JPH087217A - Magnetic head and its production - Google Patents
Magnetic head and its productionInfo
- Publication number
- JPH087217A JPH087217A JP13408094A JP13408094A JPH087217A JP H087217 A JPH087217 A JP H087217A JP 13408094 A JP13408094 A JP 13408094A JP 13408094 A JP13408094 A JP 13408094A JP H087217 A JPH087217 A JP H087217A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic core
- layer
- substrate
- magnetic head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 239000000758 substrate Substances 0.000 claims abstract description 37
- 238000005304 joining Methods 0.000 claims abstract description 7
- 238000005530 etching Methods 0.000 claims abstract description 3
- 239000000696 magnetic material Substances 0.000 claims description 11
- 229910045601 alloy Inorganic materials 0.000 claims description 7
- 239000000956 alloy Substances 0.000 claims description 7
- 229910005435 FeTaN Inorganic materials 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 238000005520 cutting process Methods 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 239000011521 glass Substances 0.000 description 11
- 238000005299 abrasion Methods 0.000 description 9
- 238000004804 winding Methods 0.000 description 8
- 230000001105 regulatory effect Effects 0.000 description 5
- 230000004907 flux Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 229910000702 sendust Inorganic materials 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は磁気記録装置に使用する
磁気ヘッドに関し、特に薄い磁気コアを非磁性体板で狭
持した構成の磁気ヘッド(以下サンドイッチ型磁気ヘッ
ドと呼ぶ)に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used in a magnetic recording apparatus, and more particularly to a magnetic head having a thin magnetic core sandwiched between nonmagnetic plates (hereinafter referred to as a sandwich type magnetic head).
【0002】[0002]
【従来の技術】磁気記録の高密度化に伴い、金属磁性材
料のセンダスト、アモルファス、パーマロイ等の高飽和
磁束密度磁性金属を磁気コアとする磁気ヘッドが、最近
広く使用されている。このような金属磁性材料を磁気コ
アとするいわゆるバルク型磁気ヘッドは、磁気コアが高
飽和磁束密度を有するため、磁気特性上は磁気コアをフ
ェライト等の酸化物磁性材料とするものに比べて非常に
薄くできるが、記録媒体との摺動特性からは耐磨耗性や
機械的強度が要求されるため、特開昭63−48606
号公報に開示されているような、サンドイッチ型磁気ヘ
ッドが一般的に使用されている。このサンドイッチ型磁
気ヘッドの製造方法について、図面を参照して説明す
る。図6aに示すように、非磁性体板1の片面に、高飽
和磁束密度を有する金属磁性材料としてセンダスト等か
らなる磁性層2を、スパッタ等の方法により形成する。
更に、少なくとも一方の非磁性体板1に、接合層3とな
るガラス層を同様の方法で形成する。図6bに示すよう
に、この非磁性体板1二枚を薄膜形成面を対向させて重
ね合わせて加熱して、接合層3のガラスを溶融し、一体
化して磁気コア基板4を作成する。次いで、この磁気コ
ア基板4を図6bに点線で示すように、積層方向と直交
する面で切断して磁気コア半体7を作成する。そして、
図6cに示すように、この磁気コア半体7の切断分離面
に、切削加工により卷線溝5及び磁気コアの厚さより小
さい寸法のトラック幅を形成するため、トラック幅規制
溝6a,6bを形成する。図7に示すように、この磁気
コア半体7,7を卷線溝5を対向させ、トラック幅規制
溝6a,6bに埋め込んだガラス8を溶融し、ギャップ
スペーサ(図示せず)を介して磁気ギャップGを形成し
て一体化し、磁気コアチップ9が作成される。そして、
この磁気コアチップ9に形成した巻線溝5を通して導電
線(図示せず)を巻付けてサンドイッチ型磁気ヘッドが
完成する。2. Description of the Related Art With the increase in density of magnetic recording, magnetic heads having a magnetic core of a magnetic metal having a high saturation magnetic flux density such as sendust, amorphous, and permalloy, have been widely used recently. A so-called bulk type magnetic head using such a metal magnetic material as a magnetic core has a magnetic core having a high saturation magnetic flux density, and therefore, in terms of magnetic characteristics, the magnetic core has a magnetic field density higher than that of an oxide magnetic material such as ferrite. Although it can be made extremely thin, abrasion resistance and mechanical strength are required due to sliding characteristics with respect to the recording medium, and therefore, it is disclosed in JP-A-63-48606.
A sandwich type magnetic head as disclosed in Japanese Patent Publication is generally used. A method of manufacturing this sandwich type magnetic head will be described with reference to the drawings. As shown in FIG. 6a, a magnetic layer 2 made of sendust or the like as a metallic magnetic material having a high saturation magnetic flux density is formed on one surface of the non-magnetic plate 1 by a method such as sputtering.
Further, a glass layer serving as the bonding layer 3 is formed on at least one of the nonmagnetic plates 1 by the same method. As shown in FIG. 6b, the two non-magnetic plates 1 are laminated and heated with their thin film forming surfaces facing each other, and the glass of the bonding layer 3 is melted and integrated to form a magnetic core substrate 4. Next, the magnetic core substrate 4 is cut along a plane orthogonal to the stacking direction to form a magnetic core half body 7, as shown by a dotted line in FIG. 6B. And
As shown in FIG. 6c, track width regulating grooves 6a and 6b are formed on the cut separation surface of the magnetic core half body 7 by cutting so as to form a track width smaller than the thickness of the winding groove 5 and the magnetic core. Form. As shown in FIG. 7, the magnetic core halves 7 and 7 are made to face the winding groove 5, and the glass 8 embedded in the track width regulating grooves 6a and 6b is melted, and a gap spacer (not shown) is used. The magnetic gap G is formed and integrated to form the magnetic core chip 9. And
A conductive wire (not shown) is wound through the winding groove 5 formed in the magnetic core chip 9 to complete the sandwich type magnetic head.
【0003】[0003]
【発明が解決しようとする課題】最近、磁気記録の高密
度化が更に進み、記録トラックの幅が数ミクロンと狭小
化すると、トラック幅規制溝の加工精度に対する要求が
厳しくなり、加工時の歩留が低下するとともに、このト
ラック幅規制溝に埋め込んだ、耐磨耗性の低い接合用の
ガラスが記録媒体との摺接面に露出するため、実用時に
記録媒体との摺接面の中で、特にガラス部の磨耗が大き
くなり、偏磨耗が起こり記録媒体との摺接に不具合が生
じるという問題があった。本発明は、上述した従来の問
題を解決するために提案するもので、トラック幅の狭小
化に対応した高精度加工に好適し、しかも偏磨耗の生じ
ない、サンドイッチ型磁気ヘッドを提供することを目的
とする。Recently, as the density of magnetic recording has further increased and the width of the recording track has been narrowed down to a few microns, the requirement for the processing accuracy of the track width regulating groove becomes strict, and the step during processing becomes difficult. As the retention decreases, the glass for bonding, which is embedded in the track width regulation groove and has low wear resistance, is exposed at the sliding contact surface with the recording medium. In particular, there has been a problem that the glass portion is greatly worn and uneven wear is caused to cause a problem in sliding contact with the recording medium. The present invention proposes to solve the above-mentioned conventional problems, and provides a sandwich-type magnetic head suitable for high-precision processing corresponding to the narrowing of the track width and free from uneven wear. To aim.
【0004】[0004]
【課題を解決するための手段】磁気ギャップG形成部位
のトラック幅方向の両側に凸部10を配した非磁性体板
1により磁性体層11を挟持したことを特徴とする磁気
ヘッドであって、その製造方法は、該非磁性体板1の少
なくとも片面をエッチングして凸部10を形成し、該非
磁性体板1の凸部10を含む凸部形成面に磁性体層11
を形成し、平坦化して基板12を作成し、二枚の前記基
板12を凸部10を対向させて、接合一体化して磁気コ
ア基板14を作成し、該磁気コア基板14を凸部対向部
において、該磁気コア基板14の接合面に直交する面で
切断分離して磁気コア半体15を作成し、該磁気コア半
体15を前記切断面を対向させて、ギャップスペーサを
介して接合一体化して作成した磁気コアチップ16を用
いることを特徴とする。そして、高密度記録用の高抗磁
力媒体への磁気記録特性を向上した狭トラック磁気ヘッ
ドを実現するには、該磁性体層11をFeTaN合金で
構成するのが望ましい。A magnetic head is characterized in that a magnetic layer (11) is sandwiched between non-magnetic plates (1) having protrusions (10) on both sides of a magnetic gap (G) forming portion in the track width direction. According to the manufacturing method, at least one surface of the non-magnetic material plate 1 is etched to form the convex portion 10, and the magnetic material layer 11 is formed on the convex portion forming surface including the convex portion 10 of the non-magnetic material plate 1.
To form a substrate 12, the substrate 12 is flattened, the two convex portions 10 of the two substrates 12 are opposed to each other, and the magnetic core substrate 14 is formed by joining and joining the magnetic core substrate 14. In, the magnetic core substrate 14 is cut and separated at a plane orthogonal to the joint surface to form a magnetic core half body 15. The magnetic core half body 15 is made to face the cut surface, and the magnetic core half body 15 is integrally bonded via a gap spacer. It is characterized in that a magnetic core chip 16 produced by converting the magnetic core chip 16 into a chip is used. In order to realize a narrow track magnetic head with improved magnetic recording characteristics on a high coercive force medium for high density recording, it is desirable that the magnetic layer 11 be made of FeTaN alloy.
【0005】[0005]
【作用】トラック幅が数ミクロンと非常に狭くても、本
発明の構成によれば、非磁性体板1の凸部10形成面に
形成された磁性体層11の厚さによりトラック幅が規制
されるが、この磁性体層11の厚さはサブミクロンの単
位で平面研磨により加工できるので、トラック幅の加工
精度は高くできる。また、記録媒体との摺接面は、とも
に耐磨耗性の高い磁性体層11と非磁性体板1のみで形
成され、ガラスが露出しないため、実用時にガラス部が
大きく磨耗して生ずる偏磨耗は起こらない。そして、磁
性体層11としてFeTaN合金を使用すれば、磁気記
録特性および耐磨耗性が向上するため、数ミクロンの狭
トラックで高抗磁力媒体に磁気記録再生が可能で、しか
も耐磨耗性を向上したサンドイッチ型磁気ヘッドを提供
できる。According to the structure of the present invention, the track width is regulated by the thickness of the magnetic layer 11 formed on the surface of the non-magnetic plate 1 on which the protrusion 10 is formed, even if the track width is very narrow, such as several microns. However, since the thickness of the magnetic layer 11 can be processed by plane polishing in units of submicrons, the processing accuracy of the track width can be increased. Further, the sliding contact surface with the recording medium is formed only by the magnetic layer 11 and the non-magnetic plate 1 having high abrasion resistance, and the glass is not exposed. No wear occurs. If FeTaN alloy is used for the magnetic layer 11, magnetic recording characteristics and abrasion resistance are improved, so that magnetic recording / reproduction can be performed on a high coercive force medium with a narrow track of several microns, and the abrasion resistance is also improved. It is possible to provide a sandwich type magnetic head having improved
【0006】[0006]
【実施例】本発明の一実施例について図面を参照して説
明する。図において、従来例と同じ部分には同一符号を
付して説明を省略する。本発明の磁気ヘッドは非磁性体
板1に形成された凸部10によりトラック幅が規制され
る構成となっていることを特徴とする。以下、本発明の
磁気ヘッドの製造方法について詳細に説明する。図1に
示すように、非磁性体板1の片面にエッチングにより磁
性体コアの厚さTcとトラック幅Ttから求められる高
さh=(Tc−Tt)/2の凸部10を形成し、該凸部
10形成面に磁性体層11として、例えばFeTaN合
金の薄膜を磁性体コアの厚さの半分の厚さTc/2より
若干厚くスパッタで形成する。該磁性体層11形成面
を、図2aに示すように、磁性体コアの半分の厚さTc
/2になるように研磨し、平担化して第一の基板12a
を形成する。また、図2bに示すように、その平担化し
た磁性体層11の上に、接合層13としてガラス層を極
薄く形成した第二の基板12bを形成する。図3に示す
ように、前記第一の基板12aと第二の基板12bとを
相互に磁性体層11及び接合層13形成面で重ね合わ
せ、接合層13のガラスを加熱溶融し、接合一体化して
磁気コア基板14を形成する。そして、非磁性体板1に
形成した凸部10のほぼ中央部において、接合面と直交
する面で点線で示すように、前記磁気コア基板14を切
断し、磁気コア半体15を得る。図4に示すように、該
磁気コア半体15の少なくとも一方の切断面に、従来例
と同様に卷線溝5を形成し、この卷線溝5に埋め込んだ
接合用のガラス8により、ギャップスペーサ(図示せ
ず)を介して接合一体化して、磁気ギャップGを形成し
た磁気コアチップ16を得る、この磁気コアチップ16
に形成した巻線溝5に導電線(図示せず)を卷付けて本
発明の磁気ヘッドが完成する。以上説明したように、こ
のように製造されたサンドイッチ型磁気ヘッドは、トラ
ツク幅Ttが切削加工でなく、高精度加工が可能な平面
研磨で形成されるため、加工精度がサブミクロン単位と
向上し、例えば、トラツク幅Ttが数ミクロンの磁気ヘ
ッドでも十分量産可能となる。また、記録媒体との摺接
面に耐磨耗性の低い接合用のガラス8が露出していない
ため、偏磨耗も起こらない。さらに、磁性体層にFeT
aN合金を使用しているため、狭トラックでも高抗磁力
媒体に対して磁気記録再生特性の優れた、しかも耐磨耗
性の高いサンドイッチ型磁気ヘッドが提供できる。以
上、磁気コア基板14の形成に第二の基板12bのみに
接合層13を形成した例について説明したが、本発明は
これに限定されず、更に薄い接合層13を、第一の基板
12aに形成し、該第一の基板12aを二枚使用して接
合すれば、同様に加工できる。このように、基板を一種
類にすることにより、部品管理が容易になるという効果
がある。また、磁性体層11としては、FeTaN合金
の薄膜を形成した例について説明したが、磁性体層11
の材料としてはセンダスト、アモルファスおよびパーマ
ロイ等の高磁束飽和密度を有する磁性材料を用いること
もできる。尚、以上のものは、説明を簡単にするため、
単体のサンドイッチ型磁気ヘッドに注目して説明した
が、一般には、図5a乃至図5cに示すように、非磁性
体板17の両面に、凸部10、10を形成し、該凸部1
0形成面にそれぞれ磁性体層11,11を形成した基板
18を作成し(図5a)、この基板18を複数枚積層し
て一体化した磁気コア基板ブロック19を形成し(図5
b)、この磁気コア基板ブロック19を前記凸部10の
ほぼ中央部において、点線で示すように、積層面と直交
する面で切断して、磁気コア半体ブロック20とし、更
に、この磁気コア半体ブロック20に卷線溝5を形成し
て、接合用のガラス8で接合一体化した磁気コアブロツ
ク21を作成し(図5c)、非磁性体板17を、図5c
に点線で示すように、スライスして磁気コアチップ16
を作成するという、量産に適したブロック加工による製
造方法が採用される。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the drawings. In the figure, the same parts as those of the conventional example are designated by the same reference numerals and the description thereof will be omitted. The magnetic head of the present invention is characterized in that the track width is regulated by the convex portion 10 formed on the non-magnetic plate 1. Hereinafter, the method for manufacturing the magnetic head of the present invention will be described in detail. As shown in FIG. 1, a convex portion 10 having a height h = (Tc-Tt) / 2 obtained from the thickness Tc of the magnetic core and the track width Tt is formed on one surface of the non-magnetic plate 1 by etching. As the magnetic layer 11, a thin film of FeTaN alloy, for example, is formed on the surface where the convex portion 10 is formed by sputtering to be slightly thicker than the thickness Tc / 2 which is half the thickness of the magnetic core. As shown in FIG. 2A, the magnetic layer 11 forming surface has a thickness Tc which is half the thickness of the magnetic core.
The first substrate 12a is ground so that it becomes 1/2.
To form. Further, as shown in FIG. 2B, a second substrate 12b having a very thin glass layer as a bonding layer 13 is formed on the flattened magnetic layer 11. As shown in FIG. 3, the first substrate 12a and the second substrate 12b are superposed on each other on the surface where the magnetic layer 11 and the bonding layer 13 are formed, and the glass of the bonding layer 13 is heated and melted to integrally bond them. To form the magnetic core substrate 14. Then, the magnetic core substrate 14 is cut at approximately the central portion of the convex portion 10 formed on the non-magnetic plate 1 as indicated by the dotted line on the plane orthogonal to the bonding surface, and the magnetic core half body 15 is obtained. As shown in FIG. 4, a winding groove 5 is formed on at least one cut surface of the magnetic core half body 15 in the same manner as in the conventional example, and a gap is formed by the bonding glass 8 embedded in the winding groove 5. The magnetic core chip 16 having the magnetic gap G formed by joining and integrating via a spacer (not shown) is obtained.
A magnetic wire of the present invention is completed by winding a conductive wire (not shown) in the winding groove 5 formed in the above. As described above, in the sandwich type magnetic head manufactured in this way, the track width Tt is formed not by cutting but by plane polishing capable of high precision processing, so that the processing precision is improved to the submicron unit. For example, even a magnetic head having a track width Tt of several microns can be sufficiently mass-produced. Further, since the glass 8 for bonding, which has low abrasion resistance, is not exposed on the sliding contact surface with the recording medium, uneven wear does not occur. Furthermore, FeT is added to the magnetic layer.
Since the aN alloy is used, it is possible to provide a sandwich type magnetic head having excellent magnetic recording / reproducing characteristics and high abrasion resistance for a high coercive force medium even in a narrow track. The example in which the bonding layer 13 is formed only on the second substrate 12b for forming the magnetic core substrate 14 has been described above, but the present invention is not limited to this, and a thinner bonding layer 13 is formed on the first substrate 12a. The same processing can be performed by forming and joining the two first substrates 12a. As described above, by using one type of board, there is an effect that component management becomes easy. Also, as the magnetic layer 11, an example in which a thin film of FeTaN alloy is formed has been described.
A magnetic material having a high magnetic flux saturation density such as sendust, amorphous and permalloy can also be used as the material. In addition, the above is for simplicity of explanation,
Although the description has been made focusing on a single sandwich type magnetic head, in general, as shown in FIGS. 5A to 5C, the convex portions 10 and 10 are formed on both surfaces of the non-magnetic plate 17, and the convex portion 1 is formed.
A substrate 18 in which the magnetic layers 11 and 11 are respectively formed on the 0 formation surface is prepared (FIG. 5 a), and a plurality of the substrates 18 are laminated to form a magnetic core substrate block 19 (FIG. 5 a).
b), the magnetic core substrate block 19 is cut along a plane orthogonal to the stacking plane, as shown by a dotted line, in a substantially central portion of the convex portion 10 to form a magnetic core half block 20. The winding groove 5 is formed in the half block 20 to form the magnetic core block 21 integrally joined by the glass 8 for joining (FIG. 5c), and the non-magnetic plate 17 is attached to the half block 20 of FIG.
As shown by the dotted line in FIG.
A manufacturing method by block processing suitable for mass production is adopted.
【0007】[0007]
【発明の効果】本発明によれば、記録媒体との摺接面
は、ともに耐磨耗性の高い磁性体層と非磁性体板のみで
形成されるため、偏磨耗は起こらない。また、トラック
幅は非磁性体板に形成した凸部形成面に形成された磁性
体層の厚さに該当するため、幅精度は高くできる。そし
て、磁性体層としてFeTaN合金を使用すれば、磁気
特性および耐磨耗性が向上するため、狭トラックでも十
分な磁気記録再生が可能で、しかも長寿命を有するサン
ドイッチ型磁気ヘッドを提供できる。According to the present invention, since the sliding contact surface with the recording medium is formed only by the magnetic layer and the non-magnetic plate having high abrasion resistance, uneven abrasion does not occur. Further, since the track width corresponds to the thickness of the magnetic layer formed on the convex forming surface formed on the non-magnetic plate, the width accuracy can be increased. When the FeTaN alloy is used for the magnetic layer, the magnetic characteristics and abrasion resistance are improved, so that it is possible to provide a sandwich type magnetic head capable of sufficient magnetic recording and reproduction even in a narrow track and having a long life.
【図1】 本発明の一実施例の磁性体層形成を示す要部
断面図FIG. 1 is a sectional view of an essential part showing formation of a magnetic layer according to an embodiment of the present invention.
【図2】 (a)は本発明の一実施例の第一の基板の要
部断面図 (b)は本発明の一実施例の第二の基板の要部断面図FIG. 2A is a cross-sectional view of an essential part of a first substrate according to an embodiment of the present invention. FIG. 2B is a cross-sectional view of an essential part of a second substrate according to an embodiment of the present invention.
【図3】 本発明の一実施例の磁気コア基板の要部側面
図FIG. 3 is a side view of a main part of a magnetic core substrate according to an embodiment of the present invention.
【図4】 本発明の一実施例の磁気コアチップの斜視図FIG. 4 is a perspective view of a magnetic core chip according to an embodiment of the present invention.
【図5】 (a)乃至(b)本発明の他の実施例の磁気
コア基板の要部側面図 (c)は本発明の他の実施例の磁気コアブロックの斜視
図5A and 5B are side views of a main part of a magnetic core substrate according to another embodiment of the present invention, and FIG. 5C is a perspective view of a magnetic core block according to another embodiment of the present invention.
【図6】 (a)は従来の磁性体層形成を示す要部断面
図 (b)は従来の磁気コア基板の要部側面図 (c)は従来の磁気コア半体の斜視図FIG. 6A is a cross-sectional view of an essential part showing formation of a conventional magnetic layer, FIG. 6B is a side view of an essential part of a conventional magnetic core substrate, and FIG. 6C is a perspective view of a conventional magnetic core half body.
【図7】 従来の磁気コアチップの斜視図FIG. 7 is a perspective view of a conventional magnetic core chip.
1 非磁性体板 10 凸部 11 磁性体層 12a 第一の基板 12b 第二の基板 13 接合層 14 磁気コア基板 15 磁気コア半体 Tt トラック幅 Tc 磁性体コアの厚さ h 凸部の高さ G 磁気ギャップ 1 Non-Magnetic Plate 10 Convex Part 11 Magnetic Layer 12a First Substrate 12b Second Substrate 13 Bonding Layer 14 Magnetic Core Substrate 15 Magnetic Core Half Tt Track Width Tc Magnetic Core Thickness h Convex Height G magnetic gap
Claims (3)
板で挟持した磁気コア半体を、ギャップスペーサを介し
て突き合せ、磁気ギャップを形成した構成の磁気ヘッド
において、該磁気ギャップ形成部位の前記磁性体層を、
前記非磁性体板に形成した凸部で挟持したことを特徴と
する磁気ヘッド。1. A magnetic head having a structure in which magnetic core halves each having a magnetic layer serving as a magnetic core sandwiched between nonmagnetic plates are butted against each other through a gap spacer to form a magnetic gap. The magnetic layer of the formation portion,
A magnetic head characterized in that the magnetic head is sandwiched by convex portions formed on the non-magnetic plate.
であることを特徴とする請求項1記載の磁気ヘッド。2. The magnetic head according to claim 1, wherein the magnetic layer is an alloy layer made of FeTaN.
して凸部を形成する工程と、該非磁性体板の凸部を形成
した面に磁性体層を形成する工程と、前記磁性体層の表
面を研磨し、平坦化して基板を作成する工程と、二つの
前記基板を凸部を対向させて接合一体化し磁気コア基板
を形成する工程と、前記磁気コア基板の凸部対向部にお
いて、前記磁気コア基板の接合面と直交する面で切断分
離して磁気コア半体を形成する工程と、前記磁気コア半
体を切断面を対向させ、ギャップスペーサを介して接合
一体化して磁気コアチップを形成する工程とを具備する
ことを特徴とした磁気ヘッドの製造方法。3. A step of etching at least one surface of a non-magnetic material plate to form a projection, a step of forming a magnetic material layer on the surface of the non-magnetic material plate on which the projection is formed, and a step of forming the magnetic material layer. A step of polishing the surface and flattening to form a substrate; a step of forming a magnetic core substrate by joining and integrating two said substrates with their convex portions facing each other; Forming a magnetic core chip by cutting and separating the magnetic core substrate at a plane orthogonal to the bonding surface to form a magnetic core half body; A method of manufacturing a magnetic head, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13408094A JPH087217A (en) | 1994-06-16 | 1994-06-16 | Magnetic head and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13408094A JPH087217A (en) | 1994-06-16 | 1994-06-16 | Magnetic head and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH087217A true JPH087217A (en) | 1996-01-12 |
Family
ID=15119936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13408094A Pending JPH087217A (en) | 1994-06-16 | 1994-06-16 | Magnetic head and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH087217A (en) |
-
1994
- 1994-06-16 JP JP13408094A patent/JPH087217A/en active Pending
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