JPH083746A - Metal film body manufacturing method and manufacturing apparatus - Google Patents

Abstract

PURPOSE:To prepare a metallic film body which is ameliorated in unsightly curl and has a good contact with a magnetic head by introducing a base deposited with a magnetic metal by evaporation into a curl removing device and applying liquid to the metallic film body, then heating and pressing the metallic film body. CONSTITUTION:The magnetic metallic material in a crucible is melted and evaporated by beam heating of an electron gun within a vacuum chamber of a prescribed vacuum degree and the magnetic metal is deposited by evaporation on the base (polyester, etc.), by which a raw sheet G of a magnetic recording medium of a metallic thin film type is produced. The raw sheet G is then guided into the vacuum chamber 16 of the prescribed vacuum degree of the curl removing device B and is affixed to a heating roll 11 in such a manner that the side of the magnetic metallic film positions on the outer side. Ethanol is applied on the magnetic metallic film by a coating applying head 13. The raw sheet G is made to travel in the state of bringing the sheet in pressurized contact with the heating roll 11 and is taken up successively on a take-up side roll 12. As a result, the unsightly curl of the raw sheet G is ameliorated and the contact with the magnetic head is improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for manufacturing a metal film body (for example, a metal thin film type magnetic recording medium).

[0002]

BACKGROUND OF THE INVENTION Magnetic recording media such as magnetic tapes are of a coating type in which a magnetic coating in which a magnetic powder or a binder is dispersed in a solvent is coated on a film which is a non-magnetic support.
There is a metal thin film type in which metal magnetic particles are deposited on a film without using a binder.

Among these, the metal thin film type magnetic recording medium is said to be suitable for high-density recording because the magnetic layer does not contain a binder and therefore has a high packing density of the magnetic material. By the way, these metal thin film magnetic recording media are usually curled in many cases. Further, curl makes contact with the magnetic head worse, and thus it is desired to remove the curl. For this reason, measures are taken to remove the curl. For example, it has been attempted to remove the curl by heating.

However, in this proposed heating means,
It was not possible to remove the curl in a short time, and therefore it was not suitable for practical use.

[0005]

DISCLOSURE OF THE INVENTION It is an object of the present invention to provide a technique for manufacturing a metal film body which can improve severe curl and is good in contact with a head. An object of the present invention is a method for producing a metal film body in which a metal film is provided on a support, which comprises a step of forming a metal film on the support and a step of applying a liquid to the surface after the film formation. And a step of heating and pressing the metal film body.

Further, there is provided an apparatus for manufacturing a metal film body, in which a metal film is provided on a support, comprising a film forming means for providing the metal film on the support in vacuum, a vacuum chamber, and a vacuum chamber. And a heating roll arranged on the heating roll, a traveling means for causing the metal film body to travel along the heating roll, and a means for applying a liquid to the metal film body. To be done.

In the above invention, it is preferable that the film forming and heating steps are performed in vacuum. Further, in the heating step, tension is applied to the surface of the heating roll to run, and it is preferable to apply the liquid at the position of the heating roll or at the front position.

It is preferable that the metal film and the heating roll be in contact with the heating roll so that the side of the metal film that is desired to be convex is on the outside. Examples of the liquid used include alcohols such as methanol and ethanol, organic liquids such as acetone, methyl ethyl ketone, toluene and cyclohexanone. Among them, a highly volatile liquid such as ethanol (having a low boiling point, for example, a boiling point of 100 ° C. or lower, preferably 80 ° C. or lower) is preferable.

The present invention can be applied to a metal thin film type magnetic recording medium. That is, it can be applied to a metal thin film type magnetic recording medium in which a metal magnetic film is provided on one surface of a support, or a metal thin film type magnetic recording medium in which a metal back coat film is provided on the other surface of a support. Examples of the support in such a metal thin film magnetic recording medium include polyester such as PET, polyamide, polyimide, polysulfone, polycarbonate, olefin resin such as polypropylene, cellulose resin, vinyl chloride resin, and the like. A polymer material or the like is used.

Examples of the material of the magnetic particles forming the metal magnetic film provided on one side of the support include Fe, Co,
Other than metals such as Ni, Co-Ni alloy, Co-Pt alloy, Co-Ni-Pt alloy, Fe-Co alloy, Fe-N
i alloy, Fe-Co-Ni alloy, Fe-Co-B alloy,
A Co-Ni-Fe-B alloy, a Co-Cr alloy, or those containing a metal such as Al is used.

The material of the metal particles forming the non-magnetic film (back coat film) provided on the other surface of the support is, for example, Cu-Al-X (where X is Mn, Fe, N).
One or more selected from the group of i) type alloys, Al-Si type alloys and the like are used. Also, Al, Z
Metals such as n, Sn, Ni and Ag are also used. Incidentally, C
A in u-Al-X (where X is one or more selected from the group of Mn, Fe, and Ni) -based alloys
The 1 content, the Al content is 5 to 30 at%, and the X content is preferably 5 at% or less. Particularly preferably, the Cu content is 70 to 90 at% and the Al content is 8 to
25 at%, Mn content is 0.5 to 4 at%, Fe content is 0.4 to 5 at%, and Ni content is 0.4 to 4 a.
t%, and the total content of Mn, Fe, and Ni is 1 to 6 at
% Is preferable. Further, the Al content in the Al-Si alloy is 15 to 70 at% and the Si content is 15 to 70 at%.
It is preferably 70 at%.

The metal magnetic film and the back coat film are formed by adopting dry plating means such as vapor deposition means. still,
Both the metal magnetic film and the back coat film may be made of a metal film, or one of them may be made of a metal film. When both are made of a metal film, either one may be formed first.

Curl usually occurs after these metal films are formed. Therefore, the technique of the present invention is applied. Then, the stress relaxation can be performed quickly and effectively, and the curl can be appropriately eliminated.
For example, the magnetic film side is convex and the curl rate is 5 to 15
It will be about%. It should be noted that when such a curl condition is obtained, the contact with the magnetic head is improved and the reproduction characteristics are good. Therefore, the heating temperature, the degree of tension (pressing degree), and the liquid may be appropriately selected so that the curl degree as described above is obtained.

Although an example of a magnetic recording medium has been described above, the present invention can also be applied to a metal thin film type ink ribbon and the like. Hereinafter, specific examples will be described.

[0015]

1 to 3 show an embodiment of an apparatus for producing a metal film body (an apparatus for producing a magnetic recording medium) according to the present invention. FIG. 1 is an overall block diagram and FIG. FIG. 3 is a schematic view of a vapor deposition apparatus for forming a film, and FIG. 3 is a schematic view of a curl removing apparatus for a metal film body. In each figure, A is a vapor deposition apparatus, 1 is a cooling can roll, 2 is a supply side roll of the support 3, 4 is a shielding plate, 5 is an oxygen gas supply nozzle, 6 is a crucible, and 7 is a crucible 6. A metal material (for example, a magnetic metal material), 8 is an electron gun, and 9 is a vacuum chamber.

B is a curl removing device, 11 is a heating roll,
12 is a roll on the winding side of the support 3 provided with a magnetic metal thin film, 13 is a coating head, 14 is a pump for supplying liquid (ethanol) to the coating head 13, 15 is a liquid (ethanol) tank, and 16 is a vacuum tank. Is. In the apparatus configured as described above, the inside of the vacuum chamber 9 is 10 ^-4 to 10 ^-6 To
After evacuation to a vacuum degree of about rr, the magnetic metal material in the crucible 6 is melted and evaporated by beam heating from the electron gun 8, and the support 3 is attached to the cooling can roll 1 and runs. A raw material G of a metal thin film type magnetic recording medium is manufactured by depositing a magnetic metal having a thickness of 0.04 to 1 μm. When forming the magnetic thin film, oxygen is supplied to the vapor deposition portion from the oxygen gas supply nozzle 5 to forcibly oxidize the surface portion of the magnetic thin film to form a protective layer of an oxide film.

Then, the original fabric G is guided to the vacuum chamber 16,
It is attached to the heating roll 11 so that the side of the metal magnetic film is on the outside. At this time, since the coating head 13 is in sliding contact with the metal magnetic film, ethanol is coated on the metal magnetic film. And a state in which tension is applied (heating roll 1
1 is pressed onto the roll 1) and is wound up by the winding side roll 12.

In this way, after being wound up, the degree of curl was low, and this had good contact with the magnetic head. In the above examples, the case where ethanol was used was described, but similar results were obtained even when a highly volatile organic solvent such as methanol or methyl ethyl ketone was used instead of ethanol.

In the above embodiment, the back coat film is not provided, but after the magnetic metal film and the non-magnetic metal film (back coat film) are provided, the curl removing device B is provided.
Similar results were obtained even when the curl degree was adjusted by. However, depending on the types of the magnetic metal film and the non-magnetic metal film, the side of the magnetic metal film may have a concave curl or a convex curl. Which side should be attached to the heating roll 11 depending on the state? Just decide.

FIG. 4 is a schematic diagram of a main part (a curl removing device for a metal film body) of a metal film body manufacturing device (magnetic recording medium manufacturing device) according to the present invention. In the present embodiment, in contrast to the embodiment using the coating head,
For example, only the point that an ultrasonic type spraying device 17 is used and the point that a supply-side roll 18 is provided (therefore, it is not necessary to be provided continuously with the vapor deposition device A and may be independent) are different, Since other basic technical ideas are the same, detailed description will be omitted. In addition, 19 is a PET film smoother having a thickness of 32 μm for making the sprayed ethanol uniform.

[0021]

According to the present invention, a metal film body having excellent head contact can be efficiently obtained.

[Brief description of drawings]

FIG. 1 is a block diagram of an entire apparatus for manufacturing a metal film body according to the present invention.

FIG. 2 is a schematic diagram of a vapor deposition device.

FIG. 3 is a schematic view of a curl removing device for a metal film body.

FIG. 4 is a schematic view of a curl removing device for a metal film body.

[Explanation of symbols]

 A vapor deposition device B curl removal device 11 heating roll 12 winding side roll 13 coating head 14 liquid (ethanol) supply pump 15 liquid (ethanol) tank 16 vacuum tank 17 spraying device

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Shigemi Wakabayashi 2606, Akabane, Kai-cho, Haga-gun, Tochigi Prefecture Kao Co., Ltd.Institute of Information Sciences (72) Inventor Akira Shiga, 2606 Akabane, Kaiga-cho, Haga-gun, Tochigi Kao-sha ceremony Company Information Science Laboratory

Claims (6)

[Claims] 1. A method for producing a metal film body, comprising a metal film provided on a support, comprising: a film forming step of providing the metal film on the support; And a step of pressing the metal film body. 2. The method for producing a metal film body according to claim 1, wherein the film forming and heating steps are performed in a vacuum. 3. The heating step is performed by tensioning the surface of the heating roll to run, and applying the liquid at the position of the heating roll or at the front position thereof. Method for manufacturing metal film body. 4. The production of a metal film body according to claim 1, wherein the metal film body is run while being attached to a heating roll so that the side to be made convex is the outside. Method. 5. The method for producing a metal film body according to claim 1, wherein the liquid has a high volatility. 6. A manufacturing apparatus for a metal film body, comprising a metal film provided on a support, comprising: a film forming means for providing the metal film on the support in a vacuum; a vacuum chamber; An apparatus for manufacturing a metal film body, comprising: a heating roll disposed on the metal film body; a traveling means for causing the metal film body to travel along the heating roll; and a means for applying a liquid to the metal film body.