JPH085662A - Inspection probe - Google Patents

Abstract

(57) [Summary] [Object] To provide an inspection probe in which a plurality of probes can be arranged at a finer pitch. [Structure] A plurality of probe fitting grooves 2 are provided on an end surface 1a of a block 1.
A conductive probe 3 which has elasticity in its length direction is formed in each groove 2, and both end portions of the conductive probe 3 are projected from both open ends of the groove 2 and are prevented from being pulled out, and The probe holding members 5 are fitted to each other in an electrically insulated state and held by the probe holding member 5. With this configuration, it is possible to arrange a large number of probes at a remarkably fine pitch, as compared with the conventional configuration in which holes are formed in the block and the probes are inserted into the holes via sockets and sleeves. .

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a chip component, an LSI,
The present invention relates to a probe used when electrically inspecting an electrical component such as an LCD, and more specifically, it is formed by holding a plurality of probes in parallel with each other and elastically provided in each length direction. The present invention relates to an inspection probe for taking out an electric signal from each terminal by bringing the tip of each probe into contact with a plurality of terminals of a component to be inspected.

[0002]

2. Description of the Related Art FIGS. 6A and 6B are views showing the structure of a conventional inspection probe of this type, in which FIG. 6A is a plan view and FIG. 6B is a front view.
(C) is a side sectional view.

As shown in the figure, in this conventional probe, a plurality of conductive probes 51 are inserted into a plurality of holding holes 53 provided in an insulating block 52 via conductive sleeves 55, respectively. As a result, they are held in parallel with each other. Each probe 51 has its rear end portion slidably fitted in a conductive socket 56 while being biased outward by a coil spring 57 and prevented from coming off. 56 is fixed in the sleeve 55. In other words, each probe 51 has a block 5
The two holding holes 53 are held in parallel with each other while being electrically insulated from each other and having elasticity in the length direction by a coil spring 57. Further, the number and pitch of the probes 51 are set corresponding to the terminals of the inspected component.

In the probe having the above structure, each probe 5
By bringing the tip portion of 1 into contact with each terminal of the component to be inspected, an electric signal can be taken out from each terminal through the probe 51, the socket 56, and the sleeve 55.
At this time, each probe 51 is pressed against each terminal by the elastic force of the coil spring 57 without giving a shock.

[0005]

However, in the structure of the conventional inspection probe as described above, it is difficult to form the holding hole 53 in the block 52 with a minute diameter and a small pitch, and the holding hole 53 is difficult. 53, the probe 51, which is made elastic by the coil spring 57, is housed and inserted in the socket 56 and the sleeve 55, so that a large number of probe 51 are increasingly densified in recent years. It has become almost impossible to arrange the terminals corresponding to the fine pitch terminals such as LCD.

The present invention has been proposed to solve this problem, and an object thereof is to provide an inspection probe in which a plurality of probes can be arranged at a finer pitch.

[0007]

In order to achieve the above object, the inspection probe according to the first invention has the following structure.

That is, a plurality of parallel probe fitting grooves (2) are provided on at least one end face (1a) of the block (1).
The groove (2) is formed so as to penetrate the block (1) and have both ends opened. Then, in each of the probe fitting grooves (2) of the block (1), a conductive probe (3) which itself has elasticity in the longitudinal direction is attached to both ends of each probe (3). The probe fitting grooves (2) are fitted and held in a state in which they are projected from both open ends of the probe fitting grooves (2) and are prevented from being pulled out, and in a state of being electrically insulated from each other.

As another structure of the first invention, the plurality of probe fitting grooves (2) of the block (1) are provided.
A deep groove (11) deeper than each of the probe fitting grooves (2) is formed on the end face (1a) formed with the two in a manner that the probe fitting grooves (2) are divided into two at right angles. By inserting a notch (12) between the probe fitting grooves (2), the block (1) is made to have the probe fitting grooves (2),
A plurality of pairs of elastic portions (13) having elasticity in the length direction of each probe fitting groove (2) are formed, and each pair of elastic portions (1) is formed.
The conductive probe (3) having the above elasticity is fitted into the probe fitting groove (2) of 3) and held in a fixed state.

Further, the inspection probe according to the second invention has the following structure.

That is, a plurality of slits (25a, 26a)
By laminating two lattice plates (25, 26) each having a plurality of slits (25a, 26a) in an intersecting state, the plurality of slit intersections are used as probe insertion holes (27). A probe holding plate (21) is formed, and two probe holding plates (21) and a spacer (2) are formed.
The hollow blocks (23) are formed by combining them in a state of facing each other via 2). Then, the pair of opposed probe insertion holes (27) of the two probe holding plates (21) constituting the hollow block (23) are themselves provided with elasticity in the longitudinal direction. The probe (3) of
Both ends of each probe (3) are connected to the hollow block (23).
The outer side of the base plate, and is inserted and attached in a state of being prevented from being pulled out and electrically insulated from each other.

[0012]

In the structure according to the first aspect of the invention, the plurality of probe fitting grooves (2) formed on the end surface (1a) of the block (1) have a minute width and a pitch, unlike the holes. Can be formed. Further, since the probe (3) fitted in each probe fitting groove (2) itself has elasticity, it is not necessary to fit it in the socket and the sleeve together with the coil spring, and it is formed extremely thin. be able to.

That is, in the inspection probe according to the first aspect of the invention, as compared with the conventional structure in which a hole is formed in a block and a probe is inserted into the hole via a socket and a sleeve, the probe is much smaller. It is possible to arrange a large number of probes (3) at various pitches.

Further, in another configuration of the first invention, each probe (3) has a block (1) near both ends thereof.
Fixed to each pair of elastic parts (13), and the probe (3)
Due to the elasticity of itself and the elasticity of the elastic portion (13), elasticity is provided in each longitudinal direction. According to this configuration, since each probe (3) can be directly fixed and held to each pair of elastic portions (13) of the block (1), each probe (3) can be held.
Can be made very thin, and hence the pitch can be further miniaturized.

Further, in the inspection probe according to the second aspect of the invention, the slits (25a, 26a) provided in the lattice plates (25, 26) of the probe holding plates (21) are provided.
Like the probe fitting groove in the inspection probe of the first invention, can be formed with a small width and pitch with high accuracy and easily. Therefore, the slit (2
5a, 26a) by intersecting each other, it is possible to form a plurality of fine probe insertion holes (27) with a fine pitch, accurately and easily, and in a state where they are two-dimensionally spread and arranged. it can. Then, each probe insertion hole (2
By inserting the probes (3) into 7), it becomes possible to arrange a large number of probes (3) in a two-dimensional manner with a minute pitch.

The reference numerals in the above parentheses are for comparison with the drawings and do not limit the structure of the present invention.

[0017]

Embodiments of the present invention will be described below with reference to the drawings. <First Invention> FIG. 1 is a view showing a first embodiment of an inspection probe according to the first invention. (A) is a partially cutaway front view, (b) is a plan view, c) is a side sectional view.

As shown in the drawing, in this probe, a plurality of parallel probe fitting grooves 2 which are parallel to each other are formed on an end surface 1a of a block 1 made of an insulating material such as a synthetic resin so as to extend vertically through the block 1. Is formed with both ends thereof open, and the probe 3 is fitted in each of the probe fitting grooves 2 with both ends thereof protruding from both open ends of the grooves 2. Further, a plate-shaped probe holding member 5 made of an insulating material such as a synthetic resin is attached to the end face (groove forming end face) 1a of the block 1 by using a screw 6, whereby each probe fitting groove 2 is attached. The fitted probe 3 is held so as not to come off.

The probe 3 is electrically conductive and has elasticity in the lengthwise direction. For example, as shown in FIG.
As shown in (c), a large number of holes 3b and notches 3c are provided in the thin metal plate 3a, and the periphery of the metal plate 3a is covered with an insulating rubber 3d for reinforcement. Then, the probe 3 is press-fitted into the probe fitting groove 2 of the block 1 to be fitted in a state in which it is prevented from coming off. In addition, each probe 3 press-fitted into each probe fitting groove 2 is electrically insulated from each other because the surrounding rubber 3d and the block 1 and the probe holding member 5 are insulative. It is in.

If the metal plate 3a is covered with an insulating rubber 3d like the probe 3, the block 1 and the probe holding member 5 are made of a conductive material such as metal. It is also possible to configure with.

In the above structure, the end surface 1a of the block 1 is
The plurality of probe fitting grooves 2 formed in is different from the one in which holes are formed.
It can be formed accurately and easily. Further, since the probe 3 fitted in each probe fitting groove 2 is also provided with elasticity itself, it is not necessary to store it in the socket and the sleeve together with the coil spring, and it is very thin, for example, a thickness of 0. It can be formed to about 05 mm.

That is, in the probe having the above-mentioned structure, compared to the conventional structure in which holes are formed in the block and the probe is inserted into the holes via the socket and the sleeve, a large number of holes are arranged at a remarkably small pitch. It is possible to arrange the probes 3. Therefore, it is possible to sufficiently deal with terminals having a fine pitch, such as chip parts, LSI, and LCD.
Moreover, since the configuration is simple and the number of parts and the number of assembly steps are reduced,
The cost can also be reduced.

Using this probe, chip parts, LS
To inspect electrical components such as I and LCD, one end of each probe 3 is brought into contact with each terminal (not shown) of the component to be inspected, and the other end is input terminal (not shown) of the inspection machine or the measuring machine. Contact). Thereby, an electric signal can be taken out from each terminal of the inspected component through each probe 3 of the probe. At this time, each probe 3 is reliably pressed against each terminal of both the inspected component and the inspection machine due to the elastic force in the lengthwise direction, and does not give a shock.

FIG. 2 shows the probe 3 in the first embodiment.
FIG. 7 is a side sectional view showing another configuration example of the probe fitting groove 2.

As shown in the figure, the probe 3 of this structural example is formed by bending the central portion of a metal pin into a U shape, and the probe fitting of the block 1 into which the probe 3 is fitted. The groove 2 is formed with a recess 2a for engaging the curved portion 3e of the probe 3. The recess 2a is formed on the end surface 1 of the block 1.
It is possible to easily form a lateral groove at a, which intersects each probe fitting groove 2 at a right angle, by engraving deeper than the probe fitting groove 2.

In this structure, the probe 3 has the curved portion 3e.
As a result, the elastic member itself has elasticity in the longitudinal direction, and further, the curved portion 3e is engaged with the concave portion 2a of the probe fitting groove 2 so as to be prevented from coming off.

According to this structure, since the structure of the probe 3 is very simple, it can be manufactured more easily and at low cost. However, in order to insulate the probes 3 from each other, it is necessary to form the block 1 and the probe holding member 5 with an insulating material.

FIGS. 3A, 3B and 3C show the first
FIG. 9 is a plan view showing another configuration example of the inspection probe in the example of FIG.

In the configuration example shown in FIG. 3 (a), a plurality of probe fitting grooves 2 are formed on the two end faces 1a of the block 1 on the front side and the back side, respectively, with their positions alternately displaced. The probe 3 is fitted into each groove 2, and
A probe holding member 5 is attached to each of the end faces 1a using a screw 6. According to this configuration, the probe 3
The pitch of can be further miniaturized.

In the embodiment shown in FIG. 3 (b), the probe fitting groove 2'of another block 1'is formed on the end face 1a of one block 1 on which the probe fitting groove 2 is formed. End face 1'a
Are joined by paralleling the two probe fitting grooves 2 and 2'in parallel with each other and offset from each other. In this case, both the blocks 1 and 1'become probe holding members that hold the other probes 3 and 3'to each other. According to this configuration, the pitch of the probes 3 and 3'can be made smaller, as in the configuration of FIG. 3 (a).

In the embodiment shown in FIG. 3C, the end face 1a
The probe 3 is fitted in the probe fitting groove 2 of the
4 blocks 1 in which the probe holding member 5 is attached to a,
It is composed by combining it into a rectangle. By combining a plurality of blocks 1 as in this configuration, a large number of probes 3 can be arranged corresponding to various arrangements of the terminals of the component to be inspected.

FIG. 4 is a view showing a second embodiment of the inspection probe according to the first invention, (a) is a partial front view,
(B) is a partial plan view and (c) is a sectional view taken along the line AA of (a).

As shown in the figure, in this probe, a plurality of probe fitting grooves 2 of a block 1 made of an insulating material such as a synthetic resin are provided.
A deep groove 1 deeper than each of the probe fitting grooves 2 is formed on the end face 1a in which the probe fitting groove 2 is formed by dividing the probe fitting groove 2 in two at right angles.
1 is formed, and a notch 12 having the same depth as the deep groove 11 is formed between each probe fitting groove 2, whereby the block 1 corresponds to each probe fitting groove 2, Plural pairs of elastic portions 13 having elasticity are formed in the lengthwise direction of each probe fitting groove 2. Then, the conductive probe 3 which itself has elasticity in the lengthwise direction is fitted into the probe fitting groove 2 of each pair of elastic portions 13 and is held in a state of being fixed by the adhesive 15. ing.

In the case of this embodiment, each pair of elastic portions 13 is
Are formed in an L shape in a state of extending above and below the block 1. From the upper and lower ends of the elastic portions 13 of each pair,
Both ends of the probe 3 are projected. Further, the probe 3 is configured to have elasticity in its length direction by forming a U-shaped bent portion 3f having substantially the same cross-sectional shape as the deep groove 11 in the central portion of the thin metal piece. ing.

That is, in this probe, each probe 3 is fixed to the elastic portions 13 of each pair of the block 1 near both ends thereof, and the elasticity of the probe 3 itself and the elasticity of the elastic portion 13 respectively cause the probe 3 to move. Will have elasticity in the longitudinal direction. Further, since the blocks 1 are made of an insulating material, the respective probes 3 are in an electrically insulated state from each other.

According to the probe of this embodiment, since each probe 3 is directly fixed and held to each pair of elastic portions 13 of the block 1, each probe 3 can be made very thin. Therefore, it becomes possible to make the pitch finer and to cope with terminals having a finer pitch.

Further, since it is not necessary to attach the probe holding member as in the first embodiment to the end surface 1a of the block 1 in which the probe fitting groove 2 is formed, there is a space limitation for the parts to be inspected. Will be drastically reduced. In other words, it becomes possible to correspond to more forms of parts.

Besides, by applying the configuration of this embodiment,
By combining the block 1 from the back so as to cover another block having a deep groove into which the block 1 can be loosely inserted, it is possible to correspond to terminals having a finer pitch. <Second Invention> FIG. 5 is a view showing an embodiment of an inspection probe according to the second invention, (a) is a front view and (b) is a plan view.

As shown in the figure, in this probe, a hollow block 23 is constructed by combining two probe holding plates 21 in a state where they are opposed to each other with a spacer 22 in between, and a plurality of hollow blocks 23 are formed. The probe 3 is held.

Each of the probe holding plates 21 is formed by stacking two lattice plates 25 and 26 having a plurality of slits 25a and 26a in a state where the slits 25a and 26a are crossed at right angles. The intersections of the slits are used as the probe insertion holes 27. The lattice plates 25 and 26 of each probe holding plate 21, and the probe holding plate 21 and the spacer 22 are bonded and fixed to each other with an adhesive material. In addition, the above-mentioned two grid plates 25, 26
The crossing angles of the respective slits 25a and 26a need not be right angles.

The upper and lower probe holding plates 21 are assembled so that the respective probe insertion holes 27 face each other, and the probe 3 is inserted into each pair of the probe insertion holes 27 facing each other.
Both ends of each probe 3 are inserted and attached in a state where both ends of the probe 3 are projected to the outside of the hollow block 23.

The probe 3 is made of a thin metal wire such as a piano wire having elasticity, and when the compressive force is applied from both ends of the probe 3, the center part is bent so that the probe 3 has elasticity in its length direction. Is configured. In addition, the probe 3 has a lower end portion having a diameter smaller than that of the upper portion, and the size of each probe insertion hole 27 of the lower probe holding plate 21 into which the lower end portion is inserted, that is, two sheets. Each slit 25 of the lattice plates 25, 26 of
By making the widths of a and 26a smaller than that of the upper side, they are prevented from coming off downward.

The lattice plates 25 and 26 of the upper and lower probe holding plates 21 are made of an insulating material such as synthetic resin, so that the probes 3 are electrically insulated from each other. is there. Further, each probe 3 is provided with an insulating coating on a portion between the upper and lower probe holding plates 21, and is adjacent to each other when it is bent by being pressed against each terminal of both the inspected component and the inspection machine. Even if the probes 3 come into contact with each other, they are kept insulated from each other.

In the above structure, the slits 25a, 2 provided in the lattice plates 25, 26 of the probe holding plates 21 respectively.
Similar to the probe fitting groove in the inspection probe of the first invention described above, 6a can be formed accurately and easily with a minute width and pitch using a precision groove carving machine or the like. it can. Therefore, by intersecting the slits 25a and 26a, a plurality of fine probe insertion holes 27 are formed.
Can be formed accurately and easily with a fine pitch and in a state where they are two-dimensionally spread and arranged. Then, by inserting the probes 3 into the respective probe insertion holes 27, it becomes possible to arrange a large number of the probes 3 in a two-dimensional manner at a minute pitch.

That is, according to the inspection probe of the second aspect of the present invention, it is possible to sufficiently and easily cope with terminals arranged in various shapes at a fine pitch such as chip parts, LSI, and LCD. It becomes possible.

[0046]

As described above, according to the inspection probe of the first invention, a large number of probes having elasticity in the length direction are arranged at a much finer pitch as compared with the conventional probe. Can be arranged. Therefore, it is possible to sufficiently deal with terminals with a fine pitch such as high-density chip parts, LSIs, LCDs, and the like. Moreover, since the structure is simple and the number of parts and the number of assembling steps are reduced, the cost can be reduced.

If a plurality of pairs of elastic portions are formed in the block and the probe is fitted and fixed in the probe fitting groove of each pair of elastic portions, the thickness of the probe can be reduced. It can be made very thin, so that it becomes possible to further miniaturize the pitch and accommodate terminals with a finer pitch.

Further, according to the inspection probe of the second aspect of the invention, a large number of probes can be arranged in a two-dimensional manner with a minute pitch, so that the chip parts and the LS can be arranged.
It becomes possible to sufficiently and easily deal with terminals arranged in various shapes with a fine pitch, such as I and LCD.

[Brief description of drawings]

FIG. 1 is a view showing a first embodiment of an inspection probe according to the first invention, (a) is a partially cutaway front view, (b)
Is a plan view and (c) is a side sectional view.

FIG. 2 is a side sectional view showing another configuration example of the probe and the probe fitting groove in the first embodiment.

3A, 3B, and 3C are plan views showing another configuration example of the inspection probe in the first embodiment.

4A and 4B are views showing a second embodiment of the inspection probe according to the first invention, wherein FIG. 4A is a partial front view, FIG. 4B is a partial plan view, and FIG. It is an A line sectional view.

5A and 5B are views showing an embodiment of an inspection probe according to the second invention, wherein FIG. 5A is a front view and FIG. 5B is a plan view.

FIG. 6 is a diagram showing a configuration of a conventional inspection probe,
(A) is a plan view, (b) is a front view, and (c) is a side sectional view.

[Explanation of symbols]

 1, 1'block 1a, 1'a end face 2, 2'probe fitting groove 3, 3'probe 5 probe holding member 11 deep groove 12 notch 13 elastic part 21 probe holding plate 22 spacer 23 hollow block 25, 26 Lattice plate 25a, 26a Slit 27 Probe insertion hole

Claims (4)

[Claims] 1. A plurality of conductive probes arranged parallel to each other,
In addition, the probe is electrically insulated from each other and is held in a state of having elasticity in each length direction, and the tip of each probe is brought into contact with a plurality of terminals of the component to be inspected to In an inspection probe for extracting an electric signal from a terminal, a plurality of parallel probe fitting grooves are formed on at least one end surface of a block in a state where both ends of the groove are opened through the block, In each of the probe fitting grooves of the block, a conductive probe having elasticity in its length direction is provided, and both ends of the probe are projected from both open ends of the probe fitting grooves. A probe for inspection, characterized in that it is fitted and held in a state in which it is prevented from being pulled out and is electrically insulated from each other. 2. A deep groove deeper than each of the probe fitting grooves is formed on an end surface of the block in which the plurality of probe fitting grooves are formed, by dividing the probe fitting grooves into two at right angles. With
By making a cut between the probe fitting grooves,
A plurality of pairs of elastic portions having elasticity in the length direction of each probe fitting groove are formed in the block so as to correspond to each probe fitting groove, and the probe of the elastic portion of each pair is formed. The probe for inspection according to claim 1, wherein the conductive probe having elasticity is fitted in the fitting groove and held in a fixed state. 3. A plurality of conductive probes arranged parallel to each other,
In addition, the probe is electrically insulated from each other and is held in a state of having elasticity in each length direction, and the tip of each probe is brought into contact with a plurality of terminals of the component to be inspected to In an inspection probe for extracting an electric signal from a terminal, two grid plates having a plurality of slits are overlapped with each other so that the slits intersect with each other, and the intersections of the slits are respectively inserted into a probe insertion hole. A probe holding plate is formed, and two probe holding plates are combined so as to face each other with a spacer interposed therebetween to form a hollow block, and the two probe forming the hollow block. When each pair of opposing probe insertion holes of the holding plate has a conductive probe having elasticity in its lengthwise direction, both ends of each probe are projected to the outside of the hollow block. Tomo In vent stopped state, and was inserted in a state of electrically insulated from one another, the inspection probe, characterized in that. 4. The probe for inspection according to claim 3, wherein an insulating coating is applied to a portion of each probe between the two probe holding plates.