JPH0847852A - Wire saw - Google Patents

Abstract

PURPOSE:To provide the drive construction of a wire saw which can make the drive part compact and improve throughput. CONSTITUTION:The rotary shaft 162 of a drive motor 128 driving a wire reel 112 is connected to a turn table 170 coaxially to the rotary shaft 162. The wire reel 112 is placed on the turn table 170, and fixed to the turn table 170 through bolts 174, 174, after positioning so as to be coaxially placed on the turn table 170. Hereby, the wire reel 112 is directly driven by the drive motor 128. Consequently, the acceleration/deceleration time is shortened, so as to improve throughput. In addition, because a motor of low inertia, namely, a small sized motor can be used for the drive motor 128, the drive part can be made compact.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw, and more particularly to a wire saw that cuts a large number of thin wafers with a wire that travels through a workpiece such as a cylindrical semiconductor ingot, ceramic or glass.

[0002]

2. Description of the Related Art A wire saw is one of the cutting devices for cutting a workpiece such as a semiconductor ingot, ceramic, or glass into thin plate wafers. This wire saw presses the work piece while supplying the working liquid containing abrasive grains to the wire traveling between the pair of wire reels,
The lapping action of the abrasive grains cuts the workpiece into a large number of thin plate wafers. And since the diameter of wafers has increased to 8 inches and 12 inches in recent years, the wire of the wire saw has to be long,
Heavy wire reels of over 100 kg are used.

Conventionally, the wire reel of this wire saw has been driven by transmitting a rotational force to the wire reel by a belt transmission from a drive motor. When slicing a workpiece with the wire saw, the slicing direction includes one-way feed in which the wire travels in only one direction and two-way feed in which the wire travels back and forth. In the case of bidirectional feeding, the wire reel has to repeat acceleration and deceleration in a short time (1 second to 6 seconds), and thus requires a large acceleration torque due to the inertia of the wire reel.

[0004]

However, if a conventional belt drive system is used to drive a heavy weight wire reel, a motor with a large inertia is required to drive the wire reel, which is inevitable. Since a motor having a large size has to be used, there is a problem that the driving unit becomes large. Further, if the acceleration / deceleration torque is large, the belt may be damaged, so that the acceleration / deceleration time cannot be shortened.

The present invention has been made in view of the above circumstances. Since a drive motor having a low inertia can be used, the wire saw device body can be made compact and
An object of the present invention is to provide a wire saw drive structure capable of improving throughput because acceleration / deceleration time can be shortened.

[0006]

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a wire reel by winding a wire from one wire reel and winding it around a plurality of grooved rollers to form a wire row on the other wire reel. A drive for driving the wire reel in a wire saw that winds and supplies a working liquid containing abrasive grains to the wire row to press the work piece and cut the work piece into many thin plate-shaped wafers. The wire reel is connected to a rotary shaft of a motor coaxially with the rotary shaft.

In order to achieve the above-mentioned object, a wire is unwound from one wire reel, wound around a plurality of grooved rollers to form a wire row, and wound on the other wire reel. Supplying a working liquid containing abrasive grains and pressing the work piece, in a wire saw for cutting the work piece into a large number of thin plate-shaped wafers, on the rotary shaft of the drive motor for driving the grooved roller,
The grooved roller is connected coaxially with the rotating shaft.

[0008]

According to the present invention, the wire reel and the grooved roller are directly connected to the drive motor and driven directly from the drive motor. As a result, the acceleration / deceleration time is shortened and the throughput is improved. Further, since a motor having a low inertia, that is, a motor having a small size can be used as the drive motor, the drive unit can be made compact. Further, since the space required for the belt transmission mechanism, which is conventionally required, can be omitted, the drive unit can be made compact.

[0009]

The preferred embodiments of the wire saw according to the present invention will be described in detail below with reference to the accompanying drawings. First, the overall structure of the wire saw 110 will be described with reference to FIG. Wire 114 wound around one wire reel 112
Is sequentially wound around the three grooved rollers 122, 122, 122 via the wire guide device 116, the plurality of fixed guide rollers 118, 118, and the dancer roller 120 to form the wire row 124, and then the plurality of fixed rollers. It is wound around the other wire reel 126 via the guide rollers 118, 118, the dancer roller 120, and the wire guide device 116.

A weight 144 having a predetermined weight is suspended from the dancer roller 120 so that the traveling wire 114 is always given a required tension. A wire cleaning device 146 is provided in the middle of the wire traveling path, and the processing liquid 14 attached to the wire 114 by the wire cleaning device 146 is provided.
0 is removed.

The wire reels 112 and 126 are respectively connected to drive motors 128 and 130 capable of rotating in the forward and reverse directions, and at the same time, one of three rollers 122 with a groove is provided.
Is connected to a drive motor 132 that can rotate in forward and reverse directions. As a result, the wire 114 is moved to the one wire reel 112.
And the other wire reel 126. A working fluid 140 containing abrasive grains (generally, GC # 600 to # 1000 or so is used) stored in a polishing fluid storage tank 138 is supplied to the wire array 124 from a polishing fluid supply nozzle 142. .

Below the wire array 124, a semiconductor ingot 154, which is a workpiece, is placed on the work block 15.
6 and the slice base 158 to support the work feed table 148. The work feed table 148 is provided so as to be vertically movable by a screw rod 152 that is rotated by a motor 150. The semiconductor ingot 154
Is pressed against the wire row 124 traveling at high speed by moving the work feed table 148 upward, and a large number of thin wafers are formed by the lapping action of the processing liquid 140 supplied to the wire row 124 traveling at high speed. Be disconnected.

Next, the structure of the drive unit of the wire reel 112 will be described with reference to FIG. The wire reel 1
The drive motor 128 that drives the wire saw 1 includes a casing 160 that houses the rotary shaft 162 and the like, and
It is fixed to the body frame of 10 with bolts. In the center of the casing 160, the rotating shaft 62 is provided with a bearing 16
4, 164 and 164 are rotatably supported, and the permanent magnets 166 and 16 are provided on the peripheral surface of the rotation shaft 162.
6 is fixed. On the other hand, armature coils 168 and 168 are fixed to the inner peripheral wall of the casing 160 so as to face the permanent magnets 166 and 166.
The rotating shaft 162 rotates.

A disc-shaped turntable 170 is connected to the upper end of the rotary shaft 162. The turntable 170 is coaxially connected to the rotary shaft 162, and its connecting portion is fixed by being bolted with two connecting bolts 172 and 172. The wire reel 112 is connected to the upper surface of the turntable 170. A frustoconical recess 113A is formed in the center of the lower surface of the flange 113 of the wire reel 112, and the recess 113A is formed into a frustoconical projection 170A formed in the center of the upper surface of the turntable 170 during connection. By fitting the wire reel 112 and the turntable 1
70 is coaxially connected. Further, the flange 113 and the turntable 170 connected to each other are fixed at their peripheral end portions by bolting them with bolts 174 and 174, and the rotation of the turntable 170 is transmitted to the wire reel 112 without being rotated together.

As described above, by making the rotary drive unit of the turntable 170 a built-in type, the wire reel 112 is directly connected to the drive motor 128 and directly driven. As a result, the acceleration / deceleration time is shortened and the throughput is improved. Further, since a motor having a low inertia, that is, a motor having a small size can be used as the drive motor, the drive unit can be made compact.

Further, since the space for the belt transmission mechanism, which has been conventionally required, can be omitted, the drive unit can be made compact. Further, this eliminates the fear of belt damage during operation. In addition, wire row 1
Regarding the driving method of the grooved roller 122 forming 24, the same effect as the wire saw 110 can be obtained by adopting the method of driving by directly connecting the driving motor to the grooved roller 122 similarly to the wire reel 112. Can be obtained.

[0017]

As described above, according to the wire saw of the present invention, the wire reel and the grooved roller are directly connected to the drive motors and directly driven by the respective drive motors. As a result, the acceleration / deceleration time is shortened and the throughput is improved. Further, since a motor having a low inertia, that is, a motor having a small size can be used as the drive motor, the drive unit can be made compact. Further, since the space required for the belt transmission mechanism, which is conventionally required, can be omitted, the drive unit can be made compact.

[Brief description of drawings]

[Figure 1] Overall structure of wire saw

FIG. 2 is a sectional view of a drive unit of a wire reel.

[Explanation of symbols]

 110 ... Wire saw 112 ... Wire reel 114 ... Wire 122 ... Grooved roller 124 ... Wire row 128, 130, 132 ... Drive motor

Claims (2)

[Claims] 1. A wire is unwound from one wire reel and wound around a plurality of grooved rollers to form a wire row and wound on the other wire reel, and a working fluid containing abrasive grains is supplied to the wire row. Then, by pressing the work piece, in a wire saw for cutting the work piece into a large number of thin plate-shaped wafers, a rotary shaft of a drive motor for driving the wire reel,
A wire saw, wherein the wire reel is connected coaxially with the rotating shaft. 2. A wire is fed from one of the wire reels and wound around a plurality of grooved rollers to form a wire row and wound on the other wire reel, and a working fluid containing abrasive grains is supplied to the wire row. In the wire saw that presses the workpiece and cuts the workpiece into a number of thin plate-shaped wafers, the rotary shaft of the drive motor that drives the grooved roller is coaxial with the rotary shaft. A wire saw characterized by connecting rollers.