JPH0843109A - Piezoelectric vibrating gyro oscillator - Google Patents

Piezoelectric vibrating gyro oscillator

Info

Publication number
JPH0843109A
JPH0843109A JP6256020A JP25602094A JPH0843109A JP H0843109 A JPH0843109 A JP H0843109A JP 6256020 A JP6256020 A JP 6256020A JP 25602094 A JP25602094 A JP 25602094A JP H0843109 A JPH0843109 A JP H0843109A
Authority
JP
Japan
Prior art keywords
rod
shaped bending
vibrator
silicone rubber
gyro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6256020A
Other languages
Japanese (ja)
Inventor
Hiromichi Kobayashi
広道 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp filed Critical Tokin Corp
Priority to JP6256020A priority Critical patent/JPH0843109A/en
Publication of JPH0843109A publication Critical patent/JPH0843109A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0128—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on electro-mechanical, magneto-mechanical, elasto-optic effects
    • G02F1/0131—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on electro-mechanical, magneto-mechanical, elasto-optic effects based on photo-elastic effects, e.g. mechanically induced birefringence
    • G02F1/0134—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on electro-mechanical, magneto-mechanical, elasto-optic effects based on photo-elastic effects, e.g. mechanically induced birefringence in optical waveguides

Landscapes

  • Gyroscopes (AREA)

Abstract

(57)【要約】 (修正有) 【目的】 ヌル電圧の経時変化のない、圧電振動ジャイ
ロ用振動子を提供する。 【構成】 棒状屈曲振動子1を振動の節となる節点線1
1で支持台8に接着支持するのに、硬化後軟弾性体とな
る一液性加熱硬化型シリコーンゴム接着剤を用いること
により、圧電振動ジャイロのヌル電圧の経時変化を、ほ
ぼ零にする。
(57) [Summary] (Modified) [Purpose] To provide a vibrator for a piezoelectric vibration gyro, in which the null voltage does not change with time. [Structure] The rod-shaped bending oscillator 1 is a nodal line 1 that serves as a node of vibration.
By using a one-component heat-curable silicone rubber adhesive that becomes a soft elastic body after being cured to adhere and support the support base 8 at 1, the change over time of the null voltage of the piezoelectric vibration gyro is made substantially zero.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、カメラ一体型VTRの
手振れ防止や、自動車のナビゲーションシステム等に用
いられるジャイロスコープの内、圧電振動子を用いた、
いわゆる圧電振動ジャイロの、特に、圧電振動ジャイロ
用振動子の棒状屈曲振動子の支持具および振動子に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention uses a piezoelectric vibrator in a gyroscope used in a camera-integrated VTR to prevent camera shake and in a car navigation system.
The present invention relates to a so-called piezoelectric vibration gyro, and more particularly to a support and a vibrator for a rod-shaped bending vibrator of a vibrator for a piezoelectric vibration gyro.

【0002】[0002]

【従来の技術】圧電振動ジャイロは、振動している物体
に回転角速度が与えられると、その振動方向と直角な方
向にコリオリ力を生ずるという力学現象を利用したジャ
イロスコープである。互いに直交する二つの方向に励振
と検出が可能であるように構成した振動系において、一
方の方向に振動し励振した状態で、振動子自身を二つの
振動面が交わる線に平行な軸を中心軸として回転させる
と、前述のコリオリ力の作用により、この振動と直角な
方向に力が働き、他方の振動が励振される。この振動の
大きさは、入力側の振動の大きさおよび回転角速度に比
例するため、入力電圧が一定の場合、あらかじめ励振さ
れている振動方向と直角な方向により発生する出力電圧
の大きさから、回転角速度の大きさを求めることができ
る。
2. Description of the Related Art A piezoelectric vibrating gyro is a gyroscope that utilizes a mechanical phenomenon in which a Coriolis force is generated in a direction perpendicular to the vibrating direction when a rotating angular velocity is applied to a vibrating object. In a vibration system configured to be able to excite and detect in two directions that are orthogonal to each other, with the vibrator vibrating in one direction and excited, the vibrator itself is centered on an axis parallel to the line where the two vibrating planes intersect. When it is rotated as an axis, due to the action of the Coriolis force described above, a force acts in a direction perpendicular to this vibration, and the other vibration is excited. Since the magnitude of this vibration is proportional to the magnitude of the input side vibration and the rotational angular velocity, when the input voltage is constant, from the magnitude of the output voltage generated in the direction perpendicular to the vibration direction that is excited in advance, The magnitude of the rotational angular velocity can be calculated.

【0003】図1は、従来例及び本発明の圧電振動ジャ
イロに用いられている圧電セラミックからなる棒状屈曲
振動子の構造を示す概略図であり、図1(a)は外観斜
視図、図1(b)は側面図である。圧電セラミックスか
らなる棒状屈曲振動子(以下振動子と称す)1の外周面
上の円周を6等分する位置に、棒状屈曲振動子の長軸方
向と平行に、振動子の表面に6本の帯状電極2,3,
4,5,6,7が形成されている。この帯状電極を互い
に一つおきに接続して2端子として分極処理を施し、分
極処理後、一つおきの帯状電極2,4,6を接続して共
通アース電極とし、残りの帯状電極の内、帯状電極3を
駆動電極、帯状電極5および7を検出用電極とし、屈曲
振動の節点にリード線を接続し取り出し線として圧電振
動ジャイロを構成している。図2は、図1に示した従来
及び本発明の圧電振動子の支持、固定に用いられている
樹脂成形された支持台8の構造例を示す外観斜視図であ
り、図3は、図2に示す支持台8に棒状屈曲振動子を組
み込んだ時の外観斜視図であり、図4は、図3の棒状屈
曲振動子及び支持台を、一方の端面から見た場合の側面
図である。図4に示すように、貫通口9から硬化後、軟
弾性体を有し、又、接着性を有するシリコーンゴム10
を注入し、振動子1を支持台8に、図3に示す棒状屈曲
振動子の振動時の節となる破線で示す節点線11に沿
い、支持、固定している。
FIG. 1 is a schematic view showing the structure of a rod-shaped bending oscillator made of a piezoelectric ceramic used in a piezoelectric vibrating gyro of a conventional example and the present invention. FIG. 1 (a) is an external perspective view and FIG. (B) is a side view. Six rod-shaped bending oscillators (hereinafter referred to as “vibrator”) 1 made of piezoelectric ceramics are placed on the outer peripheral surface at positions that divide the circumference into six equal parts, parallel to the long axis direction of the rod-shaped bending oscillator, and six on the surface of the oscillator. Strip electrodes 2, 3,
4, 5, 6, 7 are formed. Every other strip-shaped electrode is connected to each other and subjected to polarization treatment as two terminals. After the polarization treatment, every other strip-shaped electrode 2, 4 and 6 is connected to form a common ground electrode, and the remaining strip-shaped electrodes are The strip electrode 3 is used as a drive electrode, the strip electrodes 5 and 7 are used as detection electrodes, and a lead wire is connected to a node of bending vibration to form a piezoelectric vibrating gyro as a lead wire. 2 is an external perspective view showing a structural example of a resin-molded support base 8 used for supporting and fixing the piezoelectric vibrators of the related art and the present invention shown in FIG. 1, and FIG. FIG. 4 is an external perspective view when a rod-shaped bending oscillator is incorporated in the support base 8 shown in FIG. 4, and FIG. 4 is a side view of the rod-shaped bending oscillator and the support base of FIG. 3 when viewed from one end face. As shown in FIG. 4, after curing from the through-hole 9, a silicone rubber 10 having a soft elastic body and having adhesiveness
Is injected and the vibrator 1 is supported and fixed to the support base 8 along a nodal line 11 shown by a broken line which is a node when the rod-shaped bending vibrator shown in FIG. 3 vibrates.

【0004】良好な圧電振動ジャイロを構成する要因と
して、棒状屈曲振動子と支持軟弾性体との接着力と、支
持の硬度が硬化後に変化しないことが必要となる。従来
の圧電振動ジャイロにおいては、吸湿型のシリコーンゴ
ム(1液硬化型RTV)を使用し、接着力については問
題はないが、作製中に完全に硬化しきれずに振動ジャイ
ロとして組み立て後に硬化が進んで、振動子を支持する
硬度が変化し、例えば、図6に示すように、コリオリ力
が零の時の出力震度(ヌル電圧)が6例(A〜F)にお
いて、接着後の日数が経過するにつれて、ジャイロ特性
に影響を及ぼすといった欠点を有していた。
As a factor that constitutes a good piezoelectric vibrating gyro, it is necessary that the adhesive force between the rod-shaped bending oscillator and the supporting soft elastic body and the hardness of the supporting do not change after curing. In the conventional piezoelectric vibrating gyro, a hygroscopic silicone rubber (1 liquid curing type RTV) is used, and there is no problem with the adhesive strength, but it does not completely cure during fabrication and curing progresses after assembly as a vibrating gyro. Then, the hardness that supports the vibrator changes, and, for example, as shown in FIG. 6, when the output seismic intensity (null voltage) when the Coriolis force is zero is 6 cases (A to F), the number of days after bonding elapses. However, there is a drawback that the gyro characteristics are affected.

【0005】[0005]

【発明が解決しようとする課題】本発明は、以上に示し
た従来の棒状屈曲振動子の支持の際に生じていたヌル電
圧が、接着後、日時が経過後大きく変化するという欠点
を除去するもので、圧電振動ジャイロのヌル電圧の経時
変化を防止した圧電振動ジャイロ用振動子を提供するこ
とにある。
DISCLOSURE OF THE INVENTION The present invention eliminates the above-mentioned drawback that the null voltage generated during the support of the conventional rod-shaped bending vibrator changes greatly after the bonding and the passage of time. It is therefore an object of the present invention to provide a vibrator for a piezoelectric vibration gyro, which prevents the null voltage of the piezoelectric vibration gyro from changing over time.

【0006】[0006]

【課題を解決するための手段】1波長共振で振動する棒
状屈曲振動子の振動の節点、あるいは節点線を、硬化
後、軟弾性体となる1液性加熱硬化型の付加反応型のシ
リコーンゴム接着剤を用いて支持することにより、上記
問題を解決する。
[Means for Solving the Problems] A one-component thermosetting addition reaction type silicone rubber which becomes a soft elastic body after a node or line of vibration of a rod-shaped bending oscillator vibrating at one wavelength resonance is hardened. Supporting with an adhesive solves the above problem.

【0007】[0007]

【作用】圧電振動ジャイロに用いる棒状屈曲振動子の支
持部の接着剤に一液性加熱硬化型のシリコーンゴムを用
い、支持、固定の際、接着剤の硬化を安全にし、硬化後
の硬度の変化を抑えることにより、圧電振動ジャイロの
ヌル電圧の経時変化を、ほとんど零にすることができ
る。
[Function] A one-component heat-curable silicone rubber is used as the adhesive for the support portion of the rod-shaped bending vibrator used in the piezoelectric vibration gyro, to secure the curing of the adhesive when supporting and fixing it, and By suppressing the change, the change over time of the null voltage of the piezoelectric vibration gyro can be made almost zero.

【0008】[0008]

【実施例】以下、本発明の実施例について図面を用いて
説明する。本発明の実施例の棒状屈曲振動子1及び支持
台8の構造については、前記の通り従来例と同様であ
る。図2は、図1に示した棒状屈曲振動子1の支持、固
定に用いられている樹脂成形された支持台8の構造例を
示す外観斜視図である。図3は、支持台8に棒状屈曲振
動子を組み込んだ時の外観斜視図で、図4は、図3の棒
状屈曲振動子及び支持台を、一方の端面から見た場合の
側面図である。貫通口9から硬化後、軟弾性体の接着性
を有する1液性加熱硬化型の付加反応型のシリコーンゴ
ム10を注入し、加熱硬化させ、振動子1を支持台8に
支持、固定している。
Embodiments of the present invention will be described below with reference to the drawings. The structures of the rod-shaped bending vibrator 1 and the support base 8 of the embodiment of the present invention are the same as those of the conventional example as described above. FIG. 2 is an external perspective view showing a structural example of a resin-molded support base 8 used for supporting and fixing the rod-shaped bending vibrator 1 shown in FIG. 3 is an external perspective view of the rod-shaped bending oscillator incorporated in the support base 8, and FIG. 4 is a side view of the rod-shaped bending oscillator and the support base of FIG. 3 as viewed from one end face. . After curing from the through-hole 9, a one-component heat-curing addition reaction type silicone rubber 10 having adhesiveness of a soft elastic body is injected and heat-cured, and the vibrator 1 is supported and fixed to the support base 8. There is.

【0009】図5は、信越化学工業株式会社製シリコー
ンゴム、KEI1254を用いた時の実施例を示してい
る。測定試料6例(A〜F)すべてにおいて、ヌル電圧
の経時変化は、ほとんど零となった。
FIG. 5 shows an embodiment in which KEI1254, a silicone rubber manufactured by Shin-Etsu Chemical Co., Ltd., is used. In all of the six measurement samples (A to F), the change with time of the null voltage was almost zero.

【0010】なお、本発明において、上記の実施例以外
では、信越化学工業株式会社製の一液性加熱硬化型シリ
コーンゴム接着剤、KEI1840、及び東芝シリコー
ン株式会社製の一液加熱硬化型シリコーンゴム、TSE
325を用いても、同様な結果が得られる。
In the present invention, except for the above examples, one-component heat-curable silicone rubber adhesive manufactured by Shin-Etsu Chemical Co., Ltd., KEI1840, and one-component heat-curable silicone rubber manufactured by Toshiba Silicone Co., Ltd. , TSE
Similar results are obtained with 325.

【0011】[0011]

【発明の効果】以上に示したように、本発明によれば、
圧電振動ジャイロのヌル電圧の経時変化を防止した圧電
振動ジャイロ用振動子を提供できた。
As described above, according to the present invention,
It has been possible to provide a vibrator for a piezoelectric vibrating gyro, which prevents the null voltage of the piezoelectric vibrating gyro from changing over time.

【図面の簡単な説明】[Brief description of drawings]

【図1】圧電振動ジャイロに用いる棒状屈曲振動子を示
す図。図1(a)は外観斜視図。図1(b)は断面図。
FIG. 1 is a diagram showing a rod-shaped bending oscillator used in a piezoelectric vibrating gyro. FIG. 1A is an external perspective view. FIG.1 (b) is sectional drawing.

【図2】棒状屈曲振動子を支持する支持台の外観斜視
図。
FIG. 2 is an external perspective view of a support base that supports a rod-shaped bending oscillator.

【図3】図2に示した支持具に棒状屈曲振動子を組み込
んだ時の外観斜視図。
FIG. 3 is an external perspective view when a rod-shaped bending oscillator is incorporated in the support shown in FIG.

【図4】図3に示す図の側面図。FIG. 4 is a side view of the diagram shown in FIG.

【図5】本発明の棒状屈曲振動子を支持台に接着するシ
リコーンゴムに、一液性加熱硬化型シリコーンゴムを用
いた時のヌル電圧の経時変化を示す特性図。
FIG. 5 is a characteristic diagram showing a time-dependent change in null voltage when a one-component thermosetting silicone rubber is used as the silicone rubber for adhering the rod-shaped bending oscillator of the present invention to a support.

【図6】従来の接着用シリコーンゴムによるヌル電圧の
経時変化を示す特性図。
FIG. 6 is a characteristic diagram showing a change over time of a null voltage by a conventional adhesive silicone rubber.

【符号の説明】[Explanation of symbols]

1 棒状屈曲振動子 2,3,4,5,6,7 帯状電極 8 支持台 9 (シリコーンゴム注入用)貫通口 10 (接着用)シリコーンゴム 11 節点線 A,B,C,D,E,F 測定試料 1 Rod-shaped bending oscillator 2, 3, 4, 5, 6, 7 Band-shaped electrode 8 Support 9 (For silicone rubber injection) Through hole 10 (For adhesion) Silicone rubber 11 Node lines A, B, C, D, E, F Measurement sample

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 1波長共振で振動する棒状屈曲振動子の
振動の節点線を、硬化後、軟弾性体となる一液性加熱硬
化型シリコーンゴム接着剤を用いて支持してなることを
特徴とする圧電振動ジャイロ用振動子。
1. A nodal line of vibration of a rod-shaped bending oscillator that vibrates at one wavelength resonance is supported by using a one-component thermosetting silicone rubber adhesive that becomes a soft elastic body after curing. Piezoelectric vibrator for gyro.
JP6256020A 1994-07-27 1994-07-27 Piezoelectric vibrating gyro oscillator Pending JPH0843109A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6256020A JPH0843109A (en) 1994-07-27 1994-07-27 Piezoelectric vibrating gyro oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6256020A JPH0843109A (en) 1994-07-27 1994-07-27 Piezoelectric vibrating gyro oscillator

Publications (1)

Publication Number Publication Date
JPH0843109A true JPH0843109A (en) 1996-02-16

Family

ID=17286802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6256020A Pending JPH0843109A (en) 1994-07-27 1994-07-27 Piezoelectric vibrating gyro oscillator

Country Status (1)

Country Link
JP (1) JPH0843109A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0838712A3 (en) * 1996-10-28 1998-12-09 KVH Industries, Inc. Support system for resonating element of phase modulator
JP2011179922A (en) * 2010-02-26 2011-09-15 Tdk Corp Piezoelectric device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0838712A3 (en) * 1996-10-28 1998-12-09 KVH Industries, Inc. Support system for resonating element of phase modulator
JP2011179922A (en) * 2010-02-26 2011-09-15 Tdk Corp Piezoelectric device

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