JPH083402Y2 - Substrate loading and transporting device stop mechanism - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial field of application> The present invention is designed to mount a substrate and stop a transfer tool moving along a predetermined path at a movement limit position via a shock absorber. The present invention relates to a stop mechanism of a substrate mounting / transporting device configured.

<Prior Art> Conventionally, the stop mechanism of this type of substrate placement and transfer apparatus is provided with a shock absorber in the transfer tool, and when the transfer tool reaches a position near the movement limit position, first, the piston rod of the shock absorber moves to the apparatus fixing part. The transport tool decelerates while abutting on the tip of the stopper provided and the piston rod retracts into the main body during buffering, the piston rod retracts completely and the shock absorber body abuts on the stopper.
Finally, the carrier is designed to stop at a certain position.

<Problems to be Solved by the Invention> However, the conventional stop mechanism has the following problems.

That is, since the transfer tool can be decelerated and stopped by using the shock absorber as described above, even if the substrate is placed on the transfer tool without being chucked, the substrate can be accurately moved to some extent. Although it can be transferred to a fixed position, it is inevitable that a slight shock will occur when the piston rod of the shock absorber comes into contact with the stopper, and this shock causes the substrate to vibrate on the carrier. As a result, there is a problem in that a slight misalignment occurs, and the back surface of the substrate is rubbed against the carrier to generate particles.

As a means to avoid this, it may be possible to configure the entire stopper with an elastic body such as rubber, but according to this,
Although the collision vibration can be reduced, on the other hand, the entire stopper is deformed to lower the positioning accuracy, which is a practical problem.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a stop mechanism of a substrate placing and conveying apparatus capable of stopping with high positioning accuracy while suppressing collision vibration. .

<Means for Solving the Problem> In order to achieve such an object, the present invention has the following configuration.

That is, the present invention provides a stop mechanism of a substrate-loading / transporting device configured to mount a substrate and buffer-stop a transport tool moving along a predetermined path via a shock absorber at a movement limit position. Either the tip surface of the piston rod of the absorber or the tip surface of the stopper that comes into contact with the piston rod is provided with a concave portion, and the elastic body is partially inserted into the concave portion to partially remove the elastic body. Protruding from the recess,
By configuring the outer edge of the other tip surface to have a shape protruding from the elastic body at the time of contact with the elastic body, the tip end surface of the elastic body out of the two tip surfaces contacts the other tip surface. After being deformed by compression and the elastic body retreats into the recess, both the end surfaces are brought into contact with each other.

<Operation> The operation of the present invention is as follows.

Before the tip end surface of the piston rod of the shock absorber and the tip end surface of the stopper come into contact with each other, the elastic body attached to the tip end of the piston rod or the tip end of the stopper is compressed and deformed to absorb the impact force. The vibration of the upper substrate is suppressed. By the elastic deformation of the elastic body, the elastic body retreats into the recessed portion provided in the piston rod or the stopper, and thereafter, while the tip end surface of the piston rod and the tip end surface of the stopper contact each other, the piston rod As the carriage retracts into the main body, the transport tool slows down, and finally the shock absorber body and the rigid members of the stopper come into contact with each other, so that the transport tool stops at a predetermined position.

<Embodiment> An embodiment of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a plan view of the substrate placing and carrying device, and FIG. 2 is a front view thereof.

As shown by a chain line in FIG. 2, the substrate mounting / transporting device is provided with a transport tool 1 for transferring the substrate W between processing devices (not shown) disposed on the left and right sides of the device.

The transfer tool 1 is connected to and supported by a guide rail 2 and a movable block 4 which is horizontally reciprocally driven by a rodless cylinder 3 via a support arm 5, and the substrate mounting portion has a first support. As shown in FIG. 1, an upwardly expanding taper guide 6 for positioning and guiding the placed substrate W and three small protrusions 7 for supporting the substrate W in a point contact state are provided.

Further, shock absorbers 8 are attached to the movable block 4, and piston rods 8a that project from the shock absorbers 8 are provided at the left and right ends of the movable block 4 so as to buffer out. Then, the base plate 9 supporting the guide rail 2 and the rodless cylinder 3
Frames 10 are provided on the left and right sides of the frame 10, and stoppers 11 are attached to the frame 10 so as to face the piston rods 8a of the shock absorbers 8.

As shown in FIG. 3 (a), the stopper 11 is screwed on the frame 10 and fixed by the lock nut 12, and the central hole 11 is formed so as to penetrate the center thereof.
A cylindrical elastic body 13 made of rubber or the like is formed in the center hole 11a, and the amount of protrusion to the front can be adjusted by the adjusting screw 14.

The center hole 11a whose one end is closed by the adjusting screw 14 corresponds to the "recess" referred to in the configuration of the present invention.

Further, the elastic body 13 is set to have a smaller diameter than the tip surface 8b of the piston rod 8a, and when the tip surface 8b of the piston rod and the elastic body 13 contact each other, the tip surface of the piston rod 8a
8b protrudes from the elastic body 13. With this, as will be described later, when the elastic body 13 is compressed and deformed and retracts into the center hole 11a, the tip surface 8b of the piston rod comes into contact with the tip surface 11b of the stopper 11.

The stop mechanism of this embodiment is configured as described above, and the stop operation will be described next.

When the movable block 4 moves to the left from the state of FIG. 3 (a), first, the tip surface 8b of the piston rod 8a contacts the elastic body 13.

By this abutment, as shown in FIG. 3 (b), the elastic body 13 receives the compressive force and retracts into the stopper 11, and the piston rod 8a is bufferedly received by the tip of the stopper 11.

Further, the movable block 4 operates to move the piston rod.
8a retreats into the shock absorber body, and finally, as shown in FIG. 3 (c), the tip surface 8b of the shock absorber 8 contacts the tip surface 11b of the stopper 11, and the movable block 4 is fixed. At the position, the rigid members stop in a state where they face-to-face contact with each other.

In the embodiment, the case where the elastic body 13 is incorporated in the stopper 11 side is illustrated, but the tip surface 8b of the piston rod 8a is illustrated.
It is also possible to embed the elastic body 13 in such a manner that it can be compressed and retracted.

Further, in the embodiment, the rubber member is used as the elastic body, but a compression coil spring or the like may be used.

<Effects of the Invention> As described above, according to the present invention, the impact when the piston rod of the shock absorber abuts on the stopper can be alleviated and reduced by the elastic body, thereby suppressing the vibration of the substrate and reducing the vibration of the substrate. It is possible to avoid the positional deviation of and the generation of particles.

Moreover, since the rigid members of the piston rod and the stopper directly contact each other after this buffering operation, the final stop position accuracy can be made high even if a flexible elastic body is used.

[Brief description of drawings]

FIG. 1 shows an embodiment of a stopping mechanism of a substrate placing and transferring apparatus according to the present invention, FIG. 1 is a plan view of the substrate placing and carrying apparatus, and FIG.
Figure is the front view, Figure 3 shows the stop mechanism and its operation,
FIG. 3 (a) shows a state before contact, FIG. 3 (b) shows an intermediate state, and FIG. 3 (c) shows a stopped state. 1 ... Transport tool, 4 ... Movable block 7 ... Small projection, 8 ... Shock absorber 8a ... Piston rod 11 ... Stopper, 13 ... Elastic body

Claims (1)

[Scope of utility model registration request] 1. A stop mechanism for a substrate-loading and transporting device configured to buffer-stop a transporting tool that mounts a substrate and moves along a predetermined path via a shock absorber at a movement limit position. Tip surface of the piston rod of
Of the tip surface of the stopper that contacts the piston rod,
Providing a recess on one of the tip surfaces, partially inserting the elastic body into the recess to project a part of the elastic body from the recess, and contacting the outer edge of the other tip surface with the elastic body Since the tip end surface of the elastic body out of the tip ends of the elastic body comes into contact with the other tip end surface and is compressed and deformed, the elastic body is retracted into the recess. A stop mechanism for the substrate placing and conveying apparatus, wherein the front end surfaces are in contact with each other.