JPH083496B2 - Prober - Google Patents
ProberInfo
- Publication number
- JPH083496B2 JPH083496B2 JP63185941A JP18594188A JPH083496B2 JP H083496 B2 JPH083496 B2 JP H083496B2 JP 63185941 A JP63185941 A JP 63185941A JP 18594188 A JP18594188 A JP 18594188A JP H083496 B2 JPH083496 B2 JP H083496B2
- Authority
- JP
- Japan
- Prior art keywords
- prober
- needle
- wafer
- polyhedron
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明はポジショナー取付台を多層構造し、ウェハー
内の任意の時点をウェハーの広い領域にわたってプロー
ビングすること、又、針を多面体面上に設置し、多面体
周辺から面に向うウェハーを移動させ、立体的にプロー
ビングし、ウェハー処理枚数を向上させることに関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention has a multilayer structure of a positioner mount, probing an arbitrary time point in a wafer over a large area of the wafer, and placing a needle on a polyhedral surface. The present invention relates to moving a wafer from the periphery of a polyhedron toward a surface and probing it three-dimensionally to improve the number of wafers to be processed.
従来の技術 従来、ポジショナー取付台は１枚であり、マニュアル
プローバーの場合は通常マニピュレータが４〜５ケ且
つ、針の移動範囲も10平方ミリメートル程度のものがあ
る。2. Description of the Related Art Conventionally, there is one positioner mount, and in the case of a manual prober, there are usually 4 to 5 manipulators and a needle moving range of about 10 mm 2.
オートプローバーの場合は、１枚のプローブカードを
使用し、１チップごとにプロービングするものがある。In the case of an auto prober, there is one that uses one probe card and performs probing for each chip.
発明が解決しようとする課題 １層のポジショナー取付台から成るプローバーでは、
装着できるポジショナー，マニピュレータに制限があり
且つ、針の移動範囲にも制限があるため、プロービング
できるパターン数が限られる。更に、プローバーガード
を用いるとリーク，ノイズの問題が生じる。Problems to be Solved by the Invention In a prober including a single-layer positioner mount,
Since the number of positioners and manipulators that can be mounted is limited and the range of movement of the needle is also limited, the number of patterns that can be probed is limited. Furthermore, if a prober guard is used, problems of leak and noise occur.
又、ウェハーに対し針を近づける形式では、ウェハー
処理枚数に制限があり（通常１枚）大量処理に不向きで
ある。Further, in the type in which the needle is brought closer to the wafer, the number of wafers to be processed is limited (usually one wafer), which is not suitable for large-scale processing.
本発明は以上のような従来のプローバーの諸欠点に鑑
みてなされたもので、より精度良く大量にウェハーを処
理するプローバーを提供することを目的としている。The present invention has been made in view of the above drawbacks of the conventional prober, and an object thereof is to provide a prober that processes a large number of wafers with high accuracy.
課題を解決するための手段 本発明は、多面体の面上に針を設けウェハーを針に向
けて移動することを特徴とする積層型プローバー及び立
体型プローバーである。Means for Solving the Problems The present invention is a stacked prober and a three-dimensional prober, characterized in that a needle is provided on the surface of a polyhedron and a wafer is moved toward the needle.
作用 多面体の面上に針を設け、ウェハーを針に向けて移動
させ針と接触させることにより一度に多数枚のウェハー
をプロービングすることができる。Action By providing a needle on the surface of the polyhedron and moving the wafer toward the needle to bring it into contact with the needle, it is possible to probe a large number of wafers at once.
実施例 以下に本発明の一実施例について図面とともに説明す
る。Embodiment An embodiment of the present invention will be described below with reference to the drawings.
第１図は、積層型プローバーの全面から見た場合の断
面図であり、グローバルボード２−A,2−B,2−Ｃが固定
柱３に装着されていてる。各グローバルボード２−A,2
−B,2−Ｃは、固定柱３上のストッパー４間を上下移動
することにより、ウェハーステージ５上のウェハー６を
プロービングする。各グローバルボード２−A,2−B,2−
Ｃは、独立に移動できるため、必要なウェハー６上の地
点のみをプロービングすることができる。グローバルボ
ード２−A,2−B,2−Ｃには、ポジショナー７及びマニピ
ュレータ８が装着されており、１つのマニピュレータ８
の先にローカルボード９を装着することにより、固定さ
れたパターンのプロービングを容易にする。FIG. 1 is a cross-sectional view of the laminated prober as viewed from the entire surface, in which the global boards 2-A, 2-B, 2-C are mounted on the fixed column 3. Each global board 2-A, 2
-B and 2-C move up and down between the stoppers 4 on the fixed column 3 to probe the wafer 6 on the wafer stage 5. Each global board 2-A, 2-B, 2-
Since C can move independently, it is possible to probe only the point on the wafer 6 that is necessary. A positioner 7 and a manipulator 8 are mounted on the global boards 2-A, 2-B, 2-C, and one manipulator 8 is installed.
By mounting the local board 9 at the tip of the, the probing of the fixed pattern is facilitated.
第２図は、積層型プローバーを上面から見た図であり
上層のグローバルボード２−Ａの開口半径を小さくする
ことにより、マニピュレータどおしの接触を防ぐ構造と
なっている。FIG. 2 is a view of the laminated prober as seen from the top, and the structure is such that the contact between the manipulators is prevented by reducing the opening radius of the upper global board 2-A.
又、各層ごとに、ポジショナー７の位置をずらせるこ
とによりマニピュレータどおしの接触を防ぐことができ
る。Further, by shifting the position of the positioner 7 for each layer, it is possible to prevent contact between the manipulators.
第３図は、針11を立方体箱12に露出させ、外部からウ
ェハー13−Ａ〜13−Ｆを吸着装置14−Ａ〜14−Ｆで吸着
しながら針11の方向に移動させプロービングするもので
ある。このとき、立方体箱12の面は６面あるので一度に
６枚のウェハー13−Ａ〜13−Ｆのプロービングを行うこ
とができる。In FIG. 3, the needle 11 is exposed in the cubic box 12, and the wafers 13-A to 13-F are moved from the outside to the needle 11 while being adsorbed by the adsorption devices 14-A to 14-F and probing. is there. At this time, since the cube box 12 has six surfaces, six wafers 13-A to 13-F can be probed at one time.
発明の効果 本発明は、多面体表面に針を露出させ、ウェハーを針
の方向に移動させプロービングすることにより、多数枚
のウェハーのプロービング処理を可能にするものであ
る。EFFECTS OF THE INVENTION The present invention enables probing processing of a large number of wafers by exposing a needle on the surface of a polyhedron and moving the wafer in the direction of the needle for probing.
第１図は、本発明の一実施例における積層型プローバー
の断面図、第２図は同プローバーの上面図、第３図は本
発明の一実施例における立体型プローバーの外観図であ
る。 １……積層型プローバー、２……グローバルボード、３
……固定柱、４……ストッパー、５……ローカルボー
ド、６……ウェハー、７……ポジショナー、８……マニ
ピュレータ、９……小型プローブカード。FIG. 1 is a sectional view of a laminated prober in one embodiment of the present invention, FIG. 2 is a top view of the same prober, and FIG. 3 is an external view of a three-dimensional prober in one embodiment of the present invention. 1 ... Stacked prober, 2 ... Global board, 3
...... Fixed column, 4 ... Stopper, 5 ... Local board, 6 ... Wafer, 7 ... Positioner, 8 ... Manipulator, 9 ... Small probe card.
Claims (2)
方向に向いて形成された針と、ウエハーを前記多面体周
辺から前記針に対して垂直に移動させるとともに前記ウ
エハと前記針とを接触させる手段とを有するプローバ
ー。1. A needle formed on the surface of a polyhedron facing from the inside to the outside of the polyhedron, a wafer is moved vertically from the periphery of the polyhedron to the needle, and the wafer and the needle are brought into contact with each other. A prober having means.
数枚のウエハーをプロービングすることを特徴とする特
許請求の範囲第１項記載のプローバー。2. A prober according to claim 1, wherein needles are formed on a plurality of surfaces of the polyhedron and a plurality of wafers are simultaneously probed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63185941A JPH083496B2 (en) | 1988-07-26 | 1988-07-26 | Prober |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63185941A JPH083496B2 (en) | 1988-07-26 | 1988-07-26 | Prober |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0236368A JPH0236368A (en) | 1990-02-06 |
| JPH083496B2 true JPH083496B2 (en) | 1996-01-17 |
Family
ID=16179561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63185941A Expired - Fee Related JPH083496B2 (en) | 1988-07-26 | 1988-07-26 | Prober |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH083496B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04314347A (en) * | 1991-04-12 | 1992-11-05 | Nec Kyushu Ltd | Ic inspection device |
| WO2009099122A1 (en) * | 2008-02-05 | 2009-08-13 | Nec Corporation | Semiconductor inspecting device, and semiconductor inspecting method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6236139Y2 (en) * | 1986-08-06 | 1987-09-14 |
-
1988
- 1988-07-26 JP JP63185941A patent/JPH083496B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0236368A (en) | 1990-02-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |