JPH08510695A - 磁気流動学の研磨装置及び方法 - Google Patents

磁気流動学の研磨装置及び方法

Info

Publication number: JPH08510695A
Authority: JP; Japan
Prior art keywords: polishing; container; liquid; determining; magnetic field
Prior art date: 1993-06-04
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

JP7501936A

Other languages

English (en)

Japanese (ja)

Inventor

イー．コルドンスキイ，ウィリアム

ベー．プロホロフ，イゴール

エル．ゴロドキン，セルゲイ

エル．ゴロドキン，ゲンナーディ

カー．グレブ，レオニド

エー．カシェフスキイ，ブロニスラフ

Original Assignee

バイロコープサイエンティフィク，インコーポレイティド

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1993-06-04

Filing date

1994-06-03

Publication date

1996-11-12

1993-06-04 Priority claimed from US08/071,813 external-priority patent/US5449313A/en

1994-06-03 Application filed by バイロコープサイエンティフィク，インコーポレイティド filed Critical バイロコープサイエンティフィク，インコーポレイティド

1996-11-12 Publication of JPH08510695A publication Critical patent/JPH08510695A/ja

Status Withdrawn legal-status Critical Current

Links

238000005498 polishing Methods 0.000 title claims abstract description 168
238000000034 method Methods 0.000 title claims abstract description 45
239000007788 liquid Substances 0.000 claims abstract description 111
230000005291 magnetic effect Effects 0.000 claims abstract description 64
239000000463 material Substances 0.000 claims description 74
230000033001 locomotion Effects 0.000 claims description 30
239000002245 particle Substances 0.000 claims description 8
238000006073 displacement reaction Methods 0.000 claims description 7
PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 6
238000005259 measurement Methods 0.000 claims description 5
239000000203 mixture Substances 0.000 claims description 5
230000003746 surface roughness Effects 0.000 claims description 5
238000012545 processing Methods 0.000 claims description 4
235000011187 glycerol Nutrition 0.000 claims description 3
239000006249 magnetic particle Substances 0.000 claims description 3
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
239000004809 Teflon Substances 0.000 claims description 2
229920006362 Teflon® Polymers 0.000 claims description 2
230000003647 oxidation Effects 0.000 claims description 2
238000007254 oxidation reaction Methods 0.000 claims description 2
239000003381 stabilizer Substances 0.000 claims description 2
230000005294 ferromagnetic effect Effects 0.000 claims 2
239000000126 substance Substances 0.000 claims 2
238000005054 agglomeration Methods 0.000 claims 1
230000002776 aggregation Effects 0.000 claims 1
229920000642 polymer Polymers 0.000 claims 1
238000003756 stirring Methods 0.000 claims 1
230000001939 inductive effect Effects 0.000 abstract description 4
239000010410 layer Substances 0.000 description 16
238000004519 manufacturing process Methods 0.000 description 6
238000004364 calculation method Methods 0.000 description 5
238000007517 polishing process Methods 0.000 description 4
238000004590 computer program Methods 0.000 description 3
238000010586 diagram Methods 0.000 description 3
239000011521 glass Substances 0.000 description 3
239000000696 magnetic material Substances 0.000 description 3
230000003287 optical effect Effects 0.000 description 3
239000004575 stone Substances 0.000 description 3
238000005516 engineering process Methods 0.000 description 2
239000011241 protective layer Substances 0.000 description 2
238000011160 research Methods 0.000 description 2
239000007787 solid Substances 0.000 description 2
238000012360 testing method Methods 0.000 description 2
238000012546 transfer Methods 0.000 description 2
238000004804 winding Methods 0.000 description 2
RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
238000009825 accumulation Methods 0.000 description 1
239000011149 active material Substances 0.000 description 1
239000000853 adhesive Substances 0.000 description 1
230000001070 adhesive effect Effects 0.000 description 1
239000000919 ceramic Substances 0.000 description 1
239000003795 chemical substances by application Substances 0.000 description 1
239000011248 coating agent Substances 0.000 description 1
238000000576 coating method Methods 0.000 description 1
239000002131 composite material Substances 0.000 description 1
230000000694 effects Effects 0.000 description 1
229920001971 elastomer Polymers 0.000 description 1
230000005672 electromagnetic field Effects 0.000 description 1
239000012530 fluid Substances 0.000 description 1
239000004519 grease Substances 0.000 description 1
229940087654 iron carbonyl Drugs 0.000 description 1
230000001788 irregular Effects 0.000 description 1
206010023497 kuru Diseases 0.000 description 1
239000011553 magnetic fluid Substances 0.000 description 1
230000005389 magnetism Effects 0.000 description 1
239000011859 microparticle Substances 0.000 description 1
239000005304 optical glass Substances 0.000 description 1
239000004033 plastic Substances 0.000 description 1
229920003023 plastic Polymers 0.000 description 1
229920002635 polyurethane Polymers 0.000 description 1
239000004814 polyurethane Substances 0.000 description 1
239000011148 porous material Substances 0.000 description 1
239000011435 rock Substances 0.000 description 1
239000005060 rubber Substances 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
230000008054 signal transmission Effects 0.000 description 1
239000011343 solid material Substances 0.000 description 1
-1 tubes Substances 0.000 description 1

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B39/00—Burnishing machines or devices, i.e. requiring pressure members for compacting the surface zone; Accessories therefor
- B24B39/02—Burnishing machines or devices, i.e. requiring pressure members for compacting the surface zone; Accessories therefor designed for working internal surfaces of revolution
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

JP7501936A 1993-06-04 1994-06-03 磁気流動学の研磨装置及び方法 Withdrawn JPH08510695A (ja)

Applications Claiming Priority (5)

Application Number	Priority Date	Filing Date	Title
US08/071,813 US5449313A (en)	1992-04-14	1993-06-04	Magnetorheological polishing devices and methods
BY863		1993-12-09
BY08/071,813		1993-12-09
BY00863-01		1993-12-09
PCT/US1994/006209 WO1994029077A1 (en)	1993-06-04	1994-06-03	Magnetorheological polishing devices and methods

Related Child Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2004239946A Division JP4741212B2 (ja)	1993-06-04	2004-08-19	磁気粘性研磨装置及び方法

Publications (1)

Publication Number	Publication Date
JPH08510695A true JPH08510695A (ja)	1996-11-12

Family

ID=25665737

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
JP7501936A Withdrawn JPH08510695A (ja)	1993-06-04	1994-06-03	磁気流動学の研磨装置及び方法
JP2004239946A Expired - Lifetime JP4741212B2 (ja)	1993-06-04	2004-08-19	磁気粘性研磨装置及び方法

Family Applications After (1)

Application Number	Title	Priority Date	Filing Date
JP2004239946A Expired - Lifetime JP4741212B2 (ja)	1993-06-04	2004-08-19	磁気粘性研磨装置及び方法

Country Status (7)

Country	Link
EP (1)	EP0703847B1 (de)
JP (2)	JPH08510695A (de)
KR (1)	KR100335219B1 (de)
AT (1)	ATE215869T1 (de)
CA (3)	CA2497732C (de)
DE (1)	DE69430370T2 (de)
WO (1)	WO1994029077A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2013000817A (ja) *	2011-06-14	2013-01-07	Muramatsu Kenma Kogyo:Kk	バレル研磨装置
CN105014484A (zh) *	2015-08-17	2015-11-04	宇环数控机床股份有限公司	磁流变抛光设备的磁场发生装置

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0687525A1 (de) *	1994-06-13	1995-12-20	Read-Rite Corporation	Lappsystem zur automatisierten Oberflächenformgebung
JP4805640B2 (ja) *	2005-09-16	2011-11-02	株式会社リコー	表面処理装置
JP2007326183A (ja) *	2006-06-08	2007-12-20	Fdk Corp	磁気研磨液
US7364493B1 (en)	2006-07-06	2008-04-29	Itt Manufacturing Enterprises, Inc.	Lap grinding and polishing machine
KR100788796B1 (ko)	2006-11-20	2007-12-27	연세대학교 산학협력단	집속이온빔과 ｍｒｆ를 이용한 나노 구조물의 제조방법
US8974268B2 (en) *	2010-06-25	2015-03-10	Corning Incorporated	Method of preparing an edge-strengthened article
US9102030B2 (en)	2010-07-09	2015-08-11	Corning Incorporated	Edge finishing apparatus
CN102284890A (zh) *	2011-09-26	2011-12-21	厦门大学	面形自适应回转轴对称光学元件抛光装置
EA024869B1 (ru) *	2013-12-27	2016-10-31	Государственное Научное Учреждение "Институт Тепло- И Массообмена Имени А.В. Лыкова Национальной Академии Наук Беларуси"	Способ магнитореологического формообразования и полирования поверхности сложной формы
CN104308671B (zh) *	2014-10-09	2017-01-11	东北大学	一种磁流变抛光装置与方法
CN107378651A (zh) *	2017-08-04	2017-11-24	北京交通大学	一种磁流变平面抛光装置
KR101932413B1 (ko) *	2017-08-29	2018-12-27	인하대학교 산학협력단	표면광택 생성장치
KR101994029B1 (ko) *	2018-01-02	2019-09-30	인하대학교 산학협력단	평면 연마 장치
US11440156B2 (en) *	2018-06-19	2022-09-13	Islamic Azad University of Najafabad	Magnetic abrasive finishing of curved surfaces
CN108789117B (zh) *	2018-06-20	2020-05-05	中国科学院上海光学精密机械研究所	米级大口径光学元件高效抛光机及抛光方法
CN109623507A (zh) *	2019-01-02	2019-04-16	中国科学院上海光学精密机械研究所	Yag板条激光晶体反射面形加工方法
CN110421412A (zh) *	2019-09-05	2019-11-08	河北工业大学	一种小型磁流变平面抛光装置
CN112123029B (zh) *	2020-09-25	2022-09-06	山东理工大学	一种基于磁场辅助的微细结构振动光整装置及光整方法
CN112536649A (zh) *	2020-12-21	2021-03-23	浙江师范大学	一种基于磁性磨粒流的光学玻璃抛光方法及其装置
CN113561035B (zh) *	2021-07-30	2023-04-11	西安工业大学	一种点云交变磁流变抛光装置及方法
CN113752098B (zh) *	2021-09-29	2022-06-21	哈尔滨工业大学	一种基于水浴加热辅助的小球头磁流变抛光方法
CN113941904B (zh) *	2021-10-29	2022-07-29	哈尔滨工业大学	一种基于小型回转体零件旋转超声振动的小球头磁流变抛光工艺方法
CN113878413B (zh) *	2021-11-15	2022-12-13	华圭精密科技(东莞)有限公司	一种抛光防撞磁流变抛光机与控制方法
CN114055258B (zh) *	2021-11-19	2023-04-18	浙江师范大学	一种磁性抛光装置及磁性抛光控制方法
CN117428580B (zh) *	2023-12-15	2024-03-19	成都市凯林机械贸易有限责任公司	一种阀门加工用抛光装置
CN120395545B (zh) *	2025-07-01	2025-09-02	中国科学院长春光学精密机械与物理研究所	基于电磁流量计感知的磁流变抛光系统及其抛光方法

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US2735231A (en) *	1953-05-22	1956-02-21	Reflectone Corp	simjian
US3848363A (en) *	1973-02-20	1974-11-19	Minnesota Mining & Mfg	Apparatus for treating objects with particles moved by magnetic force
US3897350A (en) *	1974-05-30	1975-07-29	Mobil Oil Corp	Anti-rust compositions
US4186528A (en) *	1978-05-23	1980-02-05	Kosobutsky Alexandr A	Machine for treating spherical surfaces of parts with magneto-abrasive powder
US4485024A (en) *	1982-04-07	1984-11-27	Nippon Seiko Kabushiki Kaisha	Process for producing a ferrofluid, and a composition thereof
JPS6067057A (ja) *	1983-09-21	1985-04-17	Taihoo Kogyo Kk	研磨方法
JPS6173305A (ja) *	1984-09-18	1986-04-15	Tdk Corp	磁性流体
JPS6167045A (ja) *	1984-09-10	1986-04-07	Canon Inc	トナ−塗布方法
DD227372A1 (de) *	1984-10-25	1985-09-18	Orsta Hydraulik Veb K	Verfahren zur feinstbearbeitung von stahlrohren
US4821466A (en) *	1987-02-09	1989-04-18	Koji Kato	Method for grinding using a magnetic fluid and an apparatus thereof
JPS63232402A (ja) *	1987-03-20	1988-09-28	Nippon Seiko Kk	導電性磁性流体組成物とその製造方法
US4839074A (en) *	1987-05-22	1989-06-13	Exxon Chemical Patents Inc.	Specified C14 -carboxylate/vinyl ester polymer-containing compositions for lubricating oil flow improvement
JPH01303446A (ja) *	1988-06-01	1989-12-07	Asahi Chem Ind Co Ltd	磁性粒子とその製造方法
JP2632943B2 (ja) *	1988-07-26	1997-07-23	戸田工業株式会社	磁気記録媒体
JP2949289B2 (ja) *	1989-03-28	1999-09-13	日本エクスラン工業株式会社	ポリマー被覆磁性粒子の製造法
US4992190A (en) *	1989-09-22	1991-02-12	Trw Inc.	Fluid responsive to a magnetic field
JP3069612B2 (ja) *	1990-06-13	2000-07-24	科学技術庁金属材料技術研究所長	磁性流体及びその製造方法
JP2889664B2 (ja) *	1990-07-19	1999-05-10	株式会社リコー	回転量測定方法

1994
- 1994-06-03 CA CA2497732A patent/CA2497732C/en not_active Expired - Lifetime
- 1994-06-03 CA CA002497731A patent/CA2497731C/en not_active Expired - Lifetime
- 1994-06-03 WO PCT/US1994/006209 patent/WO1994029077A1/en not_active Ceased
- 1994-06-03 JP JP7501936A patent/JPH08510695A/ja not_active Withdrawn
- 1994-06-03 KR KR1019950705488A patent/KR100335219B1/ko not_active Expired - Lifetime
- 1994-06-03 DE DE69430370T patent/DE69430370T2/de not_active Expired - Lifetime
- 1994-06-03 EP EP94919329A patent/EP0703847B1/de not_active Expired - Lifetime
- 1994-06-03 CA CA002163671A patent/CA2163671C/en not_active Expired - Lifetime
- 1994-06-03 AT AT94919329T patent/ATE215869T1/de not_active IP Right Cessation
2004
- 2004-08-19 JP JP2004239946A patent/JP4741212B2/ja not_active Expired - Lifetime

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2013000817A (ja) *	2011-06-14	2013-01-07	Muramatsu Kenma Kogyo:Kk	バレル研磨装置
CN105014484A (zh) *	2015-08-17	2015-11-04	宇环数控机床股份有限公司	磁流变抛光设备的磁场发生装置

Also Published As

Publication number	Publication date
JP2005040944A (ja)	2005-02-17
CA2497732C (en)	2011-03-01
WO1994029077A1 (en)	1994-12-22
ATE215869T1 (de)	2002-04-15
EP0703847A1 (de)	1996-04-03
KR100335219B1 (ko)	2002-11-07
CA2163671A1 (en)	1994-12-22
DE69430370D1 (de)	2002-05-16
CA2497731A1 (en)	1994-12-22
DE69430370T2 (de)	2002-12-12
CA2497731C (en)	2006-02-07
JP4741212B2 (ja)	2011-08-03
CA2163671C (en)	2005-10-25
EP0703847A4 (de)	1997-07-09
KR960702786A (ko)	1996-05-23
EP0703847B1 (de)	2002-04-10
CA2497732A1 (en)	1994-12-22

Legal Events

Date	Code	Title	Description
2003-12-25	A601	Written request for extension of time	Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20031208
2004-01-26	A602	Written permission of extension of time	Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20040126
2004-03-25	A521	Request for written amendment filed	Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040309
2004-04-20	A02	Decision of refusal	Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20040420
2004-10-04	A761	Written withdrawal of application	Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20041001

Publication	Publication Date	Title
JPH08510695A (ja)	1996-11-12	磁気流動学の研磨装置及び方法
US5449313A (en)	1995-09-12	Magnetorheological polishing devices and methods
US6503414B1 (en)	2003-01-07	Magnetorheological polishing devices and methods
Jung et al.	2009	Magnetorheological finishing process for hard materials using sintered iron-CNT compound abrasives
EP0858381B1 (de)	2002-12-11	Deterministische magnetorheologische feinstbearbeitung
CN100566939C (zh)	2009-12-09	用于抛光和研磨光学和半导体表面的流体动力学径向流设备
EP1048404B1 (de)	2005-11-02	Verfahren und Vorrichtung zum optischen Polieren
WO1997014532A9 (en)	1997-10-09	Deterministic magnetorheological finishing
EP1526948A2 (de)	2005-05-04	Durch magnetorheologische feinstbearbeitung hergestellte gleichförmige dünne filme
US5404680A (en)	1995-04-11	Method for polishing slight area of surface of workpiece and tool therefor
Feng et al.	2020	Effect of the components of Magnetic Compound Fluid (MCF) slurry on polishing characteristics in aspheric-surface finishing with the doughnut-shaped MCF tool
Qu et al.	2021	Material removal profile prediction and experimental validation for obliquely axial ultrasonic vibration-assisted polishing of K9 optical glass
JPS59501104A (ja)	1984-06-28	電気的に制御する研磨機の仕上−研磨法
JPS63267155A (ja)	1988-11-04	研磨装置
Achour et al.	2020	Deterministic polishing of micro geometries
KR102068538B1 (ko)	2020-01-21	자기유변유체를 이용한 연마장치 및 그것을 이용한 연마방법
JPH08257897A (ja)	1996-10-08	中心に穴を有する浮子と砥粒を含む磁性流体の循環装置のある球体の研磨方法及びその装置
WO1995020465A1 (en)	1995-08-03	Surface grinding
JPS62173166A (ja)	1987-07-30	磁性流体を用いる球体の研磨方法及び研磨装置
CN223198816U (zh)	2025-08-08	一种行星偏转式研磨装置
Verma et al.	2022	Advancement in Magnetic Field Assisted Finishing Processes
CN110217600A (zh)	2019-09-10	沿移动表面移动物体的设备及方法、旋转构件的平衡装置
Jain et al.	2009	Some investigations into magnetorheological finishing (MRF) of hard materials
JPH05162064A (ja)	1993-06-29	微小域研磨装置
Cheng et al.	2005	Optimizing parameters for magnetorheological finishing supersmooth surface

JPH08510695A - 磁気流動学の研磨装置及び方法 - Google Patents

Info

Links

Classifications

Landscapes

Applications Claiming Priority (5)

Related Child Applications (1)

Publications (1)

Family

ID=25665737

Family Applications (2)

Family Applications After (1)

Country Status (7)

Cited By (2)

Families Citing this family (26)

Family Cites Families (18)

Cited By (2)

Also Published As

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