JPH085574Y2 - Laser cooler - Google Patents
Laser coolerInfo
- Publication number
- JPH085574Y2 JPH085574Y2 JP1987117157U JP11715787U JPH085574Y2 JP H085574 Y2 JPH085574 Y2 JP H085574Y2 JP 1987117157 U JP1987117157 U JP 1987117157U JP 11715787 U JP11715787 U JP 11715787U JP H085574 Y2 JPH085574 Y2 JP H085574Y2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- cooling water
- heat
- primary cooling
- temperature control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000498 cooling water Substances 0.000 claims description 31
- 238000001816 cooling Methods 0.000 description 14
- 230000020169 heat generation Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000002826 coolant Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000008399 tap water Substances 0.000 description 2
- 235000020679 tap water Nutrition 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Description
【考案の詳細な説明】 ［産業上の利用分野］ 本考案はレーザ用冷却器に関し、特に一次冷却水の温
度に対応して一次冷却水の熱交換を行うことに特徴を有
するレーザ用冷却器に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a laser cooler, and in particular to a laser cooler characterized by performing heat exchange of the primary cooling water in accordance with the temperature of the primary cooling water. Regarding
［従来の技術］ 従来、この種のレーザ用冷却器はレーザヘッド内を循
環する一次冷却水の循環路中に設けられ、一次冷却水の
熱交換を行う熱交換部と、一次冷却水の温度に応じて熱
交換部を作動又は停止させる温度制御部とよりなり、温
度制御部は一つの温度制御装置で構成されており、この
温度制御装置により熱交換器に流入する２次冷却媒体を
ON−OFFすることによって一次冷却水の温度を一定温度
に制御する構造となっていた。[Prior Art] Conventionally, this type of laser cooler is provided in a circulation path of the primary cooling water circulating in the laser head, and a heat exchange section for exchanging heat with the primary cooling water and a temperature of the primary cooling water are provided. The temperature control unit operates or stops the heat exchange unit according to the above, and the temperature control unit is configured by one temperature control device, and the temperature control device controls the secondary cooling medium flowing into the heat exchanger.
It was structured to control the temperature of the primary cooling water to a constant temperature by turning it on and off.
［解決すべき問題点］ 上述した従来のレーザ用冷却器は一つの温度制御装置
で一次冷却水の温度を一定温度に制御する構造となって
いたため、レーザヘッド内の発熱量が少ない場合にあっ
ても多量の二次冷却媒体をON−OFFすることとなり、こ
の結果温度リップルが大きくなり、またランニングコス
トも高くなるという欠点があった。[Problems to be Solved] Since the conventional laser cooler described above has a structure in which the temperature of the primary cooling water is controlled to a constant temperature by one temperature control device, there is a case where the amount of heat generated in the laser head is small. However, a large amount of secondary cooling medium is turned on and off, resulting in a large temperature ripple and a high running cost.
［問題点の解決手段］ 本考案は、上記従来の問題点を解決するためになされた
もので、そのための解決手段として、レーザヘッド内を
循環する一次冷却水の循環路中に設けられ一次冷却水の
熱交換を行う熱交換部と、一次冷却水の温度に応じて熱
交換部を作動又は停止させる温度制御部とよりなるレー
ザ用冷却器において、上記温度制御部を一次冷却水の所
定の温度範囲で作動又は停止することを示す温度ヒステ
リシスが夫々異なる２以上の温度制御装置で構成し、上
記熱交換部を上記２以上の温度制御装置の各温度ヒステ
リシスに対応して所量の熱交換を行う２以上の熱交換器
で構成したことを特徴とするレーザ用冷却器を提供する
ものである。[Means for Solving Problems] The present invention has been made to solve the above-mentioned conventional problems, and as a means for solving the problems, a primary cooling device provided in a circulation path of primary cooling water circulating in the laser head is provided. In a laser cooler comprising a heat exchanging section for exchanging heat of water and a temperature control section for activating or deactivating the heat exchanging section according to the temperature of the primary cooling water, the temperature control section is provided with a predetermined cooling water. It is configured by two or more temperature control devices each having a different temperature hysteresis indicating that it operates or stops in a temperature range, and the heat exchanging section has a certain amount of heat exchange corresponding to each temperature hysteresis of the two or more temperature control devices. The present invention provides a laser cooler characterized by comprising two or more heat exchangers for performing the above.
［実施例］ 次に、本考案の実施例について図面を参照して説明す
る。[Embodiment] Next, an embodiment of the present invention will be described with reference to the drawings.
第１図は本考案の一実施例に係るレーザ用冷却器の構
成概略図、第２図は温度制御装置の温度ヒステリシス特
性と本考案のレーザ用冷却器の冷却能力を表わした図、
第３図は本考案の他の実施例のレーザ用冷却器を示す構
成概略図である。FIG. 1 is a schematic view of the configuration of a laser cooler according to an embodiment of the present invention, and FIG. 2 is a diagram showing the temperature hysteresis characteristics of a temperature control device and the cooling capacity of the laser cooler of the present invention.
FIG. 3 is a schematic view showing the structure of a laser cooler according to another embodiment of the present invention.
第１図に示すレーザ用冷却器は、レーザヘッド１と、
純水等の一次冷却水を蓄えた一次冷却水タンク２と、循
環路３を介して一次冷却水タンク２の一次冷却水をレー
ザヘッド１に送込む循環ポンプ４と、第１冷却ファン５
を備えレーザヘッド１から送出され循環路６を通る一次
冷却水の熱交換を行って冷却する第１熱交換器７と、第
１温度センサ８を備え第１熱交換器７をON又はOFFさせ
る第１温度制御装置９と、第２冷却ファン10を備え循環
路11を通る一次冷却水の熱交換を行う第２熱交換器12
と、第２温度センサ13を備え第２熱交換器12をON又はOF
Fさせる第２温度制御装置14とよりなる。The laser cooler shown in FIG. 1 includes a laser head 1 and
A primary cooling water tank 2 that stores primary cooling water such as pure water, a circulation pump 4 that sends the primary cooling water of the primary cooling water tank 2 to the laser head 1 via a circulation path 3, and a first cooling fan 5.
A first heat exchanger 7 that is equipped with a first heat exchanger 7 that cools the primary cooling water that is sent from the laser head 1 and that passes through the circulation path 6 by heat exchange, and turns on or off the first heat exchanger 7. A second heat exchanger 12 including a first temperature control device 9 and a second cooling fan 10 for exchanging heat with the primary cooling water passing through the circulation path 11.
And a second temperature sensor 13 is provided and the second heat exchanger 12 is turned ON or OF
And a second temperature control device 14 for controlling F.
一次冷却水タンク２内にある一次冷却水は循環ポンプ
４により送出されレーザヘッド１を冷却し、第1,第２熱
交換器7,12を通り熱交換され一次冷却水タンク２へもど
る。第１熱交換器７に取付けてある第１冷却ファン５は
第１温度制御装置９によりON−OFF制御され、第２冷却
ファン10は第２温度制御装置14によりON−OFF制御され
る。The primary cooling water in the primary cooling water tank 2 is sent out by the circulation pump 4 to cool the laser head 1, passes through the first and second heat exchangers 7 and 12, and is heat-exchanged and returns to the primary cooling water tank 2. The first cooling fan 5 attached to the first heat exchanger 7 is ON / OFF controlled by the first temperature controller 9, and the second cooling fan 10 is ON / OFF controlled by the second temperature controller 14.
次に、温度制御装置9,14の温度ヒステリシス特性と冷
却能力の関係を第２図に基づいて説明する。Next, the relationship between the temperature hysteresis characteristics of the temperature control devices 9 and 14 and the cooling capacity will be described with reference to FIG.
第２図の横軸は一次冷却水温度を縦軸は温度制御装置
9,14出力のON−OFF及び冷却器の冷却能力を示す。第１
温度制御装置９の温度ヒステリシスの温度幅は例えば0.
5℃と狭く、第２温度制御装置14の温度ヒステリシスの
温度幅は例えば１℃と広く設定してあり、出力がON状態
からOFF状態になる温度を一致させた特性となってい
る。The horizontal axis of FIG. 2 is the primary cooling water temperature, and the vertical axis is the temperature controller.
Shows ON / OFF of 9,14 output and cooling capacity of cooler. First
The temperature width of the temperature hysteresis of the temperature control device 9 is, for example, 0.
The temperature width of the temperature hysteresis of the second temperature control device 14 is set as wide as 1 ° C., for example.
レーザヘッド１内の発熱が小さく第１交換器７の熱交
換能力以内の時は、一次冷却水の温度制御は第１温度制
御装置９だけで行われる。第１熱交換器７の熱交換能力
以上発熱量の場合、一次冷却水の水温は冷却能力不足の
ため上昇する。このとき、第２温度制御装置14の出力が
ONとなり、第２冷却ファン13が動作し第２熱交換器12が
熱交換をはじめ、一次冷却水の温度が制御される。この
ように発熱量によって冷却能力が自動的に切り替わる。When the heat generated in the laser head 1 is small and within the heat exchange capacity of the first exchanger 7, the temperature control of the primary cooling water is performed only by the first temperature control device 9. When the heat generation amount is equal to or higher than the heat exchange capacity of the first heat exchanger 7, the water temperature of the primary cooling water rises due to insufficient cooling capacity. At this time, the output of the second temperature control device 14
When turned on, the second cooling fan 13 operates, the second heat exchanger 12 starts heat exchange, and the temperature of the primary cooling water is controlled. In this way, the cooling capacity is automatically switched depending on the heat generation amount.
次に、本考案の他の実施例を第３図に基づいて説明す
る。Next, another embodiment of the present invention will be described with reference to FIG.
一次冷却水タンク２内にある一次冷却水は循環ポンプ
４により送出され、レーザヘッド１を冷却し、熱交換器
21を通り熱交換され一次冷却水タンク２にもどる。熱交
換器21に流入する水道水23は第１温度制御装置９で制御
される第１電磁バルブ22と、第２温度制御装置14で制御
される第２電磁バルブ23により流量が制御される。本実
施例では第1,第２温度制御装置9,14が異なる温度ヒステ
リシス特性を持っているため、レーザヘッド１の発熱量
によって熱交換器21に流れ込む水道水23の流量が自動的
に制御される。The primary cooling water in the primary cooling water tank 2 is sent out by the circulation pump 4 to cool the laser head 1 and heat exchanger.
Heat is exchanged through 21 and returns to the primary cooling water tank 2. The flow rate of the tap water 23 flowing into the heat exchanger 21 is controlled by the first electromagnetic valve 22 controlled by the first temperature control device 9 and the second electromagnetic valve 23 controlled by the second temperature control device 14. In this embodiment, since the first and second temperature control devices 9 and 14 have different temperature hysteresis characteristics, the flow rate of the tap water 23 flowing into the heat exchanger 21 is automatically controlled by the heat generation amount of the laser head 1. It
［考案の効果］ 以上説明したように本考案のレーザ用冷却器は、温度
制御部を一次冷却水の所定の温度範囲で作動又は停止す
ることを示す温度ヒステリシスが夫々異なる２以上の温
度制御装置で構成し、熱交換部を２以上の温度制御装置
の各温度ヒステリシスに対応して所量の熱交換を行う２
以上の熱交換器で構成したため、熱負荷の大小によって
自動的に冷却能力を変えることができ、低熱負荷時の温
度リップルの減少やランニングコストの減少、または空
冷冷却器の場合には冷却ファンによる騒音の減少を図る
ことができる効果がある。[Advantages of the Invention] As described above, the laser cooler of the present invention has two or more temperature control devices, each of which has different temperature hysteresis indicating that the temperature control unit is operated or stopped within a predetermined temperature range of the primary cooling water. The heat exchange part performs heat exchange in an amount corresponding to each temperature hysteresis of two or more temperature control devices.
Since it is configured with the above heat exchanger, the cooling capacity can be automatically changed depending on the size of the heat load, and the temperature ripple and running cost at low heat load can be reduced, or by the cooling fan in the case of an air-cooled cooler. There is an effect that noise can be reduced.
第１図は本考案の一実施例に係るレーザ用冷却器の構成
概略図、第２図は温度制御装置の温度ヒステリシス特性
と本考案のレーザ用冷却器の冷却能力を表わした図、第
３図は本考案の他の実施例のレーザ用冷却器を示す構成
概略図である。 1:レーザーヘッド 7,12,21:熱交換器 9,14:温度制御装置FIG. 1 is a schematic view of the configuration of a laser cooler according to an embodiment of the present invention, FIG. 2 is a diagram showing the temperature hysteresis characteristics of a temperature control device and the cooling capacity of the laser cooler of the present invention, and FIG. FIG. 1 is a schematic view showing the structure of a laser cooler according to another embodiment of the present invention. 1: Laser head 7,12,21: Heat exchanger 9,14: Temperature controller
Claims (1)
環路中に設けられ一次冷却水の熱交換を行う熱交換部
と、一次冷却水の温度に応じて熱交換部を作動又は停止
させる温度制御部とよりなるレーザ用冷却器において、 上記温度制御部を一次冷却水の所定の温度範囲で作動又
は停止することを示す温度ヒステリシスが夫々異なる２
以上の温度制御装置で構成し、 上記熱交換部を上記２以上の温度制御装置の各温度ヒス
テリシスに対応して所量の熱交換を行う２以上の熱交換
器で構成したことを特徴とするレーザ用冷却器。1. A heat exchanging unit for exchanging heat of the primary cooling water, which is provided in a circulation passage of the primary cooling water circulating in the laser head, and activates or deactivates the heat exchanging unit according to the temperature of the primary cooling water. In a laser cooler including a temperature control unit, temperature hysteresis indicating that the temperature control unit is operated or stopped in a predetermined temperature range of the primary cooling water is different from each other.
It is characterized in that it is configured by the above temperature control device, and that the heat exchange section is configured by two or more heat exchangers that exchange heat in an amount corresponding to each temperature hysteresis of the two or more temperature control devices. Laser cooler.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987117157U JPH085574Y2 (en) | 1987-07-30 | 1987-07-30 | Laser cooler |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987117157U JPH085574Y2 (en) | 1987-07-30 | 1987-07-30 | Laser cooler |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6422064U JPS6422064U (en) | 1989-02-03 |
| JPH085574Y2 true JPH085574Y2 (en) | 1996-02-14 |
Family
ID=31360353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987117157U Expired - Lifetime JPH085574Y2 (en) | 1987-07-30 | 1987-07-30 | Laser cooler |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH085574Y2 (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59119056U (en) * | 1983-01-29 | 1984-08-11 | 株式会社東芝 | Solid state laser oscillation device |
| JPS59138258U (en) * | 1983-03-03 | 1984-09-14 | 三菱電機株式会社 | Laser oscillator cooling system |
| JPS59182957U (en) * | 1983-05-23 | 1984-12-06 | 株式会社 アマダ | Gas laser oscillation device |
-
1987
- 1987-07-30 JP JP1987117157U patent/JPH085574Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6422064U (en) | 1989-02-03 |
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