JPH0841335A - Composition for active optical waveguide, production of active optical waveguide therefrom and active optical waveguide - Google Patents

Abstract

PURPOSE:To obtain a composition for an active optical waveguide being applicable in a wide frequency region and improved in heat resistance and electrooptical effect by mixing a fluoropolyamic acid with a specified alpha-aminoacrylic acid derivative. CONSTITUTION:This composition is obtained by mixing 100 pts.wt. fluoropolyamic acid which, when cyclized, can give a fluoropoly-imide having a refractive index of 1.4-1.9 (at 589nm), a dielectric constant of 2.6-3.5 (at 1MHz) and a glass transition temperature of 300 deg.C or above and has a rotation viscosity of 2000-8000 mPa.s as measured in N-methyl-2-pyrrolidone in a concentration of 15wt.% at 20 deg.C with 0.1-10 pts.wt. Q-aminoacrylic acid derivative represented by the formula [wherein R<1> is a monovalent (un)-substituted aromatic hydrocarbon, heterocyclic ring or unsaturated aliphatic hydrocarbon group; R<2> is a monovalent (un)substituted aromatic hydrocarbon, heterocyclic ring, aliphatic hydrocarbon, alicyclic hydrocarbon or specified (carbamoyl, carboxyl, its alkyl ester or the like) group or H; R<3> is a monovalent (un)substituted aromatic hydrocarbon, heterocyclic ring or the like group; and COR is an (un) substituted carbamoyl, carboxyl or the like.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a composition for active optical waveguide, a method for producing an active optical waveguide using the same, and an active optical waveguide.

[0002]

2. Description of the Related Art Optoelectronic ICs (OEI)
The optical waveguide in C) is conventionally made of LiNbO ₃ , L
Inorganic materials such as iTaO ₃ , PLZT, Sr ₂ Nb ₂ O ₇ are used. However, these materials have a problem that the response speed is slow due to deliquescent property, low threshold value for destruction, and high dielectric constant, which limits the applicable frequency band. On the other hand, organic polymer materials are generally superior to inorganic materials in that they have no deliquescent property and have a high threshold value for destruction, but such polymer materials generally have no orientation, and as-is It cannot be used as a material for optical switches and modulators that utilize the optical effect. In general, a polymer material having no orientation is applied with a DC electric field while being heated to orient, that is, a method of expressing an electro-optical effect by a poling treatment is used. As a result, the orientation is lost and the electro-optic effect is lost, which is a serious problem. Conventionally, polymethylmethacrylate (PMMA), etc., has been vigorously studied as a polymer-based optical waveguide material, but the glass transition temperature (Tg) is as low as about 150 ° C, and poling is performed at a temperature of 200 ° C or higher required during OEIC manufacturing. However, there is a problem that the orientation generated by the above is completely lost.

[0003]

SUMMARY OF THE INVENTION The present invention has been made in view of the problems of the prior art as described above, and is excellent in heat resistance and electro-optical effect and for an active optical waveguide applicable to a wide frequency band. The present invention provides a composition, a method for producing an active optical waveguide using the composition, and an active optical waveguide.

[0004]

The present invention is a composition for an active optical waveguide containing a fluorinated polyamic acid and an electro-optical material, wherein the electro-optical material has the general formula (I).

[Chemical 6] (In the formula, R ¹ represents a monovalent substituted or unsubstituted aromatic hydrocarbon group, heterocyclic group or unsaturated aliphatic hydrocarbon group,
R ² is a monovalent substituted or unsubstituted aromatic hydrocarbon group,
Heterocyclic group, aliphatic hydrocarbon group, alicyclic hydrocarbon group, characteristic group (carbamoyl group, carboxyl group and its alkyl ester, cyano group, hydroxy group, oxy group, halogen group, acylamino group) or hydrogen atom , R ¹ and R ²
And may form a hydrocarbon ring or a heterocycle, and R ¹
And R ² may each independently be at any position of cis or trans with respect to the NHR ³ group, and R ³ is a monovalent substituted or unsubstituted aromatic hydrocarbon group, heterocyclic group or aliphatic hydrocarbon group. , An alicyclic hydrocarbon group, a characteristic group (acyl group, benzoyl group, hydroxy group, sulfonyl group) or a hydrogen atom, and COR ⁴ represents a substituted or unsubstituted carbamoyl group, a carboxyl group or an alkyl ester thereof. The present invention relates to a composition for an active optical waveguide which is an α-aminoacrylic acid derivative represented.

Further, according to the present invention, the method for producing an active optical waveguide is characterized in that the fluorinated polyamic acid in the composition for active optical waveguide is imide ring-closed to give a fluorinated polyimide, and the electro-optical material is oriented. Regarding

The present invention also relates to an active optical waveguide manufactured by the method for manufacturing an active optical waveguide described above.

The present invention will be described in detail below. The fluorinated polyamic acid used in the present invention is a polyamic acid having a fluoro group, a fluoroalkyl group, etc., and can be produced under the same conditions as in the production of ordinary polyamic acid.
In a polar organic solvent such as -methyl-2-pyrrolidone, N, N-dimethylacetamide, N, N-dimethylformamide and the like, a diamine and tetracarboxylic acid or a derivative thereof, at least one of which is substituted with a fluoro group or a fluoroalkyl group Can be reacted to produce. Examples of the diamine substituted with a fluoro group, a fluoroalkyl group, and the like include, for example, 3-fluoro-1,2-phenylenediamine, 4-fluoro-1,2-phenylenediamine, 3,
4-difluoro-1,2-phenylenediamine, 3-fluoro-1,3-phenylenediamine, 4-fluoro-
1,3-phenylenediamine, 3,4-difluoro-
1,3-phenylenediamine, 3-fluoro-1,4-
Phenylenediamine, 4-fluoro-1,4-phenylenediamine, 3,4-difluoro-1,4-phenylenediamine, 3-trifluoromethyl-1,2-phenylenediamine, 4-trifluoromethyl-1,2- Phenylenediamine, 3-trifluoromethyl-1,3-phenylenediamine, 4-trifluoromethyl-1,3-phenylenediamine, 3-trifluoromethyl-1,4-
Phenylenediamine, 4-trifluoromethyl-1,4
-Phenylenediamine, 2,2 '-(bistrifluoromethyl) -4,4'-diaminobiphenyl, 2,2'-
Difluoro-4,4'-diaminobiphenyl and the like can be mentioned.

The tetracarboxylic acid substituted with a fluoro group, a fluoroalkyl group or the like, or an acid anhydride, an acid chloride or an ester compound as a derivative thereof is, for example, 1-
Fluoropyromellitic acid, 1,4-difluoropyromellitic acid, 1-trifluoromethylpyromellitic acid, 2,
2-bis (2,3-dicarboxyphenyl) -hexafluoropropane, 1,4-bis (3,4-dicarboxytrifluorophenoxy) tetrafluorobenzene,
2,2'-difluoro-3,3 ', 4,4'-biphenyltetracarboxylic acid, 2,2'-bis (trifluoromethyl) -3,3', 4,4'-biphenyltetracarboxylic acid and these Acid anhydrides, acid chlorides, ester compounds, and the like. It should be noted that diamines or tetracarboxylic acids and their derivatives which are not substituted with fluoro groups, fluoroalkyl groups and the like other than the above may be used within the range not impairing the object of the present invention.

The fluorinated polyamic acid in the present invention is
From the viewpoint of electro-optical effect, heat resistance, etc., when the imide ring-closes to give a fluorinated polyimide, the refractive index is 1.4 to 1.9.
(589 nm), a dielectric constant of 2.6 to 3.5 (1 MHz) and a glass transition temperature (Tg) of 300 ° C. or higher are preferable.

The fluorinated polyamic acid in the present invention is
From the viewpoint of electro-optic effect, heat resistance, etc., formula (II-1)

[Chemical 7] A repeating unit represented by the formula (II-2)

Embedded image Of at least one repeating unit represented by the formula (III-
1)

[Chemical 9] A repeating unit represented by the formula (III-2)

[Chemical 10] A fluorinated polyamic acid having at least one repeating unit represented by

The above formula (II-
To provide the repeating unit represented by 1) or the repeating unit represented by the formula (II-2), for example, 2,2 ′-(bistrifluoromethyl) -4,4 ′ as a diamine
-Diaminobiphenyl may be used, and pyromellitic acid anhydride may be used as the tetracarboxylic acid anhydride.

[0012] The above formula (III-
To provide the repeating unit represented by 1) or the repeating unit represented by the above formula (III-2), for example, 2,2 ′-(bistrifluoromethyl) -4, as a diamine,
4,2'-bis (trifluoromethyl)-as a tetracarboxylic acid anhydride using 4'-diaminobiphenyl
3,3 ', 4,4'-biphenyltetracarboxylic acid anhydride may be used.

The refractive index of the fluorinated polyimide obtained by subjecting the fluorinated polyamic acid in the present invention to imide ring closure can be easily adjusted by appropriately selecting the type and amount of the diamine or tetracarboxylic acid and its derivative to be used. can do. For example, when the content of the repeating unit represented by the formula (II-1) or the repeating unit represented by the formula (II-2) in the fluorinated polyamic acid is increased, the refractive index of the obtained fluorinated polyimide is increased. Can be increased. On the other hand, when the content of the repeating unit represented by the formula (III-1) or the repeating unit represented by the formula (III-2) in the fluorinated polyamic acid is increased, the refractive index of the obtained fluorinated polyimide is increased. Can be reduced.

In the present invention, the diamine, tetracarboxylic acid or its derivative is not only used alone but
A plurality of diamines, tetracarboxylic acids or their derivatives can be used in combination. In that case, it is preferable that the total number of moles of a plurality or single diamine and the total number of moles of a plurality or single tetracarboxylic acid or its derivative are equal or almost equal. In the solution of the fluorinated polyamic acid obtained by the reaction of the diamine and the tetracarboxylic acid or its derivative, the solid content concentration of the solution is preferably 5 to 40% by weight, particularly 10 to 25% by weight. Further, when the solid content concentration of the fluorinated polyamic acid is 15% by weight, the N-methyl-2-pyrrolidone solution has a rotational viscosity (20 ° C.) of 2000 to 8000.
It is preferably mPa · s, 4000 to 6000 mPa · s
Is more preferable.

The fluorinated polyimide of the present invention has the following formula (II) from the viewpoint of electro-optical effect, heat resistance and the like.

[Chemical 11] And a repeating unit represented by the following formula (III)

[Chemical 12] A fluorinated polyimide having a repeating unit represented by

The electro-optic material in the present invention has the general formula (I) in view of heat resistance and electro-optic effect.

[Chemical 13] (In the formula, R ¹ represents a monovalent substituted or unsubstituted aromatic hydrocarbon group, heterocyclic group or unsaturated aliphatic hydrocarbon group,
R ² is a monovalent substituted or unsubstituted aromatic hydrocarbon group,
Heterocyclic group, aliphatic hydrocarbon group, alicyclic hydrocarbon group, characteristic group (carbamoyl group, carboxyl group and its alkyl ester, cyano group, hydroxy group, oxy group, halogen group, acylamino group) or hydrogen atom , R ¹ and R ²
And may form a hydrocarbon ring or a heterocycle, and R ¹
And R ² may each independently be at any position of cis or trans with respect to the NHR ³ group, and R ³ is a monovalent substituted or unsubstituted aromatic hydrocarbon group, heterocyclic group or aliphatic hydrocarbon group. , An alicyclic hydrocarbon group, a characteristic group (acyl group, benzoyl group, hydroxy group, sulfonyl group) or a hydrogen atom, and COR ⁴ represents a substituted or unsubstituted carbamoyl group, a carboxyl group or an alkyl ester thereof. The α-aminoacrylic acid derivative is represented.

Examples of the α-aminoacrylic acid derivative represented by the general formula (I) include the following compounds.

[0018]

Embedded image

[0019]

[Chemical 15]

[0020]

Embedded image

The α-aminoacrylic acid derivative represented by the general formula (I) can be produced, for example, by the following synthetic method. (A) Ring-opening (hydrolysis, alcoholysis or aminolysis) of unsaturated azlactone obtained by condensation of a carbonyl compound and N-acylglycine or saturated azlactone. (B) Dehydration of a condensate of α-keto acid or its ester and phosphinimine. (C) Condensation of α-keto acid or its ester with amide or nitrile. (D) Dehydration of N-hydroxyl amino acid ester. The azlactone method (a) is highly versatile and is a general synthetic method from the viewpoint of easy availability of raw materials.

The composition for active optical waveguide of the present invention is
For example, it can be easily produced by adding an electro-optical material to a polar organic solvent solution of fluorinated polyamic acid and mixing them by stirring or the like. At this time, the amount of the electro-optical material used is preferably in the range of 0.1 to 10 parts by weight with respect to 100 parts by weight of the fluorinated polyamic acid, and is preferably 0.1.
The amount is more preferably 5 to 5 parts by weight, and particularly preferably 0.5 to 3 parts by weight. If the amount used is too small or too large, electro-optical properties, other optical properties, mechanical properties, stability, workability, etc. tend to be poor. The composition for active optical waveguide of the present invention includes a polymer other than fluorinated polyamic acid (for example, polyamic acid containing no fluorine atom, liquid crystalline polymer such as liquid crystal polyester), pinhole inhibitor, leveling agent, plasticizer. An additive such as an adhesion improver can be included.

An active optical waveguide using the active optical waveguide composition of the present invention will be described. The active optical waveguide of the present invention is used, for example, in optical matrix switches, modulators, optical polarizers, optical isolators, and the like. Figure 1 shows the basic form of optical matrix switches and modulators.
Shown in In forming the optical waveguide, a general film forming method,
For example, a spin coating method, a dipping method, a doctor blade method, a wire bar method, a roller method, a spray method or the like can be used. The core material and the clad material of the optical waveguide may be selected so that the difference between the wavelength of light and the refractive index suitable for the intended use.

In the active optical waveguide of the present invention, the composition for active optical waveguide is spin-coated on, for example, a silicon substrate and heat-treated under a nitrogen atmosphere to imidize the fluorinated polyamic acid in the composition for active optical waveguide. It can be formed by ring closure to give a fluorinated polyimide and orienting the electro-optic material. For example, manufacturing of a directional coupler type optical switch, which is one mode of the active optical waveguide, will be described with reference to FIG. 1 is a substrate, 2 is a lower electrode, 3 is a lower clad layer, 4 is a core layer, 5 is an aluminum layer, 6 is a resist layer, 7 is an upper clad layer, 8
Means the upper electrode. A lower electrode 2 of aluminum or the like is formed on a substrate of silicon or the like by a vapor deposition method, a sputtering method, or the like, and then has a smaller refractive index than the core layer 4 made of the active optical waveguide composition of the present invention. A lower clad layer 3 composed of fluorinated polyimide, which is one of the two essential components in the composition for active optical waveguide, is formed. A core layer 4 is obtained by applying the active optical waveguide composition of the present invention (containing an electro-optical material and a fluorinated polyamic acid as essential constituents) to a predetermined thickness and heating and curing the composition. Next, after applying the aluminum layer 5 by a vapor deposition method or the like, resist coating, pre-baking, exposure, development and after-baking are performed to obtain a patterned resist layer 6. After aluminum which is not protected by the resist layer 6 is removed by wet etching, the polyimide layer of the core layer 4 which is not protected by the aluminum layer 5 is removed by dry etching. The remaining aluminum layer 6 is removed by wet etching, and an upper clad layer 7 is formed thereon by using the polyimide used for forming the lower clad layer 3. Finally, an upper electrode 8 is formed on a predetermined core layer 4 through a mask pattern by a vapor deposition method, a sputtering method, or the like to obtain a directional coupler type optical switch.

To orient the electro-optical material contained in the core layer in the active optical waveguide, poling treatment or the like may be performed. For example, it is possible to orient the electro-optical material at the same time while heating while applying an electric field to perform imidization by imide ring closure. Examples of the method of applying the electric field include a method of providing an electrode and a method of charging the surface by corona discharge. The strength of the electric field is 10 ⁵ V / cm
And more preferably 10 ⁶ V / cm or more. It is also possible to orient the electro-optical material by applying an electric field to this and heating it to a temperature of Tg or higher after imidizing by imide ring closure to give a final structure of fluorinated polyimide. Waveguide is usually 10 μm
It is formed with a width of ˜15 μm and a height of 3 μm to 4 μm, and the pattern interval is about 2 μm to 3 μm.

In the present invention, the fluorinated polyimide having the highest heat resistance among plastics is used for either or both of the core layer and the clad layer of the optical waveguide.
In addition, the general formula (I), which is an electro-optical material having excellent heat resistance,
The α-aminoacryl derivative represented by is contained in the fluorinated polyimide.

[0027]

EXAMPLES The present invention will be described in more detail with reference to examples below, but the present invention is not limited to the following examples. In the following production examples, R ^{1 of} the α-aminoacryl derivative represented by the general formula (I),
Introducing R ² , R ³ and R ⁴ in the combinations shown in Tables 1 to 3,
(Compound 1) to (Compound 14) were synthesized. The synthetic method is
The azlactone method described in (a) above was used.

[0028]

[Table 1]

[0029]

[Table 2]

[0030]

[Table 3]

Production Example 1 Synthesis of azlactone compound (5-oxazolone compound) N-acylglycine 33 mmol, carbonyl compound 30 mm
10 ml (106 mmol) of acetic anhydride was added to 3.0 g (30.6 mmol) of potassium acetate and anhydrous potassium acetate, and the mixture was heated with stirring at 100 ° C. for 1 hour. After allowing to cool, the reaction product was poured into water, and the precipitated crystals were collected by filtration and washed with water. The crude crystals were recrystallized with a solvent such as acetic acid and toluene to obtain the desired azlactone compound. The reaction formula is shown below.

[Chemical 17]

Production Example 2 Synthesis of β-substituted-α- (N-acylamino) acrylic acid compound ((Compound 1), (Compound 5), (Compound 6), (Compound 7), (Compound 8), (Compound 9), (Compound 10), (Compound 11), (Compound 13) or (Compound 14)) 10 mmol of the azlactone compound synthesized in the above Production Example 1 was dissolved by heating in 300 ml of a 1% sodium hydroxide aqueous solution. After allowing to cool, the reaction solution was acidified with dilute hydrochloric acid, and the precipitated crude crystals were collected by filtration and washed with water. The crude crystals were recrystallized with a solvent such as ethanol or acetic acid to obtain the target compound. The reaction formula is shown below.

Embedded image

Production Example 3 Synthesis of β-Substituted-α- (N-acylamino) acrylic acid ester compound (Synthesis of (Compound 4) or (Compound 12)) 10 mmol of the azlactone compound synthesized in Production Example 1 was added to 1% water. It was dissolved by heating in 100 ml of sodium oxide alcohol solution. After cooling, water was added little by little, and the precipitated crude crystals were collected by filtration and washed with water. The crude crystals were recrystallized with a solvent such as ethanol or acetic acid to obtain the target compound. The reaction formula is shown below.

[Chemical 19]

Production Example 4 Synthesis of β-Substituted-α- (N-acylamino) acrylic acid amide compound (Synthesis of (Compound 2) or (Compound 3)) 10 mmol of the azlactone compound synthesized in Production Example 1 above, 30 ml of ethanol, 100 mmol of amine was added and the mixture was heated under reflux for 1 hour. After cooling, the precipitated crude crystals were collected by filtration and washed with water. The crude crystals are recrystallized with a solvent such as ethanol or acetic acid,
The target compound was obtained. The reaction formula is shown below.

Embedded image

Example 1 α as the electro-optical material produced in the above Production Example 2
1 part by weight of an aminoacrylic acid derivative (Compound 1) and 15 parts by weight of fluorinated polyamic acid OPI-1005 (trade name, manufactured by Hitachi Chemical Co., Ltd.) are N-methylpyrrolidone (NMP).
A solution of the active optical waveguide composition obtained by dissolving it in 200 parts by weight was spin-coated at a rotation speed of 2000 rpm on quartz glass having a 100 nm thick semi-transparent aluminum electrode, and 2
A μm film was formed. Under vacuum to remove NMP solvent 1
Soft bake at 20 ° C for 6 hours, followed by 1 on the above membrane.
A semitransparent aluminum electrode having a thickness of 00 nm was formed to prepare a sandwich type sample. The sample was heated to 250 ° C. (poling temperature) at a temperature rising rate of 2 ° C./min while applying a voltage of 400 V between the electrodes, and was further held at the same temperature for 1 hour while applying a voltage of 400 V. While applying a voltage of 400 V, the sample was cooled to room temperature to prepare an active optical waveguide test sample (here, only the core part corresponding to the part of the core layer 4 in FIG. 2 was included, and no clad part was included).

The thermal stability of the active optical waveguide test sample was examined by using the measuring apparatus shown in FIG.
This device is an electro-optical constant measuring device, and the measuring method is CCTe.
ng and HTMan, Appl. Phys. Lett. 56 (18) 1734 (1990). The measuring device shown in FIG. 3 is configured as follows. The light from the He-Ne laser 9 is passed through the polarizer 10 to be linearly polarized light, and then the sample 11 tilted so that the angle formed by the normal axis of the sample 11 and the beam axis is θ is transmitted, and the Babinet is used. Detecting with a detector (photodiode) 14 through a Soleil compensator 12 and an analyzer 13. The detected light intensity is used as a voltage, and the DC voltmeter 16 and the lock-in amplifier 15 are used.
Is measured at. The angle of the transmission axis of the analyzer when measuring is
The analyzer is set to rotate so that the difference between the maximum value and the minimum value of the DC voltage measured by the DC voltmeter 16 is 1/2. When an oscillator 17 applies a frequency of 1 kHz and an AC voltage of 10 V to the sample 11, the output signal is also modulated at 1 kHz by the electro-optic effect. At this time, the AC component is measured by the lock-in amplifier 15 and the DC component is measured by the DC voltmeter 16. When the measured voltages at the lock-in amplifier 15 and the DC voltmeter 16 are defined as V _m and V, respectively, the electro-optical constant r
₃₃ is calculated from the following formula (1).

[Equation 1] The refractive index n was measured with an Abbe refractometer. Thermal stability is determined by electro-optic constant r ₃₃ (0) and temperature of 15 after poling.
The electro-optical constant r ₃₃ (T) of the sample after standing in a constant temperature bath of 0 ° C. for 250 hours was measured, and the retention was calculated from the above r ₃₃ (0) and r ₃₃ (T) by using the following formula (2). Evaluation was made from the rate d (T), and the results are shown in Table 4.

[Equation 2]

Examples 2 to 14 Instead of the α-aminoacrylic acid derivative (Compound 1) and the polyamic acid OPI-1005 used in Example 1, electro-optical materials and fluorinated polyamic acids (Table 4 and Table 5) were used. Hitachi Chemical Co., Ltd.) was used to prepare an active optical waveguide test sample in the same manner as in Example 1.
The retention rate d (T) of electro-optical characteristics was evaluated, and the results are shown in Tables 4 and 5.

Comparative Example 1 α-aminoacrylic acid derivative (Compound 1) used in Example 1 and fluorinated polyamic acid OPI-1005
Instead of 4- [N-ethyl-N- (2-hydroxyethyl)]-amino-4′-nitroazobenzene (Disperse Red 1) and polymethyl methacrylate (P
MMA) solution (12% by weight) was used to prepare an active optical waveguide test sample in the same manner as in Example 1 except that the poling temperature was 150 ° C., and the retention rate d (T) of electro-optical characteristics was evaluated. The results are shown in Table 5. The electro-optical properties disappeared by 75% only by heating to 100 ° C.

[0039]

[Table 4]

[0040]

[Table 5]

[0041]

The composition for active optical waveguide of the present invention gives an optically excellent transparent film. The active optical waveguide produced by using the composition for active optical waveguide of the present invention is very stable thermally and is suitable for producing electro-optical elements such as optical switches and modulators. By using the fluorinated polyimide having excellent heat resistance and the α-aminoacryl derivative represented by the general formula (I), the thermal stability required when producing the optical waveguide is improved. Furthermore, the spin coating method has an advantage that a large-area optical waveguide can be easily manufactured, and the cost of the optical waveguide can be reduced.

[Brief description of drawings]

FIG. 1 is a basic form of an optical matrix switch and a modulator.

FIG. 2 is an explanatory diagram of an active optical waveguide manufacturing process.

FIG. 3 is an explanatory diagram of an electro-optical constant measuring device used in Examples and Comparative Examples.

[Explanation of symbols]

 1 Substrate 2 Lower Electrode 3 Lower Cladding Layer 4 Core Layer 5 Aluminum Layer 6 Resist Layer 7 Upper Cladding Layer 8 Upper Electrode 9 He-Ne Laser 10 Polarizer 11 Sample 12 Habine-Soleil Compensator 13 Analyzer 14 Detector 15 Lock-in Amplifier 16 DC voltmeter 17 Oscillator

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Office reference number FI technical display location G02F 1/03 501 1/313 G02B 6/12 J

Claims (5)

[Claims] 1. A composition for an active optical waveguide, comprising a fluorinated polyamic acid and an electro-optical material, wherein the electro-optical material has the general formula (I): (In the formula, R ¹ represents a monovalent substituted or unsubstituted aromatic hydrocarbon group, heterocyclic group or unsaturated aliphatic hydrocarbon group,
R ² is a monovalent substituted or unsubstituted aromatic hydrocarbon group,
Heterocyclic group, aliphatic hydrocarbon group, alicyclic hydrocarbon group, characteristic group (carbamoyl group, carboxyl group and its alkyl ester, cyano group, hydroxy group, oxy group, halogen group, acylamino group) or hydrogen atom , R ¹ and R ²
And may form a hydrocarbon ring or a heterocycle, and R ¹
And R ² may each independently be at any position of cis or trans with respect to the NHR ³ group, and R ³ is a monovalent substituted or unsubstituted aromatic hydrocarbon group, heterocyclic group or aliphatic hydrocarbon group. , An alicyclic hydrocarbon group, a characteristic group (acyl group, benzoyl group, hydroxy group, sulfonyl group) or a hydrogen atom, and COR ⁴ represents a substituted or unsubstituted carbamoyl group, a carboxyl group or an alkyl ester thereof. A composition for an active optical waveguide, which is an represented α-aminoacrylic acid derivative. 2. When the fluorinated polyamic acid is imide-closed to form a fluorinated polyimide, the refractive index is 1.4 to
1.9 (589 nm), dielectric constant 2.6-3.5 (1 MH
The composition for active optical waveguides according to claim 1, wherein z) and the glass transition temperature (Tg) are 300 ° C or higher. 3. The fluorinated polyamic acid has the formula (II-1): The repeating unit represented by the formula and the formula (II-2): Of at least one repeating unit represented by the formula (III-
1) [Chemical 4] A repeating unit represented by the formula and formula (III-2): The composition for active optical waveguides according to claim 1 or 2, which is a fluorinated polyamic acid having at least one repeating unit represented by: 4. The active optical waveguide characterized in that the fluorinated polyamic acid in the composition for active optical waveguide according to claim 1, 2 or 3 is imide ring-closed to give a fluorinated polyimide to orient an electro-optical material. Waveguide manufacturing method. 5. An active optical waveguide manufactured by the method for manufacturing an active optical waveguide according to claim 4.