber is recognized from the outside, it is necessary to provide a plurality of detection windows in the vacuum chamber, which leads to an increase in cost and a decrease in reliability.

On the other hand, in the method of arranging the transmissive sensor,
Since the hand is formed in a Y shape, it is necessary to exclude the reaction of the sensor with respect to the hand, and further, the hand transport operation must be temporarily stopped above the sensor, which causes a decrease in throughput.

Although a method of collating the current position data of the robot in the controller with the sensor position during transportation by the hand can be considered, it is impossible to refer to the accurate current position data during the operation of the robot. However, even if it is possible, it imposes a heavy load on the controller, and it is difficult to surely recognize the semiconductor wafer.

[0011]

As described above, in the method of arranging the sensors at the handling points, the number of sensors is increased and the vacuum chamber must be provided with a plurality of detection windows, which increases cost and reliability. It leads to deterioration of sex.

Further, in the method of arranging the transmissive sensor, the carrying operation of the hand has to be temporarily stopped above the sensor, which causes a decrease in throughput, and further, the current position data and the sensor position are detected during the carrying of the hand. Even if the above is compared, it imposes a heavy load on the controller, and it is difficult to surely recognize the semiconductor wafer.

SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a conveyance detection device capable of surely recognizing the presence of a conveyed body on a hand when it is placed on a hand and conveyed.
It is another object of the present invention to provide a multi-chamber system that surely recognizes the presence of the transported object on the hand when it is placed on the hand and transports the transported object to perform various processes.

[0014]

According to a first aspect of the present invention, when a transferred object is placed on a hand and transferred, a transfer detecting device for detecting whether the transferred object is present on the hand is used. A hand position sensor that detects the transfer position, a transferred object sensor that detects the placement portion of the transferred object in the hand, and an object to be transferred based on the sensor signal of the transferred object sensor and the sensor signal of the hand position sensor And a recognition means for recognizing whether or not is present on the hand, and a conveyance detection device for achieving the above object.

According to the second aspect of the present invention, in the case where the object to be conveyed is conveyed by the turning operation of the hand, the conveyance detecting device for detecting whether the object to be conveyed is present on the hand, the conveying position of the hand by the turning operation of the hand. Of the hand position sensor that detects the movement of the hand, which is located at a position corresponding to the detection operation timing of the hand position sensor with respect to the hand. And a recognizing unit that ANDs the sensor signal of the transported object sensor and the sensor signal of the hand position sensor and recognizes whether the transported object is present on the hand from the result of the AND. A transport detection device that achieves the above object.

According to the third aspect, the hand is a transport detecting device formed in a Y shape or a plate shape. According to the fourth aspect, the hand position sensor is a conveyance detection device arranged near the center of the turning motion of the hand.

According to a fifth aspect of the present invention, in a multi-chamber system in which a plurality of process chambers are connected to a transfer chamber equipped with a transfer robot, the transfer chamber is arranged in the transfer chamber and the transfer position of the transfer robot hand is detected. A hand position sensor, a transferred object sensor that is disposed in the transfer chamber and detects a portion of the hand on which the transferred object is placed, and a transferred object based on the sensor signal of the transferred object sensor and the sensor signal of the hand position sensor A multi-chamber system that aims to achieve the above object by including a recognition unit that recognizes whether or not a body is present on a hand.

[0018]

According to the first aspect of the present invention, the carrying position of the hand is detected by the hand position sensor while the carrying object is being carried by carrying it on the hand, and the carrying part of the carrying object is carried by the hand. It is detected by the body sensor. Then, based on the sensor signals from the transported object sensor and the hand position sensor, the recognition means recognizes whether the transported object is present on the hand. Accordingly, it is possible to reliably recognize the presence of the transported object on the hand when it is placed on the hand and the transported object is transported.

According to the second aspect of the present invention, the carrying position of the hand is detected by the hand position sensor while the object to be carried is being carried by the turning operation of the hand, and the detection operation timing of the hand position sensor with respect to the hand is detected. The mounted portion of the transported object on the hand is detected by the transported object sensor. Then, the AND of the sensor signals of the transported object sensor and the hand position sensor is taken by the recognizing means, and whether the transported object is present on the hand or not is recognized from the result of the AND. Accordingly, it is possible to reliably recognize the presence of the transported object on the hand when it is placed on the hand and the transported object is transported.

According to the third aspect of the present invention, it is possible to recognize whether or not the object to be transported is placed on the hand while being transported by the Y-shaped or plate-shaped hand. According to the fourth aspect, the hand transport position is detected by the hand position sensor arranged near the center of the hand turning motion.

According to the fifth aspect of the present invention, for example, when the transfer robot provided in the transfer chamber moves the object to be transferred into and out of each process chamber, the transfer position of the transfer robot hand is detected by the hand position sensor, and the hand position sensor is used. The mounted portion of the transported body in is detected by the transported body sensor. Then, based on the sensor signals from the transported object sensor and the hand position sensor, the recognition means recognizes whether or not the transported object is present on the hand. With this, it is possible to surely recognize the existence of the transferred object on the hand when it is placed on the hand and transfers the transferred object, and thereafter, various processes can be performed in each process chamber.

[0022]

【Example】

(1) Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram of the conveyance detection device, and FIG.
Is a side view configuration diagram thereof. The hand 1 is one of the target dual hands shown in FIGS. 7 and 8.

The hand 1 has, for example, a semiconductor wafer 2 mounted on a Y-shaped portion. A sensor detection dog 3 is provided at the turning center 1 a of the hand 1. The sensor detection dog 3 is rotated in conjunction with the rotation operation of the hand 1, and a detection protrusion 4 is formed.

A hand position sensor 5 is arranged above the passing position of the protruding portion 4 of the sensor detecting dog 3. The hand position sensor 5 has a function of outputting a high-level sensor signal s1 when the protruding portion 4 enters the detection area due to the turning of the sensor detection dog 3.

A wafer sensor 6 is arranged so as to sandwich the hand 1 in the portion of the hand 1 where the Y-shaped portion on which the semiconductor wafer 2 is placed passes. The wafer sensor 6 is arranged on a line passing from the turning center 1a of the hand 1 through the hand position sensor 5 and at a position corresponding to a portion of the hand 1 on which the semiconductor wafer 2 is placed, that is, a claw portion of the hand. .

This wafer sensor 6 has a light emitter 6a and a light receiver 6b arranged opposite to each other. When light is shielded by the hand 1 or the hand 1 on which the semiconductor wafer 2 is placed between the light emitter 6a and the light receiver 6b. , And has a function of outputting a high level sensor signal s2.

An AND logic 7 as a recognition means is connected to each output terminal of the hand position sensor 5 and the wafer sensor 6. The AND logic 7 takes the AND of the sensor signal s1 of the hand position sensor 5 and the sensor signal s2 of the wafer sensor 6, and the high level recognition signal s3 when the semiconductor wafer 2 exists on the hand 1 from the result of this AND. , And has a function of outputting a low-level recognition signal s3 when the semiconductor wafer 2 does not exist.

The recognition signal s3 output from the AND logic 7 is sent to the controller of the hand 1. Next, the operation of the apparatus configured as described above will be described.

First, the case where the semiconductor wafer 2 does not exist on the hand 1 will be described with reference to the operation timing chart shown in FIG. The hand 1 revolves around the revolving center 1a in the arrow (a) direction, for example. In response to the turning of the hand 1, the sensor detection dog 3 also turns in the arrow (a) direction.

The hand position sensor 5 outputs a high-level sensor signal s1 when it detects the protrusion 4 of the sensor detection dog 3 by the turning of the sensor detection dog 3. on the other hand,
The wafer sensor 6 detects the claw of the hand 1 twice because the semiconductor wafer 2 does not exist in the hand 1.
Each claw of the hand 1 is detected, and the sensor signal s2 that becomes high level twice consecutively is output.

In this case, the high-level portions of the sensor signal s1 of the hand position sensor 5 and the sensor signal s2 of the wafer sensor 6 do not match due to the positional relationship between the hand position sensor 5 and the wafer sensor 6.

Therefore, the AND logic 7 outputs the low level recognition signal s3 when the semiconductor wafer 2 does not exist by ANDing the sensor signal s1 of the hand position sensor 5 and the sensor signal s2 of the wafer sensor 6. .

This recognition signal s3 is sent to the controller of the hand 1, and this controller recognizes that the semiconductor wafer 2 does not exist on the hand 1. next,
A case where the semiconductor wafer 2 is present on the hand 1 will be described with reference to the operation timing chart shown in FIG.

The hand 1 turns about the turning center 1a in the arrow (a) direction, for example, and the sensor detection dog 3 also turns in the arrow (a) direction in response to the turning of the hand 1.

The hand position sensor 5 outputs a high-level sensor signal s1 when it detects the protrusion 4 of the sensor detection dog 3 by the turning of the sensor detection dog 3. on the other hand,
The wafer sensor 6 detects the overlapped portions of the hand 1 and the semiconductor wafer 2 because the semiconductor wafer 2 is present in the hand 1, and detects the overlapped portions of the hand 1 and the semiconductor wafer 2 to determine the high level. And outputs the sensor signal s2.

At this time, the high-level period of the wafer sensor 6 is longer than the high-level period due to each claw of the hand 1 corresponding to the overlapping portion of the hand 1 and the semiconductor wafer 2. Accordingly, the sensor signal s1 of the hand position sensor 5
And a high level portion of the sensor signal s2 of the wafer sensor 6 coincide with each other.

Therefore, the AND logic 7 outputs the high level recognition signal s3 when the semiconductor wafer 2 exists by taking the AND of the sensor signal s1 of the hand position sensor 5 and the sensor signal s2 of the wafer sensor 6. .

The recognition signal s3 is sent to the controller of the hand 1 and the controller recognizes that the semiconductor wafer 2 is present on the hand 1. As described above, in the first embodiment described above, the hand 1 is moved by the hand position sensor 5 while the transferred object is placed on the hand 1 and is being transferred.
Of the claw of the semiconductor wafer 2 in the hand 1 is detected by the wafer sensor 6, and the sensor signals s1 of the hand position sensor 5 and the wafer sensor 6 are detected.
Since s2 is ANDed by the AND logic 7 and whether or not the semiconductor wafer 2 is present on the hand 1 is recognized by the recognition signal s3, the semiconductor wafer 2 is placed on the hand 1 and conveyed on the hand 1. The presence of the semiconductor wafer 2 can be surely recognized.

Thus, the presence or absence of the semiconductor wafer 2 can be reliably detected by the two sensors of the hand position sensor 5 and the wafer sensor 6 without imposing a load on the controller, and a low-cost controller can be used. For example, a vacuum chamber If it is applied to internal transportation, one sensor window formed in the vacuum chamber can be reduced, leading to cost reduction and improved reliability.

Further, for example, by electrically holding the recognition signal s3 output from the AND logic 7, the controller can confirm the presence or absence of the semiconductor wafer 2 after the hand 1 is stopped. In the robot transfer by the object type dual hand 1, since the 180-degree turning is always performed during one transfer, there is always a point where the hand 1 passes every transfer.

However, at this point, the wafer sensor 6
By arranging, it is not necessary to move the position of the wafer sensor 6 only for detecting the semiconductor wafer 2, and it is possible to easily recognize the presence or absence of the semiconductor wafer 2. (2) Next, a second embodiment of the present invention will be described. The same parts as those in FIG. 1 are designated by the same reference numerals, and detailed description thereof will be omitted.

FIG. 5 is a block diagram of the conveyance detecting device. The hand 10 is formed in a plate shape. The semiconductor wafer 2 is
It is mounted on the tip of the hand 10.

A wafer sensor 11 is arranged so as to sandwich the hand 1 at a portion of the hand 1 through which the semiconductor wafer 2 is placed. The wafer sensor 11 is arranged at a predetermined distance from the line passing through the hand position sensor 5 from the turning center 1a of the hand 1.

Similar to the wafer sensor 5, the wafer sensor 11 has a light emitter and a light receiver opposed to each other, and is shielded from light by the hand 10 or the hand 10 on which the semiconductor wafer 2 is placed between the light emitter and the light receiver. In this case, it has a function of outputting the high-level sensor signal s2.

Hand position sensor 5 and wafer sensor 11
Each output terminal of the AND logic 7 as a recognition means
Is connected. Next, the operation of the apparatus configured as described above will be described.

First, the case where the semiconductor wafer 2 is not present on the hand 10 will be described. The hand 10 turns about the turning center 1a, for example, in the arrow (a) direction, and in response to the turning of the hand 10, the sensor detection dog 3 also turns in the arrow (a) direction.

The hand position sensor 5 outputs a high-level sensor signal s1 when it detects the protrusion 4 of the sensor detection dog 3 by the turning of the sensor detection dog 3. on the other hand,
The wafer sensor 11 detects only the hand 10 because the semiconductor wafer 2 does not exist in the hand 10, and outputs the sensor signal s2 at a high level corresponding to the position of the hand 10.

In this case, the high-level portions of the sensor signal s1 of the hand position sensor 5 and the sensor signal s2 of the wafer sensor 6 do not match due to the arrangement positions of the hand position sensor 5 and the wafer sensor 6.

Therefore, the AND logic 7 AND's the sensor signal s1 of the hand position sensor 5 and the sensor signal s2 of the wafer sensor 11 to obtain the semiconductor wafer 2
If there is not, the low-level recognition signal s3 is output.

The recognition signal s3 is sent to the controller of the hand 10, and the controller of the hand 10 receives the recognition signal s3.
It is recognized that there is no semiconductor wafer 2 on top. Next, a case where the semiconductor wafer 2 is present on the hand 1 will be described.

The hand 10 revolves around the revolving center 1a in the direction of arrow (a), for example.
In response to the turning of 0, the sensor detection dog 3 also turns in the direction of arrow (a).

The hand position sensor 5 outputs a high-level sensor signal s1 when it detects the protrusion 4 of the sensor detection dog 3 by the turning of the sensor detection dog 3. on the other hand,
The wafer sensor 11 detects the overlapping portions of the hand 10 and the semiconductor wafer 2 because the semiconductor wafer 2 is present in the hand 10, and detects the overlapping portions of the hand 10 and the semiconductor wafer 2 and sets the high level. And outputs the sensor signal s2.

At this time, the high level period of the wafer sensor 6 is longer than the high level period of the hand 10 corresponding to the overlapping portion of the hand 10 and the semiconductor wafer 2.
Accordingly, there is a period in which the sensor signal s1 of the hand position sensor 5 and the sensor signal s2 of the wafer sensor 11 are in high-level portions.

Therefore, the AND logic 7 takes the AND of the sensor signal s1 of the hand position sensor 5 and the sensor signal s2 of the wafer sensor 11 to obtain the semiconductor wafer 2
Output a high-level recognition signal s3.

The recognition signal s3 is sent to the controller of the hand 10, and the controller of the hand 10 receives the recognition signal s3.
It is recognized that there is a semiconductor wafer 2 on it. As described above, according to the second embodiment, it is needless to say that the same effect as that of the first embodiment can be obtained. (3) Next, a third embodiment of the present invention will be described.

FIG. 6 is a block diagram of a multi-chamber system to which the transport detecting device of the first embodiment is applied. The transfer chamber 20 includes a plurality of process chambers 21.
24, a loading chamber 25, and an unloading chamber 26 are connected to each other, and these process chambers 2
1 to 24 are connected to the loading chamber 25 and the unloading chamber 26.

The plurality of process chambers 21 to 24 perform processing such as film formation of a metal film, tri-etching using a reactive gas, and resist stripping on the semiconductor wafer 2.

The loading chamber 25 and the unloading chamber 26 are for loading and unloading the semiconductor substrate with respect to the transfer chamber 20. A robot hand 1 is provided in the transfer chamber 20. The hand 1 has a function of transferring the semiconductor wafer 2 between the process chambers 21 to 24, the loading chamber 25, and the unloading chamber 26.

Inside the transfer chamber 20, only one hand or the object type dual hand 1 shown in FIG. 7 is provided. If this hand 1 turns, this hand 1
For example, three wafer sensors 6 are arranged on the line through which the claws pass.

A hand position sensor 5 is arranged on each line connecting the wafer sensor 6 and the turning center 1a of the hand 1. It should be noted that these hand position sensors 5 are not shown in FIG.

The output terminals of the hand position sensor 5 and the wafer sensor 6 are connected to each of the three AND logics 7. Next, the transfer operation in the multi-chamber system configured as described above will be described with reference to the transfer detection device shown in FIG. 1 and the operation timing charts shown in FIGS.

When the semiconductor wafer 2 is loaded in the loading chamber 25, the hand 1 moves straight as shown in FIG. 8 to hold the semiconductor wafer 2 in the loading chamber 25 and place it on each nail. .

Next, the hand 1 moves straight back to the original position shown in FIG. 7, and then turns as shown in FIG. 7 to process the semiconductor wafer 2 in each of the process chambers 21 to 24. Aim the process chamber 21 in a certain direction.

During the turning operation of the hand 1, the claw portion of the hand 1 passes above at least one wafer sensor 6 among the wafer sensors 6. However, hand 1
Turns around the turning center 1a, and the sensor detection dog 3 also turns in response to the turning of the hand 1.

The hand position sensor 5 outputs a high-level sensor signal s1 when it detects the protrusion 4 of the sensor detection dog 3 by the turning of the sensor detection dog 3. on the other hand,
If the semiconductor wafer 2 exists in the hand 1, the wafer sensor 6 will detect the overlapping portion of the hand 1 and the semiconductor wafer 2, and the hand 1 and the semiconductor wafer 2 will be detected.
The overlapping portion of is detected and the sensor signal s2 having a high level is output as shown in FIG.

As a result, there is a period in which the high-level portions of the sensor signal s1 of the hand position sensor 5 and the sensor signal s2 of the wafer sensor 6 coincide with each other. Therefore, the AND logic 7 outputs the high-level recognition signal s3 when the semiconductor wafer 2 exists by ANDing the sensor signal s1 of the hand position sensor 5 and the sensor signal s2 of the wafer sensor 6.

This recognition signal s3 is sent to the controller of the multi-chamber system, and this controller recognizes that the semiconductor wafer 2 is present on the hand 1.

If the semiconductor wafer 2 does not exist in the hand 1, each claw of the hand 1 will be detected, and each claw of the hand 1 will be detected, and as shown in FIG. It outputs the sensor signal s2 that becomes high level.

Therefore, the AND logic 7 outputs the low level recognition signal s3 when the semiconductor wafer 2 does not exist by ANDing the sensor signal s1 of the hand position sensor 5 and the sensor signal s2 of the wafer sensor 6. .

This recognition signal s3 is sent to the controller of the multi-chamber system, and this controller recognizes that the semiconductor wafer 2 does not exist on the hand 1.

As a result of this recognition, when it is recognized that the semiconductor wafer 2 exists on the hand 1, the hand 1 moves to the position shown in FIG.
As shown in FIG. 3, the semiconductor wafer 2 is moved straight into the process chamber 21, and the semiconductor wafer 2 is placed in the process chamber 21.

After this arrangement, the hand 1 moves straight and returns to the original position shown in FIG. After that, processing on the semiconductor wafer 2 in the process chamber 21, for example,
Metal film formation and tri-etching using reactive gas,
Processing such as resist stripping is performed.

As described above, according to the third embodiment, in the multi-chamber system, while the semiconductor wafer 2 is being transferred by the hand 1, the hand position sensor 5 detects the passage of the hand 1 and the wafer sensor 6 detects the hand 1. Of the claw of the semiconductor wafer 2 in the sensor position s1, s of the hand position sensor 5 and the wafer sensor 6 are detected.
Based on 2, the output of the AND logic 7 recognizes whether or not the semiconductor wafer 2 is present on the hand 1. Therefore, the process chambers 21 to 24 of the multi-chamber system are recognized.
By applying the semiconductor wafer 1 to the wafer, the number of sensor windows formed in these process chambers 21 to 24 can be reduced, leading to cost reduction and improved reliability.

Further, in carrying to each of the process chambers 21 to 24, the hand 1 always rotates at one time of carrying, so that the hand 1 must be at least one of the wafer sensors 6 at every carrying.
Since it passes over one wafer sensor 6, it is not necessary to move the position of the wafer sensor 6 only for detecting the semiconductor wafer 2, and the presence or absence of the semiconductor wafer 2 can be easily recognized.

The present invention is not limited to the above embodiments, but may be modified as follows. For example, the object to be transferred is not limited to the semiconductor wafer 1, and the shape of the hand 1 is not limited to the Y shape or the plate shape, and any other mechanism can be applied as long as it is mounted and transferred. it can.

[0076]

As described in detail above, the first to third aspects of the present invention are described.
According to the fourth aspect, it is possible to provide the transport detection device capable of reliably recognizing the presence of the transported object on the hand when it is placed on the hand and the transported object is transported.

Further, according to claim 5 of the present invention, the multi-chamber system for surely recognizing the existence of the transferred object on the hand when carrying the transferred object by placing it on the hand and performing various processes Can be provided.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a first embodiment of a conveyance detection device according to the present invention.

FIG. 2 is a configuration diagram of the same device seen from a side surface.

FIG. 3 is an operation timing chart of the same device when a semiconductor wafer does not exist.

FIG. 4 is an operation timing chart when the semiconductor wafer of the same apparatus exists.

FIG. 5 is a configuration diagram showing a second embodiment of the conveyance detection device according to the present invention.

FIG. 6 is a configuration diagram of a multi-chamber system to which the transport detection device according to the present invention is applied.

FIG. 7 is a diagram showing a turning operation of a hand.

FIG. 8 is a diagram showing a straight movement operation of a hand.

[Explanation of symbols]

1, 10 ... Hand, 2 ... Semiconductor wafer, 3 ... Sensor detection dog, 4 ... Projection portion, 5 ... Hand position sensor, 6, 1
1 ... Wafer sensor, 7 ... AND logic, 20 ... Transfer chamber, 21-24 ... Process chamber, 25
… Loading chamber, 26… Unloading chamber.

Claims (5)

[Claims] 1. A hand position sensor for detecting a carrying position of the hand in a carrying detection device for detecting whether the carried body is present on the hand when the carried body is placed on the hand and carried. A transported body sensor that detects a placement portion of the transported body in the hand, and the transported body on the hand based on a sensor signal of the transported body sensor and a sensor signal of the hand position sensor. And a recognition means for recognizing whether or not the transport detection apparatus exists. 2. A transport detection device for detecting whether or not the transport target is present on the hand when transporting the transport target by the swing motion of the hand, wherein a transport position of the hand by the swing motion of the hand is detected. The hand position sensor for detecting and the passing point of the hand that makes a turning motion are arranged at a position corresponding to the detection operation timing of the hand position sensor with respect to the hand, and detect the placement portion of the transferred object in the hand. The transfer target sensor, and the AND of the sensor signal of the transfer target sensor and the sensor signal of the hand position sensor are taken, and it is recognized from the result of this AND whether the transfer target is present on the hand. And a recognizing means for activating the transport detecting device. 3. The conveyance detection device according to claim 1, wherein the hand is formed in a Y shape or a plate shape. 4. The conveyance detection device according to claim 1, wherein the hand position sensor is arranged near a center of a turning motion of the hand. 5. A multi-chamber system in which a plurality of process chambers are connected to a transfer chamber provided with a transfer robot, and a hand position sensor arranged in the transfer chamber for detecting a transfer position of the transfer robot hand. Based on a sensor signal of the transferred object sensor and a sensor signal of the hand position sensor, which is disposed in the transfer chamber and detects a mounted portion of the transferred object in the hand. A multi-chamber system comprising: a recognition unit that recognizes whether or not the transported object is present on the hand.